JPS6318296B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an exposure apparatus, particularly to the structure of an exposure light source section.

Generally, in the manufacturing process of color picture tubes,
In order to obtain a phosphor surface with a so-called hole-shaped or stripe-shaped arrangement, or a similar arrangement for graphite coating for so-called black matrices, a phosphor or photosensitizer is coated on the inner surface of the face plate, and a light source is provided through a shadow mask. A method is adopted in which these are exposed to light that is projected.

FIG. 1 is a schematic diagram of the main parts of an example of a conventionally used exposure apparatus. In the same figure,
Reference numeral 1 denotes an exposure table, and a light source section 2 is disposed on the lower side of the exposure table 1. The light emitted from the light source unit 2, which is equal to the deflection position of the electron beam of the color picture tube, passes through a correction lens 3 that corrects the trajectory so as to draw a trajectory that approximates the electron beam, and passes through a correction lens 3 that corrects the light to draw a trajectory that approximates the electron beam. Light is transmitted through the shadow mask 5 attached to the panel 4 onto the phosphor and photosensitizer coated on the inner surface of the panel 4, and the striped holes 5a of the shadow mask 5 are opened as shown in the plan view of the main part in FIG. The influence of the bridges 5b provided so as to be divided in the longitudinal direction is eliminated, and a phosphor surface having continuous striped phosphors 6a, 6b, and 6c is formed. Exposure equipment that forms such a fluorescent surface generally uses a mercury lamp as the light source of its light source section 2, and an aperture is placed above the mercury lamp to determine the length (diameter) of this light source. is located. In addition, since mercury lamps generate high heat, they must be cooled, and currently two methods are used: water cooling or air cooling, but in either method, the aperture has a surface treatment to prevent light reflection. There is. In the former water-cooled type, the surface of the stainless steel is treated with blackened chromium to avoid contaminating the cooling water, while in the air-cooled type, the aluminum surface is treated with blackened alumite.

However, in the aperture of the exposure light source with the above configuration, the blackened film is chemically changed by ultraviolet rays from the mercury lamp, and the blackened film disappears. Also,
It was chemically unstable even in water with little surface reflection or in a high-temperature atmosphere.

Furthermore, in the case of the water-cooled exposure light source section, stainless steel is used as the power supply terminal material to which the electrodes of the mercury lamp come into contact in order to prevent deterioration due to cooling water. In conventional exposure apparatuses, one of the power supply terminals to the mercury lamp is fixed, and the other is a flexible end to absorb thermal deformation and is connected by applying a pressing force to the power supply terminal.

However, in the exposure apparatus with the above configuration, sparks are likely to occur on the terminal surface due to the high voltage of the mercury lamp, and it is also easily oxidized in water, increasing contact resistance, resulting in poor lighting, flickering, and lifespan of the mercury lamp. It had various drawbacks.

One possible method to solve these drawbacks is to process the flexible terminal portion by soldering, but this method is extremely difficult to apply to mass production.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an exposure apparatus whose stability is improved electrically and chemically.

In order to achieve this object, an exposure apparatus according to the present invention uses carbon as the material of the connection terminal for supplying power to the aperture and the mercury lamp. The exposure apparatus according to the present invention will be described in detail below with reference to the drawings.

FIG. 3 is a sectional view of essential parts showing an embodiment of the exposure apparatus according to the present invention, particularly the light source section thereof. In the figure, 6 is a lamp housing, and a mercury lamp 7 is disposed inside this lamp housing 6. The mercury lamp 7 has a supply terminal 8 formed of copper-containing carbon on the power supply electrode 7a side.
It is attached to the insulating cylindrical side of the lamp housing 6 via a spring 9 by the pressing force of the spring 9, and is electrically connected to a power supply terminal 8 made of copper-containing carbon. A power supply lead 10a is connected to this supply terminal 8. Further, at the other end of the mercury lamp 7, its power supply electrode 7b is mechanically connected to the lamp housing 6, and a power supply lead 10b is connected, so that the mercury lamp 7 can rotate in the circumferential direction with respect to its tube axis. It is structured as follows. Also, this mercury lamp 7
An aperture 11 that determines the length (diameter) of the light source is disposed above the light source, and the aperture 11 is made of a molded carbon material.

In the exposure apparatus constructed in this way, especially in its light source section, by constructing the aperture 11 with a carbon molded product, the surface of the aperture 11 is completely coated to prevent light reflection, regardless of whether it is water-cooled or air-cooled. Since it is no longer necessary, the cost can be significantly reduced. Further, there is no chemical change on the surface caused by the ultraviolet rays of the mercury lamp, and there is no contamination of the cooling water in the water-cooled type. Furthermore, since the surface of the aperture 11 does not change even after long-term use, there is no occurrence of any defects in the shape of the phosphor stripes. A similar effect can also be obtained with a tube in which the space between the phosphors is filled with a black non-coloring substance.

Furthermore, in the exposure apparatus having the above-mentioned structure, particularly in the light source section thereof, since the connection terminal 8 that is brought into electrical contact with the power supply electrode 7a of the mercury lamp 7 is made of a copper-containing carbon material, the surface of the connection terminal 8 is
Since it is difficult to oxidize due to high heat or cooling water, the surface roughness of the terminals caused by sparks is eliminated, and the contact resistance can be significantly reduced. In this case, the contact resistance was measured using the copper-containing carbon terminal 8, and the results were as follows. In other words, when the mercury lamp 7 was turned on for about 200 hours, then turned off and the contact resistance was measured, the contact resistance was 0.8Ω for the conventional stainless steel terminal.
The copper-containing carbon terminal 8 had a resistance of 0.6Ω, and when the mercury in the mercury lamp 7 was short-circuited and both ends were measured, the resistance was 0.4Ω. Therefore, the contact resistance value could be halved. Therefore, problems such as poor lighting, flicker, and lifespan of the mercury lamp 7 can be completely alleviated, and mass productivity can be improved.

In the above embodiment, it is desirable to change the ratio of copper mixed into the copper-containing carbon in the power supply terminal depending on the capacity of the mercury lamp used, and a range of about 5 to 20% is suitable for electrical conductivity and surface roughness. It was optimal from the point of view of prevention, etc. Further, it goes without saying that the power supply terminal is not limited to copper-containing carbon, and the same effect can be obtained even if it is made of a metal other than copper, such as gold, silver, or aluminum.

FIG. 4 is a plan view of essential parts showing an example of an exposure apparatus, particularly a panel positioning apparatus, according to the present invention. In the figure, a panel positioning device 12 is fixedly arranged above the exposure table 1 to arrange a panel 4 to be exposed. A panel stopper 13 that positions the panel 4 at a predetermined position by contacting three points on the outer peripheral surface of the panel 4 is fixed to the upper surface of the panel positioning device 12 by being attached to a stopper holder 14. This panel stopper 13 has a spherical recess in the holder 13a, as shown in the cross-sectional view of the main part in FIG. A ball 15 is inserted and the ball 15 in contact with the outer peripheral surface of the panel 4 is configured to be rotatable in accordance with the movement of the panel 4. In this case, the diameter ratio of the steel balls 14 for "rollers" and the synthetic resin balls 15 is as follows:
is 1/7 or less, and the ball 15 is configured so that its rotational movement is controlled by steel balls 14 for "rollers" in the spherical recess of the holder 13a in a range deeper than the radius of the ball 15. It is configured so that it can be retained.

According to the exposure apparatus, particularly the panel positioning apparatus, configured in this way, the ball 15 that contacts the outer peripheral surface of the panel 4 freely rotates as the panel 4 moves during the positioning operation, so that the panel 4 is moved. Panel stopper 1 caused by friction with the outer peripheral surface
3 (or the ball 15), the exposure accuracy of 5/100 or less can be maintained for a long period of time, and damage caused by contact with the outer peripheral surface of the panel 4 can be prevented. Can be done.

As explained above, according to the exposure apparatus according to the present invention, the various drawbacks of the conventional ones are almost completely improved, the stability is improved electrically and chemically, and the reliability of the apparatus is greatly improved. can be done. Moreover, the quality, precision, etc. of the fluorescent surface formed by this apparatus are uniform and high, and excellent effects such as significantly improved reliability can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram of the main parts of an example of a conventionally used exposure apparatus, FIG. 2 is a plan view of the main parts of the inner surface of the panel, and FIG. 3 is an example of the exposure apparatus according to the present invention, particularly the light source section. FIG. 4 is a plan view of an exposure apparatus according to the present invention, particularly an example of a panel positioning device, and FIG. 5 is a sectional view of a main part of the panel stopper shown in FIG. 1...Exposure table, 2...Light source section, 3...Correction lens, 4...Panel, 5...Shadow mask, 6...
...Lighthouse, 7...Mercury lamp, 7a, 7b...
Electrode, 8...terminal (power supply, connection terminal), 9...
...Spring, 10a, 10b...Power lead,
11...Aperture, 12...Panel positioning device, 13...Panel stopper, 13a...Holder, 14...Steel ball, 15...Ball.

Claims (1)

[Claims] 1. An exposure apparatus having at least a mercury lamp and an aperture arranged above the mercury lamp and determining the length of the light source, characterized in that a carbon material is used for a connection terminal for supplying power to the aperture and the mercury lamp electrode. exposure equipment.