JPS6344684B2 - - Google Patents
Info
- Publication number
- JPS6344684B2 JPS6344684B2 JP59024006A JP2400684A JPS6344684B2 JP S6344684 B2 JPS6344684 B2 JP S6344684B2 JP 59024006 A JP59024006 A JP 59024006A JP 2400684 A JP2400684 A JP 2400684A JP S6344684 B2 JPS6344684 B2 JP S6344684B2
- Authority
- JP
- Japan
- Prior art keywords
- resin
- parts
- glassy carbon
- weight
- carbon material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 claims description 42
- 229910021397 glassy carbon Inorganic materials 0.000 claims description 33
- XPFVYQJUAUNWIW-UHFFFAOYSA-N furfuryl alcohol Chemical compound OCC1=CC=CO1 XPFVYQJUAUNWIW-UHFFFAOYSA-N 0.000 claims description 30
- 229920005989 resin Polymers 0.000 claims description 29
- 239000011347 resin Substances 0.000 claims description 29
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Natural products OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims description 24
- 239000000203 mixture Substances 0.000 claims description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 18
- 239000011342 resin composition Substances 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 229920001187 thermosetting polymer Polymers 0.000 claims description 12
- 229920000877 Melamine resin Polymers 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 9
- 239000012298 atmosphere Substances 0.000 claims description 7
- 229920005610 lignin Polymers 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 claims description 6
- 239000000178 monomer Substances 0.000 claims description 6
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims description 5
- 239000004202 carbamide Substances 0.000 claims description 5
- 239000007849 furan resin Substances 0.000 claims description 5
- 239000005011 phenolic resin Substances 0.000 claims description 5
- 229920001807 Urea-formaldehyde Polymers 0.000 claims description 3
- 229920002678 cellulose Polymers 0.000 claims description 3
- 239000001913 cellulose Substances 0.000 claims description 3
- 150000002240 furans Chemical class 0.000 claims description 3
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 claims description 2
- 239000004640 Melamine resin Substances 0.000 claims description 2
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 claims description 2
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 claims description 2
- 239000003575 carbonaceous material Substances 0.000 description 50
- 239000011148 porous material Substances 0.000 description 26
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 15
- 229940126062 Compound A Drugs 0.000 description 9
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 description 9
- 239000010409 thin film Substances 0.000 description 9
- 238000003763 carbonization Methods 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 238000009835 boiling Methods 0.000 description 7
- 238000003756 stirring Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 238000005498 polishing Methods 0.000 description 5
- LVTJOONKWUXEFR-FZRMHRINSA-N protoneodioscin Natural products O(C[C@@H](CC[C@]1(O)[C@H](C)[C@@H]2[C@]3(C)[C@H]([C@H]4[C@@H]([C@]5(C)C(=CC4)C[C@@H](O[C@@H]4[C@H](O[C@H]6[C@@H](O)[C@@H](O)[C@@H](O)[C@H](C)O6)[C@@H](O)[C@H](O[C@H]6[C@@H](O)[C@@H](O)[C@@H](O)[C@H](C)O6)[C@H](CO)O4)CC5)CC3)C[C@@H]2O1)C)[C@H]1[C@H](O)[C@H](O)[C@H](O)[C@@H](CO)O1 LVTJOONKWUXEFR-FZRMHRINSA-N 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 239000006227 byproduct Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229930040373 Paraformaldehyde Natural products 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 229920002866 paraformaldehyde Polymers 0.000 description 3
- 229920001568 phenolic resin Polymers 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical compound C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- 229910001257 Nb alloy Inorganic materials 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- 229920000180 alkyd Polymers 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 238000010000 carbonizing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- -1 etc. Substances 0.000 description 1
- 239000008098 formaldehyde solution Substances 0.000 description 1
- HDNHWROHHSBKJG-UHFFFAOYSA-N formaldehyde;furan-2-ylmethanol Chemical compound O=C.OCC1=CC=CO1 HDNHWROHHSBKJG-UHFFFAOYSA-N 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910021469 graphitizable carbon Inorganic materials 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000002964 rayon Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
- Magnetic Heads (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Thin Magnetic Films (AREA)
- Ceramic Products (AREA)
Description
【発明の詳細な説明】
〔発明の属する技術分野〕
本発明は、ガラス状カーボン材料の製造方法に
関する。特に、鏡面研磨した後の表面が極めて高
い平滑性を有するガラス状カーボン材料の製造方
法に関する。
〔従来技術の説明〕
一般に三次元網目構造で形成され、不溶不融の
性質をもつ熱硬化性樹脂の硬化物を不活性雰囲気
の中で炭素化を行うと、ガス不透過性に優れ、硬
度が高く、かつ等方性組織を有するガラス状カー
ボン材料が得られる。このガラス状カーボン材料
は、一般の炭素材料が有する軽量、耐熱性、高電
気伝導度、耐蝕性、熱伝導度、機械的強度、潤滑
性等の特性に加え、均質でかつ摺動部に用いても
炭素粉末を生じない特性を備えていて、エレクト
ロニクス産業、原子力産業、宇宙産業をはじめ各
種分野での広範囲に利用が期待されている。
最近、このガラス状カーボン材料の特性に着目
し、ガラス状カーボン材料を磁気ヘツド用基体と
して利用することが検討されている。磁気ヘツド
用基体として要求される性能は潤滑性、耐摩耗性
に加えて研磨してきれいな鏡面が得られることで
ある。さらにまた磁気ヘツドを支えるヘツドスラ
イダとしての用途も検討されている。それに要求
される特性は、潤滑性、鏡面加工容易性に加えて
軽重量性である。このため、ガラス状カーボン材
料を用いることにより、ヘツドスライダも兼ねた
磁気ヘツド用基体としても用いることができる。
従来製造されてきたガラス状カーボン材料を顕
微鏡で観察すると、ガラス状カーボン材料には開
孔(open pore)と閉孔(closed pore)が存在
する。このうち材料内部に存在する独立閉孔はガ
ス不透過性の点では何等影響を及ぼさないが、ガ
ラス状カーボン材料を研磨して、前記磁気ヘツド
用基体のように、その鏡面を利用しようとする分
野に応用する場合には、材料内部に閉孔が存在す
ると、研磨によつて閉孔が開孔となり、鏡面が得
られなくなり致命的な欠陥をもつことになる。
特に、薄膜磁気ヘツド等を作るに際しては、基
礎材料としてのガラス状カーボン材料に金属を蒸
着またはスパツタする必要があるが、従来のガラ
ス状カーボン材料では、上述した理由により研磨
しても金属蒸着に適した鏡面を得ることができな
かつた。
一般のピツチ等を原料とする易黒鉛化性炭素材
料の製造においては、その炭素化に至る過程で溶
融状態を経るために自ずとバブリングによる気泡
の混入は避けられない。この混入を避けるために
高圧力下による炭素化等が試みられ、この炭素化
によれば、ある程度気泡の混入は解消されている
ものの、ガス不透過性は十分といえるところまで
至つていない。
一方、熱硬化性樹脂の炭素化においても、いわ
ゆる炭素化収率の高いフエノール樹脂、フラン樹
脂を用いる場合には、その前駆体である硬化物を
得る段階で水をはじめとする低沸点物の発生が避
けがたく、これが硬化時に樹脂中に溜り、μmオ
ーダー以上の大きさの閉孔が存在する原因とな
る。
熱硬化性樹脂の硬化の際に空孔が生じるのは、
硬化前の樹脂が捲き込んだ空気、
樹脂に含まれる低沸点物、未反応成分、樹脂
生成時の縮合水、
硬化時に生成する副生成物としての縮合水、
分解ガス
等が原因である。の予め含まれる空気は脱泡操
作により、またの樹脂に含まれる低沸点物、未
反応成分、樹脂生成時の縮合水は硬化前に減圧加
熱によつて除去し得るが、の硬化時に副生する
縮合水、分解ガスの一部は除去が極めて困難であ
る。特に疎水性の強い樹脂を用いた場合には、縮
合水の溜りができ、硬化後およびそれに続く炭素
化の後に、大きな空孔がカーボン材料内に残存す
る欠点がある。
そこで、本発明者らは、閉孔のないガラス状カ
ーボン材料を得るために鋭意研究を行つた結果、
硬化時に副生する低沸点物を母体樹脂中に完全に
分散溶解した状態に保ちながら硬化させることに
より、閉孔のほとんどない実用上無孔性のガラス
状カーボン材料が得られることを見出して本発明
を完成するに至つた。
〔発明の目的〕
本発明は、実用上無孔性であつて硬質かつ緻密
で、ガス不透過性であるガラス状カーボン材料を
製造するための、熱硬化性の樹脂組織物を提供す
ることを目的とする。
〔発明の特徴〕
本発明のガラス状カーボン材料の製造方法は、
硬化前の初期縮合物の状態で20重量%以上の水を
含むことのできる熱硬化性樹脂を、不活性雰囲気
中で800℃以上の温度で炭化焼成してガラス状カ
ーボン材料を製造する方法において、上記熱硬化
性樹脂は、フエノールおよびフルフリルアルコー
ルの一方もしくは双方とホルマリンとの30対55〜
75対30のモル比の単量体混合物と、フエノール樹
脂と、フラン樹脂とフエノール変性フラン共縮合
物とから選ばれる1種または2種以上の化合物を
化合物Aとし、リグニンと、変性ロジンと、変性
セルロースとから選ばれる1種または2種以上の
化合物を化合物Bとし、尿素およびメラミンの一
方または双方とホルマリンとの30対55〜75対30の
モル比の単量体混合物と、ユリア樹脂とメラミン
樹脂とから選ばれる1種または2種以上の化合物
を化合物Cとする時に、化合物A70〜100重量部
と化合物B0〜15重量部と化合物C0〜15重量部と
からなり、25℃における粘度が300〜8000cpsであ
る樹脂組成物であることを特徴とする。
本発明において、化合物Aとしてフエノールお
よびフルフリルアルコールの双方とホルマリンと
の所定割合の単量体混合物を用いる場合、また
は、フエノール変性フラン共縮合物を用いる場合
には、化合物Aは70〜100重量部用いられるが、
化合物Aとして、フエノールもしくはフルフリル
アルコールとの一方とホルマリンとの所定割合の
単量体混合物またはフエノール樹脂またはフラン
樹脂を用いる場合には、化合物Aを70〜90重量部
用い、化合物Bと化合物Cとを、合計で10〜30重
量部用いることが好ましい。
本発明において、化合物Aとフエノールとホル
マリンの混合物が用いられる場合には、フエノー
ルとホルマリンとの比は、1対3.5〜1対0.5が好
ましく、化合物Aとしてフルフリルアルコールと
ホルマリンとの混合物が用いられる場合には、フ
ルフリルアルコールとホルマリンとの比は、1対
1.2〜1対0が好ましい。また、化合物Cとして
尿素とホルマリンとの混合物が用いられる場合に
は、尿素とホルマリンの比は、1対2〜1対0.5
が好ましく、化合物Cとしてメラミンとホルマリ
ンとの混合物が用いられる場合には、メラミンと
ホルマリンとの比は、1対6〜1対0.5が好まし
い。
本発明において、化合物Aおよび化合物Cとし
て用いられる樹脂は、樹脂組成物を構成する際
に、樹脂組成物が25℃で300〜8000cpsの粘度を示
すものであることからわかるように、固体状では
なく流動性を示すものであり、実質的には、初期
縮合物の状態を呈するものである。
本発明において、ホルマリンに代えてパラホル
ムアルデヒド等のホルムアルデヒド重合体を用い
ることもできる。
本発明を補足説明すると、本発明の製造方法は
熱硬化性樹脂が硬化するときに樹脂内に低沸点物
の溜りをなくすことが要点である。つまり熱硬化
性樹脂が硬化する前の粘度の高くなつた初期縮合
物の状態で、樹脂が20重量%以上の水を溶解でき
る程度の親水性を有することにより、低沸点物が
樹脂内に閉じ込められるのを防止し得るものであ
る。
本発明において、「不活性雰囲気」とは、酸素
を含まず、通常ヘリウム、アルゴン、窒素、水
素、ハロゲンからなる群より選ばれた少なくとも
一種の気体よりなる雰囲気あるいは減圧または真
空下の雰囲気のことをいう。
樹脂組成物がどの程度の粘度のときに、樹脂組
成物の水可溶能力が20重量%を越えていれば硬化
後にほとんど空孔を生じないかは、原料樹脂の種
類、重合度、ブレンド比率等によつて異なるが、
本発明者の研究の結果、300〜8000cps/25℃の粘
度状態において上記水可溶能力があれば良いこと
が判明した。
また、本発明を実施するにあたつて、実施中に
フイラー(骨材)を入れることができる。フイラ
ーとしては、フエノール樹脂、エポキシ樹脂、不
飽和ポリエステル樹脂、フラン樹脂、ユリア樹
脂、メラミン樹脂、アルキツド樹脂、キシレン樹
脂等の、熱硬化性樹脂を含む各種カーボン材料、
例えばポリアクリロニトリル系カーボン材、セル
ロース系カーボン材、レーヨン系カーボン材、ピ
ツチ系カーボン材、リグニン系カーボン材、フエ
ノール系カーボン材、フラン系カーボン材、エポ
キシ樹脂系カーボン材、アルキツド樹脂系カーボ
ン材、不飽和ポリエステル系カーボン材、キシレ
ン樹脂系カーボン材の他に、各種黒鉛、カーボン
ブラツク等があり、繊維状、粒子状、粉末状、塊
状等のあるゆる形態のカーボン材を使用すること
ができる。
本発明に用いられる樹脂組成物は、硬化前に目
的とするガラス状カーボン材料の用途に応じて各
種の成型法により所定の形状の型に入れられ、所
定の成型体になつた後に、不活性雰囲気中800℃
以上、好ましくは1000℃以上、より好ましくは
1200℃以上の温度で炭化焼成して目的とするガラ
ス状カーボン材料となるのである。この場合、炭
化焼成時間は焼成する温度により適宜選択すれば
よい。加熱温度が800℃より低ければ、十分炭化
せず、気孔率が大きいものであり、目的とするガ
ラス状カーボン材料としての性質を賦与すること
が困難である。
〔発明の効果〕
以上述べたように、本発明の方法によれば、出
発原料である樹脂組成物が、硬化前の段階で20重
量%以上の水を含むことができることにより、樹
脂組成物が硬化するときに副生する低沸点物を母
体樹脂中に完全に分散溶解した状態に保ちながら
硬化することから、閉孔のほとんどない実用上無
孔性のガラス状カーボン材料を得ることができる
優れた効果がある。
特に内部構造に閉孔を含まないガラス状カーボ
ン材料が得られるため、本発明の製造方法は、鏡
面性を活かした薄膜蒸着ないしスパツタによる極
薄膜製造基体の製造方法への利用、例えば磁気ヘ
ツド基体や磁気ヘツドスライダーの製造方法への
利用、薄膜支持体の製造方法への利用の他、一般
の精密電子部品に用いられる耐摩耗性のある摺動
部への利用や高集積化高密度化に伴う電子材料の
製造方法への利用に大いに貢献することができ
る。またガラス状カーボン材料に孔を実質上無く
したことから、本発明で得られたガラス状カーボ
ン材料を燃料電池用セパレータとしても利用でき
る。
〔実施例による説明〕
以下本発明を実施例によりさらに詳細に説明す
るが、以下に示す例はあくまでも一例であつて、
これにより本発明の技術的範囲を限定するもので
はない。なお、実施例中、「部」とあるのは、す
べて「重量部」を意味する。
実施例 I
フエノール100部に37%ホルムアルデヒド水溶
液157部とリグニン15部とを撹拌下で添加し、さ
らに、10%水酸化ナトリウム水溶液5部を、撹拌
下で添加する。この混合物を80℃まで昇温し、こ
の温度にて2時間反応させる。この後に、反応液
の液温を70℃に下げ、メラミン9部と37%ホルム
アルデヒド水溶液25部とを添加し、70℃のままで
5時間反応させる。この反応液を室温まで冷却し
た後に、85%乳酸で中和または弱酸性にし、減圧
下で脱水して、120部の水を除去する。これによ
つて得られた樹脂組成物は、25℃で4800cpsの粘
度を有し、含水率は30%以上であつた。
以上によつて得られた樹脂組成物に、パラトル
エンスルホン酸、水およびグリコール(重量比
7:2:1)の硬化剤溶液4.5部を添加し、充分
に撹拌した後に、厚さ3mmの短冊状の型に注入
し、減圧脱泡した。この後に、50〜60℃で3時間
加熱し、さらに90℃で10日間加熱した。得られた
短冊状の硬化樹脂を管状炉に入れ、窒素気流中に
て、10℃/hrの昇温速度で1200℃まで昇温し、2
時間保持した後に冷却して、ガラス状カーボン材
料を得た。
このガラス状カーボン材料を#500〜#8000の
研磨シートにて研磨し、内部研磨面の表面孔構造
および孔径を走査型電子顕微鏡で観察した。研磨
面は、直径が0.1μm〜0.5μmの空孔が1mm2あたり
に数個みられる程度であり、それ以上の径の空孔
は観察されなかつた。
実施例
フルフリルアルコール(花王クエーカー製)
500部と80%パラホルムアルデヒド(和光純薬製)
483部とリグニン(ボレガード社製、商品名ウル
トラジンNA)305部との混合物を、撹拌しなが
ら80℃まで昇温する。つぎに、石炭酸(三井東圧
(株)製)524部と16%水酸化ナトリウム水溶液54部
との混合物を、80℃で撹拌しながら滴下する。滴
下終了後は、80℃にて3時間熟成させ、さらに、
石炭酸81部と16%水酸化ナトリウム54部との混合
液を滴下し、この温度で、2時間熟成させる。こ
の液を室温まで冷却した後に、70%パラトルエン
スルホン酸水溶液で中和から弱酸(PH7〜5)に
調整し、液温を再び80℃に昇温し、37%ホルマリ
ン水溶液120部と尿素の50%水溶液90部とを滴下
する。これを、1時間熟成した後に、減圧下で
290部の水を脱水し、500部のフルフリルアルコー
ルを添加する。
これによつて得られた樹脂組成物は、25℃で、
2900cpsの粘度を有し、含水率は35%以上であつ
た。
この樹脂を、実施例と同様に硬化、炭素化し
てガラス状カーボン材料を得た。このガラス状カ
ーボン材料の内部研磨面の表面孔構造を、実施例
Iと同様の方法で観察した。この結果、研磨面は
ガラス状であり、直径が0.1μm〜0.5μmの空孔が
1mm2あたり10個以下見られる程度であり、それ以
上の径の空孔は観察されなかつた。
実施例
フルフリルアルコール500部と80%パラホルム
アルデヒド483部とリグニン200部の混合物を、撹
拌しながら80℃まで昇温する。つぎに、石炭酸
524部と16%水酸化ナトリウム水溶液54部との混
合物を、80℃で撹拌しながら滴下する。滴下終了
後は、80℃にて3時間熟成させ、さらに、石炭酸
81部と16%水酸化ナトリウム54部との混合液を滴
下し、この温度で、2時間熟成させる。この後
に、液温を70℃に下げ、メラミン63部と37%ホル
ムアルデヒド水溶液160部とを添加し、70℃で5
時間反応させる。つぎに、この液を室温まで冷却
した後に、70%パラトルエンスルホン酸水溶液で
中和し、減圧下で250部の水を脱水し、500部のフ
ルフリルアルコールを添加する。
これによつて得られた樹脂組成物は、25℃で、
3800cpsの粘度を有し、含水率は35%以上であつ
た。
この樹脂組成物を、実施例Iと同様に硬化、炭
素化してガラス状カーボン材料を得た。このガラ
ス状カーボン材料の内部研磨面の表面孔構造を、
実施例Iと同様の方法で観察した。この結果、研
磨面はガラス状であり、直径が0.1μm〜0.5μmの
空孔が1mm2あたり10個以下見られる程度であり、
それ以上の径の空孔は観察されなかつた。
試験例 I
実施例Iで得られたガラス状カーボン材料を図
に示される形状および寸法に切り出し、記録媒体
との摺動面Aおよび薄膜を形成させる面Bを粗研
磨から除々に微細研磨して行き、最終的に研磨シ
ート#15000で鏡面仕上げを行つてモデル基体1
を作製した。鏡面仕上げされた面Bを走査型電子
顕微鏡で観察したところ、この表面には直径
0.5μm以上の空孔は見られず、直径0.01μm以下の
空孔が見られるのみであつた。
このモデル基体1を図の一点鎖線C―C′に沿つ
て切断し、一方の切断片のB面に厚さ1μmのCo
―Zr―Nbの合金薄膜をスパツタリングにより形
成させ、もう一方の切断片のB面に厚さ0.3μmの
Co―Zr―Nbの合金薄膜を同じくスパツタリング
により形成させた。回転磁界でこれらの薄膜を熱
処理を行つた後、軟磁性薄膜用の振動型磁気測定
装置を用いて各薄膜の保磁力Hcを測定した。そ
の結果を表に示す。
試験例
実施例で得られたガラス状カーボン材料をも
ちいて、試験例Iと同様の試験を行つた。その結
果、良好なスパツタ膜が得られた。
試験例
実施例で得られたガラス状カーボン材料をも
ちいて、試験例Iと同様の試験を行つた。その結
果、良好なスパツタ膜が得られた。
(試験結果)
表で明らかなように、本発明実施例により得ら
れたガラス状カーボン材料の磁気ヘツド用基体と
しての特性(試験例Iないし)は、保磁力が小
さく磁気特性に優れていることがわかる。
【表】DETAILED DESCRIPTION OF THE INVENTION [Technical field to which the invention pertains] The present invention relates to a method for producing a glassy carbon material. In particular, the present invention relates to a method for manufacturing a glassy carbon material whose surface after mirror polishing has extremely high smoothness. [Description of the Prior Art] When a cured thermosetting resin, which is generally formed in a three-dimensional network structure and has insoluble and infusible properties, is carbonized in an inert atmosphere, it has excellent gas impermeability and hardness. A glassy carbon material having a high isotropic structure and a high isotropic structure can be obtained. In addition to the properties of general carbon materials such as light weight, heat resistance, high electrical conductivity, corrosion resistance, thermal conductivity, mechanical strength, and lubricity, this glassy carbon material is homogeneous and can be used for sliding parts. It has the property of not producing carbon powder even when exposed to water, and is expected to be used in a wide range of fields, including the electronics industry, nuclear power industry, and space industry. Recently, attention has been paid to the characteristics of this glassy carbon material, and the use of glassy carbon material as a substrate for magnetic heads has been studied. The properties required for a magnetic head substrate include lubricity and abrasion resistance, as well as the ability to polish to a clean mirror surface. Furthermore, use as a head slider to support a magnetic head is also being considered. The properties required for this are light weight in addition to lubricity and ease of mirror finishing. Therefore, by using a glassy carbon material, it can be used as a base for a magnetic head that also serves as a head slider. When conventionally manufactured glassy carbon materials are observed under a microscope, they are found to have open pores and closed pores. Among these, the independent closed pores that exist inside the material do not have any effect on gas impermeability, but it is possible to polish the glassy carbon material and utilize its mirror surface as in the substrate for the magnetic head described above. When applied in the field, if there are closed pores inside the material, polishing will open the closed pores, making it impossible to obtain a mirror surface, resulting in a fatal defect. In particular, when making thin-film magnetic heads, etc., it is necessary to evaporate or sputter metal onto a glassy carbon material as a basic material, but conventional glassy carbon materials cannot be used for metal deposition even after polishing for the reasons mentioned above. It was not possible to obtain a suitable mirror surface. In the production of easily graphitizable carbon materials using general pitch as a raw material, the inclusion of air bubbles due to bubbling is unavoidable because the materials undergo a molten state in the process of carbonization. In order to avoid this contamination, carbonization under high pressure has been attempted, and although this carbonization has eliminated the contamination of bubbles to some extent, gas impermeability has not yet reached a level where it can be said to be sufficient. On the other hand, in the carbonization of thermosetting resins, when using phenolic resins or furan resins that have a high carbonization yield, low boiling point substances such as water are used at the stage of obtaining the cured product, which is the precursor. This is unavoidable and accumulates in the resin during curing, causing closed pores on the order of μm or larger. Pores are created when thermosetting resins are cured due to air entrained in the resin before curing, low-boiling substances contained in the resin, unreacted components, condensed water during resin production, and by-products produced during curing. water of condensation as a product,
The cause is decomposition gas, etc. The air pre-contained in the resin can be removed by defoaming, and the low-boiling substances, unreacted components, and condensed water contained in the resin can be removed by heating under reduced pressure before curing, but by-products during curing can be removed. It is extremely difficult to remove some of the condensed water and cracked gas. Particularly when a highly hydrophobic resin is used, there is a disadvantage that condensed water accumulates and large pores remain in the carbon material after curing and subsequent carbonization. Therefore, the present inventors conducted intensive research to obtain a glassy carbon material without closed pores, and as a result,
This book was developed based on the discovery that a virtually non-porous glassy carbon material with almost no closed pores can be obtained by curing while keeping the low-boiling substances produced as by-products completely dispersed and dissolved in the base resin. The invention was completed. [Object of the invention] The present invention aims to provide a thermosetting resin structure for producing a glassy carbon material that is practically non-porous, hard, dense, and gas-impermeable. purpose. [Features of the invention] The method for producing a glassy carbon material of the present invention includes the following steps:
In a method for producing a glassy carbon material by carbonizing and firing a thermosetting resin that can contain 20% by weight or more of water in an initial condensate state before curing at a temperature of 800°C or more in an inert atmosphere. , the above thermosetting resin is a mixture of formalin and one or both of phenol and furfuryl alcohol in a ratio of 30 to 55.
Compound A is a monomer mixture with a molar ratio of 75:30, a phenolic resin, and one or more compounds selected from a furan resin and a phenol-modified furan cocondensate, lignin, a modified rosin, Compound B is one or more compounds selected from modified cellulose, a monomer mixture of one or both of urea and melamine and formalin at a molar ratio of 30:55 to 75:30, and urea resin. When Compound C is one or more compounds selected from melamine resin, it consists of 70 to 100 parts by weight of Compound A, 0 to 15 parts by weight of Compound B, and 0 to 15 parts by weight of Compound C, and the viscosity at 25°C is It is characterized by being a resin composition of 300 to 8000 cps. In the present invention, when using a monomer mixture of both phenol and furfuryl alcohol and formalin at a predetermined ratio as compound A, or when using a phenol-modified furan cocondensate, compound A has a weight of 70 to 100%. Although some parts are used,
When using a monomer mixture of phenol or furfuryl alcohol and formalin in a predetermined ratio as compound A, or a phenol resin or furan resin, use 70 to 90 parts by weight of compound A, and compound B and C. It is preferable to use 10 to 30 parts by weight in total. In the present invention, when a mixture of compound A, phenol, and formalin is used, the ratio of phenol to formalin is preferably 1:3.5 to 1:0.5, and as compound A, a mixture of furfuryl alcohol and formalin is used. If the ratio of furfuryl alcohol to formalin is 1:1,
1.2 to 1:0 is preferred. Further, when a mixture of urea and formalin is used as compound C, the ratio of urea to formalin is 1:2 to 1:0.5.
is preferred, and when a mixture of melamine and formalin is used as compound C, the ratio of melamine to formalin is preferably 1:6 to 1:0.5. In the present invention, the resins used as Compound A and Compound C are not in solid form when forming the resin composition, as can be seen from the fact that the resin composition exhibits a viscosity of 300 to 8000 cps at 25°C. It exhibits fluidity and is essentially in the state of an initial condensate. In the present invention, formaldehyde polymers such as paraformaldehyde can also be used in place of formalin. To provide a supplementary explanation of the present invention, the key point of the production method of the present invention is to eliminate the accumulation of low-boiling substances within the thermosetting resin when the thermosetting resin is cured. In other words, in the initial condensate state with a high viscosity before the thermosetting resin hardens, low boiling point substances are trapped within the resin because the resin has hydrophilicity to the extent that it can dissolve 20% by weight or more of water. It is possible to prevent this from occurring. In the present invention, the term "inert atmosphere" refers to an atmosphere that does not contain oxygen and usually consists of at least one gas selected from the group consisting of helium, argon, nitrogen, hydrogen, and halogen, or an atmosphere under reduced pressure or vacuum. means. The type of raw material resin, degree of polymerization, and blending ratio determine the viscosity of the resin composition and whether or not almost no pores will be generated after curing if the water-soluble ability of the resin composition exceeds 20% by weight. It varies depending on the
As a result of research by the present inventors, it was found that it is sufficient to have the above-mentioned water-soluble ability at a viscosity of 300 to 8000 cps/25°C. Also, in practicing the present invention, filler (aggregate) can be added during the practice. Fillers include various carbon materials including thermosetting resins such as phenolic resins, epoxy resins, unsaturated polyester resins, furan resins, urea resins, melamine resins, alkyd resins, and xylene resins;
For example, polyacrylonitrile-based carbon materials, cellulose-based carbon materials, rayon-based carbon materials, pitch-based carbon materials, lignin-based carbon materials, phenol-based carbon materials, furan-based carbon materials, epoxy resin-based carbon materials, alkyd resin-based carbon materials, non-carbon materials. In addition to saturated polyester-based carbon materials and xylene resin-based carbon materials, there are various types of graphite, carbon black, etc., and carbon materials in any form such as fibrous, particulate, powdered, or lumpy forms can be used. Before curing, the resin composition used in the present invention is put into a mold with a predetermined shape by various molding methods depending on the intended use of the glassy carbon material, and after becoming a predetermined molded product, it is inert. 800℃ in atmosphere
or higher, preferably 1000°C or higher, more preferably
It is carbonized and fired at a temperature of 1,200°C or higher to become the desired glassy carbon material. In this case, the carbonization firing time may be appropriately selected depending on the firing temperature. If the heating temperature is lower than 800°C, carbonization will not be sufficient and the porosity will be large, making it difficult to impart the desired properties as a glassy carbon material. [Effects of the Invention] As described above, according to the method of the present invention, the resin composition as a starting material can contain 20% by weight or more of water before curing, so that the resin composition can be Because it cures while keeping the low-boiling substances that are produced as by-products completely dispersed and dissolved in the base resin, it is possible to obtain a practically non-porous glassy carbon material with almost no closed pores. It has a positive effect. In particular, since a glass-like carbon material containing no closed pores in the internal structure can be obtained, the manufacturing method of the present invention can be used for manufacturing ultra-thin film substrates by thin film deposition or sputtering that takes advantage of specularity, such as magnetic head substrates. In addition to being used in manufacturing methods for magnetic head sliders and thin film supports, it can also be used in wear-resistant sliding parts used in general precision electronic parts, and for high integration and density. It can greatly contribute to the use in the manufacturing method of associated electronic materials. Further, since the glassy carbon material is substantially free of pores, the glassy carbon material obtained by the present invention can also be used as a separator for fuel cells. [Explanation based on Examples] The present invention will be explained in more detail using Examples below, but the examples shown below are merely examples.
This does not limit the technical scope of the present invention. In addition, all "parts" in the examples mean "parts by weight." Example I 157 parts of a 37% aqueous formaldehyde solution and 15 parts of lignin are added to 100 parts of phenol under stirring, and further 5 parts of a 10% aqueous sodium hydroxide solution are added under stirring. This mixture is heated to 80°C and reacted at this temperature for 2 hours. Thereafter, the temperature of the reaction solution was lowered to 70°C, 9 parts of melamine and 25 parts of a 37% formaldehyde aqueous solution were added, and the mixture was allowed to react at 70°C for 5 hours. After cooling the reaction solution to room temperature, it is neutralized or made slightly acidic with 85% lactic acid and dehydrated under reduced pressure to remove 120 parts of water. The resin composition thus obtained had a viscosity of 4800 cps at 25°C and a water content of 30% or more. To the resin composition obtained above, 4.5 parts of a curing agent solution of para-toluenesulfonic acid, water and glycol (weight ratio 7:2:1) was added, and after thorough stirring, a strip of 3 mm thick was added. The mixture was poured into a shaped mold and defoamed under reduced pressure. This was followed by heating at 50-60°C for 3 hours and further heating at 90°C for 10 days. The obtained strip-shaped cured resin was placed in a tube furnace and heated to 1200°C at a rate of 10°C/hr in a nitrogen stream.
After holding for a period of time, the mixture was cooled to obtain a glassy carbon material. This glassy carbon material was polished with a #500 to #8000 polishing sheet, and the surface pore structure and pore diameter of the internally polished surface were observed using a scanning electron microscope. On the polished surface, only a few pores with a diameter of 0.1 μm to 0.5 μm were observed per 1 mm 2 , and no pores with a larger diameter were observed. Example Furfuryl Alcohol (manufactured by Kao Quaker)
500 parts and 80% paraformaldehyde (manufactured by Wako Pure Chemical Industries)
A mixture of 483 parts of lignin and 305 parts of lignin (manufactured by Borregard, trade name Ultrazine NA) is heated to 80°C while stirring. Next, carbolic acid (Mitsui Toatsu
Co., Ltd. and 54 parts of a 16% aqueous sodium hydroxide solution was added dropwise at 80°C while stirring. After dropping, mature at 80℃ for 3 hours, and
A mixed solution of 81 parts of carbolic acid and 54 parts of 16% sodium hydroxide is added dropwise, and the mixture is aged at this temperature for 2 hours. After cooling this liquid to room temperature, it was neutralized with a 70% aqueous solution of para-toluenesulfonic acid and adjusted to a weak acid (PH7-5), the temperature of the liquid was raised to 80°C again, and 120 parts of a 37% aqueous formalin solution and urea were added. Add 90 parts of a 50% aqueous solution dropwise. After aging this for 1 hour, under reduced pressure
Dehydrate 290 parts of water and add 500 parts of furfuryl alcohol. The resin composition obtained by this is heated at 25°C.
It had a viscosity of 2900 cps and a water content of 35% or more. This resin was cured and carbonized in the same manner as in the examples to obtain a glassy carbon material. The surface pore structure of the internally polished surface of this glassy carbon material was observed in the same manner as in Example I. As a result, the polished surface was glass-like, and less than 10 pores with a diameter of 0.1 μm to 0.5 μm were observed per mm 2 , and no pores with a larger diameter were observed. Example A mixture of 500 parts of furfuryl alcohol, 483 parts of 80% paraformaldehyde, and 200 parts of lignin is heated to 80°C while stirring. Next, carbolic acid
A mixture of 524 parts and 54 parts of a 16% aqueous sodium hydroxide solution is added dropwise at 80°C with stirring. After dropping, it was aged at 80℃ for 3 hours, and then added with carbolic acid.
A mixed solution of 81 parts and 54 parts of 16% sodium hydroxide is added dropwise, and the mixture is aged at this temperature for 2 hours. After this, the liquid temperature was lowered to 70°C, 63 parts of melamine and 160 parts of a 37% formaldehyde aqueous solution were added, and the temperature was lowered to 70°C.
Allow time to react. Next, after cooling this liquid to room temperature, it is neutralized with a 70% aqueous para-toluenesulfonic acid solution, 250 parts of water is dehydrated under reduced pressure, and 500 parts of furfuryl alcohol is added. The resin composition obtained by this is heated at 25°C.
It had a viscosity of 3800 cps and a water content of 35% or more. This resin composition was cured and carbonized in the same manner as in Example I to obtain a glassy carbon material. The surface pore structure of the internally polished surface of this glassy carbon material is
Observations were made in the same manner as in Example I. As a result, the polished surface is glass-like, and less than 10 pores with a diameter of 0.1 μm to 0.5 μm can be seen per 1 mm2.
No pores with larger diameters were observed. Test Example I The glassy carbon material obtained in Example I was cut into the shape and dimensions shown in the figure, and the sliding surface A with the recording medium and the surface B on which the thin film is formed were roughly polished and then gradually finely polished. Finally, a mirror finish was applied using polishing sheet #15000, and model base 1 was created.
was created. When mirror-finished surface B was observed with a scanning electron microscope, it was found that this surface had a diameter
No pores larger than 0.5 μm were observed, and only pores smaller than 0.01 μm in diameter were observed. This model substrate 1 was cut along the dashed-dotted line C-C' in the figure, and a 1-μm-thick Co
-A Zr-Nb alloy thin film was formed by sputtering, and a 0.3 μm thick film was formed on the B side of the other cut piece.
A Co-Zr-Nb alloy thin film was also formed by sputtering. After heat-treating these thin films in a rotating magnetic field, the coercive force Hc of each thin film was measured using a vibrating magnetometer for soft magnetic thin films. The results are shown in the table. Test Example A test similar to Test Example I was conducted using the glassy carbon material obtained in Example. As a result, a good sputtered film was obtained. Test Example A test similar to Test Example I was conducted using the glassy carbon material obtained in Example. As a result, a good sputtered film was obtained. (Test Results) As is clear from the table, the characteristics of the glassy carbon materials obtained in the Examples of the present invention as substrates for magnetic heads (Test Examples I and above) are that the coercive force is small and the magnetic properties are excellent. I understand. 【table】
図は本発明実施例磁気ヘツドに用いられる材料
により形成されたモデル基体の外観斜視図。
1…モデル基体。
The figure is an external perspective view of a model base made of a material used in a magnetic head according to an embodiment of the present invention. 1...Model base.
Claims (1)
水を含むことのできる熱硬化性樹脂を不活性雰囲
気中で800℃以上の温度で炭化焼成してガラス状
カーボン材料を製造する方法において、 上記熱硬化性樹脂は、 フエノールおよびフルフリルアルコールの一方
もしくは双方とホルマリンとの30対55〜75対30の
モル比の単量体混合物と、フエノール樹脂と、フ
ラン樹脂と、フエノール変性フラン共縮合物とか
ら選ばれる1種または2種以上の化合物70〜100
重量部と、 リグニンと、変性ロジンと、変性セルロースと
から選ばれる1種または2種以上の化合物0〜15
重量部と、 尿素およびメラミンの一方または双方とホルマ
リンとの30対55〜75対30のモル比の単量体混合物
と、ユリア樹脂と、メラミン樹脂とから選ばれる
1種または2種以上の化合物0〜15重量部と によつて組成され、 25℃における粘度が300〜8000cpsである樹脂組
成物であることを特徴とするガラス状カーボン材
料の製造方法。[Claims] 1. A thermosetting resin that can contain 20% by weight or more of water in the state of an initial condensate before curing is carbonized and fired at a temperature of 800°C or more in an inert atmosphere to produce glassy carbon. In the method for producing the material, the thermosetting resin comprises a monomer mixture of one or both of phenol and furfuryl alcohol and formalin in a molar ratio of 30:55 to 75:30, a phenol resin, and a furan resin. and one or more compounds selected from phenol-modified furan cocondensates 70 to 100
0 to 15 parts by weight, one or more compounds selected from lignin, modified rosin, and modified cellulose
parts by weight, a monomer mixture of one or both of urea and melamine and formalin in a molar ratio of 30:55 to 75:30, urea resin, and one or more compounds selected from melamine resin. 0 to 15 parts by weight, and a resin composition having a viscosity of 300 to 8000 cps at 25°C.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59024006A JPS60171210A (en) | 1984-02-10 | 1984-02-10 | Manufacture of vitrified carbonaceous material |
| EP84102495A EP0121781B1 (en) | 1983-03-09 | 1984-03-08 | Process for manufacturing glasslike carbon material |
| DE8484102495T DE3477660D1 (en) | 1983-03-09 | 1984-03-08 | Process for manufacturing glasslike carbon material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59024006A JPS60171210A (en) | 1984-02-10 | 1984-02-10 | Manufacture of vitrified carbonaceous material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60171210A JPS60171210A (en) | 1985-09-04 |
| JPS6344684B2 true JPS6344684B2 (en) | 1988-09-06 |
Family
ID=12126469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59024006A Granted JPS60171210A (en) | 1983-03-09 | 1984-02-10 | Manufacture of vitrified carbonaceous material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60171210A (en) |
-
1984
- 1984-02-10 JP JP59024006A patent/JPS60171210A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60171210A (en) | 1985-09-04 |
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