JPS6249983B2 - - Google Patents
Info
- Publication number
- JPS6249983B2 JPS6249983B2 JP55022406A JP2240680A JPS6249983B2 JP S6249983 B2 JPS6249983 B2 JP S6249983B2 JP 55022406 A JP55022406 A JP 55022406A JP 2240680 A JP2240680 A JP 2240680A JP S6249983 B2 JPS6249983 B2 JP S6249983B2
- Authority
- JP
- Japan
- Prior art keywords
- bonding
- bonding tool
- prism
- electrodes
- slope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
- H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means
Landscapes
- Wire Bonding (AREA)
Description
【発明の詳細な説明】
本発明は集積回路(以下ICと略す)の電極と
回路基板の開孔部から電極の各々と対応する位置
に張り出したリード線とを位置合せして同時にボ
ンデイングするギヤングボンデイング装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention provides a method for aligning and bonding electrodes of an integrated circuit (hereinafter abbreviated as IC) and lead wires extending from openings in a circuit board at positions corresponding to each electrode. The present invention relates to a young bonding device.
従来のギヤングボンデイング装置は第1図、第
2図、第3図、第4図に示す如く、IC1の電極
4と回路基板2の開孔部2aから張り出した多数
のリード線3とを平面方向に位置合せするための
位置合せ装置5とIC1上の同位置に設置された
受像機6とボンデイングツール7を二位置に移動
させる移動装置8を設けていた。このためまず
IC1の電極4と回路基板2から張り出した多数
のリード線3の位置を合せる場合はボンデイング
ツール7は後退していて受像器6によつてIC1
の電極4と回路基板2のリード線3の相対位置を
拡大して観察し、位置合せ装置5により回路基板
2を平面方向に移動させ、IC1の電極4と回路
基板2のリード線3の位置合せを行う。 As shown in FIG. 1, FIG. 2, FIG. 3, and FIG. A positioning device 5 for aligning the IC 1 and a moving device 8 for moving the image receiver 6 and the bonding tool 7 installed at the same position on the IC 1 to two positions are provided. For this reason, first
When aligning the electrodes 4 of the IC 1 with the many lead wires 3 protruding from the circuit board 2, the bonding tool 7 is moved back and the image receiver 6 is attached to the IC 1.
The relative positions of the electrodes 4 of the IC 1 and the lead wires 3 of the circuit board 2 are observed under magnification, and the position of the electrodes 4 of the IC 1 and the lead wires 3 of the circuit board 2 is determined by moving the circuit board 2 in the plane direction using the alignment device 5. Perform the matching.
次にボンデイングツール7が前進し、下降して
ボンデイングを行う。 Next, the bonding tool 7 advances and descends to perform bonding.
この場合ボンデイングツール7が移動するため
ボンデイングツール7の位置を一定に保つことは
不可能であり、ボンデイングツール7とIC1の
相対位置にズレがでてしまう。一例として第4図
に示す如くボンデイングツール7がIC1に対し
てX方向にズレた場合リード線3のフオーミング
形状が第4図の様な形状になり、ボンデイング時
の加圧力により、Au―Snボンデイングの場合は
Au―Sn共晶合金9がはみ出し、IC1のエツジ1
0とシヨートすることになり不良品になつてしま
う。 In this case, since the bonding tool 7 moves, it is impossible to keep the position of the bonding tool 7 constant, and the relative positions of the bonding tool 7 and the IC 1 will shift. As an example, if the bonding tool 7 is misaligned in the X direction with respect to the IC 1 as shown in FIG. 4, the forming shape of the lead wire 3 will become the shape shown in FIG. In the case of
Au-Sn eutectic alloy 9 protrudes, edge 1 of IC1
This results in the product being shot as 0, resulting in a defective product.
従来のギヤングボンデイング装置はボンデイン
グツール7を移動しているためエツジシヨートを
防ぐことは装置の構造上不可能であつた。 Since the conventional gigantic bonding apparatus moves the bonding tool 7, it is impossible to prevent edge firing due to the structure of the apparatus.
従来のギヤングボンデイング装置の更に他の欠
点はボンデイングツール7を二位置に移動させる
移動装置8を設けているため少なくともスライド
部にガタがありIC1とボンデイングツール7の
平行度を一定に保つことが不可能であり、前記平
行度が保たれない場合は多数のリード線3を同時
にボンデイングする際に各リード線3に対する加
圧力に差が出てしまい、加圧力の弱いリード線は
ボンデイングされないか又はボンデイング強度が
弱いものがでてしまう結果となつていた。安定し
たボンデイングをするにはボンデイングツール7
とIC1の平行度は一般に2〜3μm以下とされ
ているが移動装置8を設けることにより、2〜3
μmの平行度を保つことは事実上不可能であり、
安定したボンデイングをすることは不可能であつ
た。 Another disadvantage of the conventional gigantic bonding device is that since it is provided with a moving device 8 for moving the bonding tool 7 to two positions, there is play at least in the sliding portion, making it difficult to maintain a constant parallelism between the IC 1 and the bonding tool 7. If this is not possible and the parallelism is not maintained, there will be a difference in the pressure applied to each lead wire 3 when bonding a large number of lead wires 3 at the same time, and lead wires with weak pressure may not be bonded or This resulted in some products having weak bonding strength. Bonding tool 7 for stable bonding
The parallelism between IC1 and IC1 is generally considered to be 2 to 3 μm or less, but by providing the moving device 8, the parallelism can be reduced to 2 to 3 μm.
It is virtually impossible to maintain parallelism of μm,
It was impossible to achieve stable bonding.
本発明はかかる欠点を除去するためになされた
もので、その目的はボンデイングツールとICの
電極との位置を一定に保つて回路基板のリード線
がエツジシヨートを防止できる定位置にボンデイ
ングできるギヤングボンデイング装置を提供する
ことにある。 The present invention has been made in order to eliminate such drawbacks, and its purpose is to provide a gang bonding method in which the positions of the bonding tool and the IC electrodes are kept constant, and the lead wires of the circuit board can be bonded in a fixed position to prevent the lead wires from edging. The goal is to provide equipment.
本発明によるギヤングボンデイング装置は、集
積回路の電極と回路基板の開孔部から前記電極の
各々と対応する位置に張り出したリード線とを位
置合せして同時にボンデイングするギヤングボン
デイング装置において、前記集積回路が保持され
るIC保持台と、前記IC保持台の上方に配設され
前記回路基板を保持し平面方向に移動する位置合
せ装置と、前記電極に前記リード線をボンデイン
グするボンデイングツールを前記集積回路と同軸
上に位置させて装着し上下方向に移動する上下動
装置と、前記上下動装置に係止され前記ボンデイ
ングツールと離れた位置でかつ平面的な略同一線
上にセツトされている受像機と、前記電極と前記
リード線との位置合せ状態を二つの斜面で屈折さ
せて前記受像機に投映させるプリズムと、前記プ
リズムを保持し前記位置合わせ装置と前記上下動
装置との間に配設され水平移動するプリズム移動
装置とを有してなり、前記プリズムは一方の斜面
を前記集積回路と前記ボンデイングツールとの同
軸上に、他方の斜面を前記一方の斜面と略平行で
且つ前記受像機の同軸上に位置させてなることを
特徴とする。 A guyung bonding device according to the present invention is a guyang bonding device that aligns and simultaneously bonds electrodes of an integrated circuit and lead wires extending from openings in a circuit board to positions corresponding to each of the electrodes. An IC holding stand for holding an integrated circuit, an alignment device disposed above the IC holding stand for holding the circuit board and moving in a plane direction, and a bonding tool for bonding the lead wire to the electrode. a vertical movement device that is installed coaxially with the integrated circuit and moves in the vertical direction; and an image receiver that is locked to the vertical movement device and set at a position apart from the bonding tool and on a planar, substantially colinear line. a prism that refracts the alignment state of the electrode and the lead wire on two slopes and projects it onto the receiver; and a prism that holds the prism and is disposed between the alignment device and the vertical movement device. a prism moving device that is installed and moves horizontally, the prism has one slope coaxial with the integrated circuit and the bonding tool, the other slope substantially parallel to the one slope, and the prism with the image receiving It is characterized by being located on the same axis of the machine.
本発明の一実施例を第5図、第6図について説
明すると、第1図、第2図、第3図で説明したと
同様に、1はIC、2は回路基板、3は回路基板
から張り出したリード線、4はIC電極、5は位
置合せ装置、6は受像機であるTVカメラ、7は
ボンデイングツールで、12はボンデイングツー
ル7を単純に上下移動させる上下動装置、13は
リード線3と電極4の位置合せ状態をボンデイン
グツール7と離れた位置で平面的にほぼ同一線上
にセツトされた受像機6に導びくためのプリズ
ム、14はプリズム13を保持してボンデイング
ツールの下方位置から水平方向に移動して逃がす
ためのプリズム移動装置、15はIC保持台であ
る。 An embodiment of the present invention will be explained with reference to FIGS. 5 and 6. As explained in FIGS. 1, 2, and 3, 1 is an IC, 2 is a circuit board, and 3 is from a circuit board. An overhanging lead wire, 4 is an IC electrode, 5 is an alignment device, 6 is a TV camera that is a receiver, 7 is a bonding tool, 12 is a vertical movement device that simply moves the bonding tool 7 up and down, 13 is a lead wire A prism 14 holds the prism 13 and guides the alignment state of the electrode 4 to the image receiver 6, which is set at a position apart from the bonding tool 7 and substantially on the same plane in a plane, and a prism 14 is positioned below the bonding tool. A prism moving device 15 is an IC holding stand for horizontally moving the prism to release it.
以上の構成において、IC1をIC保持台15に
セツトし、IC電極4と、回路基板2からIC電極
4に対応した位置に張り出した多数のリード線3
との位置合せ状態をプリズム13の平行する二つ
の斜面を屈折させて受像機6のTVカメラ投映
し、図示されないTVモニターに写し出す。 In the above configuration, the IC 1 is set on the IC holding stand 15, and the IC electrode 4 and the numerous lead wires 3 protruding from the circuit board 2 at positions corresponding to the IC electrodes 4 are attached.
The alignment state with the prism 13 is reflected by the two parallel slopes of the prism 13, projected by the TV camera of the receiver 6, and displayed on a TV monitor (not shown).
次に写し出された映像によつてIC電極4とリ
ード線3との位置ズレを目視又は電気的パターン
認識手段により検出し、回路基板2を位置合せ装
置5により平面方向に移動し、IC電極4とリー
ド線3との位置合せを行う。次にプリズム13が
プリズム移動装置14によりボンデイングツール
7が下降しても当らない位置まで移動された後、
ボンデイイグツール7が上下動装置12により下
降し、ボンデイング作業を行う。 Next, the positional deviation between the IC electrode 4 and the lead wire 3 is detected visually or by electrical pattern recognition means based on the projected image, and the circuit board 2 is moved in the plane direction by the alignment device 5, and the IC electrode 4 is and the lead wire 3 are aligned. Next, after the prism 13 is moved by the prism moving device 14 to a position where it will not hit even if the bonding tool 7 descends,
The bonding tool 7 is lowered by the vertical movement device 12 to perform bonding work.
この様な装置によればボンデイングツール7は
単純な上下移動だけになるため、IC1とボンデ
イングツール7の平面方向の相対位置のズレ量を
ゼロにすることができるため、エツジシヨートの
ない安定したボンデイングを行うことができる。 With such a device, the bonding tool 7 only moves up and down, so the amount of deviation in the relative position of the IC 1 and the bonding tool 7 in the plane direction can be reduced to zero, so stable bonding without edge shots can be achieved. It can be carried out.
更に従来のボンデイング装置で必要であつたボ
ンデイングツール7の二位置移動装置が不要であ
るため、ボンデイングツール7とIC1との平行
度を常に3μm以下に保つことが可能となり、安
定したボンデイングが可能となつた。 Furthermore, since there is no need for a two-position moving device for the bonding tool 7 that was required in conventional bonding equipment, it is possible to always maintain the parallelism between the bonding tool 7 and the IC 1 at 3 μm or less, making stable bonding possible. Summer.
以上の説明において光案内手段としてプリズム
を用いたが、光フアイバー、ミラー等何でもよ
い。 In the above description, a prism was used as the light guiding means, but any optical fiber, mirror, etc. may be used.
以上の如く本発明によればICの電極と回路基
板のリード線をボンデイングするボンデイングツ
ールを上下動のみする上下動装置に装着し、その
上下動装置に係止され位置合せ状態を観察する受
像機をボンデイングツールと平面的に同一線上に
配設させ、IC保持台と上下動装置の間にプリズ
ムを保持して水平移動するプリズム移動装置を配
設させたことにより、電極とリード線の位置合せ
状態はプリズムの平行する二つの斜面を屈折して
受像機に投映されて位置合せ装置でボンデイング
ツールとの相対位置を正確に位置決めすることが
可能となり、またボンデイングツールの水平移動
もなくなりICとの高い水平度の精度も必要な
く、平面方向の相対位置がゼロになるボンデイン
グツールの上下動だけでボンデイングすることに
よりエツジシヨートのないボンデイング強度の高
い安定したボンデイングをすることができる。 As described above, according to the present invention, the bonding tool for bonding the electrodes of an IC and the lead wires of a circuit board is mounted on a vertical movement device that moves only up and down, and the image receiver is latched to the vertical movement device to observe the alignment state. The electrodes and lead wires can be aligned by placing the prism on the same plane as the bonding tool, and by installing a prism moving device that holds the prism and moves it horizontally between the IC holding table and the vertical moving device. The state is reflected by the two parallel slopes of the prism and projected onto the receiver, allowing the positioning device to accurately position the bonding tool relative to it, and also eliminates horizontal movement of the bonding tool. There is no need for high accuracy in horizontality, and by bonding only by vertical movement of the bonding tool so that the relative position in the plane direction is zero, it is possible to perform stable bonding with high bonding strength without edges.
第1図は従来のギヤングボンデイング装置の斜
視図。第2図はギヤングボンデイング状態を示す
平面図。第3図は第2図の断面図。第4図はギヤ
ングボンデイング中の断面図。第5図は本発明の
ギヤングボンデイング装置の斜視図。第6図は本
発明のギヤングボンデイング装置の概念図であ
る。
1…IC、2…回路基板、3…リード線、4…
電極、5…位置合せ装置、6…受像機、7…ボン
デイングツール、8…移動装置、9…共晶合金、
10…エツジ、11…ツール、12…上下動装
置、13…プリズム置、14…プリズム移動装
置、15…IC保持台。
FIG. 1 is a perspective view of a conventional gigantic bonding device. FIG. 2 is a plan view showing the Guyang bonding state. FIG. 3 is a sectional view of FIG. 2. FIG. 4 is a cross-sectional view during Guiang bonding. FIG. 5 is a perspective view of the gigantic bonding apparatus of the present invention. FIG. 6 is a conceptual diagram of the gigantic bonding apparatus of the present invention. 1...IC, 2...circuit board, 3...lead wire, 4...
electrode, 5... alignment device, 6... image receiver, 7... bonding tool, 8... moving device, 9... eutectic alloy,
DESCRIPTION OF SYMBOLS 10... Edge, 11... Tool, 12... Vertical movement device, 13... Prism position, 14... Prism moving device, 15... IC holding stand.
Claims (1)
電極の各々と対応する位置に張り出したリード線
とを位置合せして同時にボンデイングするギヤン
グボンデイング装置において、前記集積回路が保
持されるIC保持台と、前記IC保持台の上方に配
設され前記回路基板を保持し平面方向に移動する
位置合せ装置と、前記電極に前記リード線をボン
デイングするボンデイングツールを前記集積回路
と同軸上に位置させて装着し上下方向に移動する
上下動装置と、前記上下動装置に係止され前記ボ
ンデイングツールと離れた位置でかつ平面的な略
同一線上にセツトされている受像機と、前記電極
と前記リード線との位置合せ状態を二つの斜面で
屈折させて前記受像機に投映させるプリズムと、
前記プリズムを保持し前記位置合わせ装置と前記
上下動装置との間に配設され水平移動するプリズ
ム移動装置とを有してなり、前記プリズムは一方
の斜面を前記集積回路と前記ボンデイングツール
との同軸上に、他方の斜面を前記一方の斜面と略
平行で且つ前記受像機の同軸上に位置させてなる
ことを特徴とするギヤングボンデイング装置。1. An IC holder in which the integrated circuit is held in a gang bonding device that aligns and simultaneously bonds the electrodes of the integrated circuit and the lead wires protruding from the openings of the circuit board at positions corresponding to each of the electrodes. A stand, an alignment device disposed above the IC holding stand that holds the circuit board and moves it in a planar direction, and a bonding tool that bonds the lead wires to the electrodes are positioned coaxially with the integrated circuit. a vertical moving device that is attached to the bonding tool and moves in the vertical direction; an image receiver that is locked to the vertical moving device and set at a position apart from the bonding tool and on substantially the same plane as the bonding tool; and the electrode and the lead. a prism that refracts the alignment state with the line with two slopes and projects it on the receiver;
a horizontally moving prism moving device that holds the prism and is disposed between the positioning device and the vertical moving device, and the prism moves one slope between the integrated circuit and the bonding tool. A gigantic bonding device characterized in that the other slope is located coaxially with the one slope, substantially parallel to the one slope, and coaxially with the image receiver.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2240680A JPS56118346A (en) | 1980-02-25 | 1980-02-25 | Gang bonding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2240680A JPS56118346A (en) | 1980-02-25 | 1980-02-25 | Gang bonding device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56118346A JPS56118346A (en) | 1981-09-17 |
| JPS6249983B2 true JPS6249983B2 (en) | 1987-10-22 |
Family
ID=12081777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2240680A Granted JPS56118346A (en) | 1980-02-25 | 1980-02-25 | Gang bonding device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56118346A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2592337B2 (en) * | 1989-11-20 | 1997-03-19 | 株式会社カイジョー | Tape bonding method |
-
1980
- 1980-02-25 JP JP2240680A patent/JPS56118346A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56118346A (en) | 1981-09-17 |
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