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JPS6313927B2 - - Google Patents
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JPS6313927B2 - - Google Patents

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Publication number
JPS6313927B2
JPS6313927B2 JP12252384A JP12252384A JPS6313927B2 JP S6313927 B2 JPS6313927 B2 JP S6313927B2 JP 12252384 A JP12252384 A JP 12252384A JP 12252384 A JP12252384 A JP 12252384A JP S6313927 B2 JPS6313927 B2 JP S6313927B2
Authority
JP
Japan
Prior art keywords
ozone
adsorption
desorption tower
intermittent
supply device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12252384A
Other languages
Japanese (ja)
Other versions
JPS60264310A (en
Inventor
Masaji Matsumoto
Hideki Kitamura
Yoshiaki Wakitani
Akira Usui
Kenju Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp, Kawasaki Steel Corp filed Critical Mitsubishi Electric Corp
Priority to JP12252384A priority Critical patent/JPS60264310A/en
Publication of JPS60264310A publication Critical patent/JPS60264310A/en
Publication of JPS6313927B2 publication Critical patent/JPS6313927B2/ja
Granted legal-status Critical Current

Links

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  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は間欠オゾン供給装置に関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an intermittent ozone supply device.

〔従来技術〕[Prior art]

発電所や化学工業等には多量の冷却水が使用さ
れているが、用水中の微生物や藻類によつてスラ
イム障害が発生し、管路の閉塞や熱交換率の低下
が起こる。これらの防止策として、高濃度のオゾ
ン水の適用が考慮されている。この高濃度のオゾ
ン水を生成するためには、大容量のオゾン発生機
を用いて生成するよりも、小形で小容量のオゾン
発生機を用いて、生成したオゾンを吸着剤に長期
間にわたつて蓄積し、この蓄積したオゾンを吸着
剤から一度に取り出し、高濃度オゾン水を生成す
るいわゆる間欠オゾン供給装置が設備費および運
転費用の点から有利である。
A large amount of cooling water is used in power plants, chemical industries, etc., but microorganisms and algae in the water cause slime problems, clogging pipes and reducing heat exchange efficiency. As a preventive measure against these problems, the application of highly concentrated ozonated water is being considered. In order to generate this highly concentrated ozone water, rather than using a large-capacity ozone generator, it is necessary to use a small, small-capacity ozone generator and use the generated ozone as an adsorbent for a long period of time. A so-called intermittent ozone supply device, which removes the accumulated ozone from an adsorbent at once to produce highly concentrated ozone water, is advantageous in terms of equipment costs and operating costs.

従来の代表的な間欠オゾン供給装置の一例を図
について説明する。図は従来の間欠オゾン供給装
置を示すフロー図であり、図において、1はオゾ
ン発生機、2はこのオゾン発生機で発生したオゾ
ンを吸着して蓄積するオゾン吸脱着塔、3はこの
オゾン吸脱着塔から酸素ガスをオゾン発生機1に
循環する循環ブロア、4はオゾン発生機1に酸素
を供給する酸素供給装置、5a,5bはリサイク
ル弁、5cはエゼクタ弁、6はオゾン吸脱着塔2
加熱用の熱媒体槽、7はこの熱媒体槽に設けられ
た電気ヒータ、8は熱媒体槽6からオゾン吸脱着
塔2に熱媒体を供給する熱媒体ポンプ、9はオゾ
ン吸脱着塔2冷却用の冷凍機、10はオゾン吸脱
着塔2からオゾンを吸引する水流エゼクタ、11
はこのエゼクタに被処理水を供給するエゼクタポ
ンプ、12は逆止弁、13は安全弁、14はオゾ
ン吸脱着塔内温度指示調節計である。
An example of a typical conventional intermittent ozone supply device will be explained with reference to the drawings. The figure is a flow diagram showing a conventional intermittent ozone supply device. In the figure, 1 is an ozone generator, 2 is an ozone adsorption/desorption tower that adsorbs and accumulates ozone generated by this ozone generator, and 3 is this ozone absorber. A circulation blower circulates oxygen gas from the desorption tower to the ozone generator 1, 4 is an oxygen supply device that supplies oxygen to the ozone generator 1, 5a and 5b are recycle valves, 5c is an ejector valve, and 6 is an ozone adsorption/desorption tower 2
A heating medium tank 7 is an electric heater provided in this heating medium tank, 8 is a heating medium pump that supplies the heating medium from the heating medium tank 6 to the ozone adsorption/desorption tower 2, and 9 is a cooling device for the ozone adsorption/desorption tower 2. 10 is a water jet ejector for sucking ozone from the ozone adsorption/desorption tower 2;
12 is a check valve, 13 is a safety valve, and 14 is an ozone adsorption/desorption tower internal temperature indicating controller.

オゾン吸脱着塔2は二重筒になつており、その
うち内筒にはオゾン吸着剤が充填され、内筒と外
筒の間にはジヤケツトが形成されて、熱媒体が昇
温時に充填され、熱媒体槽6に連絡している。ま
た内筒には蒸発管が巻かれ、冷凍機9に連絡して
いる。オゾン吸着剤は一般にシリカゲルが用いら
れ、熱媒体としてはエチレングリコール、アルコ
ール類等が使用されている。
The ozone adsorption/desorption tower 2 has a double cylinder structure, of which the inner cylinder is filled with an ozone adsorbent, a jacket is formed between the inner cylinder and the outer cylinder, and a heat medium is filled when the temperature is raised. It is connected to the heat medium tank 6. Further, an evaporation tube is wound around the inner cylinder and is connected to the refrigerator 9. Silica gel is generally used as the ozone adsorbent, and ethylene glycol, alcohols, etc. are used as the heat medium.

なお上記リサイクル弁5a、循環ブロア3、オ
ゾン発生機1、リサイクル弁5b、オゾン吸脱着
塔2の順に1つの循環系を構成している。
The recycle valve 5a, the circulation blower 3, the ozone generator 1, the recycle valve 5b, and the ozone adsorption/desorption tower 2 constitute one circulation system.

次に動作について説明する。この動作にはオゾ
ンの吸着動作および脱着動作の2動作が主として
ある。
Next, the operation will be explained. This operation mainly includes two operations: an ozone adsorption operation and an ozone desorption operation.

初めに吸着動作について説明する。酸素供給装
置4より循環系内に常時一定の圧力で酸素を供給
する。リサイクル弁5a,5bは開き、エゼクタ
弁5cは閉じている。循環ブロア3により循環系
内に酸素を流通させると、オゾン発生機1の放電
空隙中を通過する間に無声放電により酸素の一部
がオゾンに変換されて、オゾン化酸素となる。こ
のオゾン化酸素はオゾン吸脱着塔2へ搬送され
る。オゾン吸脱着塔2内のオゾン吸着剤は、オゾ
ンを選択的に吸着し、残りの酸素は、リサイクル
弁5aを通り循環ブロア3によりオゾン発生機1
に返送される。オゾンとして消費された酸素は、
酸素供給装置4より適宜補充される。このときオ
ゾン吸着剤の温度は冷凍機9により−30℃以下に
冷却されている。冷凍機9は圧縮機により熱媒体
のフロンまたはアンモニアガスを高温、高圧に圧
縮し、凝縮機で水または空気により熱交換し冷却
された熱媒体は膨張弁で膨張し、オゾン吸脱着塔
2内で蒸発して吸着剤を冷却する。上記オゾン吸
着剤のオゾン吸着量は温度により大きく変化す
る。例えば温度を低くするとオゾンの吸着量は増
加し、逆に温度が上昇するとオゾンの吸着量は減
少する。したがつてオゾンを脱着する時はオゾン
吸着剤の温度を上昇させる。
First, the suction operation will be explained. Oxygen is constantly supplied into the circulation system from the oxygen supply device 4 at a constant pressure. The recycle valves 5a and 5b are open, and the ejector valve 5c is closed. When oxygen is passed through the circulation system by the circulation blower 3, part of the oxygen is converted into ozone by silent discharge while passing through the discharge gap of the ozone generator 1, and becomes ozonized oxygen. This ozonized oxygen is transported to the ozone adsorption/desorption tower 2. The ozone adsorbent in the ozone adsorption/desorption tower 2 selectively adsorbs ozone, and the remaining oxygen is passed through the recycle valve 5a and sent to the ozone generator 1 by the circulation blower 3.
will be returned to. Oxygen consumed as ozone is
The oxygen is replenished from the oxygen supply device 4 as appropriate. At this time, the temperature of the ozone adsorbent is cooled down to −30° C. or lower by the refrigerator 9. The refrigerator 9 uses a compressor to compress the heat medium, fluorocarbon or ammonia gas, to high temperature and high pressure, and the condenser exchanges heat with water or air. The adsorbent is cooled by evaporation. The amount of ozone adsorbed by the ozone adsorbent varies greatly depending on the temperature. For example, when the temperature is lowered, the amount of ozone adsorbed increases, and conversely, when the temperature is raised, the amount of ozone adsorbed is decreased. Therefore, when desorbing ozone, the temperature of the ozone adsorbent is increased.

オゾン吸脱着塔2のオゾン吸着剤がオゾン飽和
吸着量近くまで吸着すると脱着動作へ移行する。
脱着動作ではオゾン発生機1、循環ブロア3、冷
凍機9が稼動を停止し、リサイクル弁5a,5b
が閉じ、熱媒体ポンプ8が稼動して吸脱着塔2内
の昇温を開始する。熱媒体層6内は電気ヒータ7
により常に一定の温度になるようにコントロール
されている。この状態を予備加熱という。
When the ozone adsorbent in the ozone adsorption/desorption tower 2 adsorbs nearly the saturated amount of ozone, it shifts to the desorption operation.
During the desorption operation, the ozone generator 1, circulation blower 3, and refrigerator 9 stop operating, and the recycle valves 5a and 5b stop operating.
is closed, and the heat medium pump 8 is operated to start raising the temperature inside the adsorption/desorption tower 2. Inside the heat medium layer 6 is an electric heater 7
The temperature is always controlled to be constant. This state is called preheating.

吸脱着塔2内の温度がある一定値になると、エ
ゼクタポンプ11が起動すると同時に、水流エゼ
クタ10が吸い込み動作を開始し、エゼクタ弁5
cが開き吸脱着塔2内のオゾンを減圧、吸引しな
がら水流エゼクタ10で水とオゾンとを混合して
オゾン水として使用箇所へ送給する。かくして、
吸脱着塔2内のオゾンが残り少なくなると脱着期
間が終了し、再び初期の吸着動作へと移行して連
続的に運転が繰り返される。また各機器に異常が
発生した場合、全機器が即時に停止するようにな
つている。
When the temperature inside the adsorption/desorption tower 2 reaches a certain value, the ejector pump 11 starts and at the same time, the water ejector 10 starts the suction operation, and the ejector valve 5
c is opened and the ozone in the adsorption/desorption tower 2 is depressurized and sucked, while the water and ozone are mixed in the water jet ejector 10 and sent to the point of use as ozonated water. Thus,
When less ozone remains in the adsorption/desorption tower 2, the desorption period ends, and the operation returns to the initial adsorption operation, and the operation is repeated continuously. Additionally, if any abnormality occurs in any device, all devices are immediately shut down.

従来の間欠オゾン供給装置は以上のように構成
されているので、構成機器のうちの1つに異常が
出た場合、全機器が停止し、これによりオゾン吸
脱着塔2内の温度が上昇して、リサイクル系全体
が昇圧状態となるため、設計条件の仕様を上げな
ければならず、また安全弁13からオゾン化酸素
を放出するため、その危険性および経済性に欠け
るという欠点があつた。
Since the conventional intermittent ozone supply device is configured as described above, if an abnormality occurs in one of the component devices, all devices will stop, and the temperature inside the ozone adsorption/desorption tower 2 will rise. Since the entire recycling system is in a pressurized state, specifications of design conditions must be increased, and since ozonized oxygen is released from the safety valve 13, there are disadvantages in that it is dangerous and lacks economic efficiency.

〔発明の概要〕[Summary of the invention]

この発明は上記のような従来の欠点を除去する
目的でなされたもので、オゾン吸脱着塔の冷却機
器は他の機器に異常が発生した場合でも稼動し
て、オゾン吸着時の温度に制御することにより、
機器に異常が発生した場合でも停止する機器を選
択し、これによりオゾン吸脱着塔内温度を上昇さ
せないでリサイクル系内の昇圧を防ぎ、信頼性が
高く、経済的で、しかも危険性の少ない間欠オゾ
ン供給装置を提供するものである。
This invention was made with the aim of eliminating the above-mentioned drawbacks of the conventional ozone adsorption/desorption tower, and the cooling equipment for the ozone adsorption/desorption tower operates even if an abnormality occurs in other equipment to control the temperature at the time of ozone adsorption. By this,
By selecting equipment that will shut down even if a malfunction occurs in the equipment, this will prevent the pressure increase in the recycling system without increasing the temperature inside the ozone adsorption/desorption tower, making intermittent operation highly reliable, economical, and less dangerous. The present invention provides an ozone supply device.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明を図について説明する。図は本発
明の一実施例をも示す。図において、基本的な構
成は従来のものと同様であるが、循環ブロア3、
リサイクル弁5a,5bおよび冷凍機9からなる
オゾン吸脱着塔2の冷却機器は、他の機器に異常
が発生した場合でも稼動し、これらの機器に異常
が発生した場合には、他の機器とともに停止する
ようになつている。リサイクル弁5a,5bは非
通電時閉のものが使用されている。他の構成は従
来のものと同様である。
The invention will now be explained with reference to the figures. The figure also shows an embodiment of the invention. In the figure, the basic configuration is the same as the conventional one, but a circulation blower 3,
The cooling equipment of the ozone adsorption/desorption tower 2, which consists of the recycling valves 5a and 5b and the refrigerator 9, continues to operate even if an abnormality occurs in other equipment. It's starting to stop. The recycle valves 5a and 5b are closed when not energized. The other configurations are the same as the conventional one.

上記のように構成された間欠オゾン供給装置に
おいては、基本的な動作は従来のものと同様であ
る。間欠オゾン供給装置の動作の3つの工程、す
なわちオゾン吸着、予備加熱、オゾン脱着のう
ち、大部分がオゾン吸着工程である。この工程時
に異常が発生すると、吸脱着塔2内の温度が−30
℃以下の状態で冷凍機9が止まるため、昇温が始
まる。この場合、リサイクル弁5a,5bが非通
電時間のものであれば、リサイクル弁全体が昇圧
され、圧力は正常時の3〜5倍程度にもなるた
め、各機器の仕様を上げる必要がある。このため
本発明では、異常の発生機器によりその停止機器
を選択し、少なくともオゾン吸脱着塔2内の昇圧
を防ぐものである。
In the intermittent ozone supply device configured as described above, the basic operation is the same as that of the conventional one. Of the three steps of operation of the intermittent ozone supply device, namely ozone adsorption, preheating, and ozone desorption, most of them are ozone adsorption steps. If an abnormality occurs during this process, the temperature inside the adsorption/desorption tower 2 will drop to -30°C.
Since the refrigerator 9 stops when the temperature is below ℃, the temperature starts to rise. In this case, if the recycle valves 5a and 5b are in the non-energized state, the entire recycle valve will be pressurized and the pressure will be about 3 to 5 times the normal pressure, so it is necessary to improve the specifications of each device. Therefore, in the present invention, the equipment to be stopped is selected depending on the equipment that causes the abnormality, and at least the pressure increase in the ozone adsorption/desorption tower 2 is prevented.

図において、オゾン発生機1、酸素供給装置
4、熱媒体ポンプ8、エゼクタポンプ11、およ
びエゼクタ弁5cのうちどれかが異常を起こした
場合には、これらは全部停止するが、循環ブロア
3、リサイクル弁5a,5bおよび冷凍機9は稼
動し、これによりオゾン吸着温度を−30℃以下に
コントロールすることができる。
In the figure, if any of the ozone generator 1, oxygen supply device 4, heat medium pump 8, ejector pump 11, and ejector valve 5c develops an abnormality, all of them stop, but the circulation blower 3, The recycle valves 5a, 5b and the refrigerator 9 are operated, thereby making it possible to control the ozone adsorption temperature to -30°C or lower.

次に、循環ブロア3、リサイクル弁5a,5b
および冷凍機9はこれらのうちどれかが異常発生
した場合は、他の機器とともに停止し、これによ
り装置の全機器が停止する。このときリサイクル
弁5a,5bは非通電時閉のものを使用している
ので、上記3つの機器に異常が発生したとして
も、リサイクル系内に昇圧は起こらず、オゾン吸
脱着塔2内の昇温による昇圧は安全弁13により
系外へ放出される。
Next, the circulation blower 3, recycle valves 5a, 5b
If any abnormality occurs in the refrigerator 9, the refrigerator 9 stops together with the other equipment, thereby stopping all the equipment in the apparatus. At this time, the recycling valves 5a and 5b are closed when energized, so even if an abnormality occurs in the three devices mentioned above, no pressure rise will occur in the recycling system, and the pressure rise in the ozone adsorption/desorption tower 2 will not increase. The pressure increase due to temperature is released to the outside of the system by the safety valve 13.

なお、上記実施例ではオゾン吸脱着塔2の冷却
機器として循環ブロア3、リサイクル弁5a,5
b、および冷凍機9のグループを同様に動作させ
たが、冷凍機9単独で温度の制御が可能な場合は
冷凍機9のみを冷却機器として前記動作を行わせ
てもよい。またこの発明は冷却水のみならず、他
の液体等にオゾンを供給する場合にも適用可能で
ある。
In the above embodiment, a circulation blower 3 and recycle valves 5a, 5 are used as cooling equipment for the ozone adsorption/desorption tower 2.
b and the group of refrigerators 9 were operated in the same manner, but if the temperature can be controlled by the refrigerator 9 alone, the above operation may be performed using only the refrigerator 9 as a cooling device. Further, the present invention is applicable not only to cooling water but also to the case where ozone is supplied to other liquids.

〔発明の効果〕〔Effect of the invention〕

以上のとおりこの発明によれば、オゾン吸脱着
塔の冷却機器は他の機器の異常発生時にも稼動す
るようにしたので、異常発生時吸脱着塔の冷却機
器以外の異常であれば最低限オゾン吸脱着塔の冷
却を行うことができ、またリサイクル弁として非
通電時閉のものを用いると、リサイクル系内の昇
圧は起こらず、このため信頼性が高く、安価で危
険の少ない装置を提供することができる。
As described above, according to this invention, the cooling equipment of the ozone adsorption/desorption tower is made to operate even when an abnormality occurs in other equipment. The adsorption/desorption tower can be cooled, and if a recycle valve that is closed when not energized is used, no pressure increase occurs in the recycle system, thus providing a highly reliable, inexpensive, and less dangerous device. be able to.

【図面の簡単な説明】[Brief explanation of the drawing]

図は従来およびこの発明の一実施例による間欠
オゾン供給装置を示すフロー図である。 図において、1はオゾン発生機、2は吸脱着
塔、3は循環ブロア、4は酸素供給装置、5a,
5bはリサイクル弁、6は熱媒体層、7は電気ヒ
ータ、8は熱媒体ポンプ、9は冷凍機、10はエ
ゼクタ、11はエゼクタポンプ、12は逆止弁、
13は安全弁、14はオゾン吸脱着塔内温度指示
調節計である。
The figure is a flow diagram showing an intermittent ozone supply device according to a conventional method and an embodiment of the present invention. In the figure, 1 is an ozone generator, 2 is an adsorption/desorption tower, 3 is a circulation blower, 4 is an oxygen supply device, 5a,
5b is a recycling valve, 6 is a heat medium layer, 7 is an electric heater, 8 is a heat medium pump, 9 is a refrigerator, 10 is an ejector, 11 is an ejector pump, 12 is a check valve,
13 is a safety valve, and 14 is an ozone adsorption/desorption tower internal temperature indicating controller.

Claims (1)

【特許請求の範囲】 1 原料酸素からオゾン化酸素を生成するオゾン
発生機と、上記オゾン化酸素からオゾンを吸着蓄
積し、このオゾンを脱着するオゾン吸脱着塔と、
上記オゾン発生機、吸脱着塔とともに循環系を構
成する循環ブロアおよびリサイクル弁とを有し、
上記オゾン吸脱着塔によりオゾンが吸着された後
の酸素をオゾン発生機に戻し、かつ上記オゾン吸
脱着塔からオゾンをエゼクタにて脱着供給し、オ
ゾン吸脱着塔をオゾンの吸着時に冷凍機により冷
却し、脱着時に加熱源により昇温する間欠オゾン
供給装置において、オゾン吸脱着塔の冷却機器は
他の機器に異常が発生した場合でも稼動し、オゾ
ン吸着時の温度に制御するようにしたことを特徴
とする間欠オゾン供給装置。 2 冷却機器は、冷却機器を構成する機器の異常
発生により他の機器とともに停止することを特徴
とする特許請求の範囲第1項記載の間欠オゾン供
給装置。 3 冷却機器が循環ブロア、リサイクル弁および
冷凍機であることを特徴とする特許請求の範囲第
1項または第2項記載の間欠オゾン供給装置。 4 リサイクル弁が非通電時閉のものであること
を特徴とする特許請求の範囲第3項記載の間欠オ
ゾン供給装置。
[Scope of Claims] 1. An ozone generator that generates ozonized oxygen from raw material oxygen, and an ozone adsorption/desorption tower that adsorbs and accumulates ozone from the ozonized oxygen and desorbs this ozone.
It has a circulation blower and a recycle valve that constitute a circulation system together with the ozone generator and the adsorption/desorption tower,
Oxygen after ozone has been adsorbed by the ozone adsorption/desorption tower is returned to the ozone generator, and ozone is desorbed and supplied from the ozone adsorption/desorption tower by an ejector, and the ozone adsorption/desorption tower is cooled by a refrigerator during ozone adsorption. However, in an intermittent ozone supply system in which the temperature is raised by a heating source during desorption, the cooling equipment for the ozone adsorption/desorption tower continues to operate even if an abnormality occurs in other equipment, and the temperature is controlled to the same level as when ozone is adsorbed. Features: Intermittent ozone supply device. 2. The intermittent ozone supply device according to claim 1, wherein the cooling device is stopped together with other devices when an abnormality occurs in a device constituting the cooling device. 3. The intermittent ozone supply device according to claim 1 or 2, wherein the cooling equipment is a circulation blower, a recycle valve, and a refrigerator. 4. The intermittent ozone supply device according to claim 3, wherein the recycle valve is closed when energized.
JP12252384A 1984-06-12 1984-06-12 Apparatus for intermittent feed of ozone Granted JPS60264310A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12252384A JPS60264310A (en) 1984-06-12 1984-06-12 Apparatus for intermittent feed of ozone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12252384A JPS60264310A (en) 1984-06-12 1984-06-12 Apparatus for intermittent feed of ozone

Publications (2)

Publication Number Publication Date
JPS60264310A JPS60264310A (en) 1985-12-27
JPS6313927B2 true JPS6313927B2 (en) 1988-03-28

Family

ID=14837955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12252384A Granted JPS60264310A (en) 1984-06-12 1984-06-12 Apparatus for intermittent feed of ozone

Country Status (1)

Country Link
JP (1) JPS60264310A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004277284A (en) * 2004-04-28 2004-10-07 Mitsubishi Electric Corp Ozone storage method and ozone storage device
JP2009143807A (en) * 2009-03-30 2009-07-02 Mitsubishi Electric Corp How to produce ozone

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2722711B2 (en) * 1989-09-14 1998-03-09 石川島播磨重工業株式会社 Ozone supply device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004277284A (en) * 2004-04-28 2004-10-07 Mitsubishi Electric Corp Ozone storage method and ozone storage device
JP2009143807A (en) * 2009-03-30 2009-07-02 Mitsubishi Electric Corp How to produce ozone

Also Published As

Publication number Publication date
JPS60264310A (en) 1985-12-27

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