JPS6311569B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a clean room having a locally highly clean space that is effective when used in the field of highly precise products that require a clean work space, for example, in the manufacturing process of semiconductor devices.

A clean room is a room where the amount of dust in the air is controlled to a specified level, and where environmental conditions such as temperature, humidity, and pressure can be controlled as necessary. is an essential space.

To obtain such a space, various methods are used depending on the required level, but when a cleaner space with extremely low dust concentration is required, a vertical layer as shown in Figure 1 is usually used. The current method is used. This system includes an air conditioner 1, a duct 2, a floor 3 with a lattice structure, a high-performance filter 5 placed on the entire surface of the ceiling 4, and several fans 6 installed facing each other to sandwich the high-performance filter 5. It is made up of. Air circulates through two routes between the air conditioner 1, the fan 6, the high-performance filter 5, and the floor 3, as indicated by arrows in the figure. During the process, some of the air is exhausted and fresh outside air is introduced. As described above, in this method, clean air is blown vertically downward from the entire surface of the ceiling and sucked in from the entire surface of the floor, thereby creating a clean environment throughout the interior of the work room 8 where the manufacturing equipment 7 is installed. .

However, this method requires a high-performance filter placed on the entire ceiling, a floor structure to suck air from the entire surface, and large-capacity equipment, making the entire facility including the building large-scale and requiring a large amount of equipment cost. However, it also has the disadvantage of requiring a large amount of energy for air conditioning.

SUMMARY OF THE INVENTION An object of the present invention is to eliminate the drawbacks of the prior art as described above, and to provide a clean room that can provide a necessary clean environment while significantly reducing equipment costs and air conditioning costs.

In order to achieve the above object, the present invention has the following features:
It is equipped with a partition suspended from the ceiling to surround a local space, a high-performance filter, a fan, a duct, and an air conditioner, and is configured to keep only the local space necessary to maintain the cleanliness of the product clean. It is characterized by

Hereinafter, the present invention will be explained with reference to illustrated embodiments.
FIG. 2 is an explanatory diagram for explaining the overall configuration of an embodiment of the clean room according to the present invention, and FIG.
This figure is a partially cutaway perspective view of the main part of FIG. 2. A partition 13 is suspended from the ceiling 11 of the work room 10 so as to surround a predetermined local space above the manufacturing apparatus 12. A plurality of openable and closable windows 14 are provided at regular intervals on the side surface of the partition 13. Above the space surrounded by the partition 13, a high-performance filter 15 and a rectifying plate 16 located below the high-performance filter 15 are arranged on the entire surface so as to cover this space, and a high-performance filter 16 is further arranged. A predetermined number of fans 17 are provided adjacent to the fans 15 . An air conditioner 19 is installed outside the work room 10 via a duct 18.

On the other hand, two parallel rails 21 are laid on the upper surface of the floor 20 in parallel with the partition 13, and a gondola 22 is placed on these rails 21 in close proximity to the partition 13. It is designed to be able to move freely along the partition 13. The gondola 22 has a high performance filter 24 and a fan 2 adjacent to it on the entire upper surface of the clean shower chamber 23.
5, and a window 2 that can be opened and closed, similar to the window 14 provided in the partition 13 on the surface facing the partition 13.
6.

Next, the operation of the clean room having such a configuration will be explained.

Air is supplied to the air conditioner 1 as shown by the arrow in the figure.
9, fan 17, high performance filter 15, rectifier plate 1
6, the partition 13 and the manufacturing device 12 are circulated in this order.
During the process, some air is discharged and fresh outside air is taken in. After being conditioned by an air conditioner 19, it is filtered more cleanly by a high performance filter 15, and the flow is further adjusted by a rectifying plate 16. That is, clean air becomes a laminar flow and is sent into a predetermined local space partitioned by the partition 13.

The gondola 22 has a clean shower chamber 23 in which a worker enters and performs maintenance on the manufacturing equipment 12.
It is a device for performing other manual work, and the manual work is performed by using the window 14 of the partition 13 and the window 26 of the gondola 22.
Open and do it. As is clear from Figure 2,
The interior of the gondola 22 is configured so that air circulates inside and outside the clean shower chamber 23 via a fan 25 and a high-performance filter 24, and is partially ventilated, so that the air inside the gondola 22 has a high-performance filter. After being filtered and cleaned by the filter 24, the air is blown vertically downward from the top of the clean shower chamber 23, blowing off the dust adhering to the worker who has entered the gondola 22, and keeping the worker safe at all times. Keep it clean.

In this way, the space partitioned by the partition 13 is kept clean at all times because it is cut off from the outside unless the window 14 is opened. Also, when doing manual work, the partition 13 and the clean shower room 2 are
The pressure inside partition 3 is higher than the outside, and the pressure inside partition 1
3 and the gondola 22 are close to each other, there is no fear that ambient air with poor cleanliness will flow into the partitioned space including the clean shower room 23, and the interior is always maintained in a clean state.

Note that as a result of the pressure inside the partition 13 being higher than the outside, air will not flow into the partition 13 even if the window 14 of the partition 13 is opened, so the required level of cleanliness is not so high and the work In cases where dust adhering to people or inflow of small amounts of ambient air are not a problem, the required environment can be obtained without providing the gondola 22.
Furthermore, if air conditioning is not particularly required, the air conditioner 19 may of course be omitted.

As is clear from the above description, the clean room according to the present invention includes a partition hanging down from the ceiling to surround a local space, a high-performance filter,
It is equipped with a fan and an air conditioner, and is configured to keep clean only the specified local space necessary to maintain the cleanliness of the product, so the equipment can be small-scale and small-capacity, reducing equipment costs and air conditioning. It is possible to obtain the necessary highly clean environment while reducing harmonization costs. In addition, since clean air is sent from above the manufacturing equipment, it has the effect of removing dust generated from the equipment by carrying it out of the equipment on the air flow, so it can be used as a local cleaning means for the manufacturing equipment.

[Brief explanation of the drawing]

Fig. 1 is a system explanatory diagram showing a conventional clean room, Fig. 2 is a system explanatory diagram showing an embodiment of the clean room according to the present invention, and Fig. 3 is a perspective view showing the main part of Fig. 2 with a part cut away. It is a diagram. 12... Manufacturing equipment, 13... Partition, 14...
Window, 15... High performance filter, 17... Filter, 18... Duct, 19... Air conditioner, 21
...Rail, 22...Gondola, 23...Clean shower room, 24...High performance filter, 25...
...Juan, 26...Window.

Claims (1)

[Claims] 1. A partition that hangs from the ceiling to surround a local space and has a window that can be opened and closed on the side;
A high-performance filter disposed at the top of this partition, a fan for sending air into the partition via this high-performance filter, and circulating air between the fan, the high-performance filter, and the partitioned space. an air conditioner connected via a duct, a rail laid on the floor parallel to the partition, and a rail placed slidably on the rail in close proximity to and opposite to the partition; A gondola has a window that can be opened and closed on the side facing the gondola, and a high-performance filter installed at the top of the gondola.
Similarly, the gondola is provided with a fan disposed in the upper part of the gondola to circulate air into the internal space of the gondola via a high-performance filter in the gondola, thereby forming a highly clean space in a predetermined area. A clean room characterized by being constructed so that it can move freely on rails.