JPS6251902B2 - - Google Patents
Info
- Publication number
- JPS6251902B2 JPS6251902B2 JP9033779A JP9033779A JPS6251902B2 JP S6251902 B2 JPS6251902 B2 JP S6251902B2 JP 9033779 A JP9033779 A JP 9033779A JP 9033779 A JP9033779 A JP 9033779A JP S6251902 B2 JPS6251902 B2 JP S6251902B2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- glass
- liquid
- gas
- horn
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002994 raw material Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000013307 optical fiber Substances 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 6
- 238000007496 glass forming Methods 0.000 claims 2
- 239000007791 liquid phase Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 33
- 239000007789 gas Substances 0.000 description 28
- 239000011521 glass Substances 0.000 description 27
- 239000000203 mixture Substances 0.000 description 12
- 238000000151 deposition Methods 0.000 description 10
- 230000008021 deposition Effects 0.000 description 8
- 230000001590 oxidative effect Effects 0.000 description 7
- 239000004071 soot Substances 0.000 description 7
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 3
- 150000003377 silicon compounds Chemical class 0.000 description 3
- 238000000889 atomisation Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009688 liquid atomisation Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
- C03B2207/34—Liquid, e.g. mist or aerosol
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
【発明の詳細な説明】
先に、本発明者はガラス組成物液体原料を水素
を含むガスで霧状にした後、酸化性ガスと混合し
て燃焼させ、この火炎をターゲツト上に吹付ける
ことにより光フアイバ用ガラスブロツクを堆積さ
せる方法を提案した。この方法はガラスブロツク
を高速度、かつ高収率で堆積でき、しかも連続的
に製造することができるという特徴をもつてい
る。しかし、ガラスブロツクを100ｇ／hr以上の
超高速度で堆積させようとするガス圧が高くなる
ために霧化粒子の速度が速くなり、ターゲツトへ
の堆積収率が低下してくるという問題点がある。[Detailed Description of the Invention] First, the present inventor atomized a liquid raw material for a glass composition with a gas containing hydrogen, mixed it with an oxidizing gas, burned it, and sprayed this flame onto a target. A method for depositing glass blocks for optical fibers was proposed. This method is characterized in that glass blocks can be deposited at high speed and in high yield, and can be manufactured continuously. However, when attempting to deposit glass blocks at an ultra-high rate of 100 g/hr or more, the gas pressure increases, which increases the speed of the atomized particles, resulting in a decrease in the deposition yield on the target. be.
本発明は上記問題点を解決させるために、ガラ
ス組成物液体原料を超音波振動のような電気機械
トランスジユーサを利用して霧化（粒子化）させ
る方法を提供するものである。すなわち、超音波
振動子に振動拡大ホーンを取付け、この振動拡大
ホーンの前端面に開口するガラス組成物液体原料
供給孔に上記液体を供給する装置を設けて超音波
振動により振動拡大ホーンの前端面に到達した上
記液体を霧化させ、この霧化粒子を酸素および水
素を含むガスと共に混合、燃焼してガラス煤を含
んだ火炎を発生させる。そしてこの火炎をターゲ
ツト上に衝突させてガラスブロツクを堆積させる
方法である。 In order to solve the above-mentioned problems, the present invention provides a method of atomizing (particulate) a liquid raw material of a glass composition using an electromechanical transducer such as ultrasonic vibration. That is, a vibration magnifying horn is attached to the ultrasonic vibrator, and a device is provided to supply the liquid to the glass composition liquid raw material supply hole opened in the front end surface of the vibration magnifying horn, and the front end surface of the vibration magnifying horn is provided by ultrasonic vibration. The liquid that has reached the temperature is atomized, and the atomized particles are mixed with a gas containing oxygen and hydrogen and burned to generate a flame containing glass soot. This flame is then allowed to collide with a target to deposit glass blocks.
以下図面を用いて本発明の方法を説明する。 The method of the present invention will be explained below using the drawings.
第１図は本発明のガラスブロツク製造方法を説
明するための概略図である。１は超音波振動子
で、その上端に振動拡大ホーン２を固定してい
る。超音波振動子１および振動拡大ホーン２はと
もに、振動拡大ホーン２の振動が零なる位置、す
なわち振動の節部１４に固定した複数の支柱１５
を介して内側ガス供給管７内に配置されている。
この内側ガス供給管７内には矢印１０方向から
H2、あるいはN2、He、Ar、Neなどのうち少なく
とも１種以上のガスを含んだH2ガスが送り込ま
れ、ノズル７′から噴射されるようになつてい
る。また内側ガス供給管７は不活性ガス供給管８
と酸化性ガス供給管９で覆われ、これらの供給管
は同心状の３重管構造になつている。不活性ガス
供給管８内には矢印１１方向からN2、Ar、He、
Neなどの不活性ガスが送り込まれ、ノズル８′か
ら噴射されるようになつている。酸化性ガス供給
管９内には矢印１２方向からO2、CO2、NO2、空
気、オゾンなどの酸化性ガス、あるいはSiCl4、
BBr3などのガラス原料の蒸気を含んだ上記酸化
性ガスが送り込まれ、ノズル９′から噴射される
ようになつている。ノズル７′，８′，９′は同心
状の３重管構造になつている。４は超音波発振器
３と超音波振動子１とを結ぶ導線、５はガラス組
成物液体原料供給装置で、供給管６を介して、振
動拡大ホーン２の前端面に開口するガラス組成物
液体原料供給孔１３と連結している。ガラス組成
物液体原料供給装置５から供給管６を経て振動拡
大ホーン２の前端面１３に到達した液体原料は表
面張力によつて薄い液膜を形成するが、超音波振
動の加振の影響を受けて微細粒子となり、前方へ
飛散する。この場合本作用による微細粒子の性質
は、超音波振動子により電気的エネルギーを振動
エネルギーに変換し、この振動を利用して液体原
料を霧化させるものであるために、粒子速度なら
びに運動エネルギーが非常に小さい。したがつて
前方へ飛散した微細粒子は矢印１０方向から供給
されたH2ガスで搬送され、ノズル７′より噴射さ
れる。そしてノズル出口部でこのH2ガスに点火
して燃焼させ、ついで矢印１１方向および矢印１
２方向からそれぞれ、不活性ガスおよび酸化性ガ
スを流すことにより、３重管ノズルの前方にガラ
ス煤を含んだ火炎１６を発生させる。この火炎を
矢印２０方向に回転しつつ矢印１９方向に移動す
るターゲツト１８に吹付けることによりターゲツ
ト上にガラス煤あるいはガラス化したロツド１７
を堆積させるようにしたものである。 FIG. 1 is a schematic diagram for explaining the glass block manufacturing method of the present invention. 1 is an ultrasonic vibrator, and a vibration amplifying horn 2 is fixed to the upper end of the ultrasonic vibrator. Both the ultrasonic vibrator 1 and the vibration amplifying horn 2 are provided with a plurality of supports 15 fixed at a position where the vibration of the vibration amplifying horn 2 becomes zero, that is, at a vibration node 14.
It is arranged in the inner gas supply pipe 7 via.
Inside this inner gas supply pipe 7, from the direction of arrow 10.
H 2 or H 2 gas containing at least one type of gas such as N 2 , He, Ar, and Ne is fed and injected from the nozzle 7'. In addition, the inner gas supply pipe 7 is an inert gas supply pipe 8.
and an oxidizing gas supply pipe 9, and these supply pipes have a concentric triple pipe structure. N 2 , Ar, He,
An inert gas such as Ne is fed and injected from a nozzle 8'. Oxidizing gas such as O 2 , CO 2 , NO 2 , air, and ozone, or SiCl 4 ,
The oxidizing gas containing vapor of a glass raw material such as BBr 3 is fed and injected from a nozzle 9'. The nozzles 7', 8', and 9' have a concentric triple tube structure. 4 is a conductor connecting the ultrasonic oscillator 3 and the ultrasonic vibrator 1; 5 is a glass composition liquid raw material supplying device, which supplies the glass composition liquid raw material to the front end surface of the vibration magnifying horn 2 through a supply pipe 6; It is connected to the supply hole 13. The liquid raw material that reaches the front end surface 13 of the vibration magnifying horn 2 from the glass composition liquid raw material supply device 5 via the supply pipe 6 forms a thin liquid film due to surface tension, but the influence of the ultrasonic vibration is It becomes fine particles and scatters forward. In this case, the properties of the fine particles due to this action are that the ultrasonic vibrator converts electrical energy into vibrational energy, and this vibration is used to atomize the liquid raw material, so the particle velocity and kinetic energy are Very small. Therefore, the fine particles scattered forward are transported by the H 2 gas supplied from the direction of arrow 10 and are injected from the nozzle 7'. Then, this H 2 gas is ignited and burned at the nozzle outlet, and then the direction of arrow 11 and arrow 1 are
By flowing an inert gas and an oxidizing gas from two directions, a flame 16 containing glass soot is generated in front of the triple tube nozzle. By spraying this flame onto a target 18 moving in the direction of arrow 19 while rotating in the direction of arrow 20, glass soot or vitrified rods 17 are deposited on the target.
It is designed to deposit.
第２図は、超音波振動を利用して液体原料を霧
化させる方法と、先に本発明者が提案した水素を
含むガスで液体原料を霧化させる方法を併用した
ことを特徴とするガラスブロツクの製造方法を説
明するための概略図である。この方法は液体の霧
化量を超音波振動子に加える電気的エネルギー量
と水素を含むガス流量の両方で制御することがで
きるのでより自由度が増えるという特徴を有して
いる。すなわち、水素を含むガスを供給装置２１
からガス供給管２２を介して振動拡大ホーン２の
前端面に開口するガス供給孔１３′へ送り込むこ
とによつてガラス組成物液体原料供給装置５から
の液体原料を供給管６を介して強制的にガラス組
成物液体原料供給孔１３″へ吸い上げさせて霧化
させると共に、超音波振動の加振によつても液体
を霧化させるものである。その結果、第１図の場
合よりも液体の霧化量を増大させることができ
る。なお、矢印１０′方向からは不活性ガスを、
矢印１１′方向からは酸化性ガスを流す。本発明
に適用できるガラス組成物液体原料は、アルキル
化物、ハロゲン化物、水素化物からなるシリコン
化合物、および屈折率制御用化合物を含んだ上記
シリコン化合物、アルコールとか水に溶解あるい
は分散したシリコン化合物、などである。本発明
に用いる超音波振動子としては、実施例で示した
ように、磁歪形振動子、あるいは電歪形振動子を
用いることができる。振動子の周波数、入力電力
は液体の霧化量によつて決めることができる。振
動子の周波数は通常、数ＫHz〜100KHzに設定す
る。入力電力は10数Ｗ〜数百Ｗを用いる。また液
体の霧化量は、液体の表面張力値、拡大ホーンの
液膜の周縁に接触するホーンの材質、液体とその
材質との親和性、ホーンの構造などによつてもち
がつてくる。ホーンの構造としては、エキスポネ
ンシヤル型、コニカル型、単純段付ホーン、さら
にはこれらを組み合わせた複合タイプを用いるこ
とができる。 FIG. 2 shows a glass characterized by the combination of a method of atomizing a liquid raw material using ultrasonic vibration and a method of atomizing a liquid raw material using a hydrogen-containing gas, which was previously proposed by the present inventor. FIG. 3 is a schematic diagram for explaining a method of manufacturing a block. This method has the feature that the degree of freedom is increased because the amount of liquid atomization can be controlled by both the amount of electrical energy applied to the ultrasonic vibrator and the flow rate of gas containing hydrogen. That is, the supply device 21 supplies gas containing hydrogen.
The liquid raw material from the glass composition liquid raw material supply device 5 is forced through the supply pipe 6 by feeding the liquid raw material from the glass composition liquid raw material supply device 5 through the gas supply pipe 22 to the gas supply hole 13' opened in the front end face of the vibration magnifying horn 2. The liquid is drawn up into the glass composition liquid raw material supply hole 13'' and atomized, and the liquid is also atomized by the excitation of ultrasonic vibrations.As a result, the liquid is more concentrated than in the case of FIG. The amount of atomization can be increased.In addition, from the direction of arrow 10', inert gas is
Oxidizing gas is caused to flow from the direction of arrow 11'. Liquid raw materials for glass compositions that can be applied to the present invention include silicon compounds consisting of alkylated compounds, halides, and hydrides, the above-mentioned silicon compounds containing refractive index controlling compounds, silicon compounds dissolved or dispersed in alcohol or water, and the like. It is. As the ultrasonic transducer used in the present invention, a magnetostrictive transducer or an electrostrictive transducer can be used, as shown in the embodiments. The frequency and input power of the vibrator can be determined depending on the amount of liquid atomized. The frequency of the vibrator is usually set to several KHz to 100 KHz. The input power used is 10-odd watts to several hundred watts. Further, the amount of liquid atomized depends on the surface tension value of the liquid, the material of the horn that contacts the periphery of the liquid film of the expanding horn, the affinity between the liquid and its material, the structure of the horn, etc. The structure of the horn may be an exponential type, a conical type, a simple stepped horn, or a composite type that is a combination of these types.
第３図は第２図の装置において、液体にテトラ
エトキシシランSi（OC2H5）4を用い、拡大ホーン
をアルミニウムで形成した場合の超音波振動子へ
の入力電力と液体の霧化量との関係の一例を示し
たものである。これはエキスポネンシヤル型のホ
ーンを用い、20KHzの周波数で振動させた結果で
ある。ただし、２１から送り込むH2ガス流量２
／min、矢印１０′から送り込むArガス流量2.5
／min、矢印１１′から送り込むO2ガス流量５
／min、である。同図からわかるように、入力
電力を大きくすることによつて液体の霧化量を増
やすことができることを示している。第４図はタ
ーゲツトとして底が半円球を有する円筒管（外径
70mmφ）にガラス煤を堆積させた結果である。こ
れは第３図の結果に対応したものである。入力電
力10数Ｗで100ｇ／hrのガラス煤堆積速度を示し
ており、入力電力20数Ｗで400ｇ／hr程度の超高
速ガラス煤堆積速度を得ることができた。従来方
法でこのような超音速堆積速度を得ようとする
と、堆積収率が10％以下になるのに対し、本発明
の方法では20％程度の堆積収率が実現されてい
る。 Figure 3 shows the power input to the ultrasonic vibrator and the amount of liquid atomized in the apparatus shown in Figure 2, when tetraethoxysilane Si (OC 2 H 5 ) 4 is used as the liquid and the expansion horn is made of aluminum. This shows an example of the relationship between This is the result of using an exponential horn and vibrating at a frequency of 20KHz. However, the H2 gas flow rate 2 sent from 21
/min, Ar gas flow rate 2.5 from arrow 10'
/min, O2 gas flow rate from arrow 11' 5
/min. As can be seen from the figure, it is shown that the amount of liquid atomized can be increased by increasing the input power. Figure 4 shows a cylindrical tube with a semicircular bottom (outer diameter
This is the result of depositing glass soot on 70mmφ). This corresponds to the results shown in FIG. It showed a glass soot deposition rate of 100 g/hr with an input power of 10-odd W, and an ultra-high glass soot deposition rate of about 400 g/hr with an input power of 20-odd W. If conventional methods were used to achieve such a supersonic deposition rate, the deposition yield would be less than 10%, whereas the method of the present invention achieves a deposition yield of approximately 20%.
以上述べたごとく、本発明の方法によると、電
気的エネルギー量で液体の霧化量を制御すること
ができ、かつ制御量も極めて広範囲に変えられ、
さらに従来法のように霧化量を多くするためにガ
ス圧を高くしなくてもよい。したがつて、霧化粒
子の速度が速くならないためにターゲツトへの堆
積収率を上げることができる。 As described above, according to the method of the present invention, the amount of liquid atomization can be controlled by the amount of electrical energy, and the control amount can also be varied over a very wide range.
Furthermore, it is not necessary to increase the gas pressure in order to increase the amount of atomization as in the conventional method. Therefore, since the velocity of the atomized particles does not increase, the deposition yield on the target can be increased.
第１図および第２図は本発明の実施例で用いる
光フアイバ母材製造装置の概略断面図、第３図は
超音波振動子への入力電力と液体の霧化量との関
係を示すグラフ、第４図は超音波振動子への入力
電力とガラス煤の堆積速度との関係を示すグラフ
である。
各図において、１は超音波振動子、２は振動拡
大ホーン、５はガラス組成物液体原料供給装置、
１０はH2を含むガスの導入方向、１１は不活性
ガスの導入方向、１２は酸化性ガスの導入方向、
１３はガラス組成物液体原料供給孔、１７はガラ
スロツド、１８はターゲツト、２１はH2を含む
ガスの供給装置である。
1 and 2 are schematic cross-sectional views of the optical fiber base material manufacturing apparatus used in the examples of the present invention, and FIG. 3 is a graph showing the relationship between the input power to the ultrasonic transducer and the amount of liquid atomized. , FIG. 4 is a graph showing the relationship between the input power to the ultrasonic transducer and the deposition rate of glass soot. In each figure, 1 is an ultrasonic vibrator, 2 is a vibration magnifying horn, 5 is a glass composition liquid raw material supply device,
10 is the introduction direction of the gas containing H2 , 11 is the introduction direction of the inert gas, 12 is the introduction direction of the oxidizing gas,
13 is a glass composition liquid raw material supply hole, 17 is a glass rod, 18 is a target, and 21 is a supply device for gas containing H2 .
Claims (1)
む光フアイバ母材の製造方法において、液相状態
の前記ガラス形成原料を加振粒子化させた後、高
温反応せしめることを特徴とする光フアイバ母材
の製造方法。 ２ 特許請求の範囲第１項において、超音波振動
を利用して加振粒子化することを特徴とする光フ
アイバ母材の製造方法。[Scope of Claims] 1. A method for producing an optical fiber base material including a step of reacting a glass-forming raw material at a high temperature, characterized in that the glass-forming raw material in a liquid phase is vibrated into particles and then subjected to a high-temperature reaction. A method for manufacturing an optical fiber base material. 2. A method for manufacturing an optical fiber base material according to claim 1, characterized in that the optical fiber base material is made into particles by using ultrasonic vibration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9033779A JPS5614438A (en) | 1979-07-18 | 1979-07-18 | Manufacture of optical fiber base material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9033779A JPS5614438A (en) | 1979-07-18 | 1979-07-18 | Manufacture of optical fiber base material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5614438A JPS5614438A (en) | 1981-02-12 |
| JPS6251902B2 true JPS6251902B2 (en) | 1987-11-02 |
Family
ID=13995698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9033779A Granted JPS5614438A (en) | 1979-07-18 | 1979-07-18 | Manufacture of optical fiber base material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5614438A (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6047215B2 (en) * | 1980-07-11 | 1985-10-21 | 日本電信電話株式会社 | Method for manufacturing base material for optical fiber |
| US5110335A (en) * | 1990-06-25 | 1992-05-05 | At&T Bell Laboratories | Method of glass soot deposition using ultrasonic nozzle |
| KR100473827B1 (en) * | 1995-12-19 | 2005-07-18 | 코닝 인코포레이티드 | Method and apparatus for forming fused silica by combustion of liquid reactants |
| US6312656B1 (en) | 1995-12-19 | 2001-11-06 | Corning Incorporated | Method for forming silica by combustion of liquid reactants using oxygen |
| DE19725955C1 (en) * | 1997-06-19 | 1999-01-21 | Heraeus Quarzglas | Quartz glass preform production for optical fibre manufacture |
| US5979185A (en) * | 1997-07-16 | 1999-11-09 | Corning Incorporated | Method and apparatus for forming silica by combustion of liquid reactants using a heater |
| ZA994171B (en) * | 1998-08-07 | 2000-03-28 | Corning Inc | Method and apparatus for forming soot for the manufacture of glass. |
| US6260385B1 (en) | 1998-08-07 | 2001-07-17 | Corning Incorporated | Method and burner for forming silica-containing soot |
| US6672106B1 (en) | 1998-08-07 | 2004-01-06 | Corning Incorporated | Method and apparatus for forming soot for the manufacture of glass |
| GB2478307A (en) | 2010-03-02 | 2011-09-07 | Heraeus Quartz Uk Ltd | Manufacture of silica glass |
| CN111239106A (en) * | 2019-08-07 | 2020-06-05 | 广西科技大学鹿山学院 | A kind of atomization device with coaxial atomization and ultrasonic atomization in series |
-
1979
- 1979-07-18 JP JP9033779A patent/JPS5614438A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5614438A (en) | 1981-02-12 |
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