JPS6352325B2 - - Google Patents
Info
- Publication number
- JPS6352325B2 JPS6352325B2 JP57172738A JP17273882A JPS6352325B2 JP S6352325 B2 JPS6352325 B2 JP S6352325B2 JP 57172738 A JP57172738 A JP 57172738A JP 17273882 A JP17273882 A JP 17273882A JP S6352325 B2 JPS6352325 B2 JP S6352325B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- receiving lens
- light receiving
- measurement surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は計測位置が多点ある板や管の肉厚等の
一点を捕え、フオトダイオードアレイを使用した
ラインセンサーカメラで肉厚等測定をする寸法測
定装置を提供するものである。[Detailed Description of the Invention] Industrial Application Field The present invention is a dimension measuring method that captures the wall thickness of a plate or pipe at multiple measurement points at one point, and measures the wall thickness, etc. using a line sensor camera using a photodiode array. The present invention provides a measuring device.
従来例の構成とその問題点
従来の肉厚寸法測定方法は接触式のマイクロメ
ータやダイアルゲージを用いていたが接触式のた
め被測定物がゴムのように柔軟性がある場合、正
確な寸法を測定することができなかつた。また表
面が柔かい金属の被測定物では測定中にキズ等を
つける恐れがあつた。Configuration of conventional examples and their problems Conventional wall thickness measurement methods used contact-type micrometers and dial gauges, but because they are contact-type, it is difficult to accurately measure dimensions when the object to be measured is flexible like rubber. could not be measured. In addition, there is a risk of scratches or the like on objects with soft metal surfaces during measurement.
発明の目的
本発明は上記の欠点を除去し、被測定物の材質
状態を考慮する必要が無く、非接触により肉厚等
を正確に測定する装置を提供することを目的とす
る。OBJECTS OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks and provide an apparatus that accurately measures wall thickness, etc. without contact, without having to consider the material condition of the object to be measured.
発明の構成
本発明は上記の目的を達成するためにラインセ
ンサーカメラとテレセントリツク絞りと測定面近
傍に光を結像させる光学系によつて寸法測定をし
ようとするものである。Structure of the Invention In order to achieve the above object, the present invention attempts to measure dimensions using a line sensor camera, a telecentric aperture, and an optical system that forms an image of light in the vicinity of a measurement surface.
実施例の説明
以下本発明の実施例を第1図、第2図に基づい
て説明する。同図において1はランプ、2は均一
な拡散面をつくる拡散板、3は集光レンズであ
り、拡散板2の拡散面の光を測定面Pに投光させ
るものである。4は板伏、管状等の被測定物、5
は測定面Pの像を受ける受光レンズ、6はテレセ
ントリツク絞りであり、受光レンズ5に入る光の
平行成分のみを抽出するためのものである。7は
ラインセンサーカメラのフオトダイオードアレイ
であり、寸法計測部分である。DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of the present invention will be described based on FIGS. 1 and 2. In the figure, 1 is a lamp, 2 is a diffusion plate that creates a uniform diffusion surface, and 3 is a condensing lens, which projects the light from the diffusion surface of the diffusion plate 2 onto the measurement surface P. 4 is the object to be measured such as board-shaped or tubular shape, 5
6 is a light-receiving lens that receives the image of the measurement surface P, and 6 is a telecentric diaphragm for extracting only the parallel component of the light that enters the light-receiving lens 5. 7 is a photodiode array of a line sensor camera, which is a dimension measurement part.
次に上記実施例の動作を説明する。ランプ1の
発した光は拡散板2により均一化され、ある面積
をもつた輝度面になる。これを集光レンズ3によ
り被測定物4の端面であるP、即ち測定面近傍に
拡散板2の像をつくる。この時、測定面Pにでき
る像は、被測定物断面より十分大きな像をつくる
ことにより被測定物に平行光線だけでなくL1、
L2方向の光の成分が照射される。よつて測定面
Pには被測定物体4を中心に上下両方向に拡散板
2の像ができる。これを受光レンズ5によつてフ
オトダイオードアレイ7上に結像し、肉厚の寸法
を測定する。すなわちフオトダイオードアレイ7
上には被測定物4が暗部にその他は明部になり暗
部の部分をカウントすることにより寸法を測定す
ることが出来る。受光レンズ5の焦点面にはテレ
セントリツク絞り6を入れ受光レンズ5に入る光
の平行成分のみをフオトダイオードアレイ7上に
結像するため、被測定物4がピント位置より光軸
方向に多少移動したとしても何ら支障なく正確な
寸法が測定できるようになる。また被測定物4が
第2図のように角度θだけ光軸直角方向に傾いた
としてもL1、L2成分の光があるため、平行光線
による測定である第3図イのX1寸法でなく、第
3図ロのX2寸法を測定することができる。X2寸
法は真の肉厚寸法ではないが角度θが5゜であつて
もX2寸法は真の寸法の0.966倍程度であるため百
分の一〜千分の一の誤差範囲内になる。よつて一
般の鉄板や鋼管の肉厚寸法の測定には問題はな
い。 Next, the operation of the above embodiment will be explained. The light emitted by the lamp 1 is made uniform by the diffuser plate 2, forming a brightness surface having a certain area. An image of the diffuser plate 2 is formed using the condenser lens 3 on the end face P of the object to be measured 4, that is, near the measurement surface. At this time, by creating an image sufficiently larger than the cross section of the object to be measured, the image formed on the measurement surface P is not only parallel to the object but also L 1 ,
L Light components in two directions are irradiated. Therefore, images of the diffuser plate 2 are formed on the measurement surface P in both the upper and lower directions with the object to be measured 4 at the center. This is imaged onto the photodiode array 7 by the light receiving lens 5, and the thickness dimension is measured. That is, photodiode array 7
The upper part of the object to be measured 4 is a dark part and the other part is a bright part, and the dimensions can be measured by counting the dark parts. A telecentric diaphragm 6 is placed on the focal plane of the light receiving lens 5, and only the parallel components of the light entering the light receiving lens 5 are imaged on the photodiode array 7, so the object to be measured 4 moves slightly in the optical axis direction from the focal position. Even if this happens, accurate dimensions can be measured without any problems. Furthermore, even if the object to be measured 4 is tilted in the direction perpendicular to the optical axis by an angle θ as shown in Fig. 2, there will be light of L 1 and L 2 components, so the X 1 dimension in Fig. 3 A, which is measured using parallel rays, will be Instead, the X2 dimension in Figure 3 (b) can be measured. The X2 dimension is not the true wall thickness dimension, but even if the angle θ is 5 degrees, the X2 dimension is about 0.966 times the true dimension, so it is within the error range of 1/100 to 1/1000th. . Therefore, there is no problem in measuring the wall thickness of general iron plates and steel pipes.
発明の効果
本発明は上記実施例より明らかなように、拡散
板と集光レンズを用いて光軸と不平行な光線を作
つているので、被測定物が傾いても測定誤差は最
少限ですむという効果を有する。Effects of the Invention As is clear from the above embodiments, the present invention uses a diffuser plate and a condensing lens to create a light beam that is non-parallel to the optical axis, so even if the object to be measured is tilted, the measurement error is minimal. It has the effect of
第1図は本発明の一実施例における寸法測定装
置の構成図、第2図は同要部拡大構成図、第3図
イ,ロは測定寸法部分の側面図である。
1……ランプ、2……拡散板、3……集光レン
ズ、4……被測定物、5……受光レンズ、6……
テレセントリツク絞り、7……フオトダイオード
アレイ。
FIG. 1 is a configuration diagram of a dimension measuring device according to an embodiment of the present invention, FIG. 2 is an enlarged configuration diagram of the same essential part, and FIGS. 3A and 3B are side views of the measurement dimension portion. 1... Lamp, 2... Diffusion plate, 3... Condensing lens, 4... Measured object, 5... Light receiving lens, 6...
Telecentric aperture, 7...photodiode array.
Claims (1)
と、この拡散板の拡散面の光を測定面に投光させ
る集光レンズと、上記測定面に配置された被測定
物と、上記測定面の像を受ける受光レンズと、こ
の受光レンズの焦点におかれたテレセントリツク
絞りと、このテレセントリツク絞りを通過した光
を検出するフオトダイオードアレイを用いたライ
ンセンサーカメラとを備えた寸法測定装置。1. A diffuser plate that creates a uniform diffusion surface from the light of the lamp, a condenser lens that projects the light from the diffuser surface of the diffuser plate onto the measurement surface, an object to be measured placed on the measurement surface, and the measurement surface A dimension measuring device equipped with a light receiving lens that receives an image of the light receiving lens, a telecentric diaphragm placed at the focal point of the light receiving lens, and a line sensor camera using a photodiode array that detects the light that passes through the telecentric diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57172738A JPS5961704A (en) | 1982-09-30 | 1982-09-30 | Dimension measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57172738A JPS5961704A (en) | 1982-09-30 | 1982-09-30 | Dimension measuring apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5961704A JPS5961704A (en) | 1984-04-09 |
| JPS6352325B2 true JPS6352325B2 (en) | 1988-10-18 |
Family
ID=15947396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57172738A Granted JPS5961704A (en) | 1982-09-30 | 1982-09-30 | Dimension measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5961704A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4573419B2 (en) | 2000-10-10 | 2010-11-04 | 株式会社キーエンス | Non-contact type outline measuring device |
| TWI700473B (en) * | 2014-06-04 | 2020-08-01 | 美商康寧公司 | Method and system for measuring thickness of glass article |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5491262A (en) * | 1977-12-28 | 1979-07-19 | Toshiba Corp | Dimension measuring apparatus |
-
1982
- 1982-09-30 JP JP57172738A patent/JPS5961704A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5961704A (en) | 1984-04-09 |
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