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JPS63116261U - - Google Patents
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JPS63116261U - - Google Patents

Info

Publication number
JPS63116261U
JPS63116261U JP1987007185U JP718587U JPS63116261U JP S63116261 U JPS63116261 U JP S63116261U JP 1987007185 U JP1987007185 U JP 1987007185U JP 718587 U JP718587 U JP 718587U JP S63116261 U JPS63116261 U JP S63116261U
Authority
JP
Japan
Prior art keywords
surface plate
workpiece
polishing
main shaft
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987007185U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987007185U priority Critical patent/JPS63116261U/ja
Publication of JPS63116261U publication Critical patent/JPS63116261U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の研磨装置の斜視図。 1……研磨定盤、2……定盤主軸、3……加工
槽、4……加工物ヘツド、5……加工物軸、6…
…夾雑物除去機構、7……支持棒、8……刃物台
FIG. 1 is a perspective view of the polishing apparatus of the present invention. DESCRIPTION OF SYMBOLS 1... Polishing surface plate, 2... Surface plate main shaft, 3... Processing tank, 4... Workpiece head, 5... Workpiece shaft, 6...
...Contaminant removal mechanism, 7...Support rod, 8...Turret rest.

Claims (1)

【実用新案登録請求の範囲】 (1) 駆動機構によつて回転できる定盤主軸2と
、定盤主軸2の上に固着された研磨定盤1と、該
研磨定盤1と一体に取付けられた加工槽3と、下
面に被加工物を貼付けるべき加工物へツド4と、
加工物ヘツド4を下端に固着してあり上下変位が
自由で回転力を加えられて回転する加工物軸5と
、研磨定盤1の上面に接触するように懸架された
夾雑物除去機構6とより構成される事を特徴とす
る研磨装置。 (2) 夾雑物除去機構6が、刷毛である事を特徴
とする実用新案登録請求の範囲第(1)項記載の研
磨装置。
[Claims for Utility Model Registration] (1) A surface plate main shaft 2 that can be rotated by a drive mechanism, a polishing surface plate 1 fixed on the surface plate main shaft 2, and a polishing surface plate 1 that is attached integrally with the polishing surface plate 1. a processing tank 3, a tube 4 for a workpiece to which a workpiece is to be pasted on the bottom surface;
A workpiece shaft 5 has a workpiece head 4 fixed to its lower end and can be freely moved up and down and rotates when a rotational force is applied; A polishing device characterized by comprising: (2) The polishing device according to claim (1), wherein the contaminant removal mechanism 6 is a brush.
JP1987007185U 1987-01-21 1987-01-21 Pending JPS63116261U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987007185U JPS63116261U (en) 1987-01-21 1987-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987007185U JPS63116261U (en) 1987-01-21 1987-01-21

Publications (1)

Publication Number Publication Date
JPS63116261U true JPS63116261U (en) 1988-07-27

Family

ID=30790407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987007185U Pending JPS63116261U (en) 1987-01-21 1987-01-21

Country Status (1)

Country Link
JP (1) JPS63116261U (en)

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