Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JPS6243539B2 - - Google Patents
[go: Go Back, main page]

JPS6243539B2 - - Google Patents

Info

Publication number
JPS6243539B2
JPS6243539B2 JP55051154A JP5115480A JPS6243539B2 JP S6243539 B2 JPS6243539 B2 JP S6243539B2 JP 55051154 A JP55051154 A JP 55051154A JP 5115480 A JP5115480 A JP 5115480A JP S6243539 B2 JPS6243539 B2 JP S6243539B2
Authority
JP
Japan
Prior art keywords
chip
circuit board
insulating layer
conductor
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55051154A
Other languages
Japanese (ja)
Other versions
JPS56146264A (en
Inventor
Yoichiro Oonishi
Hayato Takasago
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5115480A priority Critical patent/JPS56146264A/en
Publication of JPS56146264A publication Critical patent/JPS56146264A/en
Publication of JPS6243539B2 publication Critical patent/JPS6243539B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/63Vias, e.g. via plugs
    • H10W70/635Through-vias
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65Shapes or dispositions of interconnections
    • H10W70/654Top-view layouts
    • H10W70/655Fan-out layouts

Landscapes

  • Wire Bonding (AREA)

Description

【発明の詳細な説明】 この発明は印刷回路板に部品を高密度で実装す
るためのチツプ実装用キヤリアに関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a chip mounting carrier for mounting components on a printed circuit board at high density.

従来フリツプチツプIC(以下フリツプチツプ
と記す)ではフリツプチツプ側バンプ(以下チツ
プバンプと記す)がチツプの周辺部即ち4辺に各
1列で配置され総バンプ数も高々30ケ程度であつ
た。最近のVLSI技術の進歩でフリツプチツプバ
ンプ数も大巾に増加する試みがなされている。こ
れらのものではチツプバンプの配置が極めて高密
度で場合によつては格子状となり1ケのICチツ
プで100ケ以上のバンプを有する。又ICチツプの
サイズは数mm角と小さいので1ケのバンプサイズ
は数10μmから大きくても100μmφ程度であ
る。従つてこれら高密度チツプバンプを回路基板
に実装する方法は極めて困難であるがこの理由と
してフリツプチツプの如く数mm角の微小面積部分
にチツプバンプが集中する場合基板1平面で処理
するには導体数が多く1本当りの線間線巾は極端
に細くする必要があること。又複数の平面で処理
する場合には1平面当りで分担する導体数は減小
し線間線巾は増加し得るが反面前記微小部分に多
数の貫通孔を集中して設け、複数平面に分配(接
続)することが必要となり、貫通孔の直径を極端
に小さくする必要があること。
In conventional flip chip ICs (hereinafter referred to as flip chips), bumps on the flip chip side (hereinafter referred to as chip bumps) are arranged in one row on each of the four sides of the chip, and the total number of bumps is about 30 at most. With recent advances in VLSI technology, attempts are being made to greatly increase the number of flip-chip bumps. In these devices, the arrangement of chip bumps is extremely dense, sometimes in the form of a grid, with one IC chip having over 100 bumps. Also, since the size of an IC chip is small, a few mm square, the size of one bump is from several tens of micrometers to about 100 micrometers in diameter at the largest. Therefore, it is extremely difficult to mount these high-density chip bumps on a circuit board.The reason for this is that when chip bumps are concentrated in a small area of a few mm square, such as in a flip chip, the number of conductors is too large to process on one plane of the board. The line width per line must be extremely thin. In addition, when processing on multiple planes, the number of conductors shared per plane may be reduced and the line width may increase, but on the other hand, it is necessary to concentrate a large number of through holes in the minute portions and distribute them over multiple planes. (connection), and the diameter of the through hole must be made extremely small.

又後者はこの貫通孔にメタライズをする必要が
あることと小径のメタライズは信頼性が極端に悪
くなることなどの為に実現が困難とされている。
Furthermore, the latter is difficult to realize because the through hole needs to be metallized and small diameter metallization causes extremely poor reliability.

この発明は、高密度多層回路板に高密度チツプ
バンプを有するフリツプチツプICなどの信頼性
良く実現する為のチツプ実装用キヤリアを提供せ
んとするものである。
The present invention aims to provide a chip mounting carrier for realizing highly reliable flip-chip ICs having high-density chip bumps on a high-density multilayer circuit board.

以下、この発明の一実施例を第1図ないし第3
図を用いて詳細に説明する。
An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.
This will be explained in detail using figures.

第1図に於て、1は例えばガラスエポキシ、フ
エノール等のコア材からなるチツプキヤリア基材
と後述する導体2,2′で構成されたシート、1
0はシート1の基材のフリツプチツプ等の半導体
素子を塔載するための面、100はシート1の基
材の印刷回路板(図示せず)を接続するための
面、2及び2′は夫々面10から面100方向に
向つて拡大しながら延長され、上記基材1に配置
された導体で、その本数は実装されるフリツプチ
ツプ等の一辺の電極数によつて定まる。
In FIG. 1, 1 is a sheet composed of a chip carrier base material made of a core material such as glass epoxy or phenol, and conductors 2 and 2', which will be described later.
0 is a surface of the base material of sheet 1 for mounting a semiconductor element such as a flip chip, 100 is a surface of the base material of sheet 1 for connecting a printed circuit board (not shown), and 2 and 2' are respectively The conductor extends from the surface 10 toward the surface 100 while expanding, and is disposed on the base material 1, the number of which is determined by the number of electrodes on one side of the flip-chip or the like to be mounted.

次いで第2図は第1図で示したシートを用いて
構成されるチツプ実装用キヤリアを示す図であつ
て、第1図と相当する部分は同一符号及び記号で
示す。
Next, FIG. 2 is a diagram showing a carrier for chip mounting constructed using the sheet shown in FIG. 1, and parts corresponding to those in FIG. 1 are designated by the same reference numerals and symbols.

即ち第2図に於て、3はBステージのエポキシ
プリプレグなどからなるスペーサである。ここ
で、シート1,1′,1″は互にある角度をなす様
間隔を置いて配置され、シート1及び1′間又、
シート1′及び1″間には絶縁層としてのスペーサ
3が挿入されている。なお、シート1′,1″間の
スペーサは図示せず。この、第2図の例はシート
1及び1″は片面回路板でシート1′は導体20及
び20′とその反対面に導体200及び200′を
有する両面回路板である。
That is, in FIG. 2, 3 is a spacer made of B-stage epoxy prepreg or the like. Here, the sheets 1, 1', 1'' are arranged at intervals so as to form a certain angle with each other, and between the sheets 1 and 1',
A spacer 3 as an insulating layer is inserted between the sheets 1' and 1''. Note that the spacer between the sheets 1' and 1'' is not shown. In this example of FIG. 2, sheets 1 and 1'' are single-sided circuit boards and sheet 1' is a double-sided circuit board having conductors 20 and 20' and conductors 200 and 200' on the opposite side.

第2図の如くシートと絶縁機能を有したスペー
サとを交互に配置された状態で積層され第3図に
示す本発明によるチツプ実装用キヤリアが得られ
る。
As shown in FIG. 2, sheets and spacers having an insulating function are laminated in an alternating manner to obtain a carrier for chip mounting according to the present invention as shown in FIG. 3.

第2図に於て、シート1〜1″はすでに熱硬化
などによつて完成した状態の基板であつてそれぞ
れ面10と面100側でも板厚が同じものであ
る。スペーサ3は未硬化Bステージのもので面1
00側板厚が面10側に比し厚くなつている。こ
の状態の構成で積層されると積層時の圧力、熱に
よりスペーサ3はこれらの条件で定まるだけ圧縮
されることとなる。即ち任意の層間距離はこれら
の条件を制御され正確に達成されるが、面100
に比して極めて高精度を要する面10側のこれら
の値は場合によつては仮にスペーサ3の厚みが概
略であつても最強積層時にはスペーサ3が十分溶
融し面10以外に流動して無視し得る厚みとなり
結局層間距離は積層時に流動しないシート1〜
1″の厚みで決定することも可能である。
In FIG. 2, sheets 1 to 1'' are substrates that have already been completed by heat curing, etc., and have the same thickness on the surface 10 and surface 100 sides.Spacer 3 is an uncured B Stage 1
The plate thickness on the 00 side is thicker than that on the surface 10 side. When stacked in this configuration, the spacer 3 will be compressed by the pressure and heat during stacking to an amount determined by these conditions. That is, any interlayer distance can be precisely achieved with these conditions controlled, but the surface 100
In some cases, even if the thickness of the spacer 3 is approximate, the spacer 3 will sufficiently melt and flow to areas other than the surface 10 during the strongest lamination, and these values on the surface 10 side, which require extremely high precision compared to the above, may be ignored. As a result, the interlayer distance becomes sheet 1 which does not flow during lamination.
It is also possible to determine the thickness by 1″.

第3図に於て、第1図及び第2図と相当する部
分は同一符号及び記号を付す。即ちa図はチツプ
実装面10より見た図を示し導体2〜2′,20
〜20′,200〜200′、などは格子状配列を
なし積層端面10に露出している。b図は高密度
主回路板に実装される面100を示したもので面
100側の導体2〜2′,20〜20′,200〜
200′はいずれも面10側に比しx方向及びy
方向いずれへもピツチが拡大されており、且格子
状導体配列をなしている状態を示している。従つ
て高密度電極を有するチツプ素子を容易に主回路
板に実装し得る。又第2図に於て、スペーサ3の
厚みは面100側が厚くなるテーパ状のものを用
いたが積層プレス条件によつては同じ一様な厚さ
のものを用いて面10に近い方で溶融したものを
面100方向に流動させ同様に構成され得るし又
シート1〜1″の厚みを変化させても同様に構成
し得る。
In FIG. 3, parts corresponding to those in FIGS. 1 and 2 are given the same reference numerals and symbols. That is, figure a shows the view seen from the chip mounting surface 10, and shows the conductors 2 to 2', 20.
~20', 200~200', etc. are arranged in a grid pattern and are exposed on the stacked end face 10. Figure b shows the surface 100 to be mounted on the high-density main circuit board, and the conductors 2-2', 20-20', 200-
200' are both in the x direction and y direction compared to the surface 10 side.
The pitch is enlarged in all directions, and the conductors are arranged in a lattice pattern. Therefore, chip elements having high density electrodes can be easily mounted on the main circuit board. In addition, in Fig. 2, the thickness of the spacer 3 is tapered so that it is thicker on the surface 100 side, but depending on the lamination press conditions, a spacer 3 with the same uniform thickness may be used, and the thickness is thicker on the side closer to the surface 10. The same structure can be obtained by flowing the molten material in the direction of the surface 100, or the same structure can be obtained by changing the thickness of the sheets 1 to 1''.

更に第1図、第2図に於ては矩形状のシート1
〜1″を用いて構成する場合を示したが熱拡がり
に寄与しない部分を第1図に示した点線部を切断
した形状としこれら積層して第3図に示す角錐形
状に構成し得ることは云う迄もない。
Furthermore, in FIGS. 1 and 2, a rectangular sheet 1
~1'' is shown, but the part that does not contribute to heat spread can be shaped by cutting off the dotted line shown in Figure 1, and these can be laminated to form the pyramid shape shown in Figure 3. Needless to say.

以上説明した如くこの発明によれば、高密度チ
ツプバンプを有するフリツプチツプなどの素子を
X及びY方向のいずれか或は両者の方向へ任意に
そのピツチを拡大し得る設計自由度の高いチツプ
キヤリアが提供される。
As explained above, according to the present invention, a chip carrier with a high degree of freedom in design is provided, which allows the pitch of an element such as a flip chip having high-density chip bumps to be expanded arbitrarily in either or both of the X and Y directions. Ru.

例えば10行10列の100バンプを有する数mm角の
フリツプチツプICは例えば両面導体シート4
枚、片面シート2枚で構成される。又、達成され
る面10側の最小導体ピツチはシート厚、導体厚
共に10〜100μの範囲、導体巾は40μ程度迄可能
であるから仮に50μシート、50μ導体厚、巾で設
計すると略1mm角フリツプチツプに50μバンプが
100ケ形成されたものでも十分塔載可能となる。
For example, a flip-chip IC several mm square with 100 bumps arranged in 10 rows and 10 columns has a double-sided conductor sheet 4.
Consists of two single-sided sheets. Also, the minimum conductor pitch on the surface 10 side that can be achieved is in the range of 10 to 100μ for both sheet thickness and conductor thickness, and the conductor width can be up to about 40μ, so if you design it with a 50μ sheet, 50μ conductor thickness, and width, it will be approximately 1 mm square. 50μ bump on flip chip
Even if 100 pieces are formed, it can be mounted on the tower.

従つてスルーホールを用いる方式ではその穴径
だけでも400μφ程度が最小であり仮りに細径化
が進んだとしてもその細径化により信頼性低下は
問題となる為、本発明の効果は大である。
Therefore, in a system using through-holes, the minimum hole diameter alone is about 400μφ, and even if the diameter were to be reduced, the reduction in reliability would be a problem, so the effect of the present invention is not great. be.

尚、第1図に示した各シートの導体パタン形状
は一例であり、面10と面100でそのピツチが
異る様達成されるパタン配置であればどの様なも
のでも良く、導体巾を変化させても直角にう回さ
せても同様に本発明の効果が達成される。
Note that the conductor pattern shape of each sheet shown in FIG. The effects of the present invention can be similarly achieved whether it is rotated or rotated at right angles.

又この発明に用いる材質はガラスエポキシ、等
の樹脂板の他セラミツク等でも可能であり、スペ
ーサ3はこれらの間かくを保つ様な材料、構成で
あれば良い。
The material used in the present invention may be a resin plate such as glass epoxy or ceramic, and the spacer 3 may be made of any material or structure that maintains the distance between them.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、この発明のシートを示す斜視図、第
2図は第1図のシートに絶縁層を組合せたこの発
明の装置を示す斜視図、第3図aはこの装置の外
部を示す斜視図、第3図bは第3図aの底面図で
ある。 図において、1,1′,1″はシート、2,
2′,20′,200,200′は導体、3は絶縁
層である。なお、各図中同一符号は同一又は相当
部分を示す。
Fig. 1 is a perspective view showing a sheet of the present invention, Fig. 2 is a perspective view showing a device of the present invention in which the sheet of Fig. 1 is combined with an insulating layer, and Fig. 3a is a perspective view showing the outside of this device. FIG. 3b is a bottom view of FIG. 3a. In the figure, 1, 1', 1'' are sheets, 2,
2', 20', 200, and 200' are conductors, and 3 is an insulating layer. Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】 1 導体が片面又は両面に設けられた複数の回路
板、及びこの複数の回路板間に挿入された絶縁層
を備え、上記回路板と上記絶縁層は、上記導体に
おける部品実装面と回路板実装面とが電極部とし
て露出するように一体化して構成すると共に、前
記露出した電極部の導体間隔は部品実装面より回
路板実装面を広くしたことを特徴とするチツプ実
装用キヤリア。 2 回路板はガラスエポキシ又はフエノール又は
セラミツク、絶縁層はプリプレグ又は接着剤で構
成されていることを特徴とする特許請求の範囲第
1項記載のチツプ実装用キヤリア。 3 絶縁層はアルミナペースト又はガラス接着剤
構成されていることを特徴とする特許請求の範囲
第1項記載のチツプ実装用キヤリア。
[Claims] 1. A plurality of circuit boards each having a conductor on one or both sides, and an insulating layer inserted between the plurality of circuit boards, wherein the circuit board and the insulating layer are used as parts of the conductor. Chip mounting characterized in that the mounting surface and the circuit board mounting surface are integrated so as to be exposed as electrode parts, and the conductor spacing of the exposed electrode part is wider on the circuit board mounting surface than on the component mounting surface. carrier. 2. The carrier for chip mounting according to claim 1, wherein the circuit board is made of glass epoxy, phenol, or ceramic, and the insulating layer is made of prepreg or adhesive. 3. The carrier for chip mounting according to claim 1, wherein the insulating layer is made of alumina paste or glass adhesive.
JP5115480A 1980-04-14 1980-04-14 Carrier for equipment of chip Granted JPS56146264A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5115480A JPS56146264A (en) 1980-04-14 1980-04-14 Carrier for equipment of chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5115480A JPS56146264A (en) 1980-04-14 1980-04-14 Carrier for equipment of chip

Publications (2)

Publication Number Publication Date
JPS56146264A JPS56146264A (en) 1981-11-13
JPS6243539B2 true JPS6243539B2 (en) 1987-09-14

Family

ID=12878897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5115480A Granted JPS56146264A (en) 1980-04-14 1980-04-14 Carrier for equipment of chip

Country Status (1)

Country Link
JP (1) JPS56146264A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0334444U (en) * 1989-08-11 1991-04-04

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3629348B2 (en) 1997-04-16 2005-03-16 新光電気工業株式会社 Wiring board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0334444U (en) * 1989-08-11 1991-04-04

Also Published As

Publication number Publication date
JPS56146264A (en) 1981-11-13

Similar Documents

Publication Publication Date Title
US5471090A (en) Electronic structures having a joining geometry providing reduced capacitive loading
US5515604A (en) Methods for making high-density/long-via laminated connectors
US5719749A (en) Printed circuit assembly with fine pitch flexible printed circuit overlay mounted to printed circuit board
KR100395862B1 (en) Flip chip type semiconductor device and method for manufacturing the same
JP2996510B2 (en) Electronic circuit board
US5374196A (en) High-density/long-via laminated connector
JPH06291216A (en) Substrate and ceramic package
JPH1154927A (en) Composite wiring board, flexible substrate, semiconductor device, and method of manufacturing composite wiring board
US6372543B1 (en) Wrap-around interconnect for fine pitch ball grid array
US10912194B2 (en) Printed circuit board
JPH0897557A (en) Multilayer thin film wiring board
CN101101899B (en) Laminated board, method for producing same, electronic component and device having same
JP3016910B2 (en) Semiconductor module structure
US5790386A (en) High I/O density MLC flat pack electronic component
JPS6243539B2 (en)
JP7272527B2 (en) printed circuit board
CN120052063A (en) Electronic component built-in substrate
JP2022046840A (en) Circuit board and method for manufacturing circuit board
JPS5987896A (en) Multilayer printed board
JPS6127667A (en) Semiconductor device
JPH0286159A (en) Semiconductor device
JPH09130000A (en) Double-sided wiring board and semiconductor device using the same
JPH02222598A (en) Semiconductor device module
JP2536175B2 (en) Multilayer wiring structure
JPS63181436A (en) Circuit device