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JPS6342726B2 - - Google Patents
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JPS6342726B2 - - Google Patents

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Publication number
JPS6342726B2
JPS6342726B2 JP55183812A JP18381280A JPS6342726B2 JP S6342726 B2 JPS6342726 B2 JP S6342726B2 JP 55183812 A JP55183812 A JP 55183812A JP 18381280 A JP18381280 A JP 18381280A JP S6342726 B2 JPS6342726 B2 JP S6342726B2
Authority
JP
Japan
Prior art keywords
ultrasonic
cell
windows
lens
pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55183812A
Other languages
Japanese (ja)
Other versions
JPS57108622A (en
Inventor
Koichiro Myagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP55183812A priority Critical patent/JPS57108622A/en
Publication of JPS57108622A publication Critical patent/JPS57108622A/en
Publication of JPS6342726B2 publication Critical patent/JPS6342726B2/ja
Granted legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/54Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using means specified in two or more of groups G01D5/02, G01D5/12, G01D5/26, G01D5/42, and G01D5/48
    • G01D5/58Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using means specified in two or more of groups G01D5/02, G01D5/12, G01D5/26, G01D5/42, and G01D5/48 using optical means, i.e. using infrared, visible or ultraviolet light

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)

Description

【発明の詳細な説明】 この発明は回転の方向と大きさを電気信号で得
るようにした、回転変位検出装置に関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a rotational displacement detection device that obtains the direction and magnitude of rotation using electrical signals.

本発明は液体の慣性を利用し、静止液体中に発
射した超音波パルスがこの液体中に配置された数
枚の超音波反射板にて反射し、時間的空間的に特
定場所を通過するようにした超音波液体セルと、
このセル内の超音波パルスをセル外部より検出す
るフーリエ光学系とから構成されている。第1図
は本発明の概念を示した透視図であつて、超音波
液体セル1の内部に超音波パルスを発射する振動
子2と、この超音波パルスを反射する2枚の反射
板3a,3bが示されている。同セルの上下面に
は同セル内にレーザ光源8よりの平行光束を通過
させ、検出フイルタ4の中心で結像させるために
レンズ5,6がはめ込まれている。この2枚のレ
ンズ面に平行に3つの長方形開口を有する光学フ
イルタ7が配置されている。超音波パルス検出用
のフーリエ変換光学系は、前記レーザ光源8と拡
大レンズ9、前記レンズ5,6、同検出フイルタ
4,光電変換器10より構成されている。次に超
音波液体セル1の構造と、前記検出フイルタ4お
よび同振動子の配置について説明する。第2図は
前記セル1の上ぶた11を取りはずして内部状態
を示したものである。振動子2は前記セル壁面に
固定されており、セル中心に向つて30度の角度で
超音波パルスを発射する。この超音波パルスはセ
ル中心に向つて配置されている反射板3a,3b
により反射角60゜で2回反射し、一部は直接
に、一部は振動子面でさらに反射後、超音波吸収
物質12に吸収され消滅する。前記光学フイルタ
7は図で明らかなように、セル中心よりそれぞれ
120゜の角度をもつて放射状に開口が配置されてお
り、その長辺は超音波進行方向に垂直である。よ
つて、振動子2より発射された超音波により。前
記光学フイルタ7の3つの開口位置にはそれぞれ
液体密度が格子状に変化する光学的位相格子が現
われる。この超音波による光学的位相格子の検出
法を次に説明する。第3図は前記光学フイルタ7
の開口位置と同検出フイルタ4の検出用開口の相
対位置を示している。該第1図にて示したよう
に、これら2枚のフイルタは光軸中心に配置さ
れ、空間的にx軸とα軸、y軸とβ軸とが平行で
ある。さて、第3図光学的フイルタ7の1つの開
口13aを超音波パルス16が横切つた場合、こ
の開口を通過している光束が、液体中に生じた光
学的位相格子によつて回折を受け、さらにレンズ
6で集束され検出フイルタ4の位置に結像する。
本発明では前記開口13aを横切る超音波パルス
の進行方向が、該第2図で示したように開口の短
辺方向であるため、この超音波パルスで生じる第
1次回折像輝点はフラウンホーフアーの回折理論
に基づき、同図検出フイルタ7の斜線部分a,
a′に現われる。同様に、開口13bを横切つた超
音波パルスによつてb,b′に、同じく、開口13
cによつてc,c′の場所に回折光が生じる。これ
ら回折光は超音波パルス16が液体セル内で反射
を繰返して一周する際、同セル内の液体と、光学
的フイルタ7が静止状態にあれば、振動子2と反
射板3a,3bの間隔および超音波伝搬速度vで
定まる特定周期をもつて検出フイルタ上に現われ
る。本発明ではこの回折像輝点の周期的発生を検
出するため、検出フイルタ4に、前記光学的フイ
ルタ7の開口に対応した6個の円開口を設けてい
る。第4図は液体セル1が超音波パルス16の発
射後、角度θの回転運動を生じた場合、前述した
回折像輝点の発生周期に変化を生ずることを示し
た図である。セルの回転運動がセル内の液体の慣
性による静止状態保持を大幅に乱さない程度の大
きさと速さを持つものと仮定すれば、液体中に発
射された超音波パルス16は空間的に定まつた特
定の進路を速度vで進行する。この超音波パルス
16が開口13aを横切つた後、セルの回転が始
まると、超音波パルス16が開口13bを横切る
までの時間が静止状態時に較べ変化する。この時
間差をdで表わし光学的フイルタ7の開口中心と
セル中心の距離をRで表わせば、d≒Rtanθ/v
の近似式を得る。θが小さな場合、tanθ≒kθ
(k:比例定数)と考え、d≒kRθ/vとなる。
本発明のように3つの開口を有する光学フイルタ
7の場合には、回折による光出力は1つの超音波
パルスに対して3回得られ、回転角θを示す時間
差dは2回得ることができる。よつて適当に超音
波パルスの繰返し時間を設定すれば、周期的に光
出力パルスを得ることができ、これらのパルスの
発生間隔の変化を電気的に測定すれば回転角θ度
または回転の時間変化θT〔o/s〕を得ることが
できる。しかしながら、周期的超音波パルスを用
いた連続動作においては、液中の超音波パルスの
空間的周期が振動子の変位によるドツプラ効果に
よつて変化する事を考慮しなくてはならない。第
5図は振動子の変位によるドツプラ効果を考慮し
た本発明の動作原理図である。同図aは液体セル
の回転変化を示し、同図bは同セル中の超音波位
置を反射を無視した直線の位置に直して示してあ
る。点線で示した箇所は液体セルが静止状態の場
合の位置である。同図cは光学的フイルタ7の開
口を前記bと同様に直線的に並べて示したもので
ある。本図では、同図bの超音波パルスが移動す
る代わりに、同図cの開口が1,2,…,17の
順で図面右方向に移動すると考える。また、超音
波パルスと開口位置の時間的対応は、同パルス
P1と開口1の相対位置を時刻t=0と定める。
開口の動きは、超音波伝搬と液体セルの回転とで
合成される動きであつて、3つの開口の中心軌跡
は同図cの太線で示したようになる。また、斜線
で示した開口位置1,5,9,13,17は超音
波パルスが発射される時の開口位置を示し、液体
セル内に超音波パルスが存在しないため光出力は
現れない。光出力パルスは、空間的相互相関演算
の原理により超音波パルスの空間的長さを開口短
辺に一致させた場合、三角形パルスとなる。これ
を光電変換器10で電気信号に変換した結果を同
図dに示す。パルス上部の黒点は、液体セルが静
止している場合の出力パルスの位置を示す。同図
dで明らかなように、超音波パルスP1〜P4によ
る3つずつのパルス列はドツプラ効果による全体
的な偏移と、液体セルの回転による時間差dの変
化を示している。このパルス位置変化より前記時
間差dを取り出すには、本図のように同一の超音
波パルスによつて順次発生した3つの出力パルス
の組を各々明確に分離する必要がある。ゆえに、
超音波パルスの空間的最小繰返し周期は開口中心
距離の4倍以上を必要とする。つぎに、このよう
にして得た3つずつのパルス列より、同図aの回
転変化の時間割合を検出する電気的方法の一例を
述べる。第6図はこの方法のタイムチヤートであ
つて、同図aは前記第5図dを拡大して示してあ
る。上部T印な液体セルが静止状態の場合の出力
パルス位置であり、dは同セルの回転による時間
変化、gは振動子2のドツプラ効果による時間変
化の一部を示している。同図bは、同図aの出力
パルスでトリガされた単安定なマルチバイブレー
タの出力を示し、19番で示した一点鎖線な液体セ
ル静止状態における出力矩形パルスの平均値を示
す。この位相変調された出力矩形パルスをアナロ
グ信号に復調したものが点線で示した信号であ
る。また、この復調信号は時刻t0よりt1までの区
間最大値をm1として時刻t1で検出する。同様に
区間最大値m24をそれぞれ時刻t24において検
出する。同図cは、同図bで得た区間最大値m0
4を各々時間(t0〜t1)、(t1〜t2)…(t4〜t5)の
間、保持することを示した図である。このように
して、超音波パルスの繰返し周期でデイジタル変
化する信号が得られる。この信号値は、前記単安
定マルチバイブレータ、同復調器、および最大値
保持回路の動作定数を超音波パルスの繰返し周期
を考慮して適当な値に設定すれば、液体セル回転
角の時間変化割合に近似させることができる。し
かしながら、前述合のとうり区間最大値mを超音
波パルスの1周期ずつ保持するため、液体セルの
回転開始に対し信号検出時刻は前記1周期分の時
間遅れを生じる。同図cにはこの時間遅れを考慮
した液体セルの回転変化を点線で示した。この時
間遅れは、液体セルをよほど大きくしない限り、
超音波パルス周期が短いため実用上の支障にはな
らない。以上のような方法は典型的な信号検出の
一例であつて、この他、パルスカウント法や、振
動子2に加えた超音波パルスを参照信号に用いる
位相比較法などのより精度の高い検出法が考えら
れる。第7図は、本発明の実施例における構成図
である。装置の小形化を目的として2枚の反射鏡
15a,15bを用いて光学系を折り曲げ、信号
検出用の電気回路装置14及び振動子励起装置2
0とを組合せた構造となつている。
The present invention makes use of the inertia of a liquid so that an ultrasonic pulse emitted into a stationary liquid is reflected by several ultrasonic reflecting plates placed in the liquid and passes through a specific location in time and space. an ultrasonic liquid cell made of
It consists of a Fourier optical system that detects ultrasonic pulses inside the cell from outside the cell. FIG. 1 is a perspective view showing the concept of the present invention, and shows a vibrator 2 that emits ultrasonic pulses into the interior of an ultrasonic liquid cell 1, two reflecting plates 3a that reflect the ultrasonic pulses, 3b is shown. Lenses 5 and 6 are fitted into the upper and lower surfaces of the cell in order to pass the parallel light beam from the laser light source 8 into the cell and form an image at the center of the detection filter 4. An optical filter 7 having three rectangular apertures is arranged parallel to these two lens surfaces. The Fourier transform optical system for ultrasonic pulse detection is composed of the laser light source 8, the magnifying lens 9, the lenses 5 and 6, the detection filter 4, and the photoelectric converter 10. Next, the structure of the ultrasonic liquid cell 1 and the arrangement of the detection filter 4 and the vibrator will be explained. FIG. 2 shows the internal state of the cell 1 with the top lid 11 removed. The vibrator 2 is fixed to the cell wall and emits ultrasonic pulses at an angle of 30 degrees toward the center of the cell. This ultrasonic pulse is applied to the reflecting plates 3a and 3b arranged toward the center of the cell.
It is reflected twice at a reflection angle of 60 degrees, and some of it is reflected directly and some of it is further reflected on the transducer surface, and then absorbed by the ultrasonic absorbing material 12 and disappears. As is clear from the figure, the optical filters 7 are arranged from the center of the cell.
The apertures are arranged radially at an angle of 120°, and their long sides are perpendicular to the direction of ultrasound propagation. Therefore, due to the ultrasonic waves emitted from the vibrator 2. At each of the three opening positions of the optical filter 7, an optical phase grating in which the liquid density changes in a grid pattern appears. This method of detecting an optical phase grating using ultrasonic waves will be explained next. FIG. 3 shows the optical filter 7.
The opening position of the detection filter 4 and the relative position of the detection opening of the detection filter 4 are shown. As shown in FIG. 1, these two filters are arranged at the center of the optical axis, and the x-axis and the α-axis are spatially parallel, and the y-axis and the β-axis are parallel to each other. Now, when the ultrasonic pulse 16 crosses one aperture 13a of the optical filter 7 in FIG. 3, the light beam passing through this aperture is diffracted by the optical phase grating generated in the liquid. , and is further focused by a lens 6 to form an image at the position of the detection filter 4.
In the present invention, the traveling direction of the ultrasonic pulse across the aperture 13a is in the short side direction of the aperture as shown in FIG. Based on Hofer's theory of diffraction, the shaded areas a,
Appears in a′. Similarly, an ultrasonic pulse passing across the aperture 13b causes the aperture 13 to
Due to c, diffracted light is generated at locations c and c'. When the ultrasonic pulse 16 repeats reflection in the liquid cell and goes around once, if the liquid in the cell and the optical filter 7 are in a stationary state, the distance between the transducer 2 and the reflection plates 3a and 3b is reflected. and appears on the detection filter with a specific period determined by the ultrasonic propagation velocity v. In the present invention, in order to detect the periodic occurrence of this diffraction image bright spot, the detection filter 4 is provided with six circular apertures corresponding to the apertures of the optical filter 7. FIG. 4 is a diagram showing that when the liquid cell 1 undergoes a rotational movement at an angle θ after the ultrasonic pulse 16 is emitted, the generation cycle of the above-mentioned diffraction image bright spots changes. Assuming that the rotational motion of the cell is of a magnitude and speed that does not significantly disturb the inertial quiescence of the liquid within the cell, the ultrasonic pulse 16 emitted into the liquid will be spatially fixed. The vehicle travels along a specific course at a speed v. When the cell starts rotating after the ultrasonic pulse 16 crosses the aperture 13a, the time taken for the ultrasonic pulse 16 to cross the aperture 13b changes compared to when it is in a stationary state. If this time difference is expressed as d and the distance between the aperture center of the optical filter 7 and the cell center is expressed as R, then d≈Rtanθ/v
Obtain an approximate formula for . When θ is small, tanθ≒kθ
(k: constant of proportionality), d≒kRθ/v.
In the case of the optical filter 7 having three apertures as in the present invention, the optical output due to diffraction can be obtained three times for one ultrasonic pulse, and the time difference d indicating the rotation angle θ can be obtained twice. . Therefore, by setting the repetition time of the ultrasonic pulse appropriately, it is possible to obtain periodic optical output pulses, and by electrically measuring changes in the generation interval of these pulses, the rotation angle θ degrees or the rotation time can be determined. A change θ T [o/s] can be obtained. However, in continuous operation using periodic ultrasound pulses, it must be taken into account that the spatial period of the ultrasound pulses in the liquid changes due to the Doppler effect due to the displacement of the transducer. FIG. 5 is a diagram illustrating the operating principle of the present invention in consideration of the Doppler effect due to displacement of the vibrator. Figure a shows the rotational change of the liquid cell, and figure b shows the ultrasonic position in the cell corrected to a straight line position ignoring reflections. The locations indicated by dotted lines are the positions when the liquid cell is in a stationary state. Figure c shows the apertures of the optical filter 7 arranged in a straight line as in figure b. In this figure, instead of the ultrasonic pulse shown in figure b moving, the aperture shown in figure c moves in the order of 1, 2, . . . , 17 in the right direction of the figure. In addition, the temporal correspondence between the ultrasonic pulse and the aperture position is
The relative position of P 1 and opening 1 is determined as time t=0.
The movement of the apertures is a combination of ultrasonic propagation and rotation of the liquid cell, and the center trajectories of the three apertures are as shown by the bold lines in Figure c. Opening positions 1, 5, 9, 13, and 17 indicated by diagonal lines indicate the opening positions when ultrasonic pulses are emitted, and since no ultrasonic pulses exist within the liquid cell, no optical output appears. The optical output pulse becomes a triangular pulse when the spatial length of the ultrasonic pulse is made to match the short side of the aperture according to the principle of spatial cross-correlation calculation. The result of converting this into an electrical signal by the photoelectric converter 10 is shown in d of the same figure. The black dot above the pulse indicates the position of the output pulse when the liquid cell is stationary. As is clear from Figure d, the three pulse trains of ultrasonic pulses P 1 to P 4 show an overall shift due to the Doppler effect and a change in the time difference d due to the rotation of the liquid cell. In order to extract the time difference d from this pulse position change, it is necessary to clearly separate the three sets of output pulses sequentially generated by the same ultrasonic pulse as shown in this figure. therefore,
The spatial minimum repetition period of the ultrasonic pulse needs to be four times or more the aperture center distance. Next, we will describe an example of an electrical method for detecting the time ratio of the rotational change shown in Figure a from the three pulse trains thus obtained. FIG. 6 is a time chart of this method, and FIG. 6a is an enlarged view of FIG. 5d. The upper T mark indicates the output pulse position when the liquid cell is in a stationary state, d indicates the time change due to the rotation of the cell, and g indicates a part of the time change due to the Doppler effect of the vibrator 2. Figure b shows the output of a monostable multivibrator triggered by the output pulse of figure a, and the dashed line number 19 shows the average value of the output rectangular pulses in the liquid cell stationary state. This phase-modulated output rectangular pulse is demodulated into an analog signal, and the signal shown by the dotted line is the signal shown by the dotted line. Further, this demodulated signal is detected at time t 1 with m 1 being the maximum value in the interval from time t 0 to t 1 . Similarly, the section maximum values m 2 to 4 are detected at times t 2 to 4 , respectively. Figure c shows the interval maximum value m 0 obtained in figure b.
4 is a diagram showing that 4 is held for a period of time ( t0 to t1 ), ( t1 to t2 )...( t4 to t5 ), respectively. In this way, a signal that digitally changes with the repetition period of the ultrasonic pulse is obtained. This signal value can be determined by setting the operating constants of the monostable multivibrator, demodulator, and maximum value holding circuit to appropriate values in consideration of the repetition period of the ultrasonic pulse. can be approximated to. However, in the above case, since the section maximum value m is held for each period of the ultrasonic pulse, the signal detection time is delayed by one period with respect to the start of rotation of the liquid cell. In Figure c, the rotational change of the liquid cell in consideration of this time delay is shown by a dotted line. This time delay is
Since the ultrasonic pulse period is short, there is no problem in practical use. The above method is an example of typical signal detection, and there are also more accurate detection methods such as the pulse counting method and the phase comparison method that uses the ultrasonic pulse applied to the transducer 2 as a reference signal. is possible. FIG. 7 is a block diagram of an embodiment of the present invention. For the purpose of downsizing the device, the optical system is bent using two reflecting mirrors 15a and 15b, and an electric circuit device 14 for signal detection and a vibrator excitation device 2 are used.
The structure is a combination of 0 and 0.

本発明は以上のような構成であり、液体セルの
円筒中心軸を中心とする回転変化を電気信号で高
速度、かつ連続的に検出できる効果を有する。ま
た、セル中の液体の粘度と密度を適当に選定する
ことにより、低速回転のカツトオフ特性、すなわ
ち、検出不能な低速回転の範囲を設定できるため
低速定常回転時の高速微少回転(振動)のみを検
出できる効果がある。さらに、本発明は原理的に
光軸中心の回転による出力信号を検出するもので
あり、液体セル中に、光を透過する材料で作成し
た液体安定板を配置することにより、検出回転面
以外で生じた回転や振動による信号を除去できる
可能性を有する。
The present invention has the above configuration, and has the effect of being able to detect rotational changes of the liquid cell about the cylindrical center axis at high speed and continuously using electrical signals. In addition, by appropriately selecting the viscosity and density of the liquid in the cell, it is possible to set the cut-off characteristic for low-speed rotation, that is, the range of undetectable low-speed rotation, so that only high-speed minute rotation (vibration) during low-speed steady rotation can be set. It has a detectable effect. Furthermore, the present invention basically detects output signals due to rotation around the optical axis, and by arranging a liquid stabilizer made of a material that transmits light in the liquid cell, it is possible to detect signals other than the detection rotation surface. It has the potential to eliminate signals caused by rotation and vibration.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の概念を示す液体セルと光学系
の見取図、第2図は液体セルの内部構造を示す
図、第3図は光学的フイルタと検出フイルタの開
口位置を示す図、第4図は回転運動による出力パ
ルスの変位を示す図、第5図は動作タイミングチ
ヤートを示す図、第6図は出力パルスの電気的処
理におけるタイミングチヤートを示す図、第7図
は実施例を示す図。 1は液体セル、2は振動子、3a,3bは反射
板、4は検出フイルタ、5,6はレンズ、7,
7′は光学的フイルタ、8はレーザ光源、9は拡
大レンズ、10は光電変換器、11は液体セル上
ぶた、12は超音波吸収物質、13a,13b,
13cは開口、14は検出用電気回路装置、15
a,15bは反射鏡を示す、16は超音波パルス
信号、17は液状物質を示す、18は第5図cに
示す光学フイルタの順序番号を示す、19はパル
ス信号の平均値を示す、20は振動子励起装置。
Fig. 1 is a sketch of the liquid cell and optical system showing the concept of the present invention, Fig. 2 is a drawing showing the internal structure of the liquid cell, Fig. 3 is a drawing showing the opening positions of the optical filter and detection filter, and Fig. 4 is a diagram showing the opening positions of the optical filter and detection filter. The figure shows the displacement of the output pulse due to rotational movement, the figure 5 shows the operation timing chart, the figure 6 shows the timing chart in the electrical processing of the output pulse, and the figure 7 shows the example. . 1 is a liquid cell, 2 is a vibrator, 3a and 3b are reflection plates, 4 is a detection filter, 5 and 6 are lenses, 7,
7' is an optical filter, 8 is a laser light source, 9 is a magnifying lens, 10 is a photoelectric converter, 11 is a liquid cell top lid, 12 is an ultrasonic absorption material, 13a, 13b,
13c is an opening, 14 is a detection electric circuit device, 15
a, 15b indicate a reflecting mirror, 16 indicates an ultrasonic pulse signal, 17 indicates a liquid substance, 18 indicates the order number of the optical filter shown in FIG. 5c, 19 indicates the average value of the pulse signal, 20 is a oscillator excitation device.

Claims (1)

【特許請求の範囲】 1 平行光束を発生するレーザ光源8と;液状物
質を前記光束に対して平行な軸を有する円筒に保
持する液体収容セル1と;前記セル1内に備えら
れ該光束に対して直角に超音波パルスを発生する
超音波振動子2と;前記セル1内に備えられ該振
動子2から発射された超音波を該光束に対してほ
ぼ直角に反射させてそれを該軸のまわりに循環さ
せる複数の反射板3と;該循環させる超音波によ
つて位相変調されるまたは位相変調された前記平
行光束の部分を透過させるn個(n1)の窓を
有し、該循環される超音波に対してレーザ光源8
側またはその反対側に配置された光学フイルタ7
と;前記n個の窓を通過する光束をフーリエ変換
して結像させるレンズ6と;該レンズ6の結像面
に配置され該n個の窓を通過した超音波による一
次回折光を通過させる複数の開口を有する検出フ
イルタ4と;該開口を通過した回折光を受領して
n個の電気パルス群の信号に変換する光電変換器
10と;該光電変換器の出力パルス信号の間隔か
ら該セルの回転を検出する回転検出装置とを備え
た回転変位検出装置。 2 平行光束を発生するレーザ光源8と;液状物
質を前記光束に対して平行な軸を有する円筒に保
持する液体収容セル1と;前記セル1内に備えら
れ該光束に対してほぼ直角に超音波パルスを発生
する超音波振動子2と;前記セル1内に備えられ
該振動子2から発射された超音波を該光束に対し
て直角に反射させてそれを該軸のまわりに循環さ
せる複数の反射板3と;該循環させる超音波によ
つて位相変調されるまたは位相変調された前記平
行光束の部分を透過させるn個(n1)の窓を
有し、該循環される超音波に対してレーザ光源8
側またはその反対側に配置された光学フイルタ7
と;前記n個の窓を通過する光束をフーリエ変換
して結像させるレンズ6と;該レンズ6の結像面
に配置され該n個の窓を通過した超音波による一
次回折光を通過させる複数の開口を有する検出フ
イルタ4と;該開口を通過した回折光を受領して
n個の電気パルス群の信号に変換する光電変換器
10と;一つの超音波パルスが前記n個の窓をす
べて横切つた後所定時をおいて次の超音波パルス
を発生するように前記振動子を励起する励起装置
20と;一つの超音波パルスによる該n個の電気
信号を受けるたびに該超音波パルスがn個の窓を
横切る時間内における該セル1の回転を前記所定
時間内に検出することにより連続的に該セル1の
回転変位を検出する回転検出装置。
[Scope of Claims] 1. A laser light source 8 that generates a parallel light beam; A liquid containing cell 1 that holds a liquid substance in a cylinder having an axis parallel to the light beam; an ultrasonic transducer 2 that generates ultrasonic pulses at right angles to the axis; and an ultrasonic transducer 2 that is provided in the cell 1 and reflects the ultrasonic waves emitted from the transducer 2 substantially at right angles to the light beam and directs it toward the axis. a plurality of reflecting plates 3 that are circulated around the circular beam; and n (n1) windows that transmit a portion of the parallel light flux that is phase-modulated or phase-modulated by the circular ultrasonic waves; Laser light source 8
Optical filter 7 arranged on the side or the opposite side
and a lens 6 that Fourier-transforms the light flux passing through the n windows to form an image; and a lens 6 that is arranged on the imaging plane of the lens 6 and allows the first-order diffracted light due to the ultrasonic wave that has passed through the n windows to pass through. a detection filter 4 having a plurality of apertures; a photoelectric converter 10 that receives the diffracted light that has passed through the apertures and converts it into signals of a group of n electrical pulses; A rotational displacement detection device comprising a rotation detection device that detects rotation of a cell. 2 a laser light source 8 that generates a parallel light beam; a liquid storage cell 1 that holds a liquid substance in a cylinder having an axis parallel to the light beam; an ultrasonic transducer 2 that generates a sound wave pulse; a plurality of ultrasonic transducers provided in the cell 1 that reflect the ultrasonic wave emitted from the transducer 2 at right angles to the light beam and circulate it around the axis; a reflecting plate 3; having n (n1) windows that transmit a portion of the parallel light flux that is phase-modulated or phase-modulated by the circulating ultrasound; Laser light source 8
Optical filter 7 arranged on the side or the opposite side
and a lens 6 that Fourier-transforms the light flux passing through the n windows to form an image; and a lens 6 that is arranged on the imaging plane of the lens 6 and allows the first-order diffracted light due to the ultrasonic wave that has passed through the n windows to pass through. a detection filter 4 having a plurality of apertures; a photoelectric converter 10 that receives the diffracted light that has passed through the apertures and converts it into signals of a group of n electric pulses; one ultrasonic pulse passes through the n windows; an excitation device 20 that excites the transducer so as to generate the next ultrasonic pulse at a predetermined time after all the ultrasonic pulses have been traversed; A rotation detection device that continuously detects the rotational displacement of the cell 1 by detecting the rotation of the cell 1 within the predetermined time period during which the pulse crosses n windows.
JP55183812A 1980-12-26 1980-12-26 Detector for rotational displacement Granted JPS57108622A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55183812A JPS57108622A (en) 1980-12-26 1980-12-26 Detector for rotational displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55183812A JPS57108622A (en) 1980-12-26 1980-12-26 Detector for rotational displacement

Publications (2)

Publication Number Publication Date
JPS57108622A JPS57108622A (en) 1982-07-06
JPS6342726B2 true JPS6342726B2 (en) 1988-08-25

Family

ID=16142297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55183812A Granted JPS57108622A (en) 1980-12-26 1980-12-26 Detector for rotational displacement

Country Status (1)

Country Link
JP (1) JPS57108622A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0451593U (en) * 1990-09-04 1992-04-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0451593U (en) * 1990-09-04 1992-04-30

Also Published As

Publication number Publication date
JPS57108622A (en) 1982-07-06

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