JPS6250041B2 - - Google Patents
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- Publication number
- JPS6250041B2 JPS6250041B2 JP55160510A JP16051080A JPS6250041B2 JP S6250041 B2 JPS6250041 B2 JP S6250041B2 JP 55160510 A JP55160510 A JP 55160510A JP 16051080 A JP16051080 A JP 16051080A JP S6250041 B2 JPS6250041 B2 JP S6250041B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- powder
- metal oxide
- resistance
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
- Conductive Materials (AREA)
Description
【発明の詳細な説明】
本発明は固定抵抗器、可変抵抗器、混成集積回
路用抵抗体などに用いられる抵抗組成物およびそ
の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a resistance composition used for fixed resistors, variable resistors, resistors for hybrid integrated circuits, etc., and a method for manufacturing the same.
従来、精密用固定抵抗器や混成集積回路用抵抗
体などには、一般に銀(Ag)とパラジウム
(Pd)あるいは二酸化ルテニウム(RuO2)などの
貴金属を用いた抵抗組成物が用いられている。こ
の組成物を用いた抵抗器は、貴金属とその酸化物
ならびにガラスからなるため、耐熱性、耐電力に
すぐれ、かつ信頼性の高い抵抗器として一般に知
られている。しかしながらこの抵抗組成物は
Ag、Pdあるいはルテニウムなどの貴金属を用い
ているため価格が非常に高くなり、民生用の安価
な抵抗器に使用し難いのが大きな欠点である。一
方、貴金属を用いない抵抗組成物には、酸化イン
ジウムや炭化タングステンなどとガラスフリツト
を用いたものが知られているが、温度(1100〜
1250℃)の還元性雰囲気で焼成しなければならず
焼成コストが大幅に高くなる欠点がある。この欠
点を改良する試みとしては2つの大きな手段があ
る。その1つは(イ)酸化カドミニウムや珪化物など
とガラスフリツトを用いて空気中で焼成すること
により焼成コストを下げる手段であり、他の1つ
は(ロ)、低温(600〜900℃)の還元性雰囲気で焼成
して焼成コストを下げる手段である。 Conventionally, resistor compositions using silver (Ag) and noble metals such as palladium (Pd) or ruthenium dioxide (RuO 2 ) have been used in precision fixed resistors and resistors for hybrid integrated circuits. A resistor using this composition is generally known as a highly reliable resistor that has excellent heat resistance and power resistance because it is made of noble metals, their oxides, and glass. However, this resistance composition
A major drawback is that it is very expensive because it uses precious metals such as Ag, Pd, or ruthenium, making it difficult to use in inexpensive consumer resistors. On the other hand, resistor compositions that do not use noble metals include those that use indium oxide, tungsten carbide, etc. and glass frit;
It has the disadvantage that it must be fired in a reducing atmosphere (1250°C), which significantly increases the firing cost. There are two major ways to try to improve this drawback. One of these is (a) a method to reduce firing costs by firing in air using cadmium oxide, silicide, etc. and glass frit, and the other is (b) low temperature (600 to 900℃). This is a means of reducing firing costs by firing in a reducing atmosphere.
(イ)の空気中で焼成する場合の大きな問題は貴金
属を用いない電極材料がいまだ実用化されていな
いことである。(ロ)の低温還元性雰囲気で焼成する
方向の問題は金属粉末(たとえば銅、銅ニツケル
合金)ガラス形成物および有機バインダーを混合
した抵抗組成物は有機バインダを燃焼させる工程
の温度範囲条件が狭く(たとえば銅−ニツケル合
金であれば10℃位で抵抗値が108Ωから100まで変
化する。)量産化することは困難である。 The major problem with (a) firing in air is that electrode materials that do not use noble metals have not yet been put into practical use. The problem with (b) firing in a low-temperature reducing atmosphere is that resistance compositions containing metal powders (e.g. copper, copper-nickel alloys), glass formations, and organic binders have narrow temperature range conditions during the process of burning the organic binder. (For example, in the case of a copper-nickel alloy, the resistance value changes from 10 8 Ω to 10 0 at about 10°C.) Mass production is difficult.
本発明の目的はかかる問題を解決した低温の還
元性雰囲気で焼成することができる抵抗組成物を
提供することにある。 An object of the present invention is to provide a resistive composition that solves this problem and can be fired in a low-temperature reducing atmosphere.
本発明によれば電解銅粉に種々の金属酸化物を
混合し、あらかじめ温度600〜900℃還元性雰囲気
で熱処理を行ない冷却後再度微粉末化し、この微
紛末化した混合物にガラス形成物粉末を混合した
ことを特徴とする抵抗組成物およびその製造方法
が得られる。 According to the present invention, electrolytic copper powder is mixed with various metal oxides, heat-treated in advance at a temperature of 600 to 900°C in a reducing atmosphere, cooled, and then pulverized again. A resistance composition and a method for producing the same are obtained.
以下、本発明の抵抗組成物について実施例にも
とずき詳細に説明する。 Hereinafter, the resistance composition of the present invention will be explained in detail based on Examples.
実施例 1
導電性粉末は電解銅粉65重量%とタルク35重量
%とをエチルアルコールに浸漬した状態でポツト
に入れてアルミナ製ボールミルを用いて24時間混
合し、過乾燥した粉末をプレス圧力3ton/cm2で
直径5mm、厚み3mmのペレツトにプレス成型し
た。このペレツトをアルミナ製ボートに載せてア
ルゴンガスを流した拡散炉中で温度800℃で2時
間加熱し、その後徐冷した。熱処理を施したペレ
ツトをハンマで打ち砕いて粗あら粉砕し、つぎに
擂〓機で細かく粉砕し、さらにポツトにエチルア
ルコールと共に入れて、アルミナ製ボールミルを
用いて24時間混合粉砕して微粉末化し、導電性微
粉末を製造した。ガラス形成物粉末は酸化鉛:60
重量%、硼酸:20重量%、酸化けい素:10重量
%、酸化アルミニウム:5重量%、酸化亜鉛:5
重量%を乳鉢で混合しアルミナ製ボートに入れて
1200℃の温度に加熱して溶融させ、つぎに、この
溶融体を水中に滴下し、微小粒子を得た。次にポ
ツトに水と共に入れて72時間ボールミルを用いて
粉砕を行なつてガラス形成物粉末を作製した。な
お、ガラス形成物粉末は必ずしも上記組成比に限
度されるものではない。つぎに導電性微粉末とガ
ラス形成物粉末を20:80重量%の割合で混合し印
刷適性を与えるため、有機質粘結剤としてβ−タ
ーピノールとエチルセルローズを9:1(重量
比)の割合に混合したものを40重量%の割合で添
加して、ペースト状の抵抗組成物を作製した。こ
のペースト状の抵抗組成物を、200メツシユのス
クリーンを用いてアルミナ磁器基板上にスクリー
ン印刷し、温度150℃で10分間乾燥してから最高
温度300℃に加熱した空気中雰囲気のトンネル炉
を通過させてエチルセルローズを燃焼させた。Example 1 The conductive powder was prepared by immersing 65% by weight of electrolytic copper powder and 35% by weight of talc in ethyl alcohol and mixing them in a pot for 24 hours using an alumina ball mill.The overdried powder was then pressed at a pressure of 3 tons. /cm 2 and press-molded into pellets with a diameter of 5 mm and a thickness of 3 mm. The pellets were placed on an alumina boat, heated in a diffusion furnace flushed with argon gas at a temperature of 800°C for 2 hours, and then slowly cooled. The heat-treated pellets are roughly crushed by crushing them with a hammer, then finely crushed with a grinder, placed in a pot with ethyl alcohol, mixed and crushed for 24 hours using an alumina ball mill, and made into a fine powder. Conductive fine powder was produced. Glass forming powder is lead oxide: 60
Weight%, boric acid: 20% by weight, silicon oxide: 10% by weight, aluminum oxide: 5% by weight, zinc oxide: 5
Mix the weight% in a mortar and put it in an alumina boat.
It was heated to a temperature of 1200°C to melt it, and then this melt was dropped into water to obtain microparticles. Next, the mixture was placed in a pot with water and pulverized using a ball mill for 72 hours to produce a powdered glass product. Note that the composition ratio of the glass forming powder is not necessarily limited to the above composition ratio. Next, conductive fine powder and glass forming powder were mixed at a ratio of 20:80% by weight, and in order to provide printability, β-terpinol and ethyl cellulose were mixed as an organic binder at a ratio of 9:1 (weight ratio). The mixture was added at a ratio of 40% by weight to produce a paste-like resistance composition. This paste-like resistive composition was screen printed onto an alumina porcelain substrate using a 200 mesh screen, dried at a temperature of 150°C for 10 minutes, and then passed through a tunnel furnace in an air atmosphere heated to a maximum temperature of 300°C. to burn the ethyl cellulose.
次にこの基板をアルゴンガスを流した雰囲気で
最高温度850℃10分間の保持領域を有するトンネ
ル炉中を通過させて焼成して金属酸化物抵抗体を
作製した。一方、抵抗体に接続形成する電極は前
述の抵抗体を印刷、焼成する前に銅粉末とガラス
形成物粉末を含むペーストをスクリーン印刷し乾
燥させてからアルゴンガスを流したトンネル炉で
焼成した。この抵抗体の焼成後の膜厚は約30μm
であつた。室温における面積抵抗値は1.1kΩであ
つた。25℃と125℃の温度間で測定して求めた抵
抗温度係数は+150PPm/℃であつた。負荷寿命
特性は、周囲温度70℃で25mw/mm2の負荷電力を
1.5時間印加し、0.5時間負荷電力のみ除去するサ
イクルを1000時間繰り返した後の抵抗値変化率は
±1%以内という結果が得られた。 Next, this substrate was baked in a tunnel furnace having a holding area at a maximum temperature of 850° C. for 10 minutes in an atmosphere in which argon gas was flowed to produce a metal oxide resistor. On the other hand, for the electrodes connected to the resistor, before printing and firing the resistor, a paste containing copper powder and glass forming powder was screen printed, dried, and then fired in a tunnel furnace in which argon gas was flowed. The film thickness of this resistor after firing is approximately 30 μm.
It was hot. The sheet resistance value at room temperature was 1.1 kΩ. The temperature coefficient of resistance measured between 25°C and 125°C was +150PPm/°C. The load life characteristics are 25mw/ mm2 load power at an ambient temperature of 70℃.
After repeating a cycle of applying load power for 1.5 hours and removing only the load power for 0.5 hours for 1000 hours, the rate of change in resistance value was found to be within ±1%.
実施例 2
導電性微粉末として電解銅粉末:55重量%、酸
化亜鉛:45重量%を用いて実施例1と同一工程を
用いて同様な条件下で製造した。室温における面
積抵抗値は23kΩであつた。25℃と125℃の温度
間で測定して求めた抵抗温度係数は−110PPm/
℃であつた。負荷寿命特性は周囲温度70℃で25m
w/mm2の負荷電力を1.5時間印加し、0.5時間負荷
電力のみ除去するサイクルを1000時間繰り返した
後の抵抗値変化率は±0.1%以内という結果が得
られた。Example 2 A product was manufactured under the same conditions as in Example 1 using the same process as in Example 1, using 55% by weight of electrolytic copper powder and 45% by weight of zinc oxide as conductive fine powder. The sheet resistance value at room temperature was 23 kΩ. The temperature coefficient of resistance measured between 25℃ and 125℃ is -110PPm/
It was warm at ℃. Load life characteristics are 25m at an ambient temperature of 70℃
After repeating a cycle in which a load power of w/mm 2 was applied for 1.5 hours and only the load power was removed for 0.5 hours for 1000 hours, the rate of change in resistance value was within ±0.1%.
実施例 3
導電性微粉末として電解銅粉末:56重量%と酸
化シリコン:25重量%と二酸化ボロン:8重量%
と五酸化リン:4重量%と酸化スズ:2重量%と
酸化カリウム:1重量%と酸化マグネシウム:4
重量%を用いて、実施例1と同一の工程を用いて
同様な条件下で製造した。室温における面積抵抗
値は150kΩであつた。Example 3 Electrolytic copper powder: 56% by weight, silicon oxide: 25% by weight, and boron dioxide: 8% by weight as conductive fine powders
and phosphorus pentoxide: 4% by weight, tin oxide: 2% by weight, potassium oxide: 1% by weight, and magnesium oxide: 4%.
Made using the same process and under similar conditions as Example 1 using weight %. The sheet resistance value at room temperature was 150 kΩ.
25℃と125℃の温度間で測定して求めた抵抗温
度係数は−185PPm/℃であつた。負荷寿命特性
は周囲温度70℃、25mw/mm2の負荷電力を1.5時
間印加し、0.5時間負荷電力のみ除去したサイク
ルを1000時間繰り返した後の抵抗値変化率は±
0.3%以内という結果が得られた。 The temperature coefficient of resistance measured between 25°C and 125°C was -185PPm/°C. The load life characteristics are as follows: After 1000 hours of repeating a cycle in which a load power of 25 mw/ mm2 is applied for 1.5 hours and only the load power is removed for 0.5 hours at an ambient temperature of 70℃, the rate of change in resistance is ±
The result was within 0.3%.
以上、実施例より明らかなように、本発明の抵
抗組成物を用いた抵抗体は、抵抗温度係数、負荷
寿命特性など抵抗諸特性が非常にすぐれており、
かつ低温で焼成が可能となり、貴金属系の抵抗組
成物に比べて非常に安価であるなど多くの特徴を
有する抵抗組成物が得られる。 As is clear from the examples above, the resistor using the resistance composition of the present invention has extremely excellent resistance properties such as temperature coefficient of resistance and load life characteristics.
Moreover, a resistor composition having many characteristics such as being able to be fired at a low temperature and being much cheaper than noble metal-based resistor compositions can be obtained.
したがつて、混成集積回路用抵抗体や抵抗回路
網だけでなく、電力用や精密用、一般用の各種抵
抗器や可変抵抗器にも有用することができ、その
用途は広い。 Therefore, it can be used not only for resistors and resistance circuit networks for hybrid integrated circuits, but also for various resistors and variable resistors for electric power, precision, and general use, and has a wide range of uses.
Claims (1)
粉末化した導電性粉末にガラス形成粉末を混合さ
せたことを特徴とする抵抗組成物。 2 電解銅粉末と金属酸化物を混合し、還元性雰
囲気で高温処理を施こし、冷却した後機械的に粉
砕し微粉末化する工程と、前記微粉末にガラス形
成物を混合する工程とからなることを特徴とする
抵抗組成物の製造方法。 3 前記金属酸化物がタルクからなることを特徴
とする特許請求の範囲第1項記載の抵抗組成物。 4 前記金属酸化物が酸化亜鉛からなることを特
徴とする特許請求の範囲第1項に記載の抵抗組成
物。 5 前記金属酸化物が酸化シリコンと二酸化ボロ
ンと五酸化リンおよび酸化スズ、酸化アルミニウ
ム、酸化カリウム、酸化ナトリウムのうちのいず
れか1つ以上の酸化物を含むことを特徴とする特
許請求の範囲第1項記載の抵抗組成物。[Scope of Claims] 1. A resistance composition comprising a mixture of electrolytic copper powder and a metal oxide, and a finely powdered conductive powder mixed with a glass-forming powder. 2. A step of mixing electrolytic copper powder and a metal oxide, subjecting it to high temperature treatment in a reducing atmosphere, cooling it and then mechanically crushing it into a fine powder, and a step of mixing a glass forming material into the fine powder. A method for producing a resistive composition, characterized in that: 3. The resistance composition according to claim 1, wherein the metal oxide comprises talc. 4. The resistance composition according to claim 1, wherein the metal oxide comprises zinc oxide. 5. Claim 5, characterized in that the metal oxide contains silicon oxide, boron dioxide, phosphorus pentoxide, and an oxide of any one or more of tin oxide, aluminum oxide, potassium oxide, and sodium oxide. The resistance composition according to item 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55160510A JPS5784101A (en) | 1980-11-14 | 1980-11-14 | Resistand composition and method of producing same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55160510A JPS5784101A (en) | 1980-11-14 | 1980-11-14 | Resistand composition and method of producing same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5784101A JPS5784101A (en) | 1982-05-26 |
| JPS6250041B2 true JPS6250041B2 (en) | 1987-10-22 |
Family
ID=15716502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55160510A Granted JPS5784101A (en) | 1980-11-14 | 1980-11-14 | Resistand composition and method of producing same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5784101A (en) |
-
1980
- 1980-11-14 JP JP55160510A patent/JPS5784101A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5784101A (en) | 1982-05-26 |
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