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JPS6248751B2 - - Google Patents
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JPS6248751B2 - - Google Patents

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Publication number
JPS6248751B2
JPS6248751B2 JP59094718A JP9471884A JPS6248751B2 JP S6248751 B2 JPS6248751 B2 JP S6248751B2 JP 59094718 A JP59094718 A JP 59094718A JP 9471884 A JP9471884 A JP 9471884A JP S6248751 B2 JPS6248751 B2 JP S6248751B2
Authority
JP
Japan
Prior art keywords
cemented carbide
phase
base material
amount
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59094718A
Other languages
Japanese (ja)
Other versions
JPS60238483A (en
Inventor
Minoru Nakano
Masaaki Tobioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP9471884A priority Critical patent/JPS60238483A/en
Publication of JPS60238483A publication Critical patent/JPS60238483A/en
Publication of JPS6248751B2 publication Critical patent/JPS6248751B2/ja
Granted legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/403Oxides of aluminium, magnesium or beryllium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32Carbides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/38Borides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/405Oxides of refractory metals or yttrium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

(産業上の利用分野) 本発明は被覆超硬合金およびその製造方法に関
し、特に高速切削用のコーティング工具として用
いられる被覆超硬合金およびその製造方法に関す
る。 (従来の技術) 超硬合金を母材として、母材表面にTiC、
TiCN、TiN、Al2O3等を単層または積層に被覆し
た被覆超硬合金は、母材の靭性と、表面層の硬質
層のもつ耐摩耗性、耐熱性、耐化学反応性を兼備
しており、工具材料として優れた性能を有してい
る。 (発明の解決しようとする問題点) 近時、切削速度の高速化によつて、工具材料等
にはより高度の耐摩耗性が要求されてきており、
しかも、汎用性を損われていない工具材料の開発
が望まれている。 超硬合金を母材とする被覆超硬合金を切削工具
材料として用いる場合に、例えば炭素鋼を切削速
度が300m/min以上の高速で切削すると、その
刃先温度が超硬合金の液相温度(約1300℃)を超
えるため、合金の軟弱化により刃先部の塑性、変
形性が劣下して(すなわち塑性変形を生じ)、著
しく耐摩耗性が低下してしまい短時間で使用不可
能となり、いかにAl2O3やTiCの膜厚を厚くして
も、その効果は期待できないのが現状である。 このために、より耐熱性の優れる、サーメツト
や、セラミツクスを母材とする被覆工具材料も開
発されてきている。しかしながら、所詮、サーメ
ツトやセラミツクスの靭性は、超硬合金に比較す
ればはるかに低く、汎用工具としては、使用に耐
えない。 例えば、300m/minを越える高速切削におい
ては、Al2O3やAl2O3−TiC系のセラミツクス工具
が使用されるが、それらは主として、送りや切り
込みの小さい仕上切削加工においてである。これ
らの工具材料は、高送りや切込量が大きくなると
靭性が不足して使用に耐えない。 また最近、SiN4系の工具材料も開発されている
が、SiN4は鋼との反応性が高いため、通常の一般
鋼切削においては使用に耐えない。このSiN4を母
材として表面にAl2O3を被覆した工具材料も開発
されているが、これもSiN4工具の範疇を越えるも
のではなく、満足なものとは言えない。 被覆切削工具の母材として必要とされる耐摩耗
性と靭性を兼備した母材としては、依然として超
硬合金が優れていると言える。しかし高速切削に
用いると前述のようなセラミツクスに比較してそ
の液相温度が低いための、耐塑性変形性の劣化と
いう問題がある。 本発明は、上記の問題点を解決して、耐塑性変
形性の優れる超硬合金を母材とした、高速切削も
可能で、汎用性も損われない被覆超硬合金および
その製造方法を提供することを目的とし、本発明
の被覆超硬合金は優れた高速切削工具材料として
用いることができる。 (問題点を解決する手段) 本発明は、WCを硬質相とし、鉄族金属の1種
もしくは、それ以上を結合相とした超硬合金にお
いて、該超硬合金の表面から1〜100μmより内
部に主としてWCとCoからなる複炭化物が析出し
てなる超硬合金を母材とし、該母材の表面に周期
律表a、a、a族の金属と、Al、Si、Bか
らなる群より選ばれる1種以上と、C、B、N、
Oからなる群より選ばれる1種以上から構成され
る被覆を有する被覆超硬合金に関するものであ
る。 また本発明は、WCを硬質相とし、鉄族金属の
1種もしくは、それ以上を結合相とした、超硬合
金母材の表面を被覆するにあたり前もつて、炭化
水素、N2、NH3またはCOガスのいずれかのガス
雰囲気にて、1〜300torrの減圧下、温度900〜
1100℃に加熱して、それにより該母材表面から1
〜100μmにおいては、WCと鉄族金属の1種も
しくはそれ以上、例えばCoからなる複炭化物が
消失されており、該超硬合金の表面から1〜100
μmより内部にWCと鉄族金属の1種もしくはそ
れ以上、例えばCoからなる複炭化物が析出して
なる超硬合金母材としておき、次に該母材の表面
に周期律表a、a、a族の金属と、Al、
Si、Bからなる群より選ばれる1種以上と、C、
B、N、Oからなる群より選ばれる1種以上から
構成される被覆を形成することを特徴とする被覆
超硬合金の製造方法をも提供する。 本発明においては、Coを結合相とする超硬合
金の飽和磁気量が、Co結合相量との比率で表示
して、 12<飽和磁気量(ガウス/cm3/g)/Co結合相
量(重量%)16 の範囲にあることが特に好ましい。 (作用) 本発明は、超硬合金の結合炭素量を該超硬合金
の理論的結合炭素量より著しく低くし、合金中に
η相と呼ばれる鉄族金属の1種もしくはそれ以上
とWからなる複炭化物(Co3W3C、Co6W6C、
Ni3W3C、Ni6W6C、Fe3W3C、Fe6W6C)を存在
させることによつて、上述の問題点を解決し、そ
れにより該超硬合金を母材とする被覆超硬合金の
耐熱性を改善するものである。 超硬合金は、その含有炭素量によつて、その合
金特性が著しく変化することはよく知られる。通
常は、WC相とCo相からなる2相合金又は、Ti、
Ta、Nb、Mo、W、Crの炭化物、窒化物、炭窒
化物の1種以上からなる固溶体相からなる3相合
金が存在する炭素量領域で実用に供されている。 この理由は、従来はη相が出現すると著しく強
度が低下してしまうと考えられていたからであ
り、いかにη−相の出現しない合金を作成するか
が、当業者にとつて、生産技術上の大きな問題で
あり、η相出現を極力抑えた合金しか実用に供さ
れていなかつた。 本発明の特徴は、このような従来の概念に反
し、意図的に超硬合金内部にη相を出現せしめた
ところにある。 本発明者らは、被覆超硬合金部材の欠損状況を
詳細に検討した結果、被覆超硬合金部材の欠損お
よび破壊の殆どが、該部材の表面のごく近傍(表
面から1〜100μmの領域)に起点をもつ亀裂に
帰因しているとの新しい知見を得た。さらにまた
本発見者らは、合金中にη相が共存する超硬合金
は、η相が出現していない合金に比べると、靭性
はやゝ劣るものの、その液相出現温度は逆に約60
℃も高いため、耐塑性変形性と、耐熱性はより優
れているということも見出した。 そして、超硬合金表面から1〜100μmの領域
においてη相を消失させれば、たとえ該合金内部
にη相が存在していても、通常の合金と同様に靭
性が保持できること、加えてその内部にη相が存
在していれば耐塑性変形性および耐熱性が向上す
ることを見出し、本発明に到達した。 本発明の被覆超硬合金において、母材とする超
硬合金は周期律表a、aおよびa族金属の
1種もしくはそれ以上の炭化物および/または窒
化物の1種もしくはそれ以上を硬質相とし、鉄族
金属の1種もしくはそれ以上を結合相とするもの
である。 超硬合金表面近傍でη相が出現していない層
(η相消失領域)を、表面から1〜100μmの領域
としたのは、η相消失層の厚さが1μmより薄く
なると靭性保持が困難であり、また100μmを越
えると耐熱性が低下するためである。好ましくは
5〜50μmの領域である。 出現するη−相量は、合金中の炭素量により異
るが、本発明の超硬合金母材の炭素量は、合金中
のCo結合相量(重量%)と、飽和磁気量(4π
σ値)の比率であらわして、 14<飽和磁気量(ガウス/cm3/g)/Co結合相
量(重量%)16 の範囲が好ましい。14以下では、合金中のη相量
が多くなり汎用性が低下してくる。また16を越え
る場合はη相の出現がみられない。 また、母材の合金表面から1〜100μmの部分
をη相消失相とするために、該合金に被覆を設け
る以前に、炭化水素、N2、NH3ガスまたはCOガ
スの雰囲気中、900〜1100℃にて、1〜300torrの
減圧下で熱処理するのが好ましい。この場合900
℃以下では消失効果が弱く、1100℃以上では、合
金内部深くまでη相が消失してしまう。又、
1torr以下では消失効果が弱すぎ、300torr以上で
は効果がありすぎる。 当然のことではあるが、このη相消失のための
処理を該合金を粉末圧粉体より焼結体とする焼結
課程の一部にとり入れて行い、該焼結体の一部を
研削して、例えば、にげ面のみにη相消失層のな
い母材としても本来の目的を達成しうる。 本発明に用いる被覆層は、周期律表a、a
およびa族の金属と、Al、SiおよびBからなる
群より選んだ1種以上と、C、B、NおよびOか
らなる群より選んだ1種以上から構成される単層
又は混合物もしくは化合物の1種もしくはそれ以
上を被覆してなるものである。TiC、SiC、
TiN、Al2O3等の硬度の高い物質を被覆層として
選択すれば、耐摩耗性が向上する。Al2O3
ZrO2、TiO2等の酸化物を被覆層として用いれ
ば、母材の耐熱性と相乗して、耐熱性が著しく向
上する。 又、TiC、TiN、Al2O3、ZrO2等の混合体、固
溶体等のような複合化された層又は、これらを交
互に積層したものでもよい。 これら被覆層を形成するには、化学蒸着法
(CVD法)、プラズマCVD法、光励起CVD法等の
化学的蒸着を用いてもよいし、またイオンプレー
テイング、イオンミキシング、イオンビームデポ
ジシヨン等の物理的蒸着によつてもよい。 また、硬質の炭素膜や、硬質のBN膜を本発明
の超硬合金(母材)上に直接に、またはTiC、
SiC、TiN、Al2O3もしくはアモルフアスBN等を
中間層として介在させた上に、被覆すれば、母材
の耐熱性と、被覆層の高硬度という長所をもつ
て、高性能の被覆超硬合金工具が得られる。 (発明の効果) 本発明の被覆超硬合金は、従来に比べ、耐塑性
変形性および耐熱性が向上し、かつ、従来合金同
様の靭性を保持し、さらに高硬度を有するので、
高速切削にも長時間耐え得る優れた工具材料とし
て用いることができる。また、被覆されていない
超硬合金母材そのものも、工具材料としての汎用
性を備えた優れたものである。 本発明の製造方法は、上記のように優れた被覆
超硬合金を実現できる方法である。 (実施例) 実施例 1 95重量%WCと5重量%Coからなる超硬合金
で、それぞれの合金炭素量が理論炭素量の98.7
%、99.0%、99.5%である(A)、(B)、(C)の3種類の
合金を作成した。それぞれの飽和磁気量4πσ値
は(A)61、(B)70、(C)85(ガウス/cm3/g)であつ
た。 これら(A)〜(C)の合金を、CVD装置内で温度
1000℃にて、COガス雰囲気200torrにて30分保持
した後、TiCl42容量%、CH410容量%、残部H2
らなるガス中、温度1000℃にてその表面にTiCを
厚さ3μmに生成させた。しかる後、AlCl35容量
%、CO25容量%、残部H2からなるガス中、温度
1000℃にてさらに厚さ5μmのAl2O3を生成させ
た。 このようにして得た合金の断面組織を見ると、
(A)は表面より45μmまではWC−Coの2相領域
で、それ以上の内部は、WC相、Co相、η相
(Co3W3C)の3相領域であつた。(B)は同じく40
μmまではWC−Coの2相領域であつた。(C)には
η相の出現はなく、WC−Co2相合金であつた。 これら(A)〜(C)によるコーテイングチツプについ
て、下記表1の条件により切削テストを行つた。
(Industrial Application Field) The present invention relates to a coated cemented carbide and a method for producing the same, and more particularly to a coated cemented carbide used as a coated tool for high-speed cutting and a method for producing the same. (Conventional technology) Cemented carbide is used as a base material, and TiC and TiC are coated on the surface of the base material.
Coated cemented carbide coated with TiCN, TiN, Al 2 O 3 , etc. in a single layer or in multiple layers has both the toughness of the base material and the wear resistance, heat resistance, and chemical reaction resistance of the hard surface layer. It has excellent performance as a tool material. (Problems to be solved by the invention) In recent years, as cutting speeds have increased, tool materials, etc. are required to have higher wear resistance.
Furthermore, it is desired to develop a tool material that does not impair its versatility. When a coated cemented carbide with a cemented carbide base material is used as a cutting tool material, for example, when cutting carbon steel at a high cutting speed of 300 m/min or more, the cutting edge temperature will rise to the liquidus temperature of the cemented carbide ( (approximately 1300℃), the plasticity and deformability of the cutting edge deteriorates due to the softening of the alloy (i.e., plastic deformation occurs), and the wear resistance decreases significantly, making it unusable in a short period of time. The current situation is that no matter how thick the Al 2 O 3 or TiC film is made, no effect can be expected. For this reason, coated tool materials using cermets or ceramics as a base material, which have better heat resistance, have also been developed. However, the toughness of cermets and ceramics is much lower than that of cemented carbide, so they cannot be used as general-purpose tools. For example, in high-speed cutting exceeding 300 m/min, Al 2 O 3 or Al 2 O 3 -TiC ceramic tools are used, but they are mainly used in finishing cutting with small feeds and small depths of cut. These tool materials lack toughness and cannot be used when the feed rate is high or the depth of cut is large. Recently, SiN 4 -based tool materials have also been developed, but SiN 4 is highly reactive with steel, so it cannot be used in ordinary steel cutting. A tool material in which SiN 4 is used as a base material and the surface is coated with Al 2 O 3 has also been developed, but this does not go beyond the scope of SiN 4 tools and cannot be said to be satisfactory. It can be said that cemented carbide is still an excellent base material that has both wear resistance and toughness required as a base material for coated cutting tools. However, when used for high-speed cutting, there is a problem of deterioration in plastic deformation resistance due to its lower liquidus temperature than the aforementioned ceramics. The present invention solves the above problems and provides a coated cemented carbide that uses a cemented carbide with excellent plastic deformation resistance as a base material, can be cut at high speed, and does not impair its versatility, and a method for manufacturing the same. The coated cemented carbide of the present invention can be used as an excellent high speed cutting tool material. (Means for Solving the Problems) The present invention provides a cemented carbide having WC as a hard phase and one or more iron group metals as a binder phase. The base material is a cemented carbide formed by precipitating double carbides mainly composed of WC and Co, and the surface of the base material is coated with metals from groups A, A, and A of the periodic table, and metals from the group consisting of Al, Si, and B. One or more selected types and C, B, N,
The present invention relates to a coated cemented carbide having a coating composed of one or more selected from the group consisting of O. In addition, the present invention provides a method for coating the surface of a cemented carbide base material with WC as a hard phase and one or more iron group metals as a binder phase using hydrocarbons, N 2 , and NH 3 . Or in a gas atmosphere of CO gas, under reduced pressure of 1 to 300 torr, at a temperature of 900 to
Heating to 1100℃, thereby removing 1 from the surface of the base material.
At ~100 μm, double carbides consisting of WC and one or more iron group metals, such as Co, disappear, and at 1 to 100 μm from the surface of the cemented carbide.
A cemented carbide base material is prepared by precipitating a double carbide consisting of WC and one or more of the iron group metals, such as Co, within micrometers, and then the surface of the base material is coated with the elements a, a, A group metal, Al,
one or more selected from the group consisting of Si, B, and C,
The present invention also provides a method for manufacturing a coated cemented carbide, which comprises forming a coating composed of one or more selected from the group consisting of B, N, and O. In the present invention, the saturation magnetic amount of a cemented carbide containing Co as a binder phase is expressed as a ratio to the Co binder phase amount, and is expressed as 12<saturation magnetic amount (Gauss/cm 3 /g)/Co binder phase amount. (% by weight) It is particularly preferable that the amount is in the range of 16. (Function) The present invention makes the amount of bonded carbon in the cemented carbide significantly lower than the theoretical amount of bonded carbon in the cemented carbide, and the alloy contains one or more iron group metals called η phase and W. Double carbides (Co 3 W 3 C, Co 6 W 6 C,
The above-mentioned problems are solved by the presence of Ni 3 W 3 C, Ni 6 W 6 C, Fe 3 W 3 C, Fe 6 W 6 C), thereby making it possible to use the cemented carbide as a base material. This improves the heat resistance of coated cemented carbide. It is well known that the alloy properties of cemented carbide vary significantly depending on the amount of carbon contained therein. Usually, a two-phase alloy consisting of a WC phase and a Co phase, or a Ti,
It has been put to practical use in the carbon content range where three-phase alloys consisting of a solid solution phase consisting of one or more of carbides, nitrides, and carbonitrides of Ta, Nb, Mo, W, and Cr exist. The reason for this is that it was previously thought that the appearance of the η phase would significantly reduce the strength, and for those skilled in the art, how to create an alloy in which the η phase does not appear is a major problem in terms of production technology. This was a problem, and only alloys in which the appearance of the η phase was suppressed as much as possible were put into practical use. The feature of the present invention is that, contrary to such conventional concepts, the η phase is intentionally made to appear inside the cemented carbide. As a result of a detailed study of the state of defects in coated cemented carbide members, the present inventors found that most of the defects and fractures in coated cemented carbide members occur in the very vicinity of the surface of the member (an area of 1 to 100 μm from the surface). We have obtained new knowledge that this is caused by a crack that originates from . Furthermore, the present discoverers found that although the toughness of cemented carbide in which the η phase coexists is slightly inferior to that of alloys in which the η phase does not appear, the temperature at which the liquid phase appears is about 60°C.
It was also found that since the temperature is high, the plastic deformation resistance and heat resistance are better. Furthermore, if the η phase disappears in a region of 1 to 100 μm from the cemented carbide surface, even if the η phase exists inside the alloy, it will be possible to maintain the same toughness as a normal alloy, and in addition, the internal The present inventors have discovered that plastic deformation resistance and heat resistance are improved if the η phase is present, and the present invention has been achieved based on this finding. In the coated cemented carbide of the present invention, the cemented carbide used as the base material has a hard phase of one or more carbides and/or nitrides of one or more metals of Groups A, A, and A of the Periodic Table. , one or more iron group metals are used as a binder phase. The reason why the layer in which the η phase does not appear near the cemented carbide surface (η phase disappearing region) is set at 1 to 100 μm from the surface is because it is difficult to maintain toughness when the thickness of the η phase disappearing layer becomes thinner than 1 μm. This is because if the thickness exceeds 100 μm, the heat resistance will decrease. Preferably it is in the range of 5 to 50 μm. The amount of η-phase that appears varies depending on the amount of carbon in the alloy, but the amount of carbon in the cemented carbide matrix of the present invention is determined by the amount of Co bonding phase (wt%) in the alloy and the amount of saturation magnetism (4π
The preferred range is 14<saturation magnetic amount (Gauss/cm 3 /g)/Co binder phase amount (wt%) 16, expressed as a ratio of σ value). If it is less than 14, the amount of η phase in the alloy increases and the versatility decreases. Moreover, when the value exceeds 16, no η phase appears. In addition, in order to form a η-phase disappearing phase in a portion of 1 to 100 μm from the alloy surface of the base metal, the alloy is heated in an atmosphere of 900 to 100 μm in an atmosphere of hydrocarbon, N 2 , NH 3 gas, or CO gas before coating the alloy. Preferably, the heat treatment is carried out at 1100° C. under a reduced pressure of 1 to 300 torr. In this case 900
Below ℃, the disappearance effect is weak, and above 1100℃, the η phase disappears deep inside the alloy. or,
Below 1 torr, the disappearance effect is too weak, and above 300 torr, it is too effective. Naturally, this treatment for the disappearance of the η phase is carried out as part of the sintering process in which the alloy is turned into a sintered body from a powder compact, and a part of the sintered body is ground. Therefore, for example, the original purpose can be achieved even if the base material does not have the η phase disappearing layer only on the barbed surface. The coating layer used in the present invention is based on periodic table a, a
and a single layer or a mixture or compound consisting of a group a metal, one or more selected from the group consisting of Al, Si and B, and one or more selected from the group consisting of C, B, N and O. It is coated with one or more types. TiC, SiC,
If a hard material such as TiN or Al 2 O 3 is selected as the coating layer, wear resistance will be improved. Al 2 O 3 ,
If an oxide such as ZrO 2 or TiO 2 is used as a coating layer, the heat resistance will be significantly improved in conjunction with the heat resistance of the base material. Further, a composite layer such as a mixture or solid solution of TiC, TiN, Al 2 O 3 , ZrO 2 or the like, or a layer formed by alternately laminating these layers may also be used. To form these coating layers, chemical vapor deposition methods such as chemical vapor deposition (CVD method), plasma CVD method, and optically excited CVD method may be used, or ion plating, ion mixing, ion beam deposition, etc. may be used. It may also be by physical vapor deposition. In addition, a hard carbon film or a hard BN film can be directly applied to the cemented carbide (base material) of the present invention, or TiC,
If SiC, TiN, Al 2 O 3 or amorphous BN is interposed as an intermediate layer and then coated, high-performance coated carbide has the advantages of heat resistance of the base material and high hardness of the coating layer. An alloy tool is obtained. (Effects of the Invention) The coated cemented carbide of the present invention has improved plastic deformation resistance and heat resistance compared to conventional alloys, maintains toughness similar to conventional alloys, and has high hardness.
It can be used as an excellent tool material that can withstand high-speed cutting for long periods of time. Furthermore, the uncoated cemented carbide base material itself is also excellent in its versatility as a tool material. The manufacturing method of the present invention is a method that can realize an excellent coated cemented carbide as described above. (Example) Example 1 A cemented carbide consisting of 95 wt% WC and 5 wt% Co, each with an alloy carbon content of 98.7 of the theoretical carbon content.
%, 99.0%, and 99.5% (A), (B), and (C). The respective saturation magnetic quantities 4πσ values were (A) 61, (B) 70, and (C) 85 (Gauss/cm 3 /g). These alloys (A) to (C) are heated to
After holding the temperature at 1000°C for 30 minutes in a CO gas atmosphere of 200 torr, TiC was deposited to a thickness of 3 μm on the surface in a gas consisting of 2% by volume of TiCl 4 , 10% by volume of CH 4 , and the balance was H 2 at a temperature of 1000°C. was generated. Thereafter, in a gas consisting of 5% by volume AlCl3 , 5% by volume CO2 , and the balance H2 , the temperature
Al 2 O 3 with a thickness of 5 μm was further produced at 1000°C. Looking at the cross-sectional structure of the alloy obtained in this way,
In (A), the region up to 45 μm from the surface was a two-phase region of WC-Co, and the interior beyond that was a three-phase region of WC phase, Co phase, and η phase (Co 3 W 3 C). (B) is also 40
It was in the two-phase region of WC-Co up to μm. No η phase appeared in (C), and it was a WC-Co two-phase alloy. A cutting test was conducted on the coating chips prepared by these (A) to (C) under the conditions shown in Table 1 below.

【表】 テスト結果を表2に示す。【table】 The test results are shown in Table 2.

【表】 実施例 2 95重量%WCと5重量%Coからなる超硬合金
で、合金炭素量が理論炭素量の99.3%であり、飽
和磁気量4πσ値/Co量比=15.8のものについ
て、温度1000℃にて、それぞれ100torrの(イ)CH4
ガス雰囲気、(ロ)N2雰囲気、(ハ)NH3雰囲気中にて加
熱処理を施した。 上記の処理を施す以前では、合金はその表面ま
でがWC相とCo相とη相からなるものであつた
が、(イ)工程によれば表面から80μmまではWC−
Co相の2相領域でそれ以上の内部はη相の共存
する3相合金、また(ロ)、(ハ)の工程によれば、60μ
mまではWC−Coの2相領域で、それ以上の内部
はη相の共存する3相領域となつていた。 実施例 3 実施例2の(イ)工程を施したチツプについて、プ
ラズマCVD法でTiCNを厚さ3μm、アモルフア
スBNを厚さ1μmコーテイングしたのち、硬質
なBN膜(硬度3000Kg/mm2)をコーテイングして
表1と同一の条件で切削テストを行つたところ、
40分までも切削可能であつた。
[Table] Example 2 For a cemented carbide made of 95% by weight WC and 5% by weight Co, the alloy carbon content is 99.3% of the theoretical carbon content, and the saturation magnetic quantity 4πσ value/Co content ratio = 15.8, (a) CH 4 of 100 torr each at a temperature of 1000℃
Heat treatment was performed in a gas atmosphere, (b) N 2 atmosphere, and (c) NH 3 atmosphere. Before the above treatment, the alloy consisted of WC phase, Co phase, and η phase up to the surface, but according to step (a), up to 80 μm from the surface was WC-
In the two-phase region of the Co phase, the interior beyond that is a three-phase alloy in which the η phase coexists, and according to the processes (B) and (C), 60μ
The region up to m was a two-phase region of WC-Co, and the interior beyond that was a three-phase region where the η phase coexisted. Example 3 The chip subjected to step (a) of Example 2 was coated with TiCN to a thickness of 3 μm and amorphous BN to a thickness of 1 μm using the plasma CVD method, and then coated with a hard BN film (hardness of 3000 Kg/mm 2 ). When a cutting test was conducted under the same conditions as in Table 1,
It was possible to cut for up to 40 minutes.

Claims (1)

【特許請求の範囲】 1 WCを硬質相とし、鉄族金属の1種もしく
は、それ以上を結合相とした超硬合金において、
該超硬合金の表面から1〜100μmより内部に
WCと鉄族金属の1種もしくはそれ以上からなる
複炭化物が析出してなる超硬合金を母材とし、該
母材の表面に周期律表a、a、a族の金属
と、Al、Si、Bからなる群より選ばれる1種以上
と、C、B、N、Oからなる群より選ばれる1種
以上から構成される被覆を有する被覆超硬合金。 2 鉄族金属がCoであつて、Coを結合相とする
該合金の飽和磁気量が結合相量との比率で表示し
て、 12<飽和磁気量(ガウス/cm3/g)/Co結合量
(重量%)16 の範囲にある特許請求の範囲第1項に記載の被覆
超硬質合金。 3 WCを硬質相とし、鉄族金属の1種もしく
は、それ以上を結合相とした超硬合金母材の表面
を被覆するにあたり前もつて、炭化水素、N2
NH3またはCoガスのいずれかのガス雰囲気に
て、1〜300torrの減圧下、温度900〜1100℃に加
熱して、それにより該母材表面から1〜100μm
においては、WCと鉄族金属の1種もしくはそれ
以上からなる複炭化物が消失されており、該超硬
合金の表面から1〜100μmより内部にWCと鉄
族金属の1種もしくはそれ以上からなる複炭化物
が析出してなる超硬合金母材としておき、次に該
母材の表面に周期律表a、a、a族の金属
と、Al、Si、Bからなる群より選ばれる1種以上
と、C、B、N、Oからなる群より選ばれる1種
以上から構成される被覆を形成することを特徴と
する被覆超硬合金の製造方法。 4 鉄族金属がCoであつて、Coを結合相とする
該合金の飽和磁気量が結合相量との比率で表示し
て、 12<飽和磁気量(ガウス/cm3/g)/Co結合量
(重量%)16 の範囲にある特許請求の範囲第3項に記載の被覆
超硬質合金の製造方法。
[Claims] 1. A cemented carbide having WC as a hard phase and one or more iron group metals as a binder phase,
Inside the cemented carbide from 1 to 100 μm from the surface
The base material is a cemented carbide formed by precipitating double carbide consisting of WC and one or more iron group metals, and metals from groups a, a, and a of the periodic table, Al, and Si are coated on the surface of the base material. , B, and one or more members selected from the group consisting of C, B, N, and O. 2 The iron group metal is Co, and the saturation magnetic amount of the alloy with Co as the binder phase is expressed as a ratio to the binder phase amount, and 12<saturation magnetic amount (Gauss/cm 3 /g)/Co bond Coated cemented carbide according to claim 1 in an amount (% by weight) of 16%. 3. Before coating the surface of a cemented carbide base material with WC as a hard phase and one or more iron group metals as a binder phase, hydrocarbons, N 2 ,
In a gas atmosphere of either NH 3 or Co gas, under a reduced pressure of 1 to 300 torr and heated to a temperature of 900 to 1100°C, the surface of the base material is heated to 1 to 100 μm from the surface of the base material.
In this case, the double carbide consisting of WC and one or more of iron group metals has disappeared, and within 1 to 100 μm from the surface of the cemented carbide, the compound consisting of WC and one or more of iron group metals has disappeared. A cemented carbide base material formed by precipitating double carbides is prepared, and then metals from groups A, A, and A of the periodic table and one or more metals selected from the group consisting of Al, Si, and B are applied to the surface of the base material. A method for producing a coated cemented carbide, comprising: forming a coating composed of one or more selected from the group consisting of C, B, N, and O. 4 The iron group metal is Co, and the saturation magnetic amount of the alloy with Co as the binder phase is expressed as a ratio to the binder phase amount, and 12<saturation magnetic amount (Gauss/cm 3 /g)/Co bond A method for producing a coated cemented carbide according to claim 3, wherein the amount (wt%) is in the range of 16%.
JP9471884A 1984-05-14 1984-05-14 Coated hard metal Granted JPS60238483A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9471884A JPS60238483A (en) 1984-05-14 1984-05-14 Coated hard metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9471884A JPS60238483A (en) 1984-05-14 1984-05-14 Coated hard metal

Publications (2)

Publication Number Publication Date
JPS60238483A JPS60238483A (en) 1985-11-27
JPS6248751B2 true JPS6248751B2 (en) 1987-10-15

Family

ID=14117909

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JPS60238483A (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3736107A (en) * 1971-05-26 1973-05-29 Gen Electric Coated cemented carbide product
JPS55104478A (en) * 1979-01-30 1980-08-09 Nippon Kogaku Kk <Nikon> Metallizing apparatus
JPS5826428A (en) * 1981-08-07 1983-02-16 三菱電機株式会社 Circuit breaker
JPS5856033A (en) * 1981-09-29 1983-04-02 Fujitsu Ltd Multiplying circuit

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Publication number Publication date
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