JPS6322484B2 - - Google Patents
Info
- Publication number
- JPS6322484B2 JPS6322484B2 JP16318580A JP16318580A JPS6322484B2 JP S6322484 B2 JPS6322484 B2 JP S6322484B2 JP 16318580 A JP16318580 A JP 16318580A JP 16318580 A JP16318580 A JP 16318580A JP S6322484 B2 JPS6322484 B2 JP S6322484B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric ceramic
- vibration
- resonator
- ceramic plates
- edge mode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000919 ceramic Substances 0.000 claims description 19
- 238000009826 distribution Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 229910000942 Elinvar Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】
本発明は、振動モードとしてエツジモードを用
いた共振子および変換子を結合子によつて弾性的
に結合させた構成のエツジモード・メカニカルフ
イルタに関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an edge mode mechanical filter having a configuration in which a resonator and a transducer using an edge mode as a vibration mode are elastically coupled by a coupler.
従来、中波帯中間周波(IF)用フイルタとし
ては、円板または正方形板の輪郭振動を利用した
セラミツクフイルタ、あるいは円板の屈曲振動、
棒の縦振動および円柱のねじり振動を利用したメ
カニカルフイルタが用いられている。このような
従来のセラミツクフイルタ、メカニカルフイルタ
においては、共振子や変換子の支持、および入出
力リード線の取り付けは、一般に振動の節の部分
に支持線あるいはリード線を半田付する方法、突
起を有する端子板を圧接する方法等によつて行わ
れてきた。 Conventionally, filters for intermediate frequency (IF) in the medium wave band include ceramic filters that utilize the contour vibration of a disc or square plate, or flexural vibration of a disc.
A mechanical filter is used that utilizes the longitudinal vibration of a rod and the torsional vibration of a cylinder. In such conventional ceramic filters and mechanical filters, supporting the resonator and transducer and attaching the input/output lead wires are generally done by soldering the support wires or lead wires to the vibration nodes, or by using protrusions. This has been carried out by methods such as pressure-welding terminal plates having a terminal plate.
しかし振動の節では変位は零であるが応力は零
ではなく、例えば、振動の節に半田を付加した場
合、半田がステイフネスとして作用し共振周波数
を上昇させる原因となる。また、矩形板の屈曲振
動の節の部分に、支持およびリード線を取り付け
た場合には変位は零でも回転モーメントによる振
動への影響は避けられない。一方、端子板を圧接
する方法による場合には、接触部のずれによる特
性のバラツキや、振動、衝撃による接触不良など
が実用上大きな問題となる。 However, although the displacement is zero at the vibration node, the stress is not zero. For example, if solder is added to the vibration node, the solder acts as stiffness and causes an increase in the resonant frequency. Furthermore, if supports and lead wires are attached to the bending vibration nodes of the rectangular plate, even if the displacement is zero, the influence of the rotational moment on the vibration cannot be avoided. On the other hand, when using a method of pressure-welding the terminal plate, there are serious problems in practice, such as variations in characteristics due to misalignment of the contact portions and poor contact due to vibrations and shocks.
このような問題点を根本的に解決する為、本発
明者らは特願昭54−156067号、特願昭54−156068
号に示したように、圧電板の端部にのみ集中した
振動エネルギー分布を持つエツジモードを利用す
ることを提案した。また、実際にこれを用いたエ
ツジモード・圧電共振子および三端子フイルタを
開発し、これらにより、寸法が小形で、支持やリ
ード線の取り付けの影響がほとんどない良好な特
性の中波帯用の共振子およびセラミツクフイルタ
が得られることを示した。 In order to fundamentally solve these problems, the inventors of the present invention have filed Japanese Patent Application Nos. 54-156067 and 1982-156068.
As shown in the issue, we proposed the use of edge modes, which have a vibrational energy distribution concentrated only at the edges of the piezoelectric plate. In addition, we have actually developed edge mode piezoelectric resonators and three-terminal filters using this technology, and these have achieved resonance for medium-wave bands with small dimensions and good characteristics that are almost unaffected by support and lead wire attachment. It was shown that ceramic filters and ceramic filters can be obtained.
本発明は、このようなエツジモードをさらにメ
カニカルフイルタに応用したもので、特にメカニ
カルフイルタの構成要素である共振子、変換子の
振動モードにエツジモードを用いたことを特徴と
するものである。 The present invention further applies such an edge mode to a mechanical filter, and is particularly characterized in that the edge mode is used as the vibration mode of a resonator or a transducer that is a component of a mechanical filter.
以下、本発明を図面を用いてさらに詳しく説明
する。 Hereinafter, the present invention will be explained in more detail using the drawings.
まず、本発明のメカニカルフイルタの説明に入
る前に、すでに、特願昭54−156067号で明らかに
したエツジモード共振子についてその特徴を簡単
に述べる。 First, before entering into a description of the mechanical filter of the present invention, the characteristics of the edge mode resonator disclosed in Japanese Patent Application No. 156067/1988 will be briefly described.
第1図は、厚さの薄い矩形板のエツジモードの
振動パターンである。第2図はこのモードの面積
歪分布の計算結果を示したものである。第2図の
中に示した数値は、その最大値を10とした場合の
面積歪の相対値である。これらの図から、このモ
ードの振動エネルギーは端部に著しく集中してお
り、端面から板幅のおよそ1.5倍程度以上離れた
ところでは、変位、応力ともほとんど零となり、
この部分を支持、固定しても振動には影響を与え
ないことが分る。 FIG. 1 shows an edge mode vibration pattern of a thin rectangular plate. FIG. 2 shows the calculation results of the areal strain distribution in this mode. The numerical values shown in FIG. 2 are relative values of areal strain when the maximum value is 10. From these figures, the vibration energy of this mode is extremely concentrated at the edges, and at a distance of approximately 1.5 times the plate width or more from the edge, both displacement and stress become almost zero.
It can be seen that supporting and fixing this part has no effect on vibration.
このようなエツジモードを用いた共振子の一構
成例を第3図に示す。 An example of the configuration of a resonator using such an edge mode is shown in FIG.
第3図は、本発明では少くとも入力あるいは出
力用共振子に用いる圧電磁器共振子の電極構造の
一例を示す平面図である。aは表面電極、2は裏
面電極である。 FIG. 3 is a plan view showing an example of the electrode structure of a piezoelectric ceramic resonator used at least as an input or output resonator in the present invention. a is a front electrode, and 2 is a back electrode.
厚さ方向(紙面に垂直)に分極した圧電磁器板
(長さL,幅2H)の端部近傍の表裏両面に夫々
駆動電極2及び3をスパツタリング等で形成す
る。この駆動電極2及び3はエツジモード振動を
効果的に励振するために、第2図で示したよう
に、面積歪分布の形状を合わせるために概略半円
形としている。 Drive electrodes 2 and 3 are formed by sputtering or the like on both the front and back surfaces near the ends of a piezoelectric ceramic plate (length L, width 2H) polarized in the thickness direction (perpendicular to the plane of the paper). In order to effectively excite edge mode vibration, the drive electrodes 2 and 3 are approximately semicircular to match the shape of the areal strain distribution, as shown in FIG.
また、第2図の面積歪分布において、駆動電極
2及び3に相当する部分の面積歪の符号と反対の
符号で相対値の大きい磁器板の端部近傍の両側部
表裏両面に対向して2組の逆位相駆動電極4,6
及び5,7を形成する。 In addition, in the areal strain distribution shown in FIG. 2, there are two areas opposite to each other on both sides near the end of the porcelain plate where the sign of the areal strain of the portion corresponding to drive electrodes 2 and 3 is opposite and the relative value is large. Set of opposite phase drive electrodes 4, 6
and form 5 and 7.
表面電極4及び6は振動にほとんど影響のない
他端にリードされ接続される。そして、端子2′
及び4′,6′間で電気信号が入力または出力され
る。 The surface electrodes 4 and 6 are leaded and connected to the other end which has almost no effect on vibration. And terminal 2'
An electrical signal is input or output between 4' and 6'.
この場合、共振子材料としては厚さ方向に分極
された圧電磁器板を用いる。図示のように駆動電
極を第2図の面積歪分布に合わせた形状にするこ
とによりエツジモードの効果的な励振が可能にな
る。このエツジモード共振子1の共振子周波数は
矩形板1aの幅2Hによつてほとんど決定され
る。圧電磁器板を用いた場合共振周波数を455K
Hzに選べば、板の幅2Hは約3mmとなり、従つ
て、固定部分も含めた矩形板1aの長さLを幅2
Hの約2.5倍にとるとすれば、板の全長Lは約7.5
mmとなる。従つて、エツジモードを利用すること
により、この周波数帯でも非常に小形で支持の容
易な共振子を実現できることが分る。 In this case, a piezoelectric ceramic plate polarized in the thickness direction is used as the resonator material. By shaping the drive electrode as shown in the figure to match the areal strain distribution shown in FIG. 2, effective excitation of the edge mode becomes possible. The resonator frequency of this edge mode resonator 1 is almost determined by the width 2H of the rectangular plate 1a. When using a piezoelectric ceramic plate, the resonance frequency is 455K.
Hz, the width 2H of the plate will be approximately 3 mm. Therefore, the length L of the rectangular plate 1a including the fixed part will be the width 2
If it is taken to be about 2.5 times H, the total length L of the plate is about 7.5
mm. Therefore, it can be seen that by utilizing the edge mode, a very small and easily supported resonator can be realized even in this frequency band.
次に、本発明のエツジモード・メカニカルフイ
ルタについて説明する。 Next, the edge mode mechanical filter of the present invention will be explained.
第3図で示したような構成とした2個のエツジ
モード共振子1,1′を結合子8によつて弾性的
に結合させた最も基本的な構造のエツジモード・
メカニカルフイルタを第4図・第5図に示す。第
4図は、板面に垂直な方向に共振子1,1′を配
置して結合子8を付ける位置を基板の端部に選
び、また第5図は共振子1,1′を横方向に並べ
基板の側面に結合子8をつけている。第4図・第
5図において、入力側の共振子1の電極4a,6
aと出力側の電極4a′,6a′を接続し、これらを
共通接地端子とし、入力共振子の電極2aにリー
ド線を付けて入力端子P,出力側共振子の電極
2′aにリード線を付けて出力端子Qとする。ま
た、前述のようにエツジモードでは、その振動エ
ネルギーが基板の端部に集中しているため、共振
子1,1′の支持固定は振動エネルギーが存在し
ない基板のもう一方の端部9で行なう。 The edge mode resonator has the most basic structure in which two edge mode resonators 1 and 1' configured as shown in FIG. 3 are elastically coupled by a coupler 8.
Mechanical filters are shown in Figures 4 and 5. In Figure 4, the resonators 1 and 1' are arranged in the direction perpendicular to the board surface, and the position for attaching the coupler 8 is selected at the edge of the board, and in Figure 5, the resonators 1 and 1' are arranged in the horizontal direction. A connector 8 is attached to the side of the board. In FIGS. 4 and 5, the electrodes 4a and 6 of the resonator 1 on the input side
Connect a and the output side electrodes 4a' and 6a', and use these as a common ground terminal.A lead wire is attached to the input resonator's electrode 2a, and a lead wire is attached to the input terminal P and the output side resonator's electrode 2'a. and set it as the output terminal Q. Furthermore, as described above, in the edge mode, the vibrational energy is concentrated at the edge of the substrate, so the resonators 1, 1' are supported and fixed at the other end 9 of the substrate where no vibrational energy is present.
前記第4図および第5図の構成を発展させ多段
構成、すなわち、複数の共振子と変換子を結合子
で弾性結合させたメカニカルフイルタの構造を第
6図と第7図、および第8図と第9図にそれぞれ
示す。ここで、第6図は板厚方向に並べた各共振
子を板の端部に付けた結合子8によつて結合させ
る場合、第7図は結合子8aの他に板の側面につ
けた結合子8bによつて行なう場合の構成であ
る。一方、第8図と第9図は、共振子を横方向に
配置し、側面で結合子8により弾性結合させる場
合の構成を示すが、第9図では第8図と異なり、
結合子8と共振子を一体として、一枚の基板から
打ち抜いて作ることができるようにしたものであ
る。このように共振子10の数を増加すれば、そ
れに応じて急峻な遮断特性を実現することができ
る。 FIGS. 6, 7, and 8 show the structure of a mechanical filter in which the structure shown in FIGS. 4 and 5 is expanded to have a multi-stage configuration, that is, a plurality of resonators and transducers are elastically coupled by a coupler. and are shown in Figure 9, respectively. Here, FIG. 6 shows a case in which the resonators arranged in the thickness direction of the plate are coupled by a connector 8 attached to the end of the plate, and FIG. This is the configuration for the case where the child 8b is used. On the other hand, FIGS. 8 and 9 show configurations in which the resonators are arranged laterally and are elastically coupled by the connectors 8 on the sides, but in FIG. 9, unlike in FIG. 8,
The coupler 8 and the resonator are integrated and can be manufactured by punching out a single substrate. By increasing the number of resonators 10 in this way, a correspondingly steeper cutoff characteristic can be realized.
入出力の2個の変換子1および1′との間に入
る共振子10は必ずしも駆動電極を付ける必要は
なく、その共振子材料としてはエリンバーなどの
恒弾性合金を用いることもできる。 The resonator 10 inserted between the two input and output transducers 1 and 1' does not necessarily need to be provided with a drive electrode, and a constant elastic alloy such as Elinvar can also be used as the resonator material.
第10図は、本発明のメカニカルフイルタの実
施例を示したもので、第4図の構成であつて、板
の幅2H=2.7(mm)、長さL=6.8mmの共振子2個
と、直径d=0,3mm、長さlc=2.5mmの結合子に
よつて結合させた場合のフイルタ特性を示す。図
示のように保証減衰量として約30dBの値が得ら
れており、また遮断特性や通過域損失の面でも良
好な特性が実現されている。 FIG. 10 shows an embodiment of the mechanical filter of the present invention, which has the configuration shown in FIG. , shows the filter characteristics when connected by a connector with a diameter d=0.3 mm and a length l c =2.5 mm. As shown in the figure, a guaranteed attenuation value of approximately 30 dB was obtained, and good characteristics were also achieved in terms of cutoff characteristics and passband loss.
以上、本発明の具体的構成例について説明した
が、この原理にもとづくメカニカルフイルタの構
成は前記構成例にのみ限定されるものではない。
上述の変換子の電極の形状は、上述の形状の電極
のほかに、本発明者らが既に特願昭54−156067〜
8号提案しているように、振動子端部に矩形電
極、あるいはエツジモードの面積歪分布に合わせ
た半円状電極を用いても良いことは当然である。 Although specific configuration examples of the present invention have been described above, the configuration of a mechanical filter based on this principle is not limited only to the above configuration examples.
In addition to the shape of the electrode of the above-mentioned transducer, the present inventors have already disclosed the shape of the electrode in Japanese Patent Application No. 54-156067~.
Of course, as proposed in No. 8, a rectangular electrode or a semicircular electrode adapted to the area strain distribution of the edge mode may be used at the end of the vibrator.
又、共振子の材料にはエリンバー等の恒弾性合
金、あるいは変換子と同じ圧電材料を用いること
もできる。エリンバーを用いた場合には、両端の
共振子にZnO等の圧電膜あるいは薄い圧電セラミ
ツク膜をうけて、これを変換子とすることもでき
る。さらに入・出力変換子として、ここではエツ
ジモードを利用した変換子を用いたが、この代わ
りに従来メカニカルフイルタに用いられている屈
曲振動などの他の振動モードを用いた変換子を使
用することも可能である。 Furthermore, a constant elastic alloy such as Elinvar or the same piezoelectric material as the transducer can be used as the material of the resonator. When Elinbar is used, a piezoelectric film such as ZnO or a thin piezoelectric ceramic film can be applied to the resonator at both ends, and this can be used as a transducer. Furthermore, although a transducer using edge mode was used as an input/output transducer, it is also possible to use a transducer using other vibration modes such as bending vibration, which is conventionally used in mechanical filters. It is possible.
以上、本発明によれば、振動に全く影響を与え
ずに支持固定あるいはリードの引き出しが可能と
なり、この結果、極めて製作が容易で、かつ良好
なフイルタ特性を有し、バラツキの小さい、耐衝
撃・耐振性の良い高品質・高信頼性のメカニカル
フイルタを提供でき、その産業界に与える価値は
極めて大である。 As described above, according to the present invention, it is possible to support and fix or pull out the lead without affecting vibration at all, and as a result, it is extremely easy to manufacture, has good filter characteristics, has small variations, and has shock resistance.・We can provide high-quality, highly reliable mechanical filters with good vibration resistance, and the value this provides to industry is extremely large.
第1図,第2図はエツジモード振動の説明図で
あり、第1図はエツジモード振動の振動パター
ン、第2図は面積歪分布図である。第3図は本発
明の経過を説明するためのエツジモードセラミツ
ク共振子の電極構成を示すものでaは表面、bは
裏面をそれぞれ示すものであり、第4図は本発明
によるエツジモード・メカニカルフイルタの基本
構成例である。第5図は本発明の他の基本構成例
を示す。第6図〜第9図も本発明による他の実施
構成例を示す斜視図である。第10図は第4図の
構成のメカニカルフイルタの実施例のフイルタ特
性を示す。
1,1′…エツジモード変換子、1a…基板、
2,3,3a,3b…駆動電極、4,5,6,7
…逆位相駆動電極、8,8a,8b…結合子、9
…固定部、10…共振子、11…溝、L…共振子
(変換子)の長さ、2H…共振子(変換子)の幅、
P…入力端子、Q…出力端子、lg…溝の深さ、wg
…溝の幅。
1 and 2 are explanatory diagrams of edge mode vibration, FIG. 1 is a vibration pattern of edge mode vibration, and FIG. 2 is an area strain distribution diagram. FIG. 3 shows the electrode configuration of an edge-mode ceramic resonator for explaining the progress of the present invention, where a shows the front surface and b shows the back surface, and FIG. 4 shows the edge-mode mechanical filter according to the present invention. This is an example of the basic configuration. FIG. 5 shows another basic configuration example of the present invention. FIGS. 6 to 9 are also perspective views showing other embodiments of the present invention. FIG. 10 shows filter characteristics of an embodiment of the mechanical filter having the configuration shown in FIG. 1, 1'... Edge mode converter, 1a... Substrate,
2, 3, 3a, 3b...drive electrode, 4, 5, 6, 7
... Opposite phase drive electrode, 8, 8a, 8b... Connector, 9
... Fixed part, 10... Resonator, 11... Groove, L... Length of resonator (transducer), 2H... Width of resonator (transducer),
P...Input terminal, Q...Output terminal, l g ...Groove depth, w g
...Width of the groove.
Claims (1)
L≫2H,T≪2Hとする)の厚み方向に分極し
た圧電磁器板を2個以上間隔をおいて固定し、こ
れら圧電磁器板の長手方向端部の近傍のみに振動
エネルギーが集中して圧電磁器板のコーナーが円
弧状に伸縮し変位するエツジモードを伝達するた
めに前記圧電磁器板相互に端部あるいは側部を結
合子で弾性的に結合し、さらに、前記2個以上の
圧電磁器板のうち2個を入力及び出力用の共振子
とし、これら入力及び出力用共振子には圧電磁器
板の端部でしかも幅方向の中央部を中心に振動に
よる面積歪が大きい部分に弧状の駆動電極を少く
とも形成し、圧電磁器板の幅の1.5倍より遠い距
離にある点を支持固定して構成したことを特徴と
するエツジモード・メカニカルフイルタ。1 Two or more rectangular (length L, width 2H, thickness T, where L≫2H, T≪2H) piezoelectric ceramic plates polarized in the thickness direction are fixed at intervals, and these piezoelectric ceramic plates are In order to transmit the edge mode in which the vibration energy is concentrated only near the longitudinal ends of the piezoelectric ceramic plates and the corners of the piezoelectric ceramic plates expand and contract in an arc shape and are displaced, the ends or sides of the piezoelectric ceramic plates are elastically connected to each other using connectors. furthermore, two of the two or more piezoelectric ceramic plates are used as input and output resonators, and these input and output resonators include a portion at the end of the piezoelectric ceramic plate and at the center in the width direction. The edge mode is characterized in that at least an arc-shaped drive electrode is formed in a portion where area strain due to vibration is large centered around the piezoelectric ceramic plate, and a point located at a distance of more than 1.5 times the width of the piezoelectric ceramic plate is supported and fixed. mechanical filter.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16318580A JPS5787613A (en) | 1980-11-21 | 1980-11-21 | Edge mode mechanical filter |
| US06/266,073 US4396895A (en) | 1980-11-21 | 1981-05-21 | Multiple resonant electromechanical filters using edge-mode vibration of a long piezoelectric plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16318580A JPS5787613A (en) | 1980-11-21 | 1980-11-21 | Edge mode mechanical filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5787613A JPS5787613A (en) | 1982-06-01 |
| JPS6322484B2 true JPS6322484B2 (en) | 1988-05-12 |
Family
ID=15768862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16318580A Granted JPS5787613A (en) | 1980-11-21 | 1980-11-21 | Edge mode mechanical filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5787613A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61131607A (en) * | 1984-11-29 | 1986-06-19 | Murata Mfg Co Ltd | Manufacture of piezoelectric vibrator wafer and piezoelectric vibrator |
-
1980
- 1980-11-21 JP JP16318580A patent/JPS5787613A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5787613A (en) | 1982-06-01 |
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