JPS6342426B2 - - Google Patents
Info
- Publication number
- JPS6342426B2 JPS6342426B2 JP57070875A JP7087582A JPS6342426B2 JP S6342426 B2 JPS6342426 B2 JP S6342426B2 JP 57070875 A JP57070875 A JP 57070875A JP 7087582 A JP7087582 A JP 7087582A JP S6342426 B2 JPS6342426 B2 JP S6342426B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- tube
- cathode
- ion
- laser device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
本発明は熱陰極を有するイオンレーザ装置に関
する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ion laser device having a hot cathode.
従来のこの種のイオンレーザ装置は第1図に示
すようにレーザ管1は陽極5と陰極7との間にレ
ーザ電源8を接続し、陽極5と陰極7との間で放
電し出力ミラー3と全反射ミラー4とで構成され
る光共振器によりレーザ発振し、レーザ光10を
出力する。 In the conventional ion laser device of this type, as shown in FIG. Laser oscillation is performed by an optical resonator composed of a total reflection mirror 4 and a total reflection mirror 4, and a laser beam 10 is output.
イオンレーザは、イオン化された希ガスのエネ
ルギーレベル間の遷移によつてレーザ発振を行な
わせるものであり、可視域においてワツト台の大
出力連続発振が得られる唯一のガスレーザなので
ラマン分光、ホログラフイーなどに広く用いられ
ている。しかし、希ガスのイオン化エネルギーが
高いため、レーザ細管内に数10アンペアにおよぶ
大電流アーク放電を行なわせる必要があり、この
ときレーザ細管では6〜9KWに達する熱発生が
ある。したがつて、イオンレーザの細管として
は、イオンの衝撃に耐えることができ、熱分解し
にくい材料を選ぶ必要がある。そのため、中央に
穴の設けられたグラフアイトデイスク郡6をなら
べ中央穴の列をもつてレーザ細管とするものが用
いられている。さらに6〜9KWにおよぶ熱をレ
ーザ細管外部に放出させるため管外部に冷却水を
通すなどして冷却しているが長時間使用している
と、グラフアイトデイスク郡6等から発生する不
純ガス等とグラフアイトデイスクが化学反応し、
グラフアイトが分解し、グラフアイト粉末となつ
てくずれ、その粉末の1部は、光学窓2,2′に
付着し、レーザ光10を減少させる。また前記不
純ガスにより陰極7も劣化し陽極5と陰極7間の
アーク放電を維持できなくなり、寿命となる。 Ion lasers perform laser oscillation by transitioning between energy levels of ionized rare gases, and are the only gas lasers that can produce continuous oscillations with a high output on the order of Watts in the visible range, so they can be used for Raman spectroscopy, holography, etc. widely used. However, since the ionization energy of the rare gas is high, it is necessary to cause a large current arc discharge of several tens of amperes within the laser tube, and at this time, heat generation of 6 to 9 kW occurs in the laser tube. Therefore, for the thin tube of the ion laser, it is necessary to select a material that can withstand ion bombardment and is resistant to thermal decomposition. For this reason, a laser thin tube is used in which a group of graphite disks 6 each having a hole in the center are lined up and have a row of holes in the center. In addition, in order to release the heat of 6 to 9 kW to the outside of the laser tube, cooling water is passed through the outside of the tube to cool it, but if it is used for a long time, impurity gases etc. will be generated from the graphite disk group 6 etc. and the graphite disk undergo a chemical reaction,
The graphite decomposes and crumbles into graphite powder, and a portion of the powder adheres to the optical windows 2, 2' and reduces the laser beam 10. Moreover, the cathode 7 is also deteriorated by the impure gas, and arc discharge between the anode 5 and the cathode 7 cannot be maintained, and the service life of the cathode 7 is reached.
本発明の目的は、前記欠点を除去し、長時間に
わたつてレーザ出力の安定な、陰極劣化の少ない
長寿命なイオンレーザ装置を提供することにあ
る。 SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks and provide an ion laser device that has a stable laser output over a long period of time and has a long life with little cathode deterioration.
本発明は、レーザ管とレーザ共振器ミラーとレ
ーザ電源とを具備したイオンレーザ装置において
レーザ管の熱陰極と並列に接続された加熱型ゲツ
タを具備したことを特徴とする。 The present invention is characterized in that an ion laser device including a laser tube, a laser resonator mirror, and a laser power source includes a heated getter connected in parallel to the hot cathode of the laser tube.
以下第2図の一実施例について本発明を詳細に
説明する。 The present invention will be described in detail below with reference to an embodiment shown in FIG.
レーザ管1は陽極5と陰極7との間で放電し出
力ミラー3と全反射ミラー4とで構成される、光
共振器によりレーザ発振し、レーザ光10を出力
する。該陰極7と並列に加熱型ゲツタ9(Zc―
Al,Zc―C)を接続し、レーザ電源8により陰
極7とゲツタ9を同時に加熱して動作させること
によりレーザ管1内の不純ガスをゲツタ9に吸収
させ、グラフアイトデイスク郡6の劣化や陰極の
劣化を防止する。 The laser tube 1 generates a discharge between an anode 5 and a cathode 7, oscillates with an optical resonator including an output mirror 3 and a total reflection mirror 4, and outputs a laser beam 10. A heated getter 9 (Zc-
Al, Zc-C) is connected, and the cathode 7 and getter 9 are simultaneously heated and operated by the laser power source 8, so that the impure gas in the laser tube 1 is absorbed by the getter 9, and the graphite disk group 6 is prevented from deteriorating. Prevents cathode deterioration.
よつて光学窓2,2′の汚れもなく、蔭極の劣
化も少なく、長期間にわたつて出力のパワーの安
定なイオンレーザ装置を得ることができる。 Therefore, it is possible to obtain an ion laser device with no dirt on the optical windows 2, 2', less deterioration of the negative electrode, and stable output power over a long period of time.
第1図は従来のイオンレーザ装置を示すブロツ
ク図であり、第2図は本発明の一実施例を示す断
面図である。
1……レーザ管、2,2′……光学窓、3……
出力ミラー、4……全反射ミラー、5……陽極、
6……グラフアイトデイスク郡、7……陰極、8
……レーザ電源、9……ゲツタ、10……レーザ
光。
FIG. 1 is a block diagram showing a conventional ion laser device, and FIG. 2 is a sectional view showing an embodiment of the present invention. 1... Laser tube, 2, 2'... Optical window, 3...
Output mirror, 4... Total reflection mirror, 5... Anode,
6...Graphite disk group, 7...Cathode, 8
... Laser power supply, 9 ... Getsuta, 10 ... Laser light.
Claims (1)
とを具備したイオンレーザ装置において該レーザ
管の熱陰極と並列に接続された加熱型ゲツタを具
備したことを特徴とするイオンレーザ装置。1. An ion laser device comprising a laser tube, a laser resonator mirror, and a laser power source, characterized in that the ion laser device is equipped with a heated getter connected in parallel to a hot cathode of the laser tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7087582A JPS58188176A (en) | 1982-04-27 | 1982-04-27 | Ion laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7087582A JPS58188176A (en) | 1982-04-27 | 1982-04-27 | Ion laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58188176A JPS58188176A (en) | 1983-11-02 |
| JPS6342426B2 true JPS6342426B2 (en) | 1988-08-23 |
Family
ID=13444158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7087582A Granted JPS58188176A (en) | 1982-04-27 | 1982-04-27 | Ion laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58188176A (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5585087A (en) * | 1978-12-21 | 1980-06-26 | Nec Corp | He-ne gas laser tube |
| JPH0524170U (en) * | 1991-09-04 | 1993-03-30 | 日本電気株式会社 | Heater chip with work holding mechanism |
-
1982
- 1982-04-27 JP JP7087582A patent/JPS58188176A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58188176A (en) | 1983-11-02 |
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