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JPS6237534B2 - - Google Patents
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JPS6237534B2 - - Google Patents

Info

Publication number
JPS6237534B2
JPS6237534B2 JP53019534A JP1953478A JPS6237534B2 JP S6237534 B2 JPS6237534 B2 JP S6237534B2 JP 53019534 A JP53019534 A JP 53019534A JP 1953478 A JP1953478 A JP 1953478A JP S6237534 B2 JPS6237534 B2 JP S6237534B2
Authority
JP
Japan
Prior art keywords
resin
base material
sheet
sealing
solid layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53019534A
Other languages
Japanese (ja)
Other versions
JPS54111770A (en
Inventor
Katsumi Shimada
Hiromichi Nishikawa
Yoshiki Jinbo
Takumi Tanigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Electric Industrial Co Ltd filed Critical Nitto Electric Industrial Co Ltd
Priority to JP1953478A priority Critical patent/JPS54111770A/en
Publication of JPS54111770A publication Critical patent/JPS54111770A/en
Publication of JPS6237534B2 publication Critical patent/JPS6237534B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment

Landscapes

  • Laminated Bodies (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Description

【発明の詳細な説明】 本発明は半導体素子封止用の樹脂ペレツトに関
する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to resin pellets for encapsulating semiconductor devices.

従来、半導体素子封止用の材料としては、熱硬
化性樹脂組成物粉末を冷間成形して得られた樹脂
タブレツトがあるが、これでは、半導体素子を封
止するために加熱溶融させたとき、硬化物は第1
図に示す如く樹脂溶融時の表面張力の影響で中央
部が厚く盛り上り、封止厚みの薄さを要求される
半導体素子の封止には不適であると共に硬化物表
面に端子番号等の印刷をしがたい欠点を有してい
た。
Conventionally, materials for encapsulating semiconductor devices include resin tablets obtained by cold-forming thermosetting resin composition powder; , the cured product is the first
As shown in the figure, the center part bulges thickly due to the effect of surface tension when the resin melts, making it unsuitable for sealing semiconductor elements that require thin sealing thickness, and printing terminal numbers etc. on the surface of the cured product. It had some disadvantages that made it difficult to understand.

第1図中1は基板、2は半導体素子、3は硬化
物である。
In FIG. 1, 1 is a substrate, 2 is a semiconductor element, and 3 is a cured product.

また前記樹脂タブレツトでは、粉末相互が機械
的に圧着されているだけであるから強度が非常に
弱く、運搬、取扱中に破損し易く、第2図に示す
ような形状複雑なものでは、特にその割合が高く
不経済であつた。
In addition, since the resin tablets are only mechanically bonded together, the strength of the resin tablets is very low, and they are easily damaged during transportation and handling. The ratio was high and it was uneconomical.

また第3図AおよびBに示すようなキヤビテイ
パツケージタイプの半導体装置のケース10と上
部キヤツプ11を封止するためには、外部リード
12a、および12bの密集部を各々穿孔した冷
間成形樹脂タブレツトと12b間の間隙部に合致
する細長形状の冷間成形樹脂タブレツトを用い、
これを上部キヤツプ11の上にセツトして後、加
熱溶融硬化させていたが、このような方法では、
作業が煩雑である欠点を有している。
Further, in order to seal the case 10 and the upper cap 11 of a cavity package type semiconductor device as shown in FIGS. 3A and 3B, a cold molded resin is used in which holes are formed in the dense areas of the external leads 12a and 12b. Using a cold-molded resin tablet with an elongated shape that fits the gap between the tablet and 12b,
After setting this on top of the upper cap 11, it was heated and melted and hardened, but with this method,
It has the disadvantage that the work is complicated.

この欠点を改良するため、本出願人は先に冷間
成形樹脂タブレツトの片面に紙、ポリエステルフ
イルム、ポリイミドフイルム等のシートを貼着し
てなる片面シート張り樹脂タブレツトを提案した
が、これとて本質的には冷間成形樹脂タブレツト
を用いているので、連続気孔含有率が極めて大で
あり、そのためタブレツトが吸温し易く且つ加熱
溶融封止後、硬化物にボイドが残存しやすく、ま
た取扱時にシヨツク等を受けたときタブレツト部
分が損傷する欠点を免れ得なかつた。
In order to improve this drawback, the applicant previously proposed a single-sided sheet-covered resin tablet made by pasting a sheet of paper, polyester film, polyimide film, etc. on one side of a cold-molded resin tablet. Essentially, since cold-molded resin tablets are used, the content of continuous pores is extremely high, and as a result, the tablets tend to absorb heat, and voids tend to remain in the cured product after heating and melt-sealing, and they are difficult to handle. However, the tablet part sometimes gets damaged when it is hit by a shot, etc.

本発明者達はこのような欠点を改良するため
種々検討した結果、シート状繊維基材上に、熱硬
化性樹脂組成物の溶融固形体層が該基材に融着一
体化されて設けられてなる半導体素子封止用樹脂
ペレツトを用いることにより解決できた。
As a result of various studies in order to improve these drawbacks, the present inventors have found that a molten solid layer of a thermosetting resin composition is provided on a sheet-like fiber base material by being fused and integrated with the base material. This problem was solved by using resin pellets for encapsulating semiconductor devices.

本発明においてシート状繊維基材としては、各
種材質の不織布、たとえばポリエステル不織布、
等の有機質繊維不織布、ガラスペーパー、ガラス
繊維不織布等の無機質繊維不織布、セルロース混
抄ガラスペーパー、紙等が用いられる。
In the present invention, the sheet-like fiber base material includes nonwoven fabrics made of various materials, such as polyester nonwoven fabrics,
Organic fiber nonwoven fabrics such as glass paper, inorganic fiber nonwoven fabrics such as glass fiber nonwoven fabrics, cellulose-mixed glass paper, paper, etc. are used.

シート状繊維基材は、熱硬化性樹脂組成物の溶
融温度よりも高い軟化温度を有するものが好まし
く用いられる。
The sheet-like fiber base material preferably has a softening temperature higher than the melting temperature of the thermosetting resin composition.

シート状繊維基材の厚みは通常0.05mm以上好ま
しくは0.08mm〜0.3mm、見掛密度は通常0.10〜0.05
g/cm3、好ましくは0.15〜0.25g/cm3のものが有
利に用いられる。
The thickness of the sheet-like fiber base material is usually 0.05 mm or more, preferably 0.08 mm to 0.3 mm, and the apparent density is usually 0.10 to 0.05.
g/cm 3 , preferably 0.15 to 0.25 g/cm 3 are advantageously used.

溶融固形体層の溶融温度は、通常40〜180℃、
好ましくは60〜120℃程度のものを一般的に用い
る。
The melting temperature of the molten solid layer is usually 40 to 180℃,
Preferably, a temperature of about 60 to 120°C is generally used.

熱硬化性樹脂組成物としては、エポキシ樹脂、
ポリエステル樹脂、フエノール樹脂、イソシアナ
ート樹脂等の熱硬化性樹脂および硬化剤、場合に
よりこれらに硬化促進剤;カーボンブラツクの如
き顔料、染料、難燃性附与剤、難燃助剤、充填剤
等の添加剤を均一混合してなるものを挙げること
ができる。
As the thermosetting resin composition, epoxy resin,
Thermosetting resins such as polyester resins, phenol resins, and isocyanate resins, curing agents, and in some cases curing accelerators; pigments such as carbon black, dyes, flame retardant additives, flame retardant aids, fillers, etc. Examples include those made by homogeneously mixing additives.

本発明の樹脂ペレツトは、たとえば次のように
して得ることができる。
The resin pellets of the present invention can be obtained, for example, as follows.

即ち第4図に示すようにガラスペーパー4上に
常温で固形の熱硬化性樹脂組成物を、自在に移動
する加熱ノズル5より溶融押出ししつつ塗工し、
半硬化状の溶融固形体層6を形成し、該層が柔軟
性を有している間に所定の樹脂ペレツト形状に打
抜けばよい。
That is, as shown in FIG. 4, a thermosetting resin composition that is solid at room temperature is applied onto glass paper 4 while being melted and extruded from a freely moving heating nozzle 5.
A semi-cured molten solid layer 6 may be formed, and while the layer is flexible, it may be punched into a predetermined resin pellet shape.

溶融押出時には、ガラスペーパーを予熱してお
くことができる。
The glass paper can be preheated during melt extrusion.

このようにして得られた樹脂ペレツトはたとえ
ば第5図如き形状を有している。半硬化状溶融固
形体層は、勿論、常温では固形である。
The resin pellet thus obtained has a shape as shown in FIG. 5, for example. Of course, the semi-cured molten solid layer is solid at room temperature.

樹脂ペレツトの製造時、熱硬化性樹脂組成物
は、ガラスペーパーの厚み方向の全体に樹脂含浸
されたり、ガラスペーパーの表層に付近にのみ樹
脂含浸されたり、ガラスペーパー厚みの半分位ま
で樹脂含浸されたりする。このようにしてガラス
ペーパーと本発明において半硬化状溶融固形体層
の厚みは0.3mm〜5mmとされる。
When manufacturing resin pellets, the thermosetting resin composition is impregnated with resin over the entire thickness of the glass paper, only around the surface layer of the glass paper, or impregnated with resin up to about half the thickness of the glass paper. or In this way, the thickness of the semi-hardened molten solid layer in the glass paper and the present invention is set to 0.3 mm to 5 mm.

0.3mm以下では樹脂量が少な過ぎて封止機能に
劣るようになり、一方5mm以上であると逆に樹脂
量が多過ぎて適正封止部位より樹脂がはみ出す欠
点を有する。
If the amount is less than 0.3 mm, the resin amount will be too small and the sealing function will be inferior, while if it is more than 5 mm, the resin amount will be too large and the resin will protrude beyond the proper sealing area.

溶融押出し温度は、得られる樹脂ペレツトの溶
融固体層が完全硬化物とならないよう調整され
る。半硬化状態とは、加熱すれば一時的に流動化
したのち硬化することを意味する。
The melt extrusion temperature is adjusted so that the resulting molten solid layer of resin pellets does not become a completely cured product. A semi-hardened state means that when heated, it temporarily becomes fluidized and then hardens.

上記樹脂ペレツトの製造においては、熱硬化性
樹脂組成物として、既に半硬化状となつているも
のも使用することもできるし、さらには常温で液
状の熱硬化性樹脂組成物で半硬化状溶融固形体層
となつたときには、常温で固形となるようなもの
も使用可能である。これは加熱ノズルの熱附与の
条件を調整することにより為される。
In the production of the above-mentioned resin pellets, it is possible to use a thermosetting resin composition that is already in a semi-cured state, or it is also possible to use a semi-cured thermosetting resin composition that is liquid at room temperature. When it becomes a solid layer, it is also possible to use a material that becomes solid at room temperature. This is done by adjusting the conditions of heat application of the heating nozzle.

また本発明の樹脂ペレツトは熱硬化性樹脂組成
物粉末を用い溶射法により得ることもできる。
Further, the resin pellets of the present invention can also be obtained by a thermal spraying method using a thermosetting resin composition powder.

さらには熱硬化製樹脂組成物粉末を不織布上に
散布(たとえば静電塗装法で)し、加熱溶融し
て、不織布上に半硬化状溶融固形体層を、該層と
該不織布を融着一体化した状態で設けることによ
つても製造できる。
Furthermore, a thermosetting resin composition powder is sprinkled onto the nonwoven fabric (for example, by electrostatic coating), heated and melted to form a semi-cured molten solid layer on the nonwoven fabric, and the layer and the nonwoven fabric are fused and integrated. It can also be manufactured by providing it in a solid state.

勿論本発明においては第5図に示したようなシ
ート状繊維基材の片面のみに半硬化状溶融固形体
層が、融着一体化されて設けられたもののほか両
面に設けられたものであつてもよい。
Of course, in the present invention, the semi-cured molten solid layer is provided on only one side of the sheet-like fiber base material by being fused and integrated, as shown in FIG. It's okay.

シート状繊維基材は、不織布のほか各種材質の
織布を用いることもできる。
As the sheet-like fiber base material, in addition to nonwoven fabrics, woven fabrics made of various materials can also be used.

本発明により得られた樹脂ペレツトを用いる半
導体素子の封止例を以下記載する。
Examples of sealing semiconductor devices using resin pellets obtained according to the present invention will be described below.

基板上の半導体素子を封止した場合は、第6図
に示す如く、シート状繊維基材の存在する個所は
平坦となる。
When the semiconductor element on the substrate is sealed, as shown in FIG. 6, the area where the sheet-like fiber base material is present becomes flat.

また第3図AおよびBに示すごとき半導体装置
を封止するには、第7図に示す如き形状の樹脂ペ
レツトを、シート状基材を上向きにして(即ちキ
ヤツプ11と溶融固形体層を対向させる)用いる
と、1枚の樹脂ペレツトで封止でき(外部リード
と中空部7を合致させてセツトして後加熱硬化さ
せる)しかも硬化物表面が平坦となる。なお第7
図中7は樹脂ペレツトの中空部である。
Furthermore, in order to seal a semiconductor device as shown in FIGS. 3A and 3B, a resin pellet having a shape as shown in FIG. When used as a resin pellet, sealing can be performed with a single resin pellet (the external lead and the hollow part 7 are aligned and set, and then heated and cured), and the surface of the cured product becomes flat. Furthermore, the seventh
In the figure, 7 is the hollow part of the resin pellet.

以上述べた如く本発明の樹脂ペレツトによる
と、溶融固形体層は、熱硬化性樹脂組成物が溶融
して後固化したものであるため、冷間成形タブレ
ツトの如く連続的な無数の気孔を有しておらず、
そのため、保存時の耐吸湿性および機械的強度に
すぐれている。さらに冷間成形品ではなく、溶融
固形体層が存在するため、封止時に気泡が発生し
難く、且つ上述の如く保存時の耐吸湿性にもすぐ
れているので封止後のシール機能が良好である。
As described above, according to the resin pellet of the present invention, since the molten solid layer is a thermosetting resin composition that is melted and then solidified, it has numerous continuous pores like a cold-formed tablet. I haven't done it,
Therefore, it has excellent moisture absorption resistance and mechanical strength during storage. Furthermore, since it is not a cold-formed product and has a molten solid layer, it is difficult for air bubbles to occur during sealing, and as mentioned above, it has excellent moisture absorption resistance during storage, so it has a good sealing function after sealing. It is.

また溶融固形体層はシート状繊維基材の繊維組
織に融着一体化されているため、該基材との接着
性にすぐれており、この点で樹脂ペレツト自体の
強度が極めて大きくなり、樹脂ペレツトの形状を
第2図、第5図、第7図に示すような形状複雑な
ものとしても、樹脂ペレツトが運搬中に破損する
ようなこともない。
In addition, since the molten solid layer is fused and integrated with the fiber structure of the sheet-like fiber base material, it has excellent adhesion to the base material.In this respect, the strength of the resin pellet itself is extremely high, and the resin Even if the shape of the pellet is complicated as shown in FIGS. 2, 5, and 7, the resin pellet will not be damaged during transportation.

また上述の如く本発明の樹脂ペレツトは、機械
的強度が極めて大なので、封止作業をするとき、
破損するようなこともなく、封止作業性が良好で
ある。
Furthermore, as mentioned above, the resin pellets of the present invention have extremely high mechanical strength, so when performing sealing work,
There is no damage and the sealing workability is good.

さらに本発明においては、シート状基材として
プラスチツクフイルムの如きものではなく繊維基
材を用いているため、封止作業時に溶融固形体の
加熱溶融物に仮りに気泡が発生しても、加熱時に
繊維基材の多孔層を通つて逃げる効果を有する
が、プラスチツクフイルムをシート状繊維基材の
代りに用いたものでは、該フイルムが障害となつ
て発生した気泡が逃げない。
Furthermore, in the present invention, since a fiber base material is used as the sheet-like base material instead of something like a plastic film, even if air bubbles are generated in the heated melt of the molten solid during the sealing process, even if bubbles are generated during heating, It has the effect of escaping through the porous layer of the fibrous base material, but when a plastic film is used instead of the sheet-like fibrous base material, the film becomes an obstacle and prevents the generated bubbles from escaping.

また上述の如くシート状繊維基材は溶融固形体
層と融着一体化されており、しかも溶融固形体層
は前記の如く機械的強度が大であり、また該基材
は溶融固形体層の補強基材として働くので、樹脂
ペレツト全体の機械的強度は極めて良好となり、
そのため、第3図A,Bに示す如き半導体装置を
封止する場合にも、従来技術の如く複数個の冷間
成形樹脂タブレツトを用いる必要がなく、唯1ケ
の樹脂ペレツトによつて良好に封止することが可
能となる。
Further, as mentioned above, the sheet-like fiber base material is fused and integrated with the molten solid layer, and the molten solid layer has high mechanical strength as described above. Since it acts as a reinforcing base material, the mechanical strength of the entire resin pellet is extremely good.
Therefore, even when encapsulating a semiconductor device as shown in FIGS. 3A and 3B, there is no need to use multiple cold-formed resin tablets as in the prior art, and it is possible to encapsulate the semiconductor device with only one resin pellet. It becomes possible to seal it.

しかもシート状繊維基材が存在するため、特に
シート状繊維基材の片面に溶融固形体層を融着一
体化されたものを、該基材を上向にして封止作業
を行なうと、硬化物表面は平坦となり、封止厚み
の薄さを要求される半導体素子の封止に適してい
ると共に硬化物表面に端子番号等の印刷を容易に
できる。また印刷は、所望により溶融固形体層が
融着一体化される前にシート状繊維基材に予め施
しておくこともできる。
Moreover, since there is a sheet-like fiber base material, if the molten solid layer is fused and integrated on one side of the sheet-like fiber base material and the sealing operation is performed with the base material facing upward, it will harden. The surface of the cured product becomes flat, making it suitable for sealing semiconductor elements that require a thin sealing thickness, and making it easy to print terminal numbers, etc. on the surface of the cured product. Further, if desired, printing can be performed on the sheet-like fiber base material in advance before the molten solid layer is fused and integrated.

なお本発明においては、いままで半導体素子の
封止用の樹脂ペレツトとして説明してきたが、本
発明の樹脂ペレツトを用いて封止する対象には、
半導体素子以外の電気部品、たとえば第3図の如
きベースキヤツプと上部キヤツプを備え且つ外部
リード(端子)の突出したリレー、スイツチ等の
小型の電気部品も含まれる。
Although the present invention has so far been described as a resin pellet for sealing semiconductor elements, the resin pellets of the present invention can be used to seal other objects.
It also includes electrical components other than semiconductor devices, such as small electrical components such as relays and switches, which have a base cap and an upper cap as shown in FIG. 3, and have protruding external leads (terminals).

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の半導体素子の封止方法を説明す
るための説明図、第2図は従来封止用に用いられ
ていた冷間成形樹脂タブレツトの斜視図、第3図
Aは半導体装置の封止方法の説明に用いる説明図
第3図Bは第3図Aを−′線に沿つて切断
し、矢印方向よりみた断面図、第4図は本発明の
樹脂ペレツトの製造例を説明するのに用いる説明
図、第5図および第7図は本発明の樹脂ペレツト
の実例を示す斜視図、第6図は本発明の樹脂ペレ
ツトを用いて半導体素子を封止した封止後の断面
図である。 4……不織布、6……半硬化状溶融固形体層。
Fig. 1 is an explanatory diagram for explaining a conventional method for encapsulating semiconductor devices, Fig. 2 is a perspective view of a cold-molded resin tablet conventionally used for encapsulation, and Fig. 3A is an illustration of a semiconductor device. Explanatory drawings used to explain the sealing method. FIG. 3B is a cross-sectional view of FIG. 3A taken along the line -' and viewed from the direction of the arrow. FIG. 4 illustrates an example of manufacturing the resin pellets of the present invention. 5 and 7 are perspective views showing examples of the resin pellets of the present invention, and FIG. 6 is a sectional view of a semiconductor device after encapsulation using the resin pellets of the present invention. It is. 4...Nonwoven fabric, 6...Semi-cured molten solid layer.

Claims (1)

【特許請求の範囲】[Claims] 1 シート状繊維基材上に、熱硬化性樹脂組成物
からなる厚み0.3mm〜5mmの半硬化状溶融固形体
層が、該基材に融着一体化されて設けられてなる
半導体素子等電気部品封止用樹脂ペレツト。
1. Electrical devices, such as semiconductor devices, in which a semi-cured molten solid layer of a thermosetting resin composition with a thickness of 0.3 mm to 5 mm is fused and integrated on a sheet-like fiber base material. Resin pellets for parts sealing.
JP1953478A 1978-02-21 1978-02-21 Resin pellet for sealing semiconductor or electric component Granted JPS54111770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1953478A JPS54111770A (en) 1978-02-21 1978-02-21 Resin pellet for sealing semiconductor or electric component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1953478A JPS54111770A (en) 1978-02-21 1978-02-21 Resin pellet for sealing semiconductor or electric component

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP56142850A Division JPS5778142A (en) 1981-09-09 1981-09-09 Sealing method for semiconductor element

Publications (2)

Publication Number Publication Date
JPS54111770A JPS54111770A (en) 1979-09-01
JPS6237534B2 true JPS6237534B2 (en) 1987-08-13

Family

ID=12001989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1953478A Granted JPS54111770A (en) 1978-02-21 1978-02-21 Resin pellet for sealing semiconductor or electric component

Country Status (1)

Country Link
JP (1) JPS54111770A (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5111475A (en) * 1974-06-11 1976-01-29 Kienzle Apparate Gmbh KAITENUNDODENDOKIKO

Also Published As

Publication number Publication date
JPS54111770A (en) 1979-09-01

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