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JPS6348296B2 - - Google Patents
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JPS6348296B2 - - Google Patents

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Publication number
JPS6348296B2
JPS6348296B2 JP816681A JP816681A JPS6348296B2 JP S6348296 B2 JPS6348296 B2 JP S6348296B2 JP 816681 A JP816681 A JP 816681A JP 816681 A JP816681 A JP 816681A JP S6348296 B2 JPS6348296 B2 JP S6348296B2
Authority
JP
Japan
Prior art keywords
pressure
cover
sensitive element
diaphragm
pressure detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP816681A
Other languages
Japanese (ja)
Other versions
JPS57122334A (en
Inventor
Makoto Ozaki
Tadashi Hatsutori
Etsuro Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soken Inc
Original Assignee
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soken Inc filed Critical Nippon Soken Inc
Priority to JP816681A priority Critical patent/JPS57122334A/en
Publication of JPS57122334A publication Critical patent/JPS57122334A/en
Publication of JPS6348296B2 publication Critical patent/JPS6348296B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0681Protection against excessive heat
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/10Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Measuring Fluid Pressure (AREA)

Description

【発明の詳細な説明】 本発明は強誘電体の圧電効果を利用した圧電式
の圧力検出器に関し、特に負圧をも計測できるよ
うに、感圧素子に予め荷重をかけておくための予
荷重用カバーをかぶせた圧力検出器に関する。
Detailed Description of the Invention The present invention relates to a piezoelectric pressure sensor that utilizes the piezoelectric effect of a ferroelectric material, and in particular to a piezoelectric pressure sensor that applies a load to a pressure-sensitive element in advance so that negative pressure can also be measured. This relates to a pressure detector covered with a load cover.

従来の予荷重用カバーを有する圧力検出器は第
1図及び第3図に図示する通りで、第1図は圧力
検出器の全体構成を示す縦断面図、第3図は圧力
検出器の感圧素子部分の詳細構成を示す部分縦断
面図である。1は圧力検出器、14は感圧素子で
その圧電体部分140は一般に水晶もしくはチタ
ン酸鉛、ジルコニア酸鉛磁器等の磁気で出来てお
り、上下両端面に出力用電極141、接地用電極
142が形成してあり、予荷重用カバー16及び
ダイヤフラム15等により押圧することにより圧
力検出器本体、ダイヤフラム15等との電気的導
通を保つている。17はリード線で、前記出力用
電極141と電極11とを接続している。12は
絶縁体、13はハウジングである。
A conventional pressure detector with a preloading cover is shown in Figs. 1 and 3. Fig. 1 is a vertical cross-sectional view showing the overall structure of the pressure sensor, and Fig. 3 shows the sensitivity of the pressure sensor. FIG. 3 is a partial vertical cross-sectional view showing the detailed configuration of the pressure element portion. 1 is a pressure detector, 14 is a pressure sensitive element, and its piezoelectric portion 140 is generally made of magnetic material such as crystal, lead titanate, lead zirconia porcelain, etc., and output electrodes 141 and grounding electrodes 142 are provided on both upper and lower end surfaces. is formed, and electrical continuity with the pressure detector main body, diaphragm 15, etc. is maintained by pressing with the preload cover 16, diaphragm 15, etc. A lead wire 17 connects the output electrode 141 and the electrode 11. 12 is an insulator, and 13 is a housing.

第2図は前記従来の圧力検出器を内燃機関のシ
リンダー内の燃焼ガス圧を計測するのに用いた場
合の使用状態を示し、圧力検出器1はシリンダー
ヘツド2に螺着されている。3はシール用スリー
ブ、4はシリンダーの燃焼室である。この使用状
態の場合には圧力検出器は内燃機関の燃焼ガス圧
等の高温の流体の圧力を計測することになり、感
圧素子14は高温の流体と直接接することになる
ので、感圧素子に多量の熱が流入して圧電体より
なる感圧素子14の電極はなれ、うき等による零
点移動、感度劣化等の不具合が生じ、また極めて
高温になると圧電体が圧電効果を示さなくなると
いう不具合を生ずる。また、感圧素子14は前述
のように磁器で出来ており、一方予荷重用カバー
16は金属で出来ているから、それぞれの熱膨張
係数が異るので、感圧素子と予荷重用カバーとで
は、温度による伸びはそれぞれ異るため、温度が
上昇すると、感圧素子に予めかけておいた荷重の
値が変つたり、荷重がかからなくなつたりする。
また感圧素子の接地用電極142が予荷重用カバ
ー16より離れて電気的導通が不安定になること
が起こる。
FIG. 2 shows a state in which the conventional pressure detector is used to measure the pressure of combustion gas in the cylinder of an internal combustion engine, and the pressure detector 1 is screwed onto the cylinder head 2. As shown in FIG. 3 is a sealing sleeve, and 4 is a combustion chamber of the cylinder. In this state of use, the pressure detector measures the pressure of high-temperature fluid such as combustion gas pressure of an internal combustion engine, and the pressure-sensitive element 14 comes into direct contact with the high-temperature fluid. When a large amount of heat flows into the piezoelectric element, the electrodes of the piezoelectric pressure-sensitive element 14 become separated, causing problems such as zero point movement and sensitivity deterioration due to floats, etc., and when the temperature becomes extremely high, the piezoelectric material stops exhibiting the piezoelectric effect. arise. Further, as mentioned above, the pressure sensitive element 14 is made of porcelain, while the preload cover 16 is made of metal, so the coefficients of thermal expansion are different between the pressure sensitive element and the preload cover. Since elongation differs depending on temperature, when the temperature rises, the value of the load previously applied to the pressure sensitive element changes or the load is no longer applied.
Furthermore, the grounding electrode 142 of the pressure-sensitive element may become separated from the preloading cover 16, resulting in unstable electrical continuity.

本発明は、前述のように、高温の被測定流体よ
り感圧素子に多量の熱が流入するのを防止して、
感圧素子に生ずる不具合を除くと共に、熱膨張係
数の差による不具合を除くため、予荷重用カバー
を伸縮しやすい構造にしたものである。
As described above, the present invention prevents a large amount of heat from flowing into the pressure sensitive element from the high temperature fluid to be measured.
In order to eliminate problems caused by the pressure-sensitive element as well as problems caused by differences in thermal expansion coefficients, the preload cover is structured to be easily expanded and contracted.

以下本発明になる圧力検出器を図について説明
する。第4図は本発明圧力検出器の第1実施例を
示し、圧力検出器本体の内側に形成した袋形状の
底面に圧電体よりなる感圧素子14を設け、該感
圧素子14を被つて押圧し該感圧素子に予め荷重
を与えるようにした予荷重用カバー16を設け、
該予荷重用カバー16の下端面と前記袋形状の入
口部を密封するダイヤフラム15との間に、細い
棒状体よりなる受圧栓18を挿設してある、該受
圧栓18は前記ダイヤフラム15が受けた燃焼室
よりの燃焼ガス圧を感圧素子14に伝える圧力媒
体の機能を有する。そして前記予荷重用カバー1
6の側面はベローズ形状161に形成してある。
191はハウジング13に形成したフランジ部、
192は取付用のネジ部である。
The pressure detector according to the present invention will be explained below with reference to the drawings. FIG. 4 shows a first embodiment of the pressure detector of the present invention, in which a pressure-sensitive element 14 made of a piezoelectric material is provided on the bottom of a bag-shaped body formed inside the pressure detector main body, and the pressure-sensitive element 14 is covered. A preloading cover 16 is provided which is pressed to apply a preload to the pressure sensitive element,
A pressure receiving plug 18 made of a thin rod-like body is inserted between the lower end surface of the preload cover 16 and the diaphragm 15 that seals the bag-shaped entrance. It has the function of a pressure medium that transmits the received combustion gas pressure from the combustion chamber to the pressure sensing element 14. and the preload cover 1
The side surface of 6 is formed into a bellows shape 161.
191 is a flange portion formed on the housing 13;
192 is a threaded portion for attachment.

次に上記構成になる本発明圧力検出器の作用を
説明する。シリンダーの燃焼室より多量の熱がダ
イヤフラム15に伝わるが、圧力媒体たる受圧栓
18は細い棒状体に形成してあるから多量の熱は
伝わり難く予荷重用カバー16を介して感圧素子
14に伝わる熱は少なくなり、前述のように多量
の熱により圧電体よりなる感圧素子14が損傷を
受けるということが防止される。
Next, the operation of the pressure detector of the present invention having the above structure will be explained. A large amount of heat is transferred from the combustion chamber of the cylinder to the diaphragm 15, but since the pressure receiving plug 18, which is the pressure medium, is formed into a thin rod-shaped body, a large amount of heat is difficult to transfer and is transferred to the pressure sensitive element 14 via the preload cover 16. The amount of heat transmitted is reduced, and the pressure-sensitive element 14 made of piezoelectric material is prevented from being damaged by a large amount of heat as described above.

前述のように、受圧栓18を設けることにより
多量の熱が予荷重用カバー16及び感圧素子14
に流入することは防止されるが、多少の熱は予荷
重用カバー16及び感圧素子14に伝わり、温度
が上昇する。しかし予荷重用カバー16の側面を
ベローズ形状に形成してあるから、予荷重用カバ
ー16の温度が上昇して膨張しても、その伸びは
ベローズ形状161によつて吸収され、予荷重用
カバー16と感圧素子14との接触を一定に保つ
ことができる。第5図は本発明になる圧力検出器
の第2実施例を示し、予荷重用カバーの下端面を
ダイヤフラム形状162に形成し、該ダイヤフラ
ム形状の中央部とダイヤフラム15との間に、圧
力媒体となる棒状体の受圧栓18を挿設し、該受
圧栓18により予荷重用カバーを押圧している。
この実施例では、温度上昇により予荷重用カバー
のダイヤフラム形状の中央部が上方に押上げら
れ、感圧素子14との接触を一定に保持すること
ができる。またこの予荷重用カバーをバネ材で形
成すれば耐久性を増し、更に安定して感圧素子に
荷重をかけることができる。第6図は本発明にな
る圧力検出器の第3実施例を示し、感圧素子14
とダイヤフラム15との間に、中間部を細い棒状
体とし上下両端面に前記中間部より径の大きい平
板部を形成した圧力媒体たる受圧栓18を挿設
し、感圧素子側の前記受圧栓の平板部下端と圧力
検出器の袋形状部の底面との間に、下端面をダイ
ヤフラム形状162にした予荷重用カバーを配設
し、圧力検出器の袋形状部の入口部側にスプリン
グ受部193をハウジングと一体に突設し、前記
予荷重用カバーのダイヤフラム形状162の下端
面と前記スプリング受部193との間にスプリン
グを挿設してある。
As mentioned above, by providing the pressure receiving plug 18, a large amount of heat is transferred to the preload cover 16 and the pressure sensitive element 14.
However, some heat is transmitted to the preload cover 16 and the pressure sensitive element 14, and the temperature rises. However, since the side surface of the preloading cover 16 is formed into a bellows shape, even if the temperature of the preloading cover 16 rises and expands, the expansion is absorbed by the bellows shape 161, and the preloading cover 16 and the pressure sensitive element 14 can be kept constant. FIG. 5 shows a second embodiment of the pressure detector according to the present invention, in which the lower end surface of the preloading cover is formed into a diaphragm shape 162, and a pressure medium is placed between the center of the diaphragm shape and the diaphragm 15. A rod-shaped pressure receiving plug 18 is inserted, and the preload cover is pressed by the pressure receiving plug 18.
In this embodiment, the diaphragm-shaped central portion of the preloading cover is pushed upward due to the rise in temperature, making it possible to maintain constant contact with the pressure sensitive element 14. Furthermore, if this preloading cover is made of a spring material, the durability will be increased and the load can be more stably applied to the pressure sensitive element. FIG. 6 shows a third embodiment of the pressure detector according to the present invention, in which the pressure sensitive element 14
and the diaphragm 15, a pressure receiving plug 18, which is a pressure medium and has a thin rod-shaped intermediate portion and flat plate portions having a diameter larger than the intermediate portion on both upper and lower end surfaces, is inserted, and the pressure receiving plug 18 on the pressure sensitive element side is inserted. A preloading cover with a diaphragm shape 162 on the lower end is arranged between the lower end of the flat plate and the bottom of the bag-shaped part of the pressure detector, and a spring receiver is installed on the inlet side of the bag-shaped part of the pressure detector. A portion 193 is integrally provided with the housing, and a spring is inserted between the lower end surface of the diaphragm shape 162 of the preloading cover and the spring receiving portion 193.

この実施例では予荷重用カバーのダイヤフラム
形状部をスプリングで押圧しているから、感圧素
子と予荷重用カバーとの熱膨張係数の差による圧
力応答感度の劣化を防止することができ、また感
圧素子に大きな荷重を容易にかけることができ
る。
In this embodiment, since the diaphragm-shaped portion of the preloading cover is pressed by a spring, it is possible to prevent deterioration of pressure response sensitivity due to the difference in thermal expansion coefficient between the pressure sensitive element and the preloading cover. A large load can be easily applied to the pressure sensitive element.

なお、前記第5図及び第6図に図示した圧力媒
体たる受圧栓18は、細い棒状体で形成してある
ことにより、多量の熱を有するシリンダーの燃焼
室より感圧素子に伝わる熱を少なくし、感圧素子
が多量の熱により損傷することを防止する機能を
有している。
The pressure receiving plug 18, which is the pressure medium shown in FIGS. 5 and 6, is formed of a thin rod-shaped body, so that less heat is transmitted to the pressure-sensitive element than from the combustion chamber of the cylinder, which generates a large amount of heat. However, it has a function of preventing the pressure sensitive element from being damaged by a large amount of heat.

上述のように、本発明になる圧力検出器におい
ては、感圧素子を被つている予荷重用カバーとダ
イヤフラムとの間に圧力媒体たる受圧栓を挿設し
てあるから、高温の被測定流体より感圧素子に流
入する熱を少なくして圧電体よりなる感圧素子に
高温により生じやすい不具合を除くことができる
と共に、予荷重用カバーを伸縮性を持つた構造に
してあるから、予荷重用カバーと感圧素子とが温
度上昇してもその熱膨張係数の差による伸びの差
に基づく荷重値の変化、電気的導通不安定等の不
具合を除くことが出来るという効果が大である。
As described above, in the pressure sensor of the present invention, a pressure receiving plug serving as a pressure medium is inserted between the preload cover covering the pressure sensitive element and the diaphragm, so that the high temperature fluid to be measured is It is possible to reduce the amount of heat that flows into the pressure-sensitive element, thereby eliminating the problems that tend to occur in pressure-sensitive elements made of piezoelectric materials due to high temperatures, and since the preload cover has a stretchable structure, it is possible to reduce the amount of heat flowing into the pressure-sensitive element. Even if the temperature of the cover and the pressure sensitive element rises, it is highly effective in eliminating problems such as changes in load values due to differences in elongation due to differences in thermal expansion coefficients, unstable electrical conduction, and the like.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の予荷重用カバーを有する圧力検
出器の全体構成を示す縦断面図、第2図は圧力検
出器を内燃機関のシリンダーの燃焼ガス圧を測定
するのに用いた場合の使用状態を示す縦断面図、
第3図は第1図図示の従来の圧力検出器の感圧素
子部の詳細構成を示す部分縦断面図、第4図、第
5図及び第6図はそれぞれ本発明になる圧力検出
器の第1、第2及び第3実施例を示す縦断面図
で、図中同一符号は同一または均等部分を示す。 1…圧力検出器、2…シリンダーベツド、4…
燃焼室、11…電極、141…出力用電極、14
2…接地用電極、140…圧電体、14…感圧素
子、15…ダイヤフラム、16…予荷重用カバ
ー、161…ベローズ形状、162…ダイヤフラ
ム形状、17…リード線、18…圧力媒体たる受
圧栓、20…スプリング。
Figure 1 is a vertical cross-sectional view showing the overall configuration of a conventional pressure detector with a preload cover, and Figure 2 is a diagram showing how the pressure detector is used to measure combustion gas pressure in a cylinder of an internal combustion engine. A vertical cross-sectional view showing the condition,
FIG. 3 is a partial vertical sectional view showing the detailed structure of the pressure sensitive element portion of the conventional pressure detector shown in FIG. 1, and FIGS. FIG. 1 is a vertical cross-sectional view showing the first, second, and third embodiments, and the same reference numerals in the figures indicate the same or equivalent parts. 1...Pressure detector, 2...Cylinder bed, 4...
Combustion chamber, 11... Electrode, 141... Output electrode, 14
2... Grounding electrode, 140... Piezoelectric body, 14... Pressure sensitive element, 15... Diaphragm, 16... Preload cover, 161... Bellows shape, 162... Diaphragm shape, 17... Lead wire, 18... Pressure receiving plug as pressure medium , 20...Spring.

Claims (1)

【特許請求の範囲】 1 圧力検出器本体の内側の形状を袋形状とし、
前記袋形状の底面に圧電体より成る感圧素子を設
け、前記袋形状の入口部を密封するダイヤフラム
を設け、前記感圧素子を被つて押圧し前記感圧素
子に予め荷重を与えるようにした予荷重用カバー
を設けた圧力検出器において、前記ダイヤフラム
と前記予荷重用カバーとの間に圧力媒体たる受圧
栓を挿設すると共に、前記予荷重用カバーを伸縮
性を持たせた構造とすることを特徴とする圧力検
出器。 2 前記予荷重用カバーの側面をベローズ形状に
形成したことを特徴とする特許請求の範囲第1項
に記載の圧力検出器。 3 前記予荷重用カバーの下端面をダイヤフラム
形状に形成したことを特徴とする特許請求の範囲
第1項に記載の圧力検出器。 4 前記予荷重用カバーの下端面を、ダイヤフラ
ム形状に形成し、且つスプリングで押圧したこと
を特徴とする特許請求の範囲第1項に記載の圧力
検出器。 5 前記予荷重用カバーをバネ材で形成したこと
を特徴とする特許請求の範囲第3項または第4項
に記載の圧力検出器。
[Claims] 1. The inner shape of the pressure detector body is a bag shape,
A pressure sensitive element made of a piezoelectric material is provided on the bottom surface of the bag shape, a diaphragm is provided to seal the entrance of the bag shape, and the pressure sensitive element is covered and pressed to apply a load to the pressure sensitive element in advance. In the pressure detector provided with a preload cover, a pressure receiving plug serving as a pressure medium is inserted between the diaphragm and the preload cover, and the preload cover has a structure that is elastic. A pressure detector characterized by: 2. The pressure detector according to claim 1, wherein the side surface of the preload cover is formed into a bellows shape. 3. The pressure detector according to claim 1, wherein the lower end surface of the preload cover is formed into a diaphragm shape. 4. The pressure detector according to claim 1, wherein the lower end surface of the preloading cover is formed into a diaphragm shape and is pressed by a spring. 5. The pressure detector according to claim 3 or 4, wherein the preload cover is made of a spring material.
JP816681A 1981-01-22 1981-01-22 Pressure sensor Granted JPS57122334A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP816681A JPS57122334A (en) 1981-01-22 1981-01-22 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP816681A JPS57122334A (en) 1981-01-22 1981-01-22 Pressure sensor

Publications (2)

Publication Number Publication Date
JPS57122334A JPS57122334A (en) 1982-07-30
JPS6348296B2 true JPS6348296B2 (en) 1988-09-28

Family

ID=11685743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP816681A Granted JPS57122334A (en) 1981-01-22 1981-01-22 Pressure sensor

Country Status (1)

Country Link
JP (1) JPS57122334A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013147260A1 (en) * 2012-03-29 2013-10-03 シチズンファインテックミヨタ株式会社 Pressure detection device, and internal combustion engine with pressure detection device
JP2013205307A (en) * 2012-03-29 2013-10-07 Citizen Finetech Miyota Co Ltd Pressure detector and internal combustion engine with the same
JP2014048181A (en) * 2012-08-31 2014-03-17 Citizen Finetech Miyota Co Ltd Combustion pressure sensor
JP2014048045A (en) * 2012-08-29 2014-03-17 Citizen Finetech Miyota Co Ltd Combustion pressure sensor

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135639U (en) * 1984-02-20 1985-09-09 日本特殊陶業株式会社 piezoelectric sensor
JPH0442753Y2 (en) * 1985-03-22 1992-10-09
JPH0342346Y2 (en) * 1985-03-22 1991-09-05
JPS6232345U (en) * 1985-08-09 1987-02-26
JPH0342347Y2 (en) * 1985-09-24 1991-09-05
JPH0342348Y2 (en) * 1985-09-30 1991-09-05
JPS6378234U (en) * 1986-11-10 1988-05-24
JPH0539476Y2 (en) * 1986-11-15 1993-10-06
JPH0351727Y2 (en) * 1986-11-15 1991-11-07
JP3915474B2 (en) * 2001-11-02 2007-05-16 株式会社ジェイ・エム・エス Pressure detector
IT201900006429A1 (en) * 2019-04-29 2020-10-29 Omt Digital S R L SENSOR FOR NON-INVASIVE DIAGNOSTICS OF HIGH PRESSURE HYDRAULIC SYSTEMS, IN PARTICULAR OF FUEL INJECTION SYSTEMS, AND HYDRAULIC SYSTEM INCLUDING THIS SENSOR

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013147260A1 (en) * 2012-03-29 2013-10-03 シチズンファインテックミヨタ株式会社 Pressure detection device, and internal combustion engine with pressure detection device
JP2013205307A (en) * 2012-03-29 2013-10-07 Citizen Finetech Miyota Co Ltd Pressure detector and internal combustion engine with the same
JP2014048045A (en) * 2012-08-29 2014-03-17 Citizen Finetech Miyota Co Ltd Combustion pressure sensor
JP2014048181A (en) * 2012-08-31 2014-03-17 Citizen Finetech Miyota Co Ltd Combustion pressure sensor

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