JPS6248399B2 - - Google Patents
Info
- Publication number
- JPS6248399B2 JPS6248399B2 JP56067418A JP6741881A JPS6248399B2 JP S6248399 B2 JPS6248399 B2 JP S6248399B2 JP 56067418 A JP56067418 A JP 56067418A JP 6741881 A JP6741881 A JP 6741881A JP S6248399 B2 JPS6248399 B2 JP S6248399B2
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric conversion
- cooling head
- refrigerator
- heat radiation
- conversion device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/02208—Mountings; Housings characterised by the shape of the housings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/023—Mount members, e.g. sub-mount members
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/023—Mount members, e.g. sub-mount members
- H01S5/02315—Support members, e.g. bases or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0233—Mounting configuration of laser chips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0235—Method for mounting laser chips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02476—Heat spreaders, i.e. improving heat flow between laser chip and heat dissipating elements
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Light Receiving Elements (AREA)
- Semiconductor Lasers (AREA)
Description
【発明の詳細な説明】
本発明は冷却形光電変換装置に関し、特に冷凍
機を用いて光電変換素子を冷却する方式の冷却形
光電変換装置の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a cooled photoelectric conversion device, and more particularly to an improvement in a cooled photoelectric conversion device that uses a refrigerator to cool a photoelectric conversion element.
半導体レーザ素子や赤外線検知素子のような光
電変換素子は所定の動作温度にまで冷却して使用
するのが一般的である。それら光電変換素子の冷
却は液体窒素等の冷却剤を用いる方法や、循環形
冷凍機等による方法がある。この循環形冷凍機は
冷却剤を補給することなく電力の供給のみで極低
温が得られ、しかも1万時間程度の連続運転が可
能であるといつた非常に便利なものである。しか
しその反面冷却ヘツドが振動し易い。しかるに光
電変換素子として例えばレーザ素子を載置した放
熱台を冷凍機の冷却ヘツドに密着させて使用して
いる従来の方法では、冷却ヘツドの振動に伴つて
レーザ素子が振動し、その結果レーザ光の光軸が
ずれるといつた障害を招いていた。また冷凍機内
部のヘリウムガス等の圧縮、膨張に伴う微小な温
度変動も生じ、レーザ光の波長変動を生じるとい
つた問題もあつた。 Photoelectric conversion elements such as semiconductor laser elements and infrared detection elements are generally used after being cooled to a predetermined operating temperature. The photoelectric conversion elements can be cooled by using a coolant such as liquid nitrogen or by using a circulating refrigerator. This circulation type refrigerator is extremely convenient because it can achieve extremely low temperatures just by supplying electricity without replenishing refrigerant, and can operate continuously for about 10,000 hours. However, on the other hand, the cooling head tends to vibrate. However, in the conventional method in which a heat radiation stand on which a laser element is mounted as a photoelectric conversion element is used in close contact with the cooling head of a refrigerator, the laser element vibrates as the cooling head vibrates, resulting in the laser beam being emitted. This caused problems when the optical axis of the lens was misaligned. Further, there were also problems in that minute temperature fluctuations occurred due to the compression and expansion of helium gas, etc. inside the refrigerator, which caused wavelength fluctuations in the laser light.
本発明は前述の点に鑑みなされたもので、その
目的は光電変換素子の振動や微小な温度変動を防
止した構造の冷却形光電変換装置を提供すること
であり、その特徴は光電変換素子を載置した放熱
台を冷凍機の冷却ヘツド上にそなえてなる冷却形
光電変換装置において、前記冷却ヘツドと放熱台
とを可撓性を有する熱伝導体からなるクツシヨン
用板部材を介して連結するとともに当該放熱台を
前記冷凍機とは別の固定物に固定したところにあ
る。 The present invention has been made in view of the above-mentioned points, and its purpose is to provide a cooled photoelectric conversion device having a structure that prevents vibrations and minute temperature fluctuations of the photoelectric conversion element. In a cooled photoelectric conversion device in which a mounted heat dissipation stand is provided on a cooling head of a refrigerator, the cooling head and the heat dissipation stand are connected via a cushion plate member made of a flexible thermal conductor. In addition, the heat radiation stand is fixed to a fixed object different from the refrigerator.
以下本発明の実施例につき図面を参照して説明
する。 Embodiments of the present invention will be described below with reference to the drawings.
図は本発明による冷却形光電変換装置の1例構
造を示す要部断面側面図であり、1は冷凍機本体
であつて、その冷凍機本体に連結して冷却ヘツド
2が設けてある。また冷却ヘツド2上の放熱台3
には光電変換素子として例えばレーザ素子4が載
置され、真空容器5内に収容されている。そして
真空容器5には透光窓6が配設してある。このよ
うな構成において、冷凍機1を作動させ、冷却ヘ
ツド2によつて放熱台3を冷却するとともにレー
ザ素子4を所定の動作温度にまで冷却するのであ
るが、この際冷却ヘツド2の振動に伴う放熱台3
の振動を防止すべく、本発明においては冷却ヘツ
ド2と放熱台3とは可撓性を有する熱伝導体から
なるクツシヨン用板部材7を介して連結してあ
る。このクツシヨン用板部材7は銅、アルミニウ
ムのような熱伝導のよい金属板や、あるいは銅線
等を板状に編んだものからなる。また放熱台3は
真空容器5に形成した蛇腹状部5aを通して、例
えばエポキシ樹脂のような熱伝導の悪い物質から
なる支持棒8で外部の振動のない例えば光学台
(オプチカルベンチ)のような固定物9に固定し
てある。 The figure is a cross-sectional side view of a main part showing the structure of one example of a cooled photoelectric conversion device according to the present invention. Reference numeral 1 denotes a refrigerator main body, and a cooling head 2 is provided connected to the refrigerator main body. Also, the heat sink 3 on the cooling head 2
For example, a laser element 4 is mounted as a photoelectric conversion element and housed in a vacuum container 5 . A transparent window 6 is provided in the vacuum container 5. In this configuration, the refrigerator 1 is operated and the cooling head 2 cools the heat sink 3 and the laser element 4 to a predetermined operating temperature. Accompanying heat sink 3
In order to prevent vibrations, in the present invention, the cooling head 2 and the heat sink 3 are connected via a cushion plate member 7 made of a flexible heat conductor. This cushion plate member 7 is made of a metal plate with good thermal conductivity such as copper or aluminum, or a plate made of copper wire or the like. The heat dissipation table 3 is fixed to an optical bench, for example, without external vibration, by passing a bellows-shaped part 5a formed in the vacuum container 5 and using a support rod 8 made of a material with poor thermal conductivity, such as epoxy resin. It is fixed to object 9.
しかして前記クツシヨン用板部材7は冷却ヘツ
ド2と放熱台3との間の熱抵抗を大きく損なうこ
となく放熱台3を充分に冷却することができる
し、また冷却ヘツド2の振動を吸収する役割を果
たす。さらにそのクツシヨン用板部材7は金属ブ
ロツクに比べて若干の熱抵抗を有するので、冷却
ヘツド2の微小温度変動が放熱台3に伝わること
に対する抑制機能をも兼備している。 Therefore, the cushion plate member 7 can sufficiently cool the heat sink 3 without significantly impairing the thermal resistance between the cooling head 2 and the heat sink 3, and also has the role of absorbing vibrations of the cooling head 2. fulfill. Furthermore, since the cushion plate member 7 has a slightly higher thermal resistance than a metal block, it also has the function of suppressing minute temperature fluctuations in the cooling head 2 from being transmitted to the heat radiating table 3.
かくして前記クツシヨン用板部材7を介して冷
凍機の冷却ヘツド2と放熱台3とを連結し、かつ
放熱台3を固定物9に固定することにより、冷却
ヘツド2の振動や微小温度変動が放熱台3に伝わ
ることを防止でき、その結果レーザ素子4の振動
や微小温度変動を防止することが可能となるので
ある。 In this way, by connecting the cooling head 2 of the refrigerator and the heat radiation stand 3 through the cushion plate member 7 and fixing the heat radiation stand 3 to the fixed object 9, vibrations and minute temperature fluctuations of the cooling head 2 are prevented from being radiated. It is possible to prevent this from being transmitted to the table 3, and as a result, it is possible to prevent vibrations and minute temperature fluctuations of the laser element 4.
なお前述の実施例では光電変換素子としてレー
ザ素子を用いた場合について述べたが、それに限
らず冷却を必要とする赤外線検知素子のようなそ
の他の光電変換素子を用いた冷却形光電変換装置
に適用することもできる。 Although the above-mentioned embodiment describes a case where a laser element is used as a photoelectric conversion element, the application is not limited to this, but is applicable to a cooled photoelectric conversion device using other photoelectric conversion elements such as an infrared detection element that requires cooling. You can also.
以上の説明から明らかなように要するに本発明
は、光電変換素子を載置した放熱台と冷凍機の冷
却ヘツドとを可撓性を有する熱伝導体からなるク
ツシヨン用板部材を介して連結するとともに当該
放熱台を振動のない固定物に固定したもので、前
記冷却ヘツドの振動や微小温度変動が光電変換素
子に伝わることを容易に防止し得て、光電変換素
子の振動や微小温度変動に起因して生じる障害が
除去でき、実用上きわめて有益である。 As is clear from the above description, in short, the present invention connects a heat radiation stand on which a photoelectric conversion element is mounted and a cooling head of a refrigerator via a cushion plate member made of a flexible thermal conductor. The heat dissipation table is fixed to a fixed object that does not vibrate, and can easily prevent vibrations and minute temperature fluctuations of the cooling head from being transmitted to the photoelectric conversion element. This is extremely useful in practice, as it eliminates the obstacles that occur during this process.
図は本発明による冷却形光電変換装置の構造を
説明するための要部断面側面図である。
1:冷凍機本体、2:冷却ヘツド、3:放熱
台、4:光電変換素子(半導体レーザ素子)、
7:クツシヨン用板部材、9:固定物。
The figure is a sectional side view of a main part for explaining the structure of a cooled photoelectric conversion device according to the present invention. 1: Freezer body, 2: Cooling head, 3: Heat sink, 4: Photoelectric conversion element (semiconductor laser element),
7: Plate member for cushion, 9: Fixed object.
Claims (1)
却ヘツド上にそなえてなる冷却形光電変換装置に
おいて、前記冷却ヘツドと放熱台とを可撓性を有
する熱伝導体からなるクツシヨン用板部材を介し
て連結するとともに当該放熱台を前記冷凍機とは
別の固定物に固定したことを特徴とする冷却形光
電変換装置。1. In a cooling type photoelectric conversion device in which a heat radiation stand on which a photoelectric conversion element is mounted is provided on a cooling head of a refrigerator, the cooling head and the heat radiation stand are connected to a cushion plate member made of a flexible thermal conductor. A cooling type photoelectric conversion device characterized in that the heat radiation stand is connected to a fixed object different from the refrigerator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56067418A JPS57181187A (en) | 1981-04-30 | 1981-04-30 | Cooling type photoelectric converter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56067418A JPS57181187A (en) | 1981-04-30 | 1981-04-30 | Cooling type photoelectric converter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57181187A JPS57181187A (en) | 1982-11-08 |
| JPS6248399B2 true JPS6248399B2 (en) | 1987-10-13 |
Family
ID=13344335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56067418A Granted JPS57181187A (en) | 1981-04-30 | 1981-04-30 | Cooling type photoelectric converter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57181187A (en) |
-
1981
- 1981-04-30 JP JP56067418A patent/JPS57181187A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57181187A (en) | 1982-11-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4161747A (en) | Shock isolator for operating a diode laser on a closed-cycle refrigerator | |
| JPH10178216A (en) | Thermoelectric element and thermoelectric cooling device | |
| ES8704043A1 (en) | Conductively cooled laser rod. | |
| US20210389651A1 (en) | Light source device, method of manufacturing light source device, and projector | |
| JPH0760118B2 (en) | Infrared detector | |
| JPS6248399B2 (en) | ||
| JPH06120584A (en) | Structure of semiconductor laser / atom absorption cell mounting device | |
| JPS6234471Y2 (en) | ||
| JP2880890B2 (en) | Semiconductor laser module | |
| US7120025B2 (en) | Imaging apparatus | |
| JPS6410686A (en) | Semiconductor laser module with electronic cooling element | |
| JP2814987B2 (en) | Semiconductor laser module | |
| JPH0645705A (en) | Laser module | |
| DE59104534D1 (en) | Chiller with power adjustment. | |
| JP3246519B2 (en) | Optical semiconductor module | |
| US6137815A (en) | Semiconductor laser | |
| JPH0983165A (en) | Electronic device cooling device | |
| JPH07131106A (en) | Semiconductor laser module | |
| JP2536438B2 (en) | Semiconductor laser equipment | |
| JPS5931081A (en) | Module for temperature control of laser diode | |
| JP2563617B2 (en) | Outdoor optical transmitter | |
| JPS55100523A (en) | Laser working optical device | |
| CN216802087U (en) | Vibrating mirror structure and laser unsealing machine | |
| JPH0357445B2 (en) | ||
| JPS6046055A (en) | Cooler of electronic component |