JPS6328241B2 - - Google Patents

Description

[Detailed Description of the Invention] (a) Industrial Application Field This invention relates to capacitive surface roughness measurement for scale calibration of a surface roughness measuring machine in a surface roughness measuring system using a capacitive surface roughness measuring machine. This relates to standard plates for machines.

(b) Conventional technology and its problems Conventionally, the surface roughness of metal surfaces has been determined by the stylus method, which dimensionally displays the vertical amplitude of a stylus that follows the surface roughness of the surface to be measured. There is. On the other hand, in the case of a surface roughness measurement system using a capacitive surface roughness measuring device, the capacitance obtained between the surface to be measured of the object to be measured and the measurement electrode surface of the measuring device is obtained using the stylus method. It is required that the value be indicated as a value corresponding to the surface roughness based on the vertical amplitude values. Therefore, the surface roughness has a degree and shape of surface roughness such that the relationship between the detected value of surface roughness obtained by the stylus method and the capacitance obtained by the capacitive surface roughness measurement system is stable and constant. A standard plate is required, and the scale of the capacitive surface roughness measuring machine is calibrated or compared using the surface roughness standard plate.

Conventionally, for surface roughness standard plates for this type of purpose, for example, as shown in Fig. 1, surface roughness irregularities such as lathe-finished surfaces, machine-cut surfaces, ground surfaces, polished surfaces, etc. have been prepared in a certain direction. If there is a property, it can be manufactured and selected relatively easily. However, the second
As shown in the figure, when the distribution of surface roughness is non-uniform and has no directionality, such as on a plastic-finished surface, an electrical discharge machining finished surface, an etched finished surface, etc., the production of the surface roughness standard plate and the The selection was extremely difficult.

(c) Technical problems of the present invention Therefore, the present invention provides a surface roughness measuring system using a capacitive surface roughness measuring machine.
Particularly, it is an object of the present invention to provide a standard plate for surface roughness measurement that can be applied very effectively in relation to the surface roughness measurement of the above-mentioned plastic finished surfaces.

(d) Technical Means of the Invention In order to achieve the above-mentioned object, the present invention specifically applies a predetermined wide-area measurement electrode surface to the measurement surface of a metal object under constant pressure. Surface roughness measurement using a capacitance type surface roughness measuring machine that measures the surface roughness of a metal object by pressing the electrodes facing each other and detecting the change in capacitance that occurs between the measurement electrode surface and the surface to be measured as an electrical signal. In the measurement system, meridians arranged in parallel to each other and plain weaves are respectively arranged on a reference surface of a rigid substrate that is a standard plate for calibrating the scale of the surface roughness measuring machine, and are arranged parallel to each other. A wire mesh is attached that forms a plurality of electrode contact points and gap holes that are organized by latitude lines that intersect with each other in a shape, and are spaced apart from each other. A capacitance type surface roughness measuring device that is preset to correspond to the value of capacitance generated between the electrode surface and the metal surface when the electrode surface is pressed against a metal surface having a predetermined surface roughness. This is a standard plate for

(e) Embodiments of the present invention Hereinafter, the standard plate for a capacitive surface roughness measuring device according to the present invention will be described in detail based on specific embodiments shown in the drawings.

The standard plate RP according to the present invention basically includes a rigid substrate 2 having rigidity representing the center line of the surface roughness, and a wire mesh 1 mounted on one reference surface 2a of the substrate 2 in an overlapping manner. Composed by. The substrate 2 is basically as shown in FIGS. 3 and 4.
As shown in the figure, it is provided with a flat reference surface 2a, and as a modification, it is provided with a reference surface that is pre-curved in one or two axial directions, as shown in FIGS. It's okay. The wire mesh 1 has a meridian 1A and a meridian 1 arranged parallel to each other.
It is organized by latitude lines 1B that intersect with A in a plain weave manner. The meridians 1A and 1B arranged in a plain weave form electrode contact points 4, 4 which are alternately spaced apart in the longitudinal direction at the portions where they intersect with each other and overlap. On the other hand, meridian 1A and latitude 1 which are adjacent to each other
B forms gap holes 5 spaced apart from each other. The wire mesh 1 has the number of electrode contact points 4 per unit area (density of electrode contact points) and the inclination angle of the overlapping portion of each wire by appropriately selectively combining the wire diameter 6 of each wire and the pitch 7 between each wire. , the curvature of the contact point, etc. are determined, and a specific capacitance can be provided to the capacitive surface roughness measuring electrode 3. On an actual blasted surface, the number (density) of peaks per unit area, inclination angle, and curvature of the peaks in the roughness of the surface roughness are determined by the capacitance specific to the capacitive surface roughness measurement electrode. This is the main determining factor. That is, the surface roughness of the actual plastic finished surface and the structure of the standard plate determined by the wire diameter of the wire mesh and the pitch between each wire in the above configuration have a similar relationship in terms of changes in capacitance. Therefore, by statistically determining in advance the relationship between the wire diameter 6 of the wire mesh, each wire pitch 7, and the actual surface roughness, it is possible to use, for example, a standard plate for scale calibration of a capacitance type roughness measuring machine with a blasted surface. It can be applied as

(f) Effects of the present invention The standard plate for a capacitive surface roughness measuring machine of the present invention having the above-described structure has an extremely simple structure and is excellent in mass production and processability. It is economically advantageous in that it is easy to obtain and inexpensive. Furthermore, the standard plate for a surface roughness measuring device according to the present invention can be supported theoretically and statistically, and together with a simplified structure, it is possible to provide a standard plate of the same quality.

[Brief explanation of the drawing]

FIG. 1 is a schematic perspective view of the object to be measured showing an example of surface roughness with directionality, FIG. 2 is a schematic perspective view of the object to be measured showing an example of surface roughness without directionality, and FIG. The figure is a schematic perspective view of a standard plate for a capacitive surface roughness measuring machine according to the present invention, and FIG.
FIG. 5 is a schematic enlarged cross-sectional view showing the measurement electrode of the capacitive surface roughness measuring device pressed against the standard plate, and FIG. 6 is a schematic enlarged plan view of the wire mesh on the standard plate. E is a schematic perspective view showing some specific examples of curved design of the board in the standard board, and Fig. 7 shows each surface of the actual object to be measured when using a capacitive surface roughness measuring electrode. Figure 8, a graph showing changes in capacitance with respect to roughness, shows the wire diameter of the wire mesh and the pitch between each wire, that is, the mesh of the wire mesh, when a capacitive surface roughness measuring electrode is used for the standard plate. It is a graph showing changes in capacitance with respect to numbers. DESCRIPTION OF SYMBOLS 1... Wire mesh, 2... Substrate, 3... Capacitive surface roughness measurement electrode, 4... Electrode contact point of wire mesh, 5
...Gap hole in wire mesh, 6... Wire diameter of wire mesh, 7...
...Pitch between each line of wire mesh, RP...Standard plate.

Claims (1)

[Claims] 1. Pressing a predetermined wide-area measurement electrode surface against the surface to be measured of a metal object under constant pressure, and measuring the change in capacitance that occurs between the measurement electrode surface and the surface to be measured. In a surface roughness measurement system using a capacitance type surface roughness measuring machine that measures the surface roughness of a metal workpiece by detecting it as an electrical signal, a standard plate for calibrating the scale of the surface roughness measuring machine, A plurality of electrode contact points and void holes are arranged on one reference surface of a hard substrate having properties and spaced apart from each other and are organized by meridian lines arranged parallel to each other and latitude lines that intersect the meridian lines in a plain weave manner, respectively. When the electrode surface of a capacitance type surface roughness measuring device is pressed against a metal surface with a predetermined surface roughness, the wire diameter and the pitch between the wires of the wire mesh are set to A standard plate for a capacitive surface roughness measuring device, characterized in that the standard plate is preset to correspond to the value of capacitance generated between the metal surface and the metal surface.