JPS63109991A - Arm drive mechanism of rectangular coordinate type robot for clean room - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed Description of the Invention (Field of Industrial Application) The present invention relates to an industrial robot used in a clean room, and in particular to an arm drive system for a Cartesian coordinate robot that can reliably prevent the generation of dust! ! 1′! ! Regarding 4.

(Prior Art and its Problems) Conventionally, many of this type of clean room robots have been articulated robots. In articulated robots,
By sealing each joint, dust generation could be prevented and cleanliness could be achieved relatively easily. On the other hand, in the case of Cartesian coordinate robots, there have been examples of using non-volatile grease in the guide system and examples of sealing the guide system with bellows, but generally the cleanliness has not been sufficient.

In other words, in the conventional rectangular coordinate robot for clean rooms mentioned above, if non-volatile grease is used, the guide, which is a source of dust, is not sealed, so the cleaning effect is small, and the guide system is not sealed with bellows. Class 10 because the bellows itself becomes a source of dust even if it is sealed.
There was a problem that about 0 was the technical limit.

(Means for Solving the Problems) In order to solve the above-mentioned problems, the arm drive mechanism of the Cartesian coordinate robot for clean rooms provided by the present invention includes a slide shaft and ends fixed to both ends of the slide shaft. It consists of a plate, a linear motor scale attached between each end plate, a movable body slidably attached to the slide shaft via an air bearing, and a linear motor slider fixed to this movable body. , the linear motor scale is mounted parallel to the slide shaft, the linear motor slider and the linear motor scale face each other with a small gap, and the moving body includes the air bearing. It is characterized by having an intake port for sucking air.

(Example) Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a side view of the arm drive mechanism of the Cartesian coordinate robot for clean rooms according to the embodiment of the present invention, and FIG. FIG. 3 is a perspective view of a clean room rectangular coordinate robot formed by combining two arm drive mechanisms shown in FIG. 1.

As shown in FIG. 1, end plates 2a and 2b are fixed to both ends of the slide shaft 1a.

A linear motor scale 3a is fixed between the end plates 2a and 2b so as to be parallel to the slide shaft 1a. A moving body 7a is slidably attached to the slide shaft 1a via air bearings 5a and 5b. A linear motor slider 4a is fixed to this moving body 7a (Fig. 2).The linear motor scale 3a and the linear motor slider 4a face each other, and the linear motor slider 4a is fixed to the moving body 7a. A slide shaft 1a passes through air bearings 5a and 5b of the body 7a.

1b, so as to have a smaller gap therebetween. The appropriate gap amount between the linear motor scale 3a and the linear motor slider 4a is about 50 μm. The moving body 7a is provided with an intake port 6 for sucking air into the air bearings 5a, 5b. Since the inner diameter of the air bearings 5a, 5b is larger than the diameter of the slide shafts 1a, 1b, when air is sucked from the intake port 6, the air bearings 5a, 5b and the slide shaft 1
A and 1b are in a non-contact state.

Next, the operation will be explained.

When clean air is supplied into the air bearings 5a, 5b from the intake port 6 attached to the moving body 7a, the air bearings 5a, 5b become suspended from the slide shafts Ia, 1b. In this state, the linear motor slider 4a also moves to the linear motor scale 3.
From a to flt, an appropriate gap is maintained.

When the linear motor slider 4a is energized and the linear motor slider 4a is driven straight on the linear morph school 3a, the slide shafts la and Ib and the air bearings 5a and 5b, and the linear motor scale 3a and the linear motor slider 4a are brought into non-contact with each other. Make a straight movement in the state.

According to the arm drive mechanism of the rectangular coordinate robot for clean rooms of this embodiment, air bearings 5a and 5b are used as the guide system and a linear motor is used as the drive system, eliminating the need for grease, bellows, etc., and reducing dust generation. source can be removed.

(Effects of the Invention) As explained above, according to the arm drive mechanism of the rectangular coordinate robot for clean rooms of the present invention, even minute dust is not generated in the clean room.

[Brief explanation of the drawing]

FIG. 1 is a side view of the arm drive mechanism of the Cartesian coordinate robot for clean rooms according to the embodiment of the present invention, and FIG. FIG. 3 is a perspective view of a clean room rectangular coordinate robot formed by combining two arm drive mechanisms shown in FIG. 1. 18~1d...Slide shaft, 28~2d...
End plate, 3a, 3b...Linear motor scale, 4a, 4b...Linear motor slider, 58
~5d...Air bearing, 6...Intake port, 7a
, 7b...mobile object.

Claims (1)

[Claims] a slide shaft, an end plate fixed to both ends of the slide shaft, a linear motor scale attached between each of the end plates, and a movable body slidably attached to the slide shaft via an air bearing; It consists of a linear motor slider fixed to this moving body, the linear motor scale is attached parallel to the slide shaft, and the linear motor slider and the linear motor scale are mutually spaced with a slight gap. An arm drive mechanism for a rectangular coordinate robot for a clean room, characterized in that the movable body is provided with an intake port for sucking air into the air bearing.