JPS6253053B2 - - Google Patents
Info
- Publication number
- JPS6253053B2 JPS6253053B2 JP18626681A JP18626681A JPS6253053B2 JP S6253053 B2 JPS6253053 B2 JP S6253053B2 JP 18626681 A JP18626681 A JP 18626681A JP 18626681 A JP18626681 A JP 18626681A JP S6253053 B2 JPS6253053 B2 JP S6253053B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- scale
- slit window
- light receiving
- sine wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000035945 sensitivity Effects 0.000 claims description 16
- 238000010586 diagram Methods 0.000 description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/366—Particular pulse shapes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Description
【発明の詳細な説明】
本発明は、光学式スケール装置等において、位
置分解能を高めるための内挿操作の基本信号とな
る基本正弦波を、一定のピツチで明暗の縞模様を
施したスケールから直接簡単にとり出す光学式の
正弦波エンコーダに関するものであつて、特に前
記スケールからの反射光を一定の幅を持つスリツ
ト窓を介して受光するような光学式正弦波エンコ
ーダにおいて、受光手段の最大感度点の位置を前
記スリツト窓の領域外に配置し、前記スリツト窓
からの散乱光を主体として受光することによつ
て、正弦波様の信号をとり出すようにすることに
より、前記受光手段と前記スリツト窓との精密位
置合わせ作業の不要な、しかも製作が容易で量産
性に優れた光学式の正弦波エンコーダを提供する
ことを目的とするものである。DETAILED DESCRIPTION OF THE INVENTION The present invention is an optical scale device, etc., in which a fundamental sine wave, which is a fundamental signal for interpolation operations to improve positional resolution, is generated from a scale with bright and dark striped patterns at a constant pitch. This relates to an optical sine wave encoder that can be directly and easily taken out, and in particular, in an optical sine wave encoder that receives reflected light from the scale through a slit window with a certain width, the maximum sensitivity of the light receiving means. By arranging a point outside the area of the slit window and mainly receiving scattered light from the slit window to extract a sine wave-like signal, the light receiving means and the The object of the present invention is to provide an optical sine wave encoder that does not require precise positioning work with a slit window, is easy to manufacture, and has excellent mass productivity.
一定のピツチで明暗の縞模様を施したスケール
から、一定の幅を持つたスリツト窓を介して波形
歪の少ない正弦波様の信号を光学的にとり出すエ
ンコーダにおいては、従来より前記スケールから
の反射光を受光する受光手段と前記スリツト窓と
の相対位置を厳密に規定する必要があつた。第1
図は従来例を示すもので、受光素子11および発
光素子12を内蔵したセンサハウジング13と、
スリツト窓15をあけたマスクプレート14とを
前記受光素子11の最大感度点の位置が前記スリ
ツト窓15の中心位置にくるように厳密に位置合
わせを行なつていた。なお、第1図においてはス
リツト窓を介さない受光素子感度特性をQで示し
ている。しかし、このような従来の構成では、エ
ンコーダの組み立てに非常な精度が要求され、組
み立て作業に多くの時間を必要とし、量産性が悪
かつた。 In encoders that optically extract a sine wave-like signal with little waveform distortion from a scale with a bright and dark striped pattern at a constant pitch through a slit window with a constant width, conventionally, the reflection from the scale is It was necessary to strictly define the relative position of the light receiving means for receiving light and the slit window. 1st
The figure shows a conventional example, which includes a sensor housing 13 incorporating a light receiving element 11 and a light emitting element 12,
The mask plate 14 having a slit window 15 therein was precisely aligned so that the maximum sensitivity point of the light receiving element 11 was located at the center of the slit window 15. In FIG. 1, Q indicates the sensitivity characteristic of the light receiving element without using the slit window. However, in such a conventional configuration, extremely high precision is required for assembling the encoder, a lot of time is required for assembly work, and mass productivity is poor.
本発明は、前記従来の欠点を除去し、受光手段
とスリツト窓との相対位置を厳密に規定する必要
がなく、やや粗雑な位置あわせでも正弦波様の信
号をとり出すことのできる組み立て作業の容易
な、量産性のよいエンコーダであつて、以下、本
発明を図面の実施例に基いて説明する。第2図
a,bは本発明の一実施例の要部構成図で、aは
その上面図、bはその側面図である。ただし同図
a,bにおいては発光手段および受光手段を含む
エンコーダ全体を前記スケールに対して平行に相
対運動させる機構の詳細は省略してある。同図
a,bにおいて、8は一定のピッチLで明暗の縞
模様を施し、かつ縞模様内の明るい部分と暗い部
分の比がいたるところ同一であるように構成され
たスケールであり、2は該スケール8を照射する
赤外発光ダイオードなどの発光素子、1は上記発
光素子2の前記スケール8からの反射光がスリツ
ト窓5によつて散乱された散乱光を主として受光
するフオト・トランジスタなどの受光素子であ
る。同図a,bにおいては受光素子1と発光素子
2は一体化されたフオト・リフレクタを用いて構
成している。4は該フオト・リフレクタの受光面
に接してとりつけられたマスクプレートであり、
5は前記マスクプレート4内に設けられた前記ス
ケール8の長手方向の幅がL/2であるスリツト
窓である。3は前記受光素子1を前記マスクプレ
ート4に対して位置決めするためのセンサハウジ
ングである。6は前記受光素子1のリード線、7
は前記発光素子2のリード線である。また、同図
bにおけるPP′は受光素子1の最大感度点の位
置、MM′はスリツト窓5の中心位置、Δlは受
光素子1の最大感度点の位置とスリツト窓5の中
心位置との距離をあらわす。Δlは、前記受光素
子1の最大感度点の位置が前記スリツト窓5の領
域外にあつて、前記受光素子1が前記スリツト窓
5からの散乱光を主体として受光するような位置
に決める。発光素子2からの光はスリツト窓5を
介して、一定のピツチで明暗の縞模様を施したス
ケール8に照射され、該スケール8の面で反射さ
れる。反射された光は再び前記スリツト窓5に入
射し、前記受光素子1は、該スリツト窓5からの
散乱光を主体として受光する。前記受光素子1
は、センサハウジング3が前記スケール8に対し
て、一定の間隙を維持しながら相対運動を行なう
と、前記スケール8の縞模様の周期に同期した周
期波形を出力する。特に、前記センサハウジング
3と前記スケール8との間隙が適切であれば、前
記周期波形は正弦波様の信号となる。 The present invention eliminates the drawbacks of the conventional art, eliminates the need to strictly define the relative position between the light receiving means and the slit window, and enables assembly work that allows a sine wave-like signal to be extracted even with somewhat rough alignment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS This encoder is easy to mass produce and the present invention will be described below with reference to embodiments shown in the drawings. FIGS. 2a and 2b are main part configuration diagrams of an embodiment of the present invention, in which a is a top view and b is a side view. However, in Figures a and b, details of the mechanism for moving the entire encoder including the light emitting means and the light receiving means relative to the scale in parallel are omitted. In Figures a and b, 8 is a scale constructed such that a light and dark striped pattern is applied at a constant pitch L, and the ratio of bright and dark parts within the striped pattern is the same everywhere. A light emitting element such as an infrared light emitting diode that illuminates the scale 8; 1 is a photo transistor or the like that mainly receives the scattered light that is the reflected light from the scale 8 of the light emitting element 2 scattered by the slit window 5; It is a light receiving element. In figures a and b, the light receiving element 1 and the light emitting element 2 are constructed using an integrated photo reflector. 4 is a mask plate attached in contact with the light receiving surface of the photo reflector;
Reference numeral 5 denotes a slit window provided in the mask plate 4 and having a width of L/2 in the longitudinal direction of the scale 8. 3 is a sensor housing for positioning the light receiving element 1 with respect to the mask plate 4. 6 is a lead wire of the light receiving element 1; 7 is a lead wire of the light receiving element 1;
is a lead wire of the light emitting element 2. In addition, in the figure b, PP' is the position of the maximum sensitivity point of the light receiving element 1, MM' is the center position of the slit window 5, and Δl is the distance between the position of the maximum sensitivity point of the light receiving element 1 and the center position of the slit window 5. represents. Δl is determined at a position such that the maximum sensitivity point of the light receiving element 1 is outside the area of the slit window 5 and the light receiving element 1 mainly receives scattered light from the slit window 5. Light from the light emitting element 2 is irradiated through the slit window 5 onto a scale 8 having a bright and dark striped pattern at a constant pitch, and is reflected by the surface of the scale 8. The reflected light enters the slit window 5 again, and the light receiving element 1 mainly receives the scattered light from the slit window 5. The light receiving element 1
When the sensor housing 3 moves relative to the scale 8 while maintaining a constant gap, a periodic waveform synchronized with the period of the striped pattern of the scale 8 is output. In particular, if the gap between the sensor housing 3 and the scale 8 is appropriate, the periodic waveform becomes a sine wave-like signal.
ここで、本発明のエンコーダによつてどのよう
にして正弦波様の信号が得られるかを説明する。
第2図のスケール8の長手方向をx軸にとり、該
スケール8の縞模様のピツチをL、該縞模様の
「明」の部分の幅をW、「暗」の部分の幅をL−
W、該スケール8の輝度をあらわすスケール輝度
密度関数をS(x)、スリツト窓5の中心位置を
前記x軸上でx=X、受光素子1の該スリツト窓
5を介した感度特性をあらわす受光素子感度密度
関数を、P(x、X)とする〔第3図a,b参
照〕。 Here, a description will be given of how a sine wave-like signal can be obtained by the encoder of the present invention.
Taking the longitudinal direction of the scale 8 in FIG. 2 as the x-axis, the pitch of the striped pattern on the scale 8 is L, the width of the "bright" part of the striped pattern is W, and the width of the "dark" part is L-.
W, S(x) is a scale brightness density function representing the brightness of the scale 8, x=X is the center position of the slit window 5 on the x-axis, and represents the sensitivity characteristic of the light receiving element 1 through the slit window 5. Let the light-receiving element sensitivity density function be P(x,
S(x)は次式のように表現される。 S(x) is expressed as follows.
ここで、Bは前記縞模様の「暗」の部分の輝度
をあらわしており、Kは前記縞模様の「明」の部
分の輝度と「暗」の部分の輝度の差をあらわして
いる。またu(x)は単位ステツプ関数で、mは
前記縞模様の数で、スケール上にはm個の縞模様
が施こされてあると仮定している。 Here, B represents the brightness of the "dark" part of the striped pattern, and K represents the difference between the brightness of the "bright" part and the brightness of the "dark" part of the striped pattern. Further, u(x) is a unit step function, m is the number of striped patterns, and it is assumed that m striped patterns are applied on the scale.
また、前記スリツト窓5に入射する光量が多い
ほど、前記スリツト窓5で散乱されて前記受光素
子1に達する散乱光も多いから、前記受光素子1
のスリツト窓5を介した受光素子感度密度関数P
(x、X)は、前記スリツト窓5の中心位置x=
Xにおいてピーク値をとり、x=Xを中心として
x座標の増加する方向と減少する方向とで対称に
分布する。すなわち、次の様に表現できる。 In addition, as the amount of light incident on the slit window 5 increases, the amount of scattered light that is scattered by the slit window 5 and reaches the light receiving element 1 increases.
The light receiving element sensitivity density function P through the slit window 5 of
(x, X) is the center position of the slit window 5 =
It has a peak value at X, and is distributed symmetrically around x=X in the direction in which the x coordinate increases and in the direction in which it decreases. That is, it can be expressed as follows.
P(x−Δx、X)=P(x+Δx、X)
………(2)
ただし、Δxはxの増分を表わしており、Δx
>0である。 P(x-Δx,X)=P(x+Δx,X)
………(2) However, Δx represents the increment of x, and Δx
>0.
さて、受光素子1の出力電圧をV(X)とする
と、V(X)は次の様に表現される。 Now, assuming that the output voltage of the light receiving element 1 is V(X), V(X) is expressed as follows.
V(X)=∫0 mLP(x、X)S(x)dx
………(3)
ここで、前記スリツト窓5の幅はL/2である
ので、該スリツト窓5を介した受光素子1の感度
密度関数P(x、X)の分布は、x=Xを中心と
して、±L/4近傍内である。従つて第(3)式の計
算においては、x=Xを中心とする±L/4近傍
内で考えれば十分である。第(1)式および第(3)式よ
り、V(X)は次式のように近似される。 V(X)=∫ 0 mL P(x,X)S(x)dx
(3) Here, since the width of the slit window 5 is L/2, the distribution of the sensitivity density function P(x, X) of the light receiving element 1 through the slit window 5 is x=X It is within ±L/4 around the center. Therefore, in calculating equation (3), it is sufficient to consider the range within ±L/4 around x=X. From equations (1) and (3), V(X) is approximated as shown below.
ただし、上式においてはx=Xを中心とする±
L/4近傍内でのnの値をn=iとした。 However, in the above equation, ±
The value of n within the L/4 neighborhood was set to n=i.
前述のようにP(x、X)はx=Xを中心とす
る±L/4近傍内に分布するので第(4)式の第1項
はXの値にかかわらず一定であり、この定数をC
とおく。また、第(4)式の第2項の積分をIとお
く。するとV(X)はさらに次の様に表現でき
る。 As mentioned above, P(x, C
far. Also, let I be the integral of the second term of equation (4). Then, V(X) can be further expressed as follows.
V(X)≒C+KI ………(5)
C=B∫0 mLP(x、X)dx ………(6)
I=∫iL+W iLP(x、X)dx ………(7)
さて、先に述べたように受光素子感度密度関数
P(x、X)は、前記スリツト窓5の中心x=X
を中心としてx座標の増加する方向と減少する方
向とで対称に分布し、その広がりはx=Xを中心
とする±L/4近傍である。しかも、前記センサ
ハウジング3と前記スケール8との間隙が適切で
あれば、P(x、X)は区間の限定された正弦波
様の信号となる。そこで、P(x、X)を次の様
に三角関数で近似して考える。 V(X)≒C+KI……(5) C=B∫ 0 mL P(x,X)dx……(6) I=∫ iL+W iL P(x,X)dx……(7) Now , as mentioned above, the light receiving element sensitivity density function P(x,
It is distributed symmetrically in the direction in which the x coordinate increases and in the direction in which it decreases with x=X as the center, and its spread is around ±L/4 with x=X as the center. Moreover, if the gap between the sensor housing 3 and the scale 8 is appropriate, P(x, X) becomes a sine wave-like signal with a limited section. Therefore, consider approximating P(x, X) using trigonometric functions as follows.
ここでAは定数であり、(8)式のP(x、X)の
概形を第4図に示す。(7)、(8)式よりIは次式のよ
うになる。 Here, A is a constant, and the outline of P(x, X) in equation (8) is shown in FIG. From equations (7) and (8), I becomes as follows.
I=∫iL+W iLA{cos2π/L(x−X)+1
}dx
=AL/πsinπW/Lcos2π/L(X−W/2)
+AW………(9)
また、Cは(6)、(8)式より次式のようになる。 I=∫ iL+W iL A{cos2π/L(x-X)+1
}dx = AL/πsinπW/Lcos2π/L(X-W/2)
+AW……(9) Also, C becomes as follows from equations (6) and (8).
C=B∫X+L/2 X−L/2A{cos2π/L(x
−X)+1}dx
=BAL ………(10)
(5)、(9)、(10)式より前記受光素子1の出力電圧V
(X)は次式のようになる。 C=B∫ X+L/2 X-L/2 A{cos2π/L(x
-X)+1}dx =BAL......(10) From equations (5), (9), and (10), the output voltage V of the light receiving element 1
(X) is as shown in the following equation.
V(X)≒BAL+AKW+AKL/πsinπW/Lcos2π/
L
(X−W/2) ………(11)
このV(X)は直流分BAL+AKWと振幅が
AKL/πsinπW/Lである交流分AKL/πsinπW
/Lcos2π/L(X
−W/2)とからなり、特に交流分は、Xに関して周
期がLの正弦波様の信号である。このように、前
記センサハウジング3が前記スケール8に対し
て、適切な間隙を維持しながら相対運動を行なう
と、前記受光素子1は前記スケール8の縞模様の
周期に同期した正弦波様の信号を出力する。この
様子を第5図に示す。また前記受光素子1は、前
記スリツト窓5からの散乱光を主体として受光す
るため、前記受光素子1と、前記スリツト窓5と
の相対位置には許容度があり、該相対位置が仕様
値から少しずれても、受光素子感度密度関数P
(x、X)は、振幅が変化するだけでその概形は
殆ど不変である。振幅の変化は利得可変の増幅器
を通すことによつてこれを補正することができ
る。従つて、本発明の正弦波エンコーダは受光手
段とスリツト窓の相対位置を厳密に規定する必要
がなく、受光手段の位置とスリツト窓の位置との
精密位置合わせ作業が不要である。また、センサ
ハウジングに設けられた受光手段を固定するため
の穴の加工誤差や、センサ自体の寸法のバラツキ
によつて生ずる受光手段とスリツト窓との相対位
置の仕様値からのずれも、受光素子感度密度関数
P(x、X)の概形には殆ど影響を及ぼさず、前
記穴の加工誤差や、センサ自体の寸法のバラツキ
を吸収することができ、組みたて作業が容易で量
産性に優れており、生産コストも安価である。V(X)≒BAL+AKW+AKL/πsinπW/Lcos2π/
L (X-W/2) ......(11) This V(X) is the DC component BAL + AKW and the AC component AKL/πsinπW whose amplitude is AKL/πsinπW/L.
/Lcos2π/L(X - W/2), and especially the alternating current component is a sine wave-like signal with a period of L with respect to X. In this way, when the sensor housing 3 moves relative to the scale 8 while maintaining an appropriate gap, the light receiving element 1 generates a sine wave-like signal synchronized with the period of the striped pattern of the scale 8. Output. This situation is shown in FIG. In addition, since the light receiving element 1 mainly receives scattered light from the slit window 5, there is a tolerance in the relative position between the light receiving element 1 and the slit window 5, and the relative position differs from the specification value. Even if there is a slight deviation, the photodetector sensitivity density function P
(x, X) only changes its amplitude, but its outline remains almost unchanged. Changes in amplitude can be compensated for by passing the signal through a variable gain amplifier. Therefore, in the sine wave encoder of the present invention, it is not necessary to strictly define the relative positions of the light receiving means and the slit window, and there is no need for precise positioning work between the position of the light receiving means and the position of the slit window. In addition, deviations from the specification values in the relative position of the light receiving means and the slit window caused by machining errors in the hole for fixing the light receiving means provided in the sensor housing or variations in the dimensions of the sensor itself may also cause the light receiving element to deviate from the specified value. It has almost no effect on the outline of the sensitivity density function P(x, It is excellent and the production cost is low.
第1図は従来例を示す要部斜視図、第2図a,
bは本発明の一実施例の要部上面図と要部側面
図、第3図a,bはスケール輝度密度関数と受光
素子感度密度関数を説明するための図、第4図は
受光素子感度密度関数を数式表現した場合の説明
図、第5図は本発明の正弦波エンコーダによつて
得られる正弦波様の信号の一例の波形図である。
1……受光素子、2……発光素子、3……セン
サハウジング、4……マスクプレート、5……ス
リツト窓、6……受光素子リード線、7……発光
素子リード線、8……スケール。
Fig. 1 is a perspective view of the main part showing a conventional example, Fig. 2 a,
b is a top view and a side view of a main part of an embodiment of the present invention, FIGS. 3a and 3b are diagrams for explaining a scale luminance density function and a light-receiving element sensitivity density function, and FIG. 4 is a diagram showing the light-receiving element sensitivity. FIG. 5, which is an explanatory diagram when the density function is expressed mathematically, is a waveform diagram of an example of a sine wave-like signal obtained by the sine wave encoder of the present invention. 1... Light receiving element, 2... Light emitting element, 3... Sensor housing, 4... Mask plate, 5... Slit window, 6... Light receiving element lead wire, 7... Light emitting element lead wire, 8... Scale .
Claims (1)
縞模様の明るい部分と暗い部分の比がいたるとこ
ろ同一であるように構成されたスケールと、該ス
ケールに対して相対運動を行ない、かつ該相対運
動方向の幅が一定であるスリツト窓を有し、該ス
リツト窓を介して前記スケールを照射する発光手
段及び、前記スリツト窓を介して前記スケールか
らの反射光を受光する受光手段とを具備し、かつ
前記受光手段の最大感度点の位置を前記スリツト
窓の領域外に配置し、前記スケールからの反射光
のうち前記スリツト窓を介して前記受光手段に到
達する前記スリツト窓からの散乱光が前記スリツ
ト窓からの直接光を上まわるような散乱光主体の
受光構造を有し、正弦波様の信号を得るようにし
たことを特徴とする正弦波エンコーダ。1. A scale that has a bright and dark striped pattern at a constant pitch and is constructed so that the ratio of bright and dark parts of the striped pattern is the same everywhere, and a scale that moves relative to the scale and It has a slit window having a constant width in the direction of relative movement, and includes a light emitting means for illuminating the scale through the slit window, and a light receiving means for receiving reflected light from the scale through the slit window. and the position of the maximum sensitivity point of the light receiving means is arranged outside the area of the slit window, and among the light reflected from the scale, scattered light from the slit window reaches the light receiving means via the slit window. 1. A sine wave encoder characterized in that the sine wave encoder has a light receiving structure that mainly receives scattered light such that the amount of light exceeds the direct light from the slit window, and is configured to obtain a sine wave-like signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56186266A JPS5886413A (en) | 1981-11-19 | 1981-11-19 | sine wave encoder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56186266A JPS5886413A (en) | 1981-11-19 | 1981-11-19 | sine wave encoder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5886413A JPS5886413A (en) | 1983-05-24 |
| JPS6253053B2 true JPS6253053B2 (en) | 1987-11-09 |
Family
ID=16185272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56186266A Granted JPS5886413A (en) | 1981-11-19 | 1981-11-19 | sine wave encoder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5886413A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63178546U (en) * | 1987-05-11 | 1988-11-18 | ||
| JPH0184227U (en) * | 1987-11-25 | 1989-06-05 | ||
| JPH0288837U (en) * | 1988-12-27 | 1990-07-13 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6325320U (en) * | 1986-08-02 | 1988-02-19 |
-
1981
- 1981-11-19 JP JP56186266A patent/JPS5886413A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63178546U (en) * | 1987-05-11 | 1988-11-18 | ||
| JPH0184227U (en) * | 1987-11-25 | 1989-06-05 | ||
| JPH0288837U (en) * | 1988-12-27 | 1990-07-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5886413A (en) | 1983-05-24 |
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