JPS63267601A - Mask management facility - Google Patents

Abstract

PURPOSE:To automate a lithograph mask management facility by providing such an arrangement that a central control device takes out a mask casing onto a traverse from a carrier in accordance with an input signal from a terminal device while recognizing a batch, and moves the traverse to a predetermined storage rack. CONSTITUTION:When a terminal device 6 requests the take-out of a mask casing 1, a central control device 7 moves a traverse 4 to a predetermined storage rack 2a to take out a predetermined mask casing 1. On the way of conveyance of the mask casing 1 to a carrier 3 by the traverse, a bar code reader 5 reads a bar code on the mask casing 1, and transmits thus read data to the central control device 7. The central control device moves the traverse to a predetermined carrier 3 and shifts the same onto the latter, and then the carrier 3 conveys the mask casing to a required position. On the contrary the above-mentioned steps are carried out in the reverse order when a mask casing is stored onto the storage rack 2a. With this arrangement, it is possible to automate the mask managing facility, to aim at enhancing the degree of cleanness and productivity.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to mask management equipment, and particularly to mask management equipment that automates the storage and removal of masks.

[Conventional technology]

As ICs became more highly integrated, LSI and then VLSI progressed.
The circuit patterns are becoming increasingly finer. Moreover, LSI
is AS (specific purpose) IC, custom (special order) L
There is a diversification of products, including the manufacture of C products.

On the other hand, as patterns become finer, automation in clean rooms is being promoted to make LSI manufacturing equipment dust-free. Although this is particularly noticeable in the automated lithography process, the management of masks used for pattern formation in the lithography process is still managed manually.

[Problem that the invention seeks to solve]

Previously, masks were managed manually by the traditional L.
This was due to the fact that SI manufacturing was limited to high-volume production of a small number of products. However, as LSIs become more diverse and smaller in quantity, masks are also becoming more diverse and smaller in quantity.Manually managing these masks not only takes time to search, but also becomes an obstacle to improving LSI production efficiency. This also results in a decrease in the cleanliness of the clean room.

The present invention solves the above problems, and provides mask management equipment that can promote unmanned and dust-free clean rooms and improve production efficiency by automating mask management. The purpose is to

[Means for solving problems]

The mask management equipment according to the present invention includes a carrier that transports mask cases containing masks between other equipment and a storage, a traverse that transports the mask cases between the carrier and storage shelves of the storage, and a traverse that transports the mask cases. a recognition device that recognizes a lot of mask cases and outputs a signal thereof; a central control device that instructs the traverse to move to a desired position and store the mask cases based on the input signal from the recognition device; and a terminal device that outputs mask case loading/unloading instructions.

[Effect]

According to the present invention, when a predetermined human power is applied to the terminal device, the carrier's mask case traverse is taken out, and when the recognition device recognizes this and outputs the signal to the central control device,
Based on the recognition signal, the central controller moves the traverse to a predetermined storage shelf and stores the mask case there. On the other hand, when removing a specified mask case from storage,
When inputting this into the terminal, the central control unit outputs a command signal, moves the traverse to a designated storage shelf, takes out the mask case, and transports it to the carrier, but before the mask case is stored in the carrier, a recognition device It recognizes mask cases and returns them to the carrier if they comply with the instructions, and returns them to the original storage shelf if they do not.

(Example) The present invention will be described below based on an example shown in FIGS. 1 and 2. FIG. 1 is an overall view showing the mask management equipment, and FIG. 2 is a perspective view of a mask case containing masks.

As shown in Figure 1, the mask management equipment consists of a storage (2) equipped with a large number of storage shelves (2a) for storing mask cases (see Figure 2) (1) containing masks, and a storage (2). )
and a carrier (3) for transporting the mask case (1) between the equipment and other equipment. The carrier (3) is configured to accommodate the mask case (1), and the accommodated mask case (1) is taken out by a traverse (4) and transported to a predetermined storage shelf (2a). The traverse (4) is moved to the storage (2) by the motor (4a).
) can be moved back and forth (both left and right ends in the figure),
- The mounting table (4b) of the mask case (1) is configured to be raised and lowered in the storage (2). Mounting table (4
b) is the roller (
4c) , (4c) The looped endless belt (4c)
It is raised and lowered by the drive of d).

Mask case (1) carried by traverse (4)
) has a barcode (1a) affixed to its surface as shown in Fig. 2, and projections (lb) and (lb) are formed on both sides, and a mask is inserted through the projections (lb) and (lb). The case (1) is stored in storage shelves (2a) and (2a).

However, the mask case (1) carried by the traverse (4)
) from carrier (3) to storage shelf (2a), (2a
), the barcode (1a) on the mask case (1) is read by the barcode reader (BCR in the figure) (5) placed above the carrier (3), and the read signal is read. is outputted from the barcode reader (5) and manually inputted to the central control unit (7) arranged for the storage (2) via the terminal (6). The central control device (7) outputs a command signal based on the input signal to the traverse (4), and the traverse (4) that receives the signal transports the mask case (1) to the intended storage shelf (2a). Transfer from the mounting table (4b) to the storage shelf (2a).

Conversely, when taking out a prescribed mask case (1) from storage (2), place the empty carrier (3) in advance from storage (2).
If you put it on standby and enter that into the terminal (6),
The central controller (7) operates and outputs a command signal to the traverse (4), and moves the traverse (4) to a predetermined storage shelf (2a).
). Traverse (4) is a storage shelf (2a
), the mask case (1) is taken out and placed on the mounting table (4b), and then moved to the carrier (3). Before the traverse (4) reaches the carrier (3), the barcode (1a) of the mask case (1) is read by the barcode reader (5), and the signal is output to the central control unit (7). be done. The central control unit (7) is the terminal (6)
Compare with the command signal from and if it matches, traverse (4)
is moved to the carrier (3) and the mask case (1) is transferred to the carrier (3). The carrier (3) receives the mask case (1) and transports the mask case (1) to other necessary equipment.
transport. Conversely, if the read signal from the barcode reader (5) does not match the command signal from the terminal (6), the traverse (4) returns the mask case (1) to the original storage shelf (2).
Move to return to a).

In addition, when transporting the mask case (1) from the carrier (3) to the designated storage shelf (2a), send a message to that effect on the terminal (6).
It goes without saying that the traverse (4) is driven and controlled by inputting it to the . The central control device (7) also has a function of communicating mask storage information to related equipment.

As described above, according to this embodiment, since mask management can be automated, it is possible to eliminate humans who are the source of dust generation in a clean room and make it unmanned, and it is also possible to eliminate mistakes in mask management, improving production efficiency. can be achieved.

In this embodiment, the mask is recognized using a barcode reader (5), but the mask may also be recognized by directly reading characters displayed on the surface of the mask, for example.

(Effects of the Invention) According to the present invention, mask management can be automated, dust-free production can be promoted, and production efficiency can be improved.

[Brief explanation of drawings]

FIG. 1 is an overall view showing an embodiment of mask management equipment according to the present invention, and FIG. 2 is a perspective view showing a mask case used in this embodiment. In the figure, (1) is a mask case, (la) is a barcode reader, (2) is a storage, (2a) is a storage shelf, (3)
) is a carrier, (4) is a traverse, (5) is a barcode reader (recognition device), (6) is a terminal, and (7) is a central control device.

Claims (2)

[Claims] (1) A storage for storing multiple types of mask cases storing masks in respective storage shelves, a carrier for transporting the mask cases between the storage and other equipment, and a carrier for transporting the mask cases between the carrier and the storage shelf. A traverse that transports mask cases; a recognition device that recognizes a lot of mask cases that the traverse transports and outputs a recognition signal; 1. A mask management facility comprising: a central control device that instructs the central control device to store the mask case in the storage location; and a terminal device that outputs a command to the central control device to put the mask case in and out of the storage. (2) The mask management equipment according to claim 1, wherein the recognition device is a barcode reader.