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JPS6333311B2 - - Google Patents
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JPS6333311B2 - - Google Patents

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Publication number
JPS6333311B2
JPS6333311B2 JP55005577A JP557780A JPS6333311B2 JP S6333311 B2 JPS6333311 B2 JP S6333311B2 JP 55005577 A JP55005577 A JP 55005577A JP 557780 A JP557780 A JP 557780A JP S6333311 B2 JPS6333311 B2 JP S6333311B2
Authority
JP
Japan
Prior art keywords
present
electric field
thickness
dielectric constant
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55005577A
Other languages
Japanese (ja)
Other versions
JPS56103486A (en
Inventor
Sadayuki Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP557780A priority Critical patent/JPS56103486A/en
Publication of JPS56103486A publication Critical patent/JPS56103486A/en
Publication of JPS6333311B2 publication Critical patent/JPS6333311B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/853Ceramic compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Insulating Materials (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

本発明は海洋計測システム用音響信号送受波器
に使用される圧電性磁器材料に関するものであ
る。 海洋音響計測システムによる音響信号送受に際
しては、信号の振巾と位相情報の送受が必要にな
る。従つて、ここで使用されるトランスデユサは
送受波感度が良好で、大振巾駆動が可能で、かつ
指向性副極の低いことが望まれる。従来、この種
の用途には、ジルコン・チタン酸鉛系圧電性磁器
を板状にした厚み振動子が用いられている。しか
し、この様な材料で構成した振動子は、厚み方向
振動の共振周波数以下の周波数領域で縦振動横効
果が強勢に励振されるため、この領域で送受波感
度の周波数特性が非常に複雑になると同時に、音
響放射面がピストン運動をしないので指向性副極
が厚み共振以外の周波数で極めて大きくなつてし
まう欠点があつた。また、誘電率εT 33や誘電損失
tanδの値が比較的低い電界強度で急激に大きくな
る為、高電界を印加して大振巾で駆動することが
出来ない欠点も有していた。 本発明の目的は、厚み方向に分極処理した板状
の厚み方向振動子において、厚み振動共振周波数
以下の領域で縦振動横効果系の振動が抑圧され、
かつ高電界を印加した場合でもεT 33及びtanδの値
が比較的小さい値を示す材料を提供することによ
り、ひいては上記従来振動子の欠点を除去し、指
向性副極が小さく、かつ大振巾振動の励振が可能
な海洋音響計測システム用音響信号送受波器を可
能とすることである。 本発明の材料はPb1-xSrxTi1-y(Mn1/3Sb2/3yO3
で表わされる組成の圧電性磁器材料である。 本発明の材料を海洋音響計測システム用の音響
信号トランスデユサに適用すれば、指向性副極が
低く、かつ大振巾駆動が可能な位相特性、振巾特
性が共に優れた高性能トランスデユサが実現出来
る。 以下本発明の詳細を実施例に沿つて説明する。 実施例 1 本発明の材料を得る出発原料としては、酸化鉛
(PbO)、酸化チタン(TiO2)、炭酸ストロンチウ
ム(SrCO3)、炭酸マンガン(MnCO3)、酸化ア
ンチモン(Sb2O3)、の各粉末を用いた。ここで、
SrCO3、MnCo3はそれぞれSrO、MnOに換算し
て必要量を得るようにした。各粉末を所定量だけ
秤量し、純水を用いてボールミル混合し、混合粉
末を850℃で1時間予焼した。粉砕後、700Kg/cm2
の圧力で粉末を加圧成型し、1240℃〜1300℃で1
時間焼結した後、23×23×5.5mmの矩形板状に加
工した。両面に銀電極を焼きつけ、120℃で
8kV/mmの直流バイアス電界を1時間印加して圧
電的に活性化した。24時間室温中で放置した後、
ベクトルインピーダンスメータを用いて自由アド
ミツタンス特性を評価した。 第1図は、本発明になる材料 Pb1-xSrxTi1-y(Mn1/3Sb2/3yO3の中からx=
0.03、y=0.05を代表例に選び、その自由アドミ
ツタンス特性を示したものである。略350KHzに
強勢な厚み振動が励振され、それ以下の周波数領
域では殆んど振動が励振されていず、充分に満足
すべき状態であることは明白である。参考までに
第2図に通常のジルコン・チタン酸鉛系圧電磁器
の自由アドミツタンス特性を示す。この従来材料
による振動子の寸法諸元は先の第1図に示すもの
と同一である。この従来材料による振動子におい
ては、厚み振動の共振周波数より低い周波数領域
で多数の強勢な厚み振動以外の振動が励振されて
おり、満足すべき状態ではない。 本実施例からも明らかな様に、本発明の圧電磁
器で厚み縦振動子を構成すれば、広い周波数範囲
にわたつてほぼ厚み縦振動のみを励振することが
可能となり、厚み共振周波数以下の周波数領域で
も指向性副極を低く保つことができる。 実施例 2 実施例1で述べたと同様の方法で直径16mm厚さ
0.5mmの円板を試作し、上下面に銀電極を施して
厚め方向に分極処理した後、誘電率εT 33、誘電損
失tanδ及びこれら諸定数の電界強度依存性並びに
厚み縦振動電気機械結合係数ktの測定を行つた。 本発明材料の組成を次式 Pb1-xSrxTi1-y(Mn1/3Sb2/3yO3 で表わすと、第3図中斜線で示した領域の組成物
は成型焼結体が得られないか、あるいは電気抵抗
が低い為に長時間の間直流バイアス電界を印加し
て分極処理する事が出来ない事を示している。第
3図で斜線を施さない領域の組成物は成型焼結体
が得られ、かつ分極処理が可能で分極後大きな圧
電性を示した。得られた結果の代表的な例を次に
示す。 第4図a,bは、それぞれ1kHzの周波数で測
定した誘電率εT 33と誘電損失tanδの測定電界強度
依存性を示したもので、誘電率は50V/cmの電界
での測定値を基準として変化率で示してあり、誘
電損失は絶対値で示されている。図中1は本発明
による材料のうち代表例としてPb0.95Sr0.05Ti0.95
(Mn1/3Sb2/30.05O3の特性を示したもので、2は
高出力ソナー用材料として市販されている米国ガ
ルソン社のG−1408の特性を示したものである。
本発明の材料の方が、誘電率、tanδ共に印加電界
強度に対する依存性が小さく、高電界駆動に耐え
ることが明白である。 また最近、本発明の材料と類似した圧電性を示
す材料が報告されているので、これらと本発明材
料との誘電率、tanδの電界強度依存性も併せ比較
した。第4図中3は0.965PbTiO3+0.025LaO3/2
+0.010MnO2、4はPb0.93Sr0.07Ti0.96(Co1/2W1/2
0.04O3で表わされる材料に対する試験結果を示し
ており、いずれも本発明の材料と比較して電界依
存性が大きいことが明らかである。 次表は、本発明の材料について誘電率の電界依
存性(但し50V/cmの電界における測定値を基準
にとり、10kV/cmにおける測定値の変化率で示
してある。)、誘電損失tanδの絶対値(但し
10kV/cmの値で示してある。)、及び厚み方向振
動の電気機械結合係数ktを示している。これらの
結果からも、先にも述べた様に本発明の材料は既
存材料と比較していずれも誘電率、tanδの電界依
存性が小さく、大振巾駆動用厚み振動子材料に適
していることが明白である。
The present invention relates to a piezoelectric ceramic material used in an acoustic signal transducer for a marine measurement system. When transmitting and receiving acoustic signals using a marine acoustic measurement system, it is necessary to transmit and receive signal amplitude and phase information. Therefore, it is desired that the transducer used here has good wave transmission/reception sensitivity, can be driven with a large amplitude, and has a low directivity subpole. Conventionally, for this type of application, a thickness vibrator made of plate-shaped zircon-lead titanate-based piezoelectric porcelain has been used. However, in a vibrator made of such a material, the longitudinal vibration transverse effect is strongly excited in the frequency range below the resonant frequency of the thickness direction vibration, so the frequency characteristics of the transmitting and receiving sensitivity become extremely complex in this region. At the same time, since the acoustic radiation surface does not make a piston movement, the directional sub-pole becomes extremely large at frequencies other than thickness resonance. In addition, the dielectric constant ε T 33 and the dielectric loss
Since the value of tan δ increases rapidly at a relatively low electric field strength, it also has the disadvantage that it cannot be driven with a large amplitude by applying a high electric field. An object of the present invention is to suppress the vibration of the longitudinal vibration transverse effect system in a region below the thickness vibration resonance frequency in a plate-shaped thickness direction vibrator polarized in the thickness direction,
Moreover, by providing a material that exhibits relatively small values of ε T 33 and tan δ even when a high electric field is applied, the above-mentioned drawbacks of the conventional vibrator can be eliminated, and the directivity subpole is small and the large vibration An object of the present invention is to provide an acoustic signal transducer for a marine acoustic measurement system that can excite width vibrations. The material of the present invention is Pb 1-x Sr x Ti 1-y (Mn 1/3 Sb 2/3 ) y O 3
It is a piezoelectric ceramic material with a composition expressed by: If the material of the present invention is applied to an acoustic signal transducer for a marine acoustic measurement system, a high-performance transducer with low directivity subpole and excellent phase characteristics and amplitude characteristics capable of large amplitude drive can be realized. . The details of the present invention will be explained below along with examples. Example 1 Starting materials for obtaining the material of the present invention include lead oxide (PbO), titanium oxide (TiO 2 ), strontium carbonate (SrCO 3 ), manganese carbonate (MnCO 3 ), antimony oxide (Sb 2 O 3 ), Each powder was used. here,
SrCO 3 and MnCo 3 were converted into SrO and MnO, respectively, to obtain the required amounts. A predetermined amount of each powder was weighed, mixed in a ball mill using pure water, and the mixed powder was prefired at 850° C. for 1 hour. After crushing, 700Kg/cm 2
Pressure mold the powder at a pressure of 1,240℃ to 1,300℃.
After sintering for a period of time, it was processed into a rectangular plate shape of 23 x 23 x 5.5 mm. Burn silver electrodes on both sides and heat at 120℃.
A DC bias electric field of 8 kV/mm was applied for 1 hour to piezoelectrically activate it. After leaving it at room temperature for 24 hours,
Free admittance characteristics were evaluated using a vector impedance meter. Figure 1 shows x = _ _
0.03 and y=0.05 are chosen as representative examples, and their free admittance characteristics are shown. It is clear that strong thickness vibrations are excited at about 350 KHz, and almost no vibrations are excited in the frequency range below that, which is a fully satisfactory condition. For reference, Figure 2 shows the free admittance characteristics of a typical zircon-lead titanate piezoelectric ceramic. The dimensions of this vibrator made of conventional material are the same as those shown in FIG. 1 above. In the vibrator made of this conventional material, many strong vibrations other than the thickness vibration are excited in a frequency range lower than the resonant frequency of the thickness vibration, and the condition is not satisfactory. As is clear from this example, if a thickness longitudinal vibrator is constructed using the piezoelectric ceramic of the present invention, it becomes possible to excite almost only thickness longitudinal vibration over a wide frequency range, and frequencies below the thickness resonance frequency can be excited. It is possible to keep the directivity sub-pole low even in the area. Example 2 The same method as described in Example 1 was used to make a 16 mm diameter
A 0.5 mm disk was prototyped, and after applying silver electrodes on the top and bottom surfaces and polarizing it in the thickness direction, we investigated the dielectric constant ε T 33 , the dielectric loss tan δ, the electric field strength dependence of these constants, and the thickness longitudinal vibration electromechanical coupling. The coefficient kt was measured. When the composition of the material of the present invention is expressed by the following formula Pb 1-x Sr x Ti 1-y (Mn 1/3 Sb 2/3 ) y O 3 , the composition in the shaded area in Fig. 3 is formed by molding and sintering. This indicates that either a solid body cannot be obtained or the electric resistance is low, so that polarization cannot be performed by applying a DC bias electric field for a long period of time. For the compositions in the non-shaded areas in FIG. 3, a shaped sintered body was obtained, and the compositions could be subjected to polarization treatment, and exhibited great piezoelectricity after polarization. Representative examples of the results obtained are shown below. Figures 4a and b show the dependence of the dielectric constant ε T 33 and the dielectric loss tan δ on the measured electric field strength, respectively, measured at a frequency of 1 kHz, and the dielectric constant is based on the measured value in an electric field of 50 V/cm. The dielectric loss is shown as a rate of change, and the dielectric loss is shown as an absolute value. In the figure, 1 is a representative example of materials according to the present invention: Pb 0.95 Sr 0.05 Ti 0.95
The characteristics of (Mn 1/3 Sb 2/3 ) 0.05 O 3 are shown, and 2 shows the characteristics of G-1408 manufactured by Garson Co., Ltd. in the United States, which is commercially available as a material for high-output sonar.
It is clear that the material of the present invention has a smaller dependence on the applied electric field strength in both dielectric constant and tan δ, and can withstand high electric field driving. Furthermore, since materials exhibiting piezoelectricity similar to the material of the present invention have been reported recently, the electric field strength dependence of the dielectric constant and tan δ of these and the material of the present invention was also compared. 3 in Figure 4 is 0.965PbTiO 3 +0.025LaO 3/2
+0.010MnO 2 , 4 is Pb 0.93 Sr 0.07 Ti 0.96 (Co 1/2 W 1/2 )
The test results for materials expressed by 0.04 O 3 are shown, and it is clear that both have greater electric field dependence than the materials of the present invention. The following table shows the dependence of dielectric constant on electric field (measured value in electric field of 50 V/cm is taken as reference, and is shown as the rate of change of the measured value at 10 kV/cm), and the absolute dielectric loss tan δ for the material of the present invention. value (however
It is shown as a value of 10kV/cm. ), and the electromechanical coupling coefficient k t of vibration in the thickness direction. From these results, as mentioned earlier, the materials of the present invention have smaller electric field dependence of permittivity and tanδ than existing materials, and are suitable for thick vibrator materials for large amplitude drives. That is clear.

【表】【table】

【表】 *印を付したものは参照のために示した従来
例であり、その組成、呼称は備考欄に記
した通りである。
以上実施例1、2からも明らかな様に、本発明
の組成物は厚み共振以下の周波数領域で異種モー
ドの振動が抑圧されるため、広い周波数範囲にわ
たつて純粋な厚み振動を励振する事が出来る。従
つて音響信号の送波に対して指向性副極を低く抑
えることが出来る。また高電界の電気信号を入力
しても、誘電率、tanδの増大の割合が既存材料と
比較して小さい。従つて、本発明の材料を海洋計
測システム用音響送受波器材料に適用すれば、優
れたトランスデユサを提供することが可能とな
る。
[Table] Items marked with * are conventional examples shown for reference, and their compositions and names are as stated in the notes column.
As is clear from Examples 1 and 2 above, the composition of the present invention suppresses vibrations in different modes in the frequency range below thickness resonance, so it is possible to excite pure thickness vibrations over a wide frequency range. I can do it. Therefore, the directivity sub-pole can be kept low for acoustic signal transmission. Furthermore, even when a high electric field electric signal is input, the rate of increase in dielectric constant and tan δ is small compared to existing materials. Therefore, if the material of the present invention is applied to an acoustic transducer material for an oceanographic measurement system, it will be possible to provide an excellent transducer.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の材料の自由アドミツタンス特
性の代表例を示したものである。材料組成は
Pb0.97Sr0.03Ti0.95(Mn1/3Sb2/30.05O3で、振動子の
形状、寸法は23×23×5.5mmの矩形板で、厚み方
向に分極処理されている。第2図は従来のジルコ
ンチタン酸鉛系圧電板の自由アドミツタンス特性
を示している。寸法諸元は第1図に示した振動子
と同一である。第3図は本発明の材料組成を
Pb1-xSrxTi1-y(Mn1/3Sb2/3yO3で表わした時の、
x、yの値と材料特性との関係を示したもので、
図中斜線を施した領域では成型焼結体が得られな
いかあるいは電気低抗が低く分極処理して活性化
することが不可能である事を示している。第4図
a,b図はそれぞれ誘電率とtanδの印加電界強度
依存性の測定値を示したものであり、誘電率は
50V/cmの電界強度における測定値を基準にとつ
てそこからの変化率で表わし、tanδは絶対値で表
わしてある。図中、1が本発明の組成物の代表例
として示した(Pb0.95Sr0.05Ti0.95(Mn1/3Sb2/30.05
O3)から得たデータである。2は参照のために
示した米国ガルトン社製のG−1408から得たデー
タである。3もまた従来例の1つである
0.965PbTiO3+0.025LaO3/2+0.010MnO2から得た
データであり、4もまた従来例の1つである
Pb0.93Sr0.07Ti0.96(Co1/2W1/20.04O3から得たデー
タを示している。 これら全てのデータにおいて本発明の圧電性磁
器は充分満足すべき値を示していることが判る。
FIG. 1 shows a typical example of the free admittance characteristics of the material of the present invention. The material composition is
The vibrator is a rectangular plate with dimensions of 23 x 23 x 5.5 mm , and is polarized in the thickness direction. FIG. 2 shows the free admittance characteristics of a conventional zirconium titanate-based piezoelectric plate. The dimensions are the same as the vibrator shown in FIG. Figure 3 shows the material composition of the present invention.
When expressed as Pb 1-x Sr x Ti 1-y (Mn 1/3 Sb 2/3 ) y O 3 ,
It shows the relationship between x, y values and material properties.
The shaded area in the figure indicates that either a molded sintered body cannot be obtained or the electrical resistance is so low that it is impossible to activate it by polarization treatment. Figures 4a and 4b show the measured values of the dependence of the dielectric constant and tanδ on the applied electric field strength, respectively, and the dielectric constant is
It is expressed as a rate of change from a measured value at an electric field strength of 50 V/cm as a reference, and tan δ is expressed as an absolute value. In the figure, 1 is shown as a representative example of the composition of the present invention (Pb 0.95 Sr 0.05 Ti 0.95 (Mn 1/3 Sb 2/3 ) 0.05
This data was obtained from O 3 ). 2 is data obtained from G-1408 manufactured by Galton, USA, shown for reference. 3 is also one of the conventional examples.
This is data obtained from 0.965PbTiO 3 +0.025LaO 3/2 +0.010MnO 2 , and 4 is also one of the conventional examples.
Data obtained from Pb 0.93 Sr 0.07 Ti 0.96 (Co 1/2 W 1/2 ) 0.04 O 3 are shown. It can be seen that the piezoelectric ceramic of the present invention exhibits sufficiently satisfactory values in all of these data.

Claims (1)

【特許請求の範囲】 1 Pb1-xSrxTi1-y(Mn1/3Sb2/3yO3と表わした時
にx、yの値が 0.009≦x≦0.16 0.015≦y≦0.12 なる値を有する組成比で囲まれる組成範囲内にあ
る事を特徴とする圧電性磁器。
[Claims] When expressed as 1 Pb 1-x Sr x Ti 1-y (Mn 1/3 Sb 2/3 ) y O 3 , the values of x and y are 0.009≦x≦0.16 0.015≦y≦0.12 A piezoelectric porcelain characterized by being within a composition range surrounded by a composition ratio having a value of.
JP557780A 1980-01-21 1980-01-21 Piezoelectric porcelain Granted JPS56103486A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP557780A JPS56103486A (en) 1980-01-21 1980-01-21 Piezoelectric porcelain

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP557780A JPS56103486A (en) 1980-01-21 1980-01-21 Piezoelectric porcelain

Publications (2)

Publication Number Publication Date
JPS56103486A JPS56103486A (en) 1981-08-18
JPS6333311B2 true JPS6333311B2 (en) 1988-07-05

Family

ID=11615072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP557780A Granted JPS56103486A (en) 1980-01-21 1980-01-21 Piezoelectric porcelain

Country Status (1)

Country Link
JP (1) JPS56103486A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2990088B2 (en) * 1997-02-28 1999-12-13 日本電気株式会社 Manganese-containing composite oxide and method for producing composite perovskite compound composition using the composite oxide
KR100765176B1 (en) 2006-05-27 2007-10-12 류주현 Piezoelectric Ceramics Composition and Manufacturing Method Thereof

Also Published As

Publication number Publication date
JPS56103486A (en) 1981-08-18

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