JPS6351255B2 - - Google Patents
Info
- Publication number
- JPS6351255B2 JPS6351255B2 JP3862280A JP3862280A JPS6351255B2 JP S6351255 B2 JPS6351255 B2 JP S6351255B2 JP 3862280 A JP3862280 A JP 3862280A JP 3862280 A JP3862280 A JP 3862280A JP S6351255 B2 JPS6351255 B2 JP S6351255B2
- Authority
- JP
- Japan
- Prior art keywords
- linear
- weight
- sensitive element
- vibration sensor
- linear piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 239000002033 PVDF binder Substances 0.000 claims description 3
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 3
- 239000002184 metal Substances 0.000 description 7
- 229920001971 elastomer Polymers 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 239000005060 rubber Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000011896 sensitive detection Methods 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 229940021013 electrolyte solution Drugs 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012510 hollow fiber Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】
本発明は線状感圧素子を用いた振動感知器に関
し、特に地震の如く任意の方向からの振動に対し
好適な振動感知器に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vibration sensor using a linear pressure-sensitive element, and particularly to a vibration sensor suitable for vibrations from arbitrary directions such as earthquakes.
地震感知器としては種々のものが提案され、使
用されている。その1つとして、周囲に堰を有す
る受け皿を感振球を載置し、振動がある大きさ以
上になると感振球がその堰を通り越して落下する
ことを利用したタイプのものがある。しかし、こ
のタイプのものは感振球を載せる受け皿の堰が厳
密に水平でないと、地震以外の僅かな振動でも堰
の高さの低い個所から落下してしまい、その度に
セツトしなおさなければならないという実用上の
煩雑さがある。そればかりでなくある大きさ以上
の地震、例えば150ガル以上の地震に対してのみ
感知させるように設計、製造されていても正しく
水平に設置されていないと設定値以下の非常に小
さな地震にも感知してしまうという欠点があり、
又厳密に水平に設置するには精密機械程度の製作
精度及び取り扱いを厳しく要求され、汎用的でな
いという欠点がある。 Various types of earthquake detectors have been proposed and used. One of these is a type in which a vibration-sensitive ball is placed on a tray with a weir around it, and when the vibration exceeds a certain level, the vibration-sensitive ball passes over the weir and falls. However, with this type of ball, if the weir of the receiver on which the vibration-sensitive ball is placed is not strictly horizontal, even the slightest vibration other than an earthquake will cause it to fall from the low height of the weir, and you will have to reset it each time. There is a practical complication of not having to do this. Not only that, even if the product is designed and manufactured to be able to detect only earthquakes of a certain magnitude or more, for example, earthquakes of 150 gal or more, if it is not installed correctly and horizontally, it will also detect very small earthquakes below the set value. It has the disadvantage of sensing
In addition, in order to install it strictly horizontally, manufacturing precision and handling equivalent to that of a precision machine are strictly required, and there is a drawback that it is not versatile.
この他のタイプのものは特定方向の振動に対し
てのみ高感度の検知が可能なものであり、地震の
如き横波、縦波両方を含み、しかも任意の方向か
らの横波を感知しなければならない場合1個の振
動感知器のみでは不充分であり、多数個の振動感
知器を設けなければならず、コスト的にも高くな
り、また装置への取り付けに対しても煩雑とな
り、汎用的とは云えないものである。 Other types are capable of highly sensitive detection of vibrations only in a specific direction, including both transverse and longitudinal waves such as those caused by earthquakes, and must be able to detect transverse waves from any direction. In some cases, one vibration sensor alone is not sufficient, and many vibration sensors must be installed, which increases the cost and is complicated to install on the device. It is impossible to say.
これらの問題は地震感知に限らず、振動感知一
般において、みられるものであり、任意の方向か
らの振動に対し振動感知ができる装置が要望され
ているが、コスト面でも、取扱いの面での実用に
供しうるものはなかつた。 These problems are not limited to earthquake sensing, but are found in vibration sensing in general, and there is a demand for a device that can detect vibrations from any direction, but there are problems in terms of cost and handling. There was nothing that could be put to practical use.
本発明は上記欠点に鑑み、線状圧電体が線状圧
電体の軸方向に直角な任意な方向の応力に対し、
等しく圧電気を生成することが可能であり、しか
もそのときに発生する圧電気も充分地震を始めと
する種々の振動感知の信号として利用が可能な程
度に大きいものであることに着目してなされたも
ので、重錘と線状感圧素子の組合せ、たとえば、
固定支持枠と、その少なくとも一部が線状感圧素
子よりなる支持体を介して前記固定支持枠に支持
された重錘とより構成することにより、固定支持
枠に対する重錘の、振動による変位を線状感圧素
子への応力変化として検知することにより任意の
方向からの振動に対し方向依存性を有することな
く実用的でかつ高感度の検知が可能な振動感知器
を提供しようとするものである。さらには振動感
知器を取り付けるべき機器に対して高度の厳密性
を要求することなく容易に正しく設置することを
も目的としている。 In view of the above-mentioned drawbacks, the present invention has been developed so that a linear piezoelectric material can respond to stress in any direction perpendicular to the axial direction of the linear piezoelectric material.
It was developed with the focus on the fact that piezoelectricity can be equally generated, and the piezoelectricity generated at that time is large enough to be used as a signal for sensing various vibrations including earthquakes. A combination of a weight and a linear pressure-sensitive element, for example,
By comprising a fixed support frame and a weight supported by the fixed support frame through a support at least a part of which is made of a linear pressure-sensitive element, displacement of the weight with respect to the fixed support frame due to vibration can be avoided. The present invention aims to provide a vibration sensor that is practical and capable of detecting vibrations from any direction with high sensitivity without directional dependence by detecting the change in stress on a linear pressure-sensitive element. It is. Furthermore, the purpose is to easily and correctly install the vibration sensor without requiring a high degree of precision in the equipment to which the vibration sensor is to be installed.
本発明によれば、前記目的は、枠体と、この枠
体から線状体によつて懸垂された重錘と、一端が
重錘に結合され、他端が枠体に結合された線状感
圧素子と、この線状感圧素子に生じた電気信号を
検出すべく、当該線状感圧素子に電気的に接続さ
れた検出回路とからなる振動感知器により達成さ
れる。 According to the present invention, the object is to provide a frame body, a weight suspended from the frame body by a linear body, and a linear body whose one end is connected to the weight body and the other end is connected to the frame body. This is achieved by a vibration sensor consisting of a pressure sensitive element and a detection circuit electrically connected to the linear pressure sensitive element to detect an electrical signal generated in the linear pressure sensitive element.
以下に、第1図、第2図を参照しつつ、本発明
実施例の地震感知用の振動感知器を説明する。こ
の振動感知器は、地盤に固定されたコの字形の枠
体としての支持枠1に両端を支持された線状圧電
体3a,3bを介して重錘2が2方向から支持さ
れてなる構造を有するものでこの線状感圧素子と
しての線状圧電体3a,3bは管状圧電体の内外
にそれぞれ内部電極、表面電極を有しており、こ
れらは検出回路としての電気信号検出回路に接続
されている。 A vibration sensor for detecting an earthquake according to an embodiment of the present invention will be described below with reference to FIGS. 1 and 2. This vibration sensor has a structure in which a weight 2 is supported from two directions via linear piezoelectric bodies 3a and 3b whose both ends are supported by a support frame 1 as a U-shaped frame fixed to the ground. The linear piezoelectric bodies 3a and 3b as linear pressure-sensitive elements have internal electrodes and surface electrodes inside and outside the tubular piezoelectric body, respectively, and these are connected to an electric signal detection circuit as a detection circuit. has been done.
ここで重錘2より上部の線状圧電体3bには重
錘2の荷重により張力が加わるが、線状圧電体3
aには張力を与えてもよいし、与えなくてもよ
い。 Here, tension is applied to the linear piezoelectric body 3b above the weight 2 due to the load of the weight 2, but the linear piezoelectric body 3b
Tension may or may not be applied to a.
第2図は線状圧電体3の端部を拡大して示し、
かつ電気信号検出回路にある付属の電気部品の1
例をブロツク線図で示したものである。6は線状
圧電体の内部電極、6aは線状圧電体の表面電
極、7は前置増幅器、8はバンドパスフイルタ、
9は増幅器、10は防災作動回路である。ここで
バンドパスフイルタ8は地震の周波数が1〜10ヘ
ルツに限られ、多くのそれは3〜7ヘルツである
ことを利用してこの周波数帯域の信号のみを通す
ものであり、これにより地震以外のノイズを極力
カツトするものであり、防災作動回路10によつ
てガス管、結油管の元栓を閉じたり、電源を切つ
たりすることが行なわれる。なお、本実施例(第
1図及び第2図)においては線状体として線状圧
電体3bが用いられている。 FIG. 2 shows an enlarged view of the end of the linear piezoelectric body 3,
and one of the attached electrical parts in the electrical signal detection circuit.
An example is shown in a block diagram. 6 is an internal electrode of the linear piezoelectric material, 6a is a surface electrode of the linear piezoelectric material, 7 is a preamplifier, 8 is a bandpass filter,
9 is an amplifier, and 10 is a disaster prevention operation circuit. Here, the bandpass filter 8 passes only signals in this frequency band, taking advantage of the fact that the frequency of earthquakes is limited to 1 to 10 hertz, and most frequencies are 3 to 7 hertz, and thereby allows signals other than earthquakes to pass through. This is to cut noise as much as possible, and the disaster prevention operation circuit 10 closes the main valves of gas pipes and oil pipes, and turns off the power. In this embodiment (FIGS. 1 and 2), a linear piezoelectric body 3b is used as the linear body.
ここで線状圧電体としては本願出願人の出願に
係る特願昭54−141754に記載されている管状のポ
リ弗化ビニリデン系樹脂よりなるものが圧電性が
大きく、好ましい。その製法の一例を挙げると、
公知の中空糸の製造法を用いてポリ弗化ビニリデ
ン系樹脂を管状に形成する。次いでかかる管状体
の中空管内部に該管状体高分子材料の融点以下の
温度で流動性を有するような導電体からなる内部
電極を形成する。かかる導電体としては低融点の
金属合金、電解質溶液、導電性樹脂、導電性ゴム
等が挙げられる。これらを中空管内部に形成する
には管状体の一端から吸引しながら他端から注入
する方法、導電性樹脂を共押出する方法、導電性
ゴムを未架橋の状態で注入してその後架橋させる
方法等が用いられる。このような方法で内部電極
を形成した後、管状体は延伸されてもよいし、電
極形成方法によつては先に延伸がなされてもよ
い。更に管状体の表面にも蒸着法等により電極を
形成し、配向分極をして線状圧電体が得られる。 Here, as the linear piezoelectric material, a tubular polyvinylidene fluoride resin described in Japanese Patent Application No. 141754/1989 filed by the applicant of the present application is preferred because it has high piezoelectricity. An example of the manufacturing method is
A polyvinylidene fluoride resin is formed into a tubular shape using a known hollow fiber manufacturing method. Next, an internal electrode made of a conductor having fluidity at a temperature below the melting point of the polymeric material of the tubular body is formed inside the hollow tube of the tubular body. Such conductors include low melting point metal alloys, electrolyte solutions, conductive resins, conductive rubbers, and the like. These can be formed inside a hollow tube by suctioning from one end of the tubular body and injecting it from the other end, by coextruding conductive resin, or by injecting conductive rubber in an uncrosslinked state and then crosslinking it. methods etc. are used. After forming the internal electrodes by such a method, the tubular body may be stretched, or depending on the method of forming the electrodes, stretching may be performed first. Further, electrodes are formed on the surface of the tubular body by vapor deposition or the like, and orientation polarization is performed to obtain a linear piezoelectric body.
次に上記のように構成された振動感知器の作用
を説明すると、地震の横波により地盤に固定され
た支持枠1は横波を受けて振動し、この相対的変
位によつて重錘2も振動する。その結果、重錘2
と係累された線状圧電体3a,3bは張力の変化
により伸縮を受け、この力によつて内部電極と表
面電極との間に圧電気を生ずる。この圧電気を電
気信号検出回路を用いて検出し、これを増幅して
記録したり、防災の作動等を行なわせるものであ
る。ここで線状圧電体は別個の線状圧電体3a,
3bに代えて一本の線状圧電体3を用いその中間
部に重錘2を配置してもよい。 Next, to explain the operation of the vibration sensor configured as above, the support frame 1 fixed to the ground vibrates due to the transverse waves of an earthquake, and the weight 2 also vibrates due to this relative displacement. do. As a result, the weight 2
The linear piezoelectric bodies 3a and 3b engaged with each other undergo expansion and contraction due to changes in tension, and this force generates piezoelectricity between the internal electrode and the surface electrode. This piezoelectricity is detected using an electric signal detection circuit, amplified and recorded, and used for disaster prevention operations. Here, the linear piezoelectric bodies are separate linear piezoelectric bodies 3a,
3b, a single linear piezoelectric body 3 may be used and the weight 2 may be placed in the middle thereof.
かかる振動感知器を用いることにより、いかな
る方向の振動に対してもその設置状況に厳密性を
要求されることなく振動を感知することができ
る。 By using such a vibration sensor, vibrations can be detected in any direction without requiring strict installation conditions.
第3図は本発明感知器の第二実施例の斜視図で
あり、前記第1の実施例における線状感圧体の1
方を線状体としての金属線5で構成したものであ
る。第1図に於て常時重錘2の荷重による応力を
受ける線状圧電体3bは線状圧電体の構成によつ
ては重錘3の荷重に耐えかねる場合もあり、それ
程でなくても長期間の応力負荷により変形を受
け、弾性限界を越えてしまうこともある。かかる
場合にはこのように線状圧電体3a,3bのう
ち、3bの金属線5で置き換えることにより荷重
による弾性限界をこえることなく、この場合重錘
2とつながつた1つの線状圧電体3aのみでもそ
の伸縮により内部電極と表面電極との間に圧電気
を生ずる故、地震に限らず振動を検知することが
できる。尚、図では金属線の例のみ示したが、金
属線に限定されるものでなく、繊維を始め、重錘
2の荷重に耐え得る線状の剛体であればよい。ま
た、金属線等の線状剛体の一部を線状感圧素子に
おき代えたような構造でもよいことは言うまでも
ない。 FIG. 3 is a perspective view of a second embodiment of the sensor of the present invention, in which one of the linear pressure sensitive bodies in the first embodiment is shown.
The other is made up of a metal wire 5 as a linear body. In Fig. 1, the linear piezoelectric body 3b, which is constantly subjected to stress due to the load of the weight 2, may not be able to withstand the load of the weight 3 depending on the configuration of the linear piezoelectric body, and even if it is not so severe, it may not be able to withstand the load of the weight 3 for a long time. It may undergo deformation due to stress loading over a period of time and exceed its elastic limit. In such a case, by replacing the linear piezoelectric bodies 3a and 3b with the metal wire 5 of 3b, the elastic limit due to the load will not be exceeded, and in this case, one linear piezoelectric body 3a connected to the weight 2 can be replaced. Since piezoelectricity is generated between the inner electrode and the surface electrode by the expansion and contraction of the electrode, it is possible to detect not only earthquakes but also vibrations. In addition, although only an example of a metal wire is shown in the figure, it is not limited to a metal wire, and any linear rigid body that can withstand the load of the weight 2, including fibers, may be used. It goes without saying that a structure in which a part of a linear rigid body such as a metal wire is replaced with a linear pressure-sensitive element may also be used.
第4図は本発明感知器の第三実施例の斜視図で
あり、線状圧電体3c,3d,3e,3f,3
g,3hは3本ずつ一組となつてそれぞれ重錘2
の上下に分かれている。尚、重錘2の振動は厳密
に水平面方向である必要はなく、ほゞ水平面方向
であれば実用上問題なく発生する圧電気の大小か
ら横波の伝播方向を検出することもできる。また
第4図の如く上下各々3本以上の線状圧電体が用
いられている場合にはこの波の伝播方向の検出が
可能である。なお、本実施例では、線状体として
線状圧電体3c,3d及び3eが用いられてい
る。 FIG. 4 is a perspective view of a third embodiment of the sensor of the present invention, in which linear piezoelectric bodies 3c, 3d, 3e, 3f, 3
g and 3h are in a set of 3 and each has 2 weights.
It is divided into upper and lower parts. It should be noted that the vibration of the weight 2 does not have to be strictly in the horizontal direction; if it is in a substantially horizontal direction, the propagation direction of the transverse wave can be detected from the magnitude of the piezoelectricity that is generated without any practical problem. Further, when three or more linear piezoelectric bodies are used in each of the upper and lower directions as shown in FIG. 4, it is possible to detect the propagation direction of this wave. In this embodiment, linear piezoelectric bodies 3c, 3d, and 3e are used as the linear bodies.
第5図は本発明振動感知器の第四実施例の斜視
図であり、線状圧電体は略水平方向の異なつた方
向に3本が、略垂直方向に1本が支持枠1に固定
されている。この場合には、任意の水平方向の振
動と垂直方向の振動とを分離して検知することが
できる。 FIG. 5 is a perspective view of a fourth embodiment of the vibration sensor of the present invention, in which three linear piezoelectric bodies are fixed to the support frame 1 in different directions approximately horizontally and one in the approximately vertical direction. ing. In this case, arbitrary horizontal vibrations and vertical vibrations can be detected separately.
なお、本実施例においては線状体として金属線
5が用いられている。 Note that in this embodiment, a metal wire 5 is used as the linear body.
以上の実施例に於ては線状感圧素子として線状
圧電体について例示したが感圧ゴムを始めとする
感圧抵抗素子等広く感圧素子を線状、棒状、管状
に形成したものも用いられる。即ち、本発明では
かかる圧電素子および感圧抵抗素子等の応力一電
気変換素子を総称して感圧素子と表現しているも
のである。 In the above embodiments, a linear piezoelectric material was used as an example of a linear pressure-sensitive element, but a wide range of pressure-sensitive elements such as pressure-sensitive resistance elements such as pressure-sensitive rubber may also be used. used. That is, in the present invention, stress-electrical transducers such as piezoelectric elements and pressure-sensitive resistance elements are collectively referred to as pressure-sensitive elements.
上記説明からも明らかなように本発明振動感知
器は地震を始めとする任意の方向からの振動に対
し、方向依存性を有することなく汎用性、実用的
で且つ高感度の検知が可能である。更に振動感知
器に取りつけるべき機器に精密機械程の厳密さを
要求されずに容易に正しくセツトが可能であり、
産業上有用である。 As is clear from the above description, the vibration sensor of the present invention is versatile, practical, and capable of highly sensitive detection of vibrations from any direction, including earthquakes, without directional dependence. . Furthermore, the equipment to be attached to the vibration sensor does not require the same precision as a precision machine, and can be easily and correctly set.
Industrially useful.
第1図は本発明振動感知器の第一実施例を示す
斜視図、第2図は線状圧電体の端部の拡大斜視図
と附属する電気部品のブロツク線図、第3図は同
じく第二実施例、第4図は同じく第三実施例、第
5図は同じく第4実施例を示すそれぞれ斜視図で
ある。
1……支持枠、2……重錘、3……線状圧電
体、4……固定端、5……金属線、6,6a……
電極、9……増幅器。
FIG. 1 is a perspective view showing a first embodiment of the vibration sensor of the present invention, FIG. 2 is an enlarged perspective view of the end of a linear piezoelectric body and a block diagram of the attached electric components, and FIG. FIG. 4 is a perspective view of the second embodiment, FIG. 4 is a perspective view of the third embodiment, and FIG. 5 is a perspective view of the fourth embodiment. DESCRIPTION OF SYMBOLS 1... Support frame, 2... Weight, 3... Linear piezoelectric body, 4... Fixed end, 5... Metal wire, 6, 6a...
Electrode, 9...amplifier.
Claims (1)
れた重錘と、一端が重錘に結合され、他端が枠体
に結合された線状感圧素子と、この線状感圧素子
に生じた電気信号を検出すべく、当該線状感圧素
子に電気的に接続された検出回路とからなる振動
感知器。 2 線状感圧素子が線状圧電体である特許請求の
範囲第1項に記載の振動感知器。 3 線状感圧素子がポリ弗化ビニリデン系樹脂管
状体を素材とする線状圧電体である特許請求の範
囲第1項又は第2項に記載の振動感知器。[Claims] 1. A frame, a weight suspended from the frame by a linear body, and a linear pressure-sensitive element whose one end is connected to the weight and the other end is connected to the frame. and a detection circuit electrically connected to the linear pressure-sensitive element in order to detect an electrical signal generated in the linear pressure-sensitive element. 2. The vibration sensor according to claim 1, wherein the linear pressure-sensitive element is a linear piezoelectric material. 3. The vibration sensor according to claim 1 or 2, wherein the linear pressure-sensitive element is a linear piezoelectric material made of a polyvinylidene fluoride resin tubular body.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3862280A JPS56135127A (en) | 1980-03-26 | 1980-03-26 | Oscillation sensor |
| GB8021502A GB2055018B (en) | 1979-07-11 | 1980-07-01 | Vibration detector |
| US06/165,802 US4368525A (en) | 1979-07-11 | 1980-07-03 | Vibration detector |
| DE19803025894 DE3025894A1 (en) | 1979-07-11 | 1980-07-09 | VIBRATION DETECTOR |
| CA000355868A CA1171953A (en) | 1979-07-11 | 1980-07-10 | Seismic vibration detector using piezoelectric polymeric substance |
| FR8015352A FR2461270A1 (en) | 1979-07-11 | 1980-07-10 | VIBRATION DETECTOR |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3862280A JPS56135127A (en) | 1980-03-26 | 1980-03-26 | Oscillation sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56135127A JPS56135127A (en) | 1981-10-22 |
| JPS6351255B2 true JPS6351255B2 (en) | 1988-10-13 |
Family
ID=12530332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3862280A Granted JPS56135127A (en) | 1979-07-11 | 1980-03-26 | Oscillation sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56135127A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114042878B (en) * | 2021-11-30 | 2023-05-23 | 江苏沙钢集团有限公司 | Device for detecting vibration abnormality of crystal vibrating table and abnormal working condition detection method |
-
1980
- 1980-03-26 JP JP3862280A patent/JPS56135127A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56135127A (en) | 1981-10-22 |
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