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JPS6235915B2 - - Google Patents
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JPS6235915B2 - - Google Patents

Info

Publication number
JPS6235915B2
JPS6235915B2 JP56094277A JP9427781A JPS6235915B2 JP S6235915 B2 JPS6235915 B2 JP S6235915B2 JP 56094277 A JP56094277 A JP 56094277A JP 9427781 A JP9427781 A JP 9427781A JP S6235915 B2 JPS6235915 B2 JP S6235915B2
Authority
JP
Japan
Prior art keywords
conductor
resistor
thermal head
insulating substrate
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56094277A
Other languages
Japanese (ja)
Other versions
JPS57208271A (en
Inventor
Toshio Hida
Kazuo Kawahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56094277A priority Critical patent/JPS57208271A/en
Publication of JPS57208271A publication Critical patent/JPS57208271A/en
Publication of JPS6235915B2 publication Critical patent/JPS6235915B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00Electric solid-state thin-film or thick-film devices, not otherwise provided for

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electronic Switches (AREA)

Description

【発明の詳細な説明】 この発明は感熱記録紙の印字に用いるサーマル
ヘツドの製造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a thermal head used for printing on thermal recording paper.

一般にサーマルヘツドは、絶縁性基板上に形成
された2つの電極の間に接続された抵抗体に電圧
を印加し、この抵抗体を発熱させて、数字、文
字、記号等を感熱記録紙上に熱印字するものであ
るが、このサーマルヘツドでは印加電力の低減、
印字品質の向上及び高密度化などが強く要求され
ている。
In general, thermal heads apply voltage to a resistor connected between two electrodes formed on an insulating substrate, causing the resistor to generate heat to print numbers, letters, symbols, etc. on thermal recording paper. For printing, this thermal head reduces the applied power,
There is a strong demand for improved printing quality and higher density.

第1図及び第2図は従来のサーマルヘツドを示
し、このサーマルヘツドは、セラミツク等よりな
る絶縁性基板1上に125〜250μmのピツチで相対
向して設けられた1000〜2000個の電極導体2と、
該電極導体2の一部を覆つて一対の電極導体2と
電気的に接続された1000〜2000個の抵抗体3とに
より構成されている。そして上記電極導体2は
金、銀−パラジウム等の金属材料を含有する導電
性ペーストを用いてスクリーン印刷等の手法によ
り形成され、一方抵抗体3は酸化ルテニウム等よ
りなる抵抗性ペーストを用いて上記電極導体2と
同様の手法により形成されている。
Figures 1 and 2 show a conventional thermal head, which consists of 1000 to 2000 electrode conductors arranged facing each other at a pitch of 125 to 250 μm on an insulating substrate 1 made of ceramic or the like. 2 and
It is composed of a pair of electrode conductors 2 and 1000 to 2000 resistors 3 electrically connected to the electrode conductors 2 so as to partially cover the electrode conductors 2. The electrode conductor 2 is formed using a method such as screen printing using a conductive paste containing a metal material such as gold or silver-palladium, while the resistor 3 is formed using a resistive paste made of ruthenium oxide or the like. It is formed by the same method as the electrode conductor 2.

そしてこのサーマルヘツドを用いて感熱記録紙
(図示せず)に印字を行なう場合は、感熱記録紙
を抵抗体3の上面と接触して配置し、電極導体2
にパルス電圧を印加して抵抗体3を発熱させれば
よく、これによつて感熱記録紙には数字、文字、
記号等が熱印字されることとなる。
When printing on thermal recording paper (not shown) using this thermal head, the thermal recording paper is placed in contact with the upper surface of the resistor 3, and the electrode conductor 2 is placed in contact with the upper surface of the resistor 3.
All you have to do is apply a pulse voltage to the resistor 3 to generate heat, and as a result, numbers, letters,
Symbols, etc. will be thermally printed.

しかるに従来のサーマルヘツドでは、電極導体
2及び抵抗体3の膜厚が電流容量、耐電力等の点
からそれぞれ10〜15μm及び10〜30μm程度必要
となるため、抵抗体3の中央部3aがその電極導
体2との重なり部分3bに比べて低くなつて、抵
抗体3の上面が凹状になり、その結果抵抗体3の
中央部3aが感熱記録紙と十分に接触せず、抵抗
体3に発生した熱が効率よく感熱記録紙に伝達さ
れないため、抵抗体3への印加電力を大きくしな
ければならないという欠点があつた。また抵抗体
3は、スクリーン印刷等の手法で形成されている
ためにその膜厚の均一性が悪く、感熱記録紙との
接触が不均一となる結果、印字品質が悪いという
欠点もあつた。さらにはセラミツク等の絶縁性基
板1への抵抗体3のスクリーン印刷技術の限界か
ら、100μm以下の幅及び間隔をもつた極めて多
数の抵抗体3を同時に生産性よく形成することは
極めて困難であつた。
However, in a conventional thermal head, the thickness of the electrode conductor 2 and the resistor 3 are required to be about 10 to 15 μm and 10 to 30 μm, respectively, from the viewpoint of current capacity, power resistance, etc., so the central part 3a of the resistor 3 is The upper surface of the resistor 3 is lower than the overlapping part 3b with the electrode conductor 2 and has a concave shape, and as a result, the center part 3a of the resistor 3 does not come into sufficient contact with the thermal recording paper, and a Since the generated heat is not efficiently transferred to the thermosensitive recording paper, there is a drawback that the electric power applied to the resistor 3 must be increased. Further, since the resistor 3 is formed by a method such as screen printing, its film thickness is not uniform, and as a result, the contact with the heat-sensitive recording paper is uneven, resulting in poor print quality. Furthermore, due to the limitations of screen printing technology for forming resistors 3 on insulating substrates 1 such as ceramics, it is extremely difficult to simultaneously form extremely large numbers of resistors 3 with widths and intervals of 100 μm or less with good productivity. Ta.

この発明は以上のような従来のものの欠点を除
去するためになされたもので、未焼成の絶縁性基
板(以下、グリーンシートと呼ぶ)上に形成され
た導体をこのグリーンシートとともに焼成し、こ
の導体の中央部を酸化して抵抗体を形成すること
により、抵抗体への印加電力を低減できるととも
に、良好な印字品質が得られ、しかも高密度化を
図ることができるようにしたサーマルヘツドの製
造方法を提供することを目的としている。
This invention was made in order to eliminate the drawbacks of the conventional ones as described above.A conductor formed on an unfired insulating substrate (hereinafter referred to as a green sheet) is fired together with this green sheet. By oxidizing the center of the conductor to form a resistor, the power applied to the resistor can be reduced, good printing quality can be obtained, and the thermal head can be printed at high density. The purpose is to provide a manufacturing method.

以下本発明の実施例を図について説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第3図は本発明の一実施例により製造されたサ
ーマルヘツドを示し、図において、10はアルミ
ナ等の絶縁性材料を焼成して形成された絶縁性基
板、21はこの絶縁性基板10上にタングステ
ン、モリブデン等を用いて形成された導体22の
両端部を被覆する導電性の酸化防止被膜で、上記
導体22の酸化防止被膜21によつて覆われた部
分は一対の電極20となつている。30は上記導
体22の中央部を酸化して形成された抵抗体30
である。
FIG. 3 shows a thermal head manufactured according to an embodiment of the present invention. In the figure, 10 is an insulating substrate formed by firing an insulating material such as alumina, and 21 is an insulating substrate formed on this insulating substrate 10. An electrically conductive anti-oxidation film that covers both ends of a conductor 22 made of tungsten, molybdenum, etc., and the portions of the conductor 22 covered by the anti-oxidation film 21 form a pair of electrodes 20. . 30 is a resistor 30 formed by oxidizing the central part of the conductor 22.
It is.

次に本サーマルヘツドの製造方法を説明する。 Next, a method of manufacturing this thermal head will be explained.

このサーマルヘツドを製造する場合は、まずア
ルミナ等の絶縁性材料よりなるグリーンシート上
にタングステン、モリブデン等の金属材料よりな
る導電性ペーストを用いてスクリーン印刷により
所定形状の導体パターンを形成する。そしてこの
グリーンシート及び導体パターンを1300〜1800℃
の還元雰囲気内で焼成して絶縁性基板10及び導
体22を形成した後、上記導体22の両端部にメ
ツキ、蒸着あるいはスクリーン印刷等の手法によ
り金などの導電性材料を用いて酸化防止被膜21
をそれぞれ形成し、最後にこの導体22を500〜
600℃の酸化雰囲気内で焼成する。このようにす
れば導体22の中央部は酸化変成されて抵抗体3
0となり、又導体22の両端部は酸化防止被膜2
1により酸化が防止され、そのまま一対の電極2
0となる。
When manufacturing this thermal head, first, a conductive pattern of a predetermined shape is formed on a green sheet made of an insulating material such as alumina by screen printing using a conductive paste made of a metal material such as tungsten or molybdenum. Then, heat this green sheet and conductor pattern to 1300~1800℃.
After baking in a reducing atmosphere to form the insulating substrate 10 and the conductor 22, an anti-oxidation coating 21 is applied to both ends of the conductor 22 using a conductive material such as gold by plating, vapor deposition, screen printing, or other methods.
, and finally, this conductor 22 is
Fired in an oxidizing atmosphere at 600℃. In this way, the center part of the conductor 22 is oxidized and transformed into the resistor 3.
0, and both ends of the conductor 22 are coated with an anti-oxidation coating 2.
1 prevents oxidation, and the pair of electrodes 2
It becomes 0.

以上のような本実施例は、電極20と抵抗体3
0とを1つの導体22から形成しているので、抵
抗体30の上面が凹状になることはなく、しかも
酸化防止被膜21は単に導体22の酸化を防止す
るために設けられているのでその膜厚は1μm程
度でよい。したがつて抵抗体30と感熱記録紙と
の接触は良好となり、抵抗体30に発生した熱は
効率よく感熱記録紙に伝達され、その結果抵抗体
30への印加電力を低減できるとともに、熱応答
性が向上して高速印字ができることになる。
In this embodiment as described above, the electrode 20 and the resistor 3
0 from one conductor 22, the upper surface of the resistor 30 does not become concave, and the oxidation-preventing coating 21 is provided simply to prevent the conductor 22 from oxidizing. The thickness may be about 1 μm. Therefore, the contact between the resistor 30 and the thermal recording paper becomes good, and the heat generated in the resistor 30 is efficiently transferred to the thermal recording paper.As a result, the power applied to the resistor 30 can be reduced, and the thermal response is improved. This improves performance and enables high-speed printing.

また抵抗体30は導体20の一部を酸化変成し
て形成されているので、その表面平滑性は向上
し、感熱記録紙への印字濃度が均一となる。さら
には導体22はセラミツクの未焼成品であるグリ
ーンシート上に導電性ペーストをスクリーン印刷
し、それを焼成して形成するようにしているの
で、スクリーン印刷した際に導電性ペーストがグ
リーンシートに吸収され、ペーストのだれやにじ
みが発生せず、50μm程度の幅及び間隔をもつた
導体22を容易に形成でき、その結果サーマルヘ
ツドの高密度化を達成できる。
Further, since the resistor 30 is formed by oxidizing and modifying a part of the conductor 20, its surface smoothness is improved and the density of printing on the heat-sensitive recording paper becomes uniform. Furthermore, the conductor 22 is formed by screen-printing a conductive paste on a green sheet, which is an unfired ceramic product, and then firing it, so that the conductive paste is absorbed into the green sheet when screen-printed. As a result, conductors 22 having a width and spacing of about 50 μm can be easily formed without causing paste dripping or bleeding, and as a result, a high density thermal head can be achieved.

さらに、導体22を部分的に酸化させる際、抵
抗体30の引出し電極を兼ねる導電性の酸化防止被
膜21を用いているので、製造工程が簡単化され
る。
Furthermore, when the conductor 22 is partially oxidized, the conductive oxidation-preventing coating 21, which also serves as the lead electrode of the resistor 30, is used, so the manufacturing process is simplified.

以上のように本発明に係るサーマルヘツドによ
れば、グリーンシート上に導体パターンを形成し
た後、それを焼成して絶縁性基板及び導体を形成
し、上記導体の両端部に酸化防止被膜を被覆して
一対の電極を形成するとともに、導体の中央部を
酸化して抵抗体を形成するようにしたので、抵抗
体への印加電力を低減できるとともに、高速印字
が可能で、しかも抵抗体の表面平滑性の良い、さ
らには高密度化が達成できるサーマルヘツドを簡
単な方法で製造できる効果がある。
As described above, according to the thermal head according to the present invention, a conductor pattern is formed on a green sheet, and then it is fired to form an insulating substrate and a conductor, and both ends of the conductor are coated with an antioxidant coating. In addition to forming a pair of electrodes by oxidizing the central part of the conductor to form a resistor, it is possible to reduce the power applied to the resistor, enable high-speed printing, and furthermore, the surface of the resistor can be This has the effect that a thermal head with good smoothness and high density can be manufactured by a simple method.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のサーマルヘツドの一部平面図、
第2図は第1図の−線断面図、第3図は本発
明の一実施例により製造されたサーマルヘツドの
断面図である。 10……絶縁性基板、20……電極、21……
酸化防止被膜、22……導体、30……抵抗体。
Figure 1 is a partial plan view of a conventional thermal head.
2 is a cross-sectional view taken along the line -- in FIG. 1, and FIG. 3 is a cross-sectional view of a thermal head manufactured according to an embodiment of the present invention. 10... Insulating substrate, 20... Electrode, 21...
Antioxidant coating, 22... conductor, 30... resistor.

Claims (1)

【特許請求の範囲】 1 未焼成の絶縁性基板上に導体を被着する工程
と、 これらの基板及び導体を同時に焼成する工程
と、 上記導体の両側部に後述する電極の引き出し電
極となる導電性酸化防止被膜を被覆して上記導体
部の中央部を酸化処理し、上記導体部の両側部に
一対の電極を、中央部に抵抗体を形成する工程と
を備えたことを特徴とするサーマルヘツドの製造
方法。
[Scope of Claims] 1. A step of depositing a conductor on an unfired insulating substrate, a step of simultaneously firing these substrates and the conductor, and a step of depositing a conductor on both sides of the conductor to serve as lead-out electrodes for electrodes to be described later. oxidizing the central part of the conductor part by coating it with a protective oxidation-preventing film, forming a pair of electrodes on both sides of the conductor part, and forming a resistor in the central part. Head manufacturing method.
JP56094277A 1981-06-17 1981-06-17 Thermal head and manufacture thereof Granted JPS57208271A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56094277A JPS57208271A (en) 1981-06-17 1981-06-17 Thermal head and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56094277A JPS57208271A (en) 1981-06-17 1981-06-17 Thermal head and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS57208271A JPS57208271A (en) 1982-12-21
JPS6235915B2 true JPS6235915B2 (en) 1987-08-04

Family

ID=14105758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56094277A Granted JPS57208271A (en) 1981-06-17 1981-06-17 Thermal head and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS57208271A (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52135745A (en) * 1976-05-10 1977-11-14 Toshiba Corp Preparation of thin film heat-sensitive head
JPS52151850A (en) * 1976-06-10 1977-12-16 Matsushita Electric Industrial Co Ltd Resistor elements and method of making same
JPS5392141A (en) * 1977-01-25 1978-08-12 Hitachi Chemical Co Ltd Thermosensitive head

Also Published As

Publication number Publication date
JPS57208271A (en) 1982-12-21

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