JPS6251516B2 - - Google Patents
Info
- Publication number
- JPS6251516B2 JPS6251516B2 JP56126473A JP12647381A JPS6251516B2 JP S6251516 B2 JPS6251516 B2 JP S6251516B2 JP 56126473 A JP56126473 A JP 56126473A JP 12647381 A JP12647381 A JP 12647381A JP S6251516 B2 JPS6251516 B2 JP S6251516B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor laser
- metal cantilever
- metal
- cantilever
- electrostrictive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/023—Mount members, e.g. sub-mount members
- H01S5/02325—Mechanically integrated components on mount members or optical micro-benches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/1026—Controlling the active medium by translation or rotation, e.g. to remove heat from that part of the active medium that is situated on the resonator axis
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02469—Passive cooling, e.g. where heat is removed by the housing as a whole or by a heat pipe without any active cooling element like a TEC
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Optical Recording Or Reproduction (AREA)
- Semiconductor Lasers (AREA)
Description
【発明の詳細な説明】
この発明は半導体レーザに微小振幅、一定周波
数の機械的振動を加える半導体レーザ加振装置に
関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semiconductor laser excitation device that applies mechanical vibration of minute amplitude and constant frequency to a semiconductor laser.
半導体レーザの加振により、レンズ系を用い
て、半導体レーザ光束の微細偏向、あるいは集光
された半導体レーザ光のスポツト位置の微細変動
を実現することが可能となる。半導体レーザ光の
スポツト位置微細変動の重要な応用の一例とし
て、ビデオデイスク等の光情報読取装置におけ
る、デイスク面のトラツキングを挙げることがで
きよう。すなわち前記トラツキングの一方式とし
て、デイスク面のビツト列をトラツキングすべ
く、デイスク面に集光された光スポツトを前記ピ
ツト列に直交する方向に一定周波数で、0.1ない
し0.2μm程度の振幅で振る、いわゆるウオブリ
ング(wobbling)法が多用されている。従来ウ
オブリングの手段としては、専ら反射鏡の振動等
の光学的手段が用いられており、このために前記
反射鏡等専用の光学素子が必要とされ、光情報読
取装置の構成を複雑なものにしていた。 By excitation of the semiconductor laser, it becomes possible to achieve fine deflection of the semiconductor laser beam or fine fluctuation of the spot position of the focused semiconductor laser beam using a lens system. One example of an important application of minute fluctuations in the spot position of semiconductor laser light is tracking of a disk surface in an optical information reading device such as a video disk. That is, as one method of tracking, in order to track the bit rows on the disk surface, a light spot focused on the disk surface is swung at a constant frequency and with an amplitude of about 0.1 to 0.2 μm in a direction perpendicular to the pit rows. A so-called wobbling method is often used. Conventionally, optical means such as vibration of a reflecting mirror have been used as means for wobbling, and this requires a dedicated optical element such as the reflecting mirror, which complicates the structure of the optical information reading device. was.
本発明は上記事情に鑑みてなされたもので、そ
の特徴は、半導体レーザの小形・軽量性に着目
し、これらの特性を何ら損うことなしに、小形且
つ単純構造のカンチレバーすなわち片持梁に半導
体レーザを装着し、前記カンチレバーの励振を実
現することにある。他の特徴は、前記カンチレバ
ーおよびそのクランパの材料として金属を採用
し、前記金属の良好な熱伝導性によつて半導体レ
ーザの放熱を確実に行い、安定したレーザ発振の
持続を実現することにある。更に他の特徴は、前
記金属製カンチレバーの両面に電歪素子を張り付
け、これらを帯域増幅器、移相器を含む電気信号
増幅部に接続して前記カンチレバーの自励発振を
行わしめ、もつて一定振幅、一定周波数の安定な
振動を、半導体レーザに加えることを実現するこ
とにある。以下図について説明する。 The present invention has been made in view of the above circumstances, and is characterized by focusing on the small size and light weight of semiconductor lasers, and by creating a small and simple cantilever structure without impairing these characteristics. A semiconductor laser is installed to realize excitation of the cantilever. Another feature is that metal is used as the material for the cantilever and its clamper, and the good thermal conductivity of the metal ensures heat dissipation from the semiconductor laser, thereby realizing stable laser oscillation. . Still another feature is that electrostrictive elements are pasted on both sides of the metal cantilever, and these are connected to an electric signal amplification section including a band amplifier and a phase shifter to cause self-oscillation of the cantilever, thereby achieving constant oscillation. The objective is to apply stable vibrations of constant amplitude and frequency to a semiconductor laser. The figures will be explained below.
第1図は半導体レーザ加振部の斜視図である。
図において半導体レーザ10は、補助ヒートシン
ク20を介して、直方体状金属製カンチレバー3
0の先端近傍にろう付等により装着されており、
前記金属製カンチレバー30とは熱的な接触が保
たれている。前記金属製カンチレバー30は、同
一金属材料あるいは別途加工された金属よりなる
クランパ40によつて一方が固定されている。
こゝで前記半導体レーザ10と前記金属製カンチ
レバー30間、および前記金属製カンチレバー3
0と前記クランパ40の間には熱的接触が保たれ
ており、従つて前記半導体レーザ10で発生した
熱は前記金属製カンチレバー30および前記クラ
ンパ40を伝つて外界に放出される。前記金属製
カンチレバー30には相対向する2面に、前記半
導体レーザ10とは異なる位置に、前記金属製カ
ンチレバー30の長さ方向50に電歪効果によつ
て伸縮可能な、各々の両面に電極を設けた、1対
の電歪素子板60a,60bが各々張りつけられ
ている。但し図には電歪素子板60bに示されて
いない。各電歪素子板60a,60bの、前記金
属製カンチレバー30に接していない電極からは
リード線70a,70bが引き出されており、電
極電圧のとり出し、あるいは電極への電圧印加が
可能となるようになされている。 FIG. 1 is a perspective view of a semiconductor laser excitation section.
In the figure, a semiconductor laser 10 is connected to a rectangular parallelepiped metal cantilever 3 via an auxiliary heat sink 20.
It is attached by brazing etc. near the tip of 0.
Thermal contact with the metal cantilever 30 is maintained. One side of the metal cantilever 30 is fixed by a clamper 40 made of the same metal material or separately processed metal.
Here, between the semiconductor laser 10 and the metal cantilever 30, and the metal cantilever 3
Thermal contact is maintained between the semiconductor laser 10 and the clamper 40, so that the heat generated by the semiconductor laser 10 is transmitted to the metal cantilever 30 and the clamper 40 and released to the outside world. The metal cantilever 30 is provided with electrodes on two opposite surfaces thereof, at a position different from the semiconductor laser 10, and which can be expanded and contracted in the length direction 50 of the metal cantilever 30 by an electrostrictive effect. A pair of electrostrictive element plates 60a and 60b are attached to each other. However, the electrostrictive element plate 60b is not shown in the figure. Lead wires 70a and 70b are drawn out from the electrodes of each electrostrictive element plate 60a and 60b that are not in contact with the metal cantilever 30, so that it is possible to take out the electrode voltage or apply voltage to the electrode. is being done.
第2図はこの発明による半導体レーザ加振装置
の概略説明図である。金属製カンチレバー30に
張り付けられた電歪素子板60aより引き出され
たリード線70aにより、前記電歪素子板60a
の、電極電圧が電気信号増幅部80に入力され
る。電気信号増幅部80は帯域フイルタ90、増
幅器100および移相器110を含み、その出力
電圧をリード線70bを介して電歪素子板60b
に印加する。増幅器100の利得、移相器110
による移相量は、前記金属製カンチレバー30の
先端が、自励発振によつて一定振幅で安定に振れ
るように調整される。帯域フイルタ90は、前記
金属製カンチレバー30の1つの固有振動数に合
わせられており、当振動数にて自励発振が行われ
るよう設けられている。この発明に係る加振装置
においては、以上で説明したように、金属製カン
チレバー30の自励発振を採用しているため、前
記金属製カンチレバー30の固有振動数が、温度
変化等によつ若干変化したとしても、振幅および
発振の安定性にはほとんど影響を与えないという
利点を有することは、容易に理解されよう。なお
第2図における帯域フイルタ90、増幅器10
0、移相器110の順序は、本発明に係る加振装
置の機能に何ら影響を及ぼすものではなく、これ
らの順序は自由に変更してもさしつかえない。ま
た帯域フイルタ90と増幅器100を分けて説明
したが、本発明に係る加振装置は例えばアクテイ
ブ帯域フイルタの如き、帯域フイルタと増幅器が
一体となつた場合にも適用できることはいうまで
もない。 FIG. 2 is a schematic explanatory diagram of a semiconductor laser excitation device according to the present invention. The electrostrictive element plate 60a is connected to the electrostrictive element plate 60a by a lead wire 70a drawn out from the electrostrictive element plate 60a attached to the metal cantilever 30.
The electrode voltage is input to the electrical signal amplification section 80. The electric signal amplification section 80 includes a bandpass filter 90, an amplifier 100, and a phase shifter 110, and outputs its output voltage to the electrostrictive element plate 60b via a lead wire 70b.
to be applied. Gain of amplifier 100, phase shifter 110
The phase shift amount is adjusted so that the tip of the metal cantilever 30 swings stably with a constant amplitude due to self-oscillation. The band filter 90 is tuned to one natural frequency of the metal cantilever 30, and is provided so that self-oscillation is performed at this frequency. As explained above, in the vibration device according to the present invention, since self-excited oscillation of the metal cantilever 30 is adopted, the natural frequency of the metal cantilever 30 may be slightly affected by temperature changes, etc. It will be easily understood that this has the advantage that even if it is changed, the amplitude and stability of the oscillation are hardly affected. Note that the bandpass filter 90 and amplifier 10 in FIG.
0. The order of the phase shifters 110 has no effect on the function of the vibration excitation device according to the present invention, and these orders may be changed freely. Although the bandpass filter 90 and the amplifier 100 have been described separately, it goes without saying that the vibration device according to the present invention can also be applied to a case where the bandpass filter and amplifier are integrated, such as an active bandpass filter.
以上述べたように、本発明によれば、半導体レ
ーザは小形且つ単純構造の金属製カンチレバー
に、熱的接触を保つように装着されており、また
前記金属製カンチレバーに張り付けて設けられた
1対の電歪素子板と、帯域増幅器、移相器を含む
電気信号増幅部とによつて前記金属製カンチレバ
ーに自励発振を行わせることによつて前記半導体
レーザを加振するため、半導体レーザの小形・軽
量性という特長を損うことなしに、良好な放熱性
によつて、安定したレーザ発振を維持しつつ、一
定振幅、一定周波数の安定な機械的振動を半導体
レーザに与えることができる。 As described above, according to the present invention, a semiconductor laser is attached to a small and simple metal cantilever so as to maintain thermal contact, and a pair of semiconductor lasers is attached to the metal cantilever. In order to excite the semiconductor laser by causing the metal cantilever to self-oscillate using an electrostrictive element plate, a band amplifier, and an electric signal amplification section including a phase shifter, the semiconductor laser is excited. Without sacrificing the features of small size and light weight, stable laser oscillation can be maintained due to good heat dissipation, and stable mechanical vibrations of constant amplitude and constant frequency can be applied to the semiconductor laser.
第1図は半導体レーザ加振部の斜視図、第2図
はこの発明による半導体レーザ加振装置の概略説
明図である。図中10は半導体レーザ、30は金
属製カンチレバー、40はクランパ、60は電歪
素子板、80は電気信号増幅部、90は帯域フイ
ルタ、100は増幅部、110は移相器である。
なお図中同一または相当部分には同一符号を付し
て示してある。
FIG. 1 is a perspective view of a semiconductor laser excitation section, and FIG. 2 is a schematic explanatory diagram of a semiconductor laser excitation device according to the present invention. In the figure, 10 is a semiconductor laser, 30 is a metal cantilever, 40 is a clamper, 60 is an electrostrictive element plate, 80 is an electric signal amplification section, 90 is a bandpass filter, 100 is an amplification section, and 110 is a phase shifter.
In the drawings, the same or corresponding parts are designated by the same reference numerals.
Claims (1)
より加工されて成るか、もしくは別金属部材にて
別途加工されたクランパに熱的接触を保ちつつ固
定されて成る大略直方体状の金属製カンチレバー
と、前記金属製カンチレバー先端近傍にろう付け
等の手段をもつて、熱的接触を保ちつつ装着され
た半導体レーザと、前記金属製カンチレバーの相
対向する2面に、前記半導体レーザとは異なる位
置に各々張り付けられ、かつ前記金属製カンチレ
バーの長さ方向に電歪効果によつて伸縮可能な、
各々の両面に電極を設けた1対の電歪素子板と、
前記1対の電歪素子板のうち第1の電歪素子板
の、前記金属製カンチレバーに接していない側の
電極に生ずる電圧を増幅する少くとも帯域通過フ
イルタ付増幅器と位相変化部を設けた電気信号増
幅部とを有し、前記電気信号増幅部の出力を前記
1対の電歪素子板のうち第2の電歪素子板の、前
記金属製カンチレバーに接していない側の電極に
印加することにより前記金属製カンチレバーの自
励発振を誘起し、この自励発振による前記金属製
カンチレバー先端の振動を前記半導体レーザに伝
達することを特徴とする半導体レーザ加振装置。1. A roughly rectangular parallelepiped metal cantilever that is made of the same metal material as the clamper that fixes one end, or is fixed to a clamper that is separately machined from a different metal member while maintaining thermal contact; A semiconductor laser is mounted near the tip of a metal cantilever while maintaining thermal contact by means such as brazing, and a semiconductor laser is attached to two opposing surfaces of the metal cantilever at positions different from the semiconductor lasers. , and is expandable and contractible in the length direction of the metal cantilever by electrostrictive effect.
a pair of electrostrictive element plates each having electrodes on both sides;
At least an amplifier with a bandpass filter and a phase change section are provided to amplify the voltage generated at the electrode of the first electrostrictive element plate of the pair of electrostrictive element plates on the side not in contact with the metal cantilever. an electric signal amplification section, and applies the output of the electric signal amplification section to an electrode of a second electrostrictive element plate of the pair of electrostrictive element plates on the side not in contact with the metal cantilever. A semiconductor laser excitation device characterized by inducing self-excited oscillation of the metal cantilever and transmitting vibrations at the tip of the metal cantilever due to the self-excited oscillation to the semiconductor laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56126473A JPS5828885A (en) | 1981-08-12 | 1981-08-12 | Semiconductor laser exciter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56126473A JPS5828885A (en) | 1981-08-12 | 1981-08-12 | Semiconductor laser exciter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5828885A JPS5828885A (en) | 1983-02-19 |
| JPS6251516B2 true JPS6251516B2 (en) | 1987-10-30 |
Family
ID=14936082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56126473A Granted JPS5828885A (en) | 1981-08-12 | 1981-08-12 | Semiconductor laser exciter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5828885A (en) |
-
1981
- 1981-08-12 JP JP56126473A patent/JPS5828885A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5828885A (en) | 1983-02-19 |
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