JPS6255577B2 - - Google Patents

Description

[Detailed Description of the Invention] This invention relates to an air filter, particularly an ultra-high efficiency air filter (HEPA filter).
This relates to the hermetically sealed mounting structure of the Particulate Air filter.

IC (integrated circuit), LSI (large scale integrated circuit), super
In places where the influence of dust and microorganisms floating in the air is a problem, such as LSI manufacturing plants, pharmaceutical manufacturing plants, hospital operating rooms, and treatment rooms, highly dust-free and sterile clean rooms, so-called clean rooms or bio A clean room is used.

Therefore, in order to maintain the air in a clean room in a highly clean state, it is often done to completely shield the ceiling (vertical laminar flow system) or wall surface (horizontal laminar flow system) with a bank of filter modules.

That is, before entering the clean room, the circulating air is introduced under pressure over the filter module to pass through an ultra-high performance air filter (HEPA filter), and the filtered clean air is supplied to the clean room.

The individual filter modules are designed to be fastened together and the banks are attached around a metal support frame forming a support structure, such as by riveting or welding.

To prevent air leakage between adjacent support frames, a gasket of neoprene or other similar material is typically interposed between the edge of the filter module frame and the metal support frame.

However, due to uneven tightening, deterioration of the gasket over time, etc., air leakage is unavoidable in the gasket method, and even a small leakage has a serious effect on cleanliness, especially in high-level clean rooms.

Therefore, the purpose of this invention is to provide a hermetic installation of an air filter that can completely prevent air leakage and safely maintain the cleanliness of a clean room by using a gasket method and a viscous liquid sealant. It's about providing structure.

DESCRIPTION OF THE PREFERRED EMBODIMENTS The structure of the present invention will be described below with reference to the drawings showing embodiments thereof.

FIG. 1 shows a ceiling mounting method (vertical laminar flow method) of a sealed mounting structure of the air filter of the present invention, in which a filter module 2 equipped with a HEPA filter 1 is mounted on a metal support frame 3.

The edge of the wooden frame 4 of the filter module 2 is covered with appropriately shaped metal fittings 5, and the metal support frame 3
A gasket 7 made of chloroprene rubber or other similar material is interposed between the wooden frame 4 and the L-shaped metal fitting 6. Hardware 6 and gasket 7
The groove formed by the filter module 2 and the metal support frame 3 are sealed with a viscous liquid sealant 8, and the filter module 2 and the metal support frame 3 are completely sealed.

FIGS. 2 to 4 show other embodiments of the air filter mounting structure of the present invention, in which the shape of the hardware 5 is changed as appropriate.

3 and 4, the shape of the metal fitting 5 is such that it covers the entire edge of the wooden frame 4, and in this case, the gasket 7 is interposed between the metal 5 and the L-shaped metal fitting 6. be done.

In the above embodiment, a ceiling mounting method (vertical laminar flow method) has been described, but it is also possible to implement a vertical wall mounting method (horizontal laminar flow method).

Next, the effects of this invention configured as described above will be explained.

As shown in Figure 1, the circulating air is as shown by the arrow.
It passes through a HEPA filter 2, is cleaned and introduced into a clean room 9. At this time, a part of the circulating air does not pass through the HEPA filter 1 and flows into the wooden frame 4 side of the filter module 2.

However, since the mounting structure of the filter module 2 to the metal support frame 3 is a sealed structure that uses both the gasket method and the viscous liquid sealant as described above, this circulating air is leaked into the clean room 9.
There is no risk of leakage to the side.

Furthermore, if the liquid sealant 8 is in direct contact with the wooden frame 4 of the filter module 2, the liquid sealant 8 will penetrate into the wooden frame 4 within 1 to 2 years after the filter module 2 is installed, and the wooden frame will become damaged. However, in the structure of this invention, since the metal fittings 5 are attached to the edges of the wooden frame 4, the liquid sealant 8 is applied directly to the wooden frame 4. 4, thereby preventing cracks in the wooden frame 4 due to penetration of the liquid sealant 8, and there is no risk of air leakage to the clean room 9 side.

As described above, according to the air filter airtight mounting structure of the present invention, leakage of circulating air from the mounting portion of the filter module 2 to the metal support frame 3 is completely prevented, and the air in the clean room is kept at a high level. Can be kept clean.

[Brief explanation of the drawing]

The drawings show an embodiment of the air filter airtight mounting structure of the present invention. FIG. 1 is an explanatory diagram showing how the filter module is attached to the metal support frame, and FIGS. 2, 3, and 4 show the filter module when the shape of the metal parts is changed in various ways. It is an explanatory view showing a state where Yule is attached to a metal support frame. 2... Filter module, 3... Metal support frame, 4... Wooden frame, 5... Hardware, 5... L-shaped hardware,
7...Gasket, 8...Liquid sealant.

Claims (1)

[Claims] 1. A suitably shaped metal fitting 5 is attached to the edge of the wooden frame 4 of the filter module 2, and an L-shaped metal fitting 6 is attached to the end of the metal support frame 3 in close contact with the filter module 2. Sealing of an air filter characterized in that it is attached to an L-shaped metal fitting 6 of a support frame 3 with a gasket 7 interposed therebetween, and a groove formed by the metal fitting 5, L-shaped metal fitting 6, and gasket 7 is sealed with a liquid sealant 8. Mounting structure.