JPS626169B2 - - Google Patents
Info
- Publication number
- JPS626169B2 JPS626169B2 JP11988881A JP11988881A JPS626169B2 JP S626169 B2 JPS626169 B2 JP S626169B2 JP 11988881 A JP11988881 A JP 11988881A JP 11988881 A JP11988881 A JP 11988881A JP S626169 B2 JPS626169 B2 JP S626169B2
- Authority
- JP
- Japan
- Prior art keywords
- vibration detection
- metal base
- adhesive
- detection device
- coating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】
本発明は自動車のエンジン等の振動を検出する
振動検知装置に関するもので、信頼性および量産
性の向上を図ることを目的としたものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vibration detection device for detecting vibrations of an automobile engine, etc., and is intended to improve reliability and mass productivity.
本出願人は、第１図に示すようなこの種の振動
検知装置について既に提案している。この振動検
知装置は、圧電振動検知素子１、金属基台２、導
電層１０を有するセラミツク基板３、信号取り出
し線４、押え板５、ネジ６、信号取り出し線４を
基板３の導電層１０に接続するハンダ部７、板状
金属電極片８、ハンダ層９により構成され、この
装置が取付けられた物体の振動にともない圧電振
動検知素子１の出力が信号取り出し線４を介して
取り出される。 The applicant has already proposed this type of vibration detection device as shown in FIG. This vibration detection device includes a piezoelectric vibration detection element 1, a metal base 2, a ceramic substrate 3 having a conductive layer 10, a signal extraction line 4, a holding plate 5, a screw 6, and a signal extraction line 4 connected to the conductive layer 10 of the substrate 3. It is composed of a connecting solder part 7, a plate-shaped metal electrode piece 8, and a solder layer 9, and the output of the piezoelectric vibration sensing element 1 is taken out via a signal take-out line 4 as the object to which this device is attached vibrates.
ところでこの種の振動検知装置がたとえば自動
車のエンジンに取り付けられ、そのエンジンのノ
ツキング状態を検出する装置として用いられる場
合には−40℃〜＋130℃程度の温度変化に対して
も安定に動作しなくてはならない。しかし上述し
た振動検知装置は、板状金属片電極８ではさまれ
た圧電振動検出素子１の金属基台２との絶縁を金
属基台２上に接着剤１１で貼り付けたセラミツク
基板３により行なつている。 By the way, when this type of vibration detection device is attached to, for example, a car engine and used as a device to detect the knocking state of the engine, it does not operate stably even when the temperature changes from -40℃ to +130℃. must not. However, in the above-mentioned vibration detection device, insulation between the piezoelectric vibration detection element 1 sandwiched between the plate-shaped metal piece electrodes 8 and the metal base 2 is performed using the ceramic substrate 3 attached to the metal base 2 with an adhesive 11. It's summery.
このようにセラミツク基板３の貼り付けに接着
剤１１を用いることは、温度変化に対する接着剤
１１の部分の信頼性を低下させる原因となる。ま
た接着剤１１で貼り付ける工程は作業性が悪く、
量産には適していない。 Using the adhesive 11 to attach the ceramic substrate 3 in this way causes a decrease in the reliability of the adhesive 11 against temperature changes. In addition, the process of pasting with adhesive 11 has poor workability.
Not suitable for mass production.
本発明は上記欠点を除去し、耐温度の信頼性を
高めると共に生産の容易な振動検知装置を提供す
ることを目的とする。 It is an object of the present invention to provide a vibration detection device that eliminates the above-mentioned drawbacks, improves the reliability of temperature resistance, and is easy to produce.
以下にその実施例とともに本発明について説明
する。第２図において、１，２，４，５，６，
７，８はそれぞれ第１図における同符号のものに
対応する。第１図に示した装置と異なるのはセラ
ミツク基板３を取り除き、信号取り出し線４を板
状金属電極片８にハンダ部７で結合させ、かつ板
状金属電極片８に面した金属基台２に板状セラミ
ツクコーテイング皮膜１２が設けられたことであ
る。 The present invention will be described below along with examples thereof. In Figure 2, 1, 2, 4, 5, 6,
7 and 8 correspond to the same reference numerals in FIG. 1, respectively. What is different from the device shown in FIG. 1 is that the ceramic substrate 3 is removed, the signal output line 4 is connected to the plate-shaped metal electrode piece 8 with a solder part 7, and the metal base 2 faces the plate-shaped metal electrode piece 8. A plate-shaped ceramic coating film 12 is provided on the surface.
このセラミツクコーテイング皮膜１２は接着剤
を用いることなく化学蒸着法、物理蒸着法、溶射
法によつて金属基台２の表面に形成され、強固で
安定な絶縁皮膜として機能する。 This ceramic coating film 12 is formed on the surface of the metal base 2 by chemical vapor deposition, physical vapor deposition, or thermal spraying without using an adhesive, and functions as a strong and stable insulating film.
上述した構成の実施例において、第１図に示す
この種の装置のように接着剤を用いていないため
温度変化に対する信頼性を向上させることができ
る。また接着剤を用いて電極片等を接着すること
なく、多数の金属基台２へ直接にかつ同時にセラ
ミツクコーテイング皮膜１２を形成できるため量
産性にすぐれている。 In the embodiment of the above-described configuration, reliability against temperature changes can be improved because no adhesive is used as in this type of device shown in FIG. Furthermore, the ceramic coating film 12 can be formed directly and simultaneously on a large number of metal bases 2 without using an adhesive to bond electrode pieces, etc., so that mass productivity is excellent.
なお上記実施例においてセラミツクコーテイン
グ皮膜としてTiO2を含んだセラミツクを用いる
こともできる。また金属基台２は振動検知装置の
筐体に固定されて使用されるが、その金属基台２
は上記筐体の一部として用いることもできる。 In the above embodiments, a ceramic containing TiO 2 may also be used as the ceramic coating film. Furthermore, the metal base 2 is used while being fixed to the housing of the vibration detection device;
can also be used as part of the casing.
以上の説明から明らかなように本発明による振
動検知装置は接着材を使用することなく、セラミ
ツクコーテイング皮膜を設けた金属基台に圧電振
動検知素子を固定するようにしているため、温度
変化に対する信頼性が向上し、かつ接着材を用い
てセラミツク基板を介在させたものに比して量産
性に富んでいる特徴がある。 As is clear from the above explanation, the vibration sensing device according to the present invention does not use adhesive, but has a piezoelectric vibration sensing element fixed to a metal base provided with a ceramic coating, so it is reliable against temperature changes. It has the characteristics that it has improved properties and is more easily mass-produced than the one in which a ceramic substrate is interposed using an adhesive.
第１図ａは本出願人が提案している振動検知装
置の側断面図、同図ｂは同平面図、第２図ａは本
発明の一実施例による振動検知装置の側断面図、
同図ｂは同平面図である。
１……圧電振動検知素子、２……金属基台、６
……ビス、１２……セラミツクコーテイング皮
膜。
FIG. 1a is a side sectional view of a vibration detection device proposed by the present applicant, FIG. 1b is a plan view thereof, and FIG.
Figure b is a plan view of the same. 1...Piezoelectric vibration sensing element, 2...Metal base, 6
...screw, 12...ceramic coating film.
Claims (1)
膜を設け、上記セラミツクコーテイング皮膜を介
在させて圧電振動検出素子を前記金属基台に取付
けたことを特徴とする振動検知装置。1. A vibration detection device characterized in that a ceramic coating film is provided on the surface of a metal base, and a piezoelectric vibration detection element is attached to the metal base with the ceramic coating film interposed therebetween.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56119888A JPS5821127A (en) | 1981-07-29 | 1981-07-29 | Detector for oscillation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56119888A JPS5821127A (en) | 1981-07-29 | 1981-07-29 | Detector for oscillation |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60128742A Division JPS6117029A (en) | 1985-06-13 | 1985-06-13 | vibration detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5821127A JPS5821127A (en) | 1983-02-07 |
| JPS626169B2 true JPS626169B2 (en) | 1987-02-09 |
Family
ID=14772712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56119888A Granted JPS5821127A (en) | 1981-07-29 | 1981-07-29 | Detector for oscillation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5821127A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5850436A (en) * | 1981-09-21 | 1983-03-24 | Toyota Motor Corp | Knocking sensor |
-
1981
- 1981-07-29 JP JP56119888A patent/JPS5821127A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5821127A (en) | 1983-02-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5076147A (en) | Pressure sensor including a diaphragm having a protective layer thereon | |
| JPH0220650Y2 (en) | ||
| JPS62191730A (en) | Pressure sensor | |
| WO1999060413A1 (en) | Acceleration sensor and acceleration apparatus using acceleration sensor | |
| JPS6332333A (en) | Pressure measuring can | |
| JPS626169B2 (en) | ||
| US4441370A (en) | Vibration sensor | |
| JP3123798B2 (en) | Pressure detector | |
| JPS5892915A (en) | vibration detection device | |
| JP2572864Y2 (en) | Pyroelectric infrared detector | |
| JPS5968290U (en) | Electronic wristwatch with thermometer | |
| JPH0116016Y2 (en) | ||
| JPS5895224A (en) | Infrared ray detector | |
| JPH0810202B2 (en) | Gas detection method | |
| JPH06249706A (en) | Piezoelectric oscillation sensor | |
| JPH10185641A (en) | Sensor, sensor element support substrate and substrate body | |
| JPH02177503A (en) | Thin film temperature sensor | |
| JPS6230396Y2 (en) | ||
| JPH05264383A (en) | Electric capacitance type silicon pressure sensor | |
| JP2002310832A (en) | Capacitive pressure sensor | |
| JP2694710B2 (en) | Pyroelectric element and manufacturing method thereof | |
| JPS59109959U (en) | Piezoelectric acceleration pick-up | |
| JPS6123867Y2 (en) | ||
| KR0117683Y1 (en) | Thin Film Silicon (Si) Substrate Sensor Using Direct Bonding of Silicon Substrate | |
| JPH10170541A (en) | Vibration acceleration sensor |