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JPS6352954B2 - - Google Patents
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JPS6352954B2 - - Google Patents

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Publication number
JPS6352954B2
JPS6352954B2 JP9726285A JP9726285A JPS6352954B2 JP S6352954 B2 JPS6352954 B2 JP S6352954B2 JP 9726285 A JP9726285 A JP 9726285A JP 9726285 A JP9726285 A JP 9726285A JP S6352954 B2 JPS6352954 B2 JP S6352954B2
Authority
JP
Japan
Prior art keywords
distilled water
piping
purity
pipe
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9726285A
Other languages
Japanese (ja)
Other versions
JPS61257281A (en
Inventor
Seiichi Tan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP9726285A priority Critical patent/JPS61257281A/en
Publication of JPS61257281A publication Critical patent/JPS61257281A/en
Publication of JPS6352954B2 publication Critical patent/JPS6352954B2/ja
Granted legal-status Critical Current

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  • Heat Treatment Of Water, Waste Water Or Sewage (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、高純度蒸溜水製造装置からの高純度
蒸溜水を使用施設に供給する高純度蒸溜水供給装
置の改良に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention relates to an improvement in a high-purity distilled water supply device that supplies high-purity distilled water from a high-purity distilled water production device to a user facility.

(従来技術及びその問題点) 従来のこの種装置では、装置内部での細菌類の
増殖を防止するためにタンクに貯留されている高
純度蒸溜水を常に主配管内で循環させるようにな
つている。
(Prior art and its problems) In conventional devices of this type, high-purity distilled water stored in a tank is constantly circulated within the main piping to prevent the growth of bacteria inside the device. There is.

しかしながら主配管の途中には高温で貯留され
ている高純度蒸溜水を適温にまで冷却する冷却機
構が設けられているので、従来のように余剰の高
純度蒸溜水を全量循環させると、本来冷却する必
要のない循環する高純度蒸溜水までも冷却されて
しまい、冷却および再加熱に要するエネルギが無
駄になるという問題がある。
However, there is a cooling mechanism in the middle of the main piping that cools the high-purity distilled water stored at high temperature to an appropriate temperature. There is a problem in that even circulating high-purity distilled water that does not need to be heated is cooled, and the energy required for cooling and reheating is wasted.

(発明の目的) 本発明は、前述のようなエネルギの無駄をなく
すとともに、装置内部での細菌類の増殖を防止す
ることができる高純度蒸溜水供給装置を提供する
ことを目的としている。
(Objective of the Invention) An object of the present invention is to provide a high-purity distilled water supply device that can eliminate the above-mentioned waste of energy and prevent the growth of bacteria inside the device.

(発明の構成) (1) 技術的手段 本発明は、高純度蒸溜水製造装置で製造された
高純度蒸溜水を細菌類の増殖を防止し得る高温で
貯留するタンクとタンクに貯留された高純度水を
使用施設に圧送する主配管と、主配管の高純度水
を冷却する冷却機構とを有する高純度蒸溜水供給
装置において、主配管の蒸溜水出口から高純度蒸
溜水をタンクに循環させる還流配管を設け、この
還流配管の流量を高純度蒸溜水供給装置内部にお
ける細菌類の増殖を防止し得る程度の少ない流量
に絞る絞り機構を設け、主配管を一定の圧力に保
ち流通する余剰の高純度蒸溜水を、タンクと冷却
機構の間の主配管からタンクに循環させるバイパ
ス配管を設けたことを特徴とする高純度蒸溜水供
給装置である。
(Structure of the Invention) (1) Technical Means The present invention provides a tank for storing high-purity distilled water produced by a high-purity distilled water production device at a high temperature that prevents the growth of bacteria, and a high-purity distilled water stored in the tank. In a high-purity distilled water supply system that has a main pipe that pressure-feeds purified water to the facility where it is used and a cooling mechanism that cools the high-purity water in the main pipe, high-purity distilled water is circulated from the distilled water outlet of the main pipe to a tank. A reflux pipe is installed, and a throttling mechanism is installed to reduce the flow rate of the reflux pipe to a low enough flow rate to prevent the growth of bacteria inside the high-purity distilled water supply device. This is a high-purity distilled water supply device characterized by providing a bypass pipe for circulating high-purity distilled water from the main pipe between the tank and the cooling mechanism to the tank.

(2) 作用 絞り機構で循環配管を流通する高純度蒸溜水の
流量を細菌類の増殖を防止し得る程度の少ない流
量に絞つて、高純度蒸溜水の循環に要するエネル
ギを低減し、主配管内の余剰の高純度蒸溜水をバ
イパス配管で冷却機構を通過させずにタンクに還
流させる。
(2) Effect The flow rate of high-purity distilled water flowing through the circulation piping is restricted by the throttling mechanism to a low enough flow rate to prevent the growth of bacteria, reducing the energy required for circulating high-purity distilled water, and Excess high-purity distilled water is returned to the tank via bypass piping without passing through the cooling mechanism.

(実施例) 本発明による高純度蒸溜水供給装置を備えた純
粋蒸気の製造装置を示す第1図において、Mは製
造装置であり、Fは高純度蒸溜水供給装置であ
る。図中で10は液滴流下式の蒸発缶である。縦
長状に形成され垂設されている蒸発缶10内には
2枚の管板12で固定された伝熱管14が設けら
れており、伝熱管14の上部は上部室16、下部
は下部室18となつている。
(Example) In FIG. 1 showing a pure steam production apparatus equipped with a high-purity distilled water supply apparatus according to the present invention, M is a production apparatus and F is a high-purity distilled water supply apparatus. In the figure, 10 is a droplet-flowing type evaporator. A heat exchanger tube 14 fixed by two tube plates 12 is provided in the vertically elongated evaporator 10, and the upper part of the heat exchanger tube 14 is an upper chamber 16, and the lower part is a lower chamber 18. It is becoming.

蒸発缶10の上部室16には主配管20が接続
されており、主配管20には例えば脱イオン水等
の高純度水が流通されている。主配管20には上
流側から自動弁22、第1プレヒータ24a、第
2プレヒーター24b、加熱器26等が順次に介
装されており、両プレヒータ24a,24bで予
熱された脱イオン水を加熱器26で沸騰させ、発
生する蒸気の上昇力で脱イオン水を蒸発缶10に
供給する機能を有する。
A main pipe 20 is connected to the upper chamber 16 of the evaporator 10, and high-purity water such as deionized water flows through the main pipe 20. An automatic valve 22, a first preheater 24a, a second preheater 24b, a heater 26, etc. are sequentially installed in the main pipe 20 from the upstream side, and the deionized water preheated by both preheaters 24a and 24b is heated. It has the function of supplying deionized water to the evaporator 10 by boiling it in the vessel 26 and using the rising power of the generated steam.

蒸発缶10の下部室18には屈曲管28が設け
られており、屈曲管28は蒸気と液滴を分離する
気液分離器30に接続されている。気液分離器3
0の上部には圧力指示調節計34bが設けられて
おり、蒸気出口管32は例えばオートクレーブ3
3等へ純粋蒸気を供給するようになつている。
A bent pipe 28 is provided in the lower chamber 18 of the evaporator 10, and the bent pipe 28 is connected to a gas-liquid separator 30 that separates vapor and liquid droplets. Gas-liquid separator 3
A pressure indicating controller 34b is provided at the upper part of the autoclave 3, and the steam outlet pipe 32 is connected to the autoclave 3, for example.
It is designed to supply pure steam to the 3rd class.

また気液分離器30の底部にはブロー配管36
が接続されており、気液分離器30に溜る脱イオ
ン水を外部に排出する機能を有する。ブロー配管
36は分岐管38と分岐管40に分岐しており、
分岐管38は第2プレヒータ24bと加熱器26
の間の主配管20に接続され、加熱器26による
発生蒸気の上昇力で脱イオン水が分岐管38より
循環され蒸発缶10に供給される。分岐管40は
配管41に接続されている。ブロー配管36はオ
リフイス42、自動弁44等を介して配管41に
接続されている。
In addition, a blow pipe 36 is provided at the bottom of the gas-liquid separator 30.
is connected to the gas-liquid separator 30, and has a function of discharging deionized water accumulated in the gas-liquid separator 30 to the outside. The blow pipe 36 branches into a branch pipe 38 and a branch pipe 40,
The branch pipe 38 connects the second preheater 24b and the heater 26.
Deionized water is circulated through a branch pipe 38 and supplied to the evaporator 10 by the upward force of the steam generated by the heater 26 . Branch pipe 40 is connected to piping 41. The blow pipe 36 is connected to the pipe 41 via an orifice 42, an automatic valve 44, and the like.

これらの蒸発缶10、両プレヒータ24a,2
4b、加熱器26の熱源は開度調整弁48を有す
る主蒸気管50から圧力指示調節計34bの信号
で開度調整弁48の開度調整により供給され、主
蒸気管50は加熱缶26を介して蒸発缶10に接
続されている。
These evaporator 10, both preheaters 24a, 2
4b, the heat source of the heater 26 is supplied from the main steam pipe 50 having the opening adjustment valve 48 by adjusting the opening of the opening adjustment valve 48 using the signal from the pressure indicating controller 34b. It is connected to the evaporator 10 via the evaporator 10.

蒸発缶10には伝熱管14を加熱した後の蒸気
ドレンを排出する蒸気ドレン配管56が設けられ
ており、蒸気ドレン配管56は加熱器26を通過
した後にスチームトラツプ58を介して両プレヒ
ータ24a,24bに接続され、両プレヒータ2
4a,24bで廃熱回収された後に蒸気ドレン配
管60から排出されるようになつている。
The evaporator 10 is provided with a steam drain pipe 56 for discharging steam drain after heating the heat transfer tube 14, and after passing through the heater 26, the steam drain pipe 56 is connected to both preheaters 24a via a steam trap 58. , 24b, both preheaters 2
After the waste heat is recovered at 4a and 24b, it is discharged from the steam drain pipe 60.

ブロー配管36にはレベルスイツチ64が設け
られており、レベルスイツチ64からの信号で自
動弁22と自動弁44を開閉して加熱器26の水
位を一定に保つとともに脱イオン水中の不純物が
濃縮されないように脱イオン水の供給量とブロー
量とを制御する機能を有する。
The blow pipe 36 is provided with a level switch 64, which opens and closes the automatic valve 22 and the automatic valve 44 in response to a signal from the level switch 64 to keep the water level in the heater 26 constant and prevent impurities in the deionized water from concentrating. It has a function to control the amount of deionized water supplied and the amount of blowing.

蒸気出口管32の途中には余剰蒸気取出し管7
0の一端が接続されており、余剰蒸気取出し管7
0の他端は、第3プレヒーター71a、第2蒸発
缶71b、第3蒸発缶71c等を介して純粋蒸気
を凝縮させて高純度蒸溜水を製造する第1コンデ
ンサー72aに接続されている。第2蒸発缶71
b、第3蒸発缶71cにはそれぞれ第2気液分離
器71d、第3気液分離器71eが備えられてい
る。
In the middle of the steam outlet pipe 32, there is a surplus steam extraction pipe 7.
0 is connected to the surplus steam extraction pipe 7.
0 is connected to a first condenser 72a that condenses pure steam to produce high-purity distilled water via a third preheater 71a, a second evaporator 71b, a third evaporator 71c, etc. Second evaporator 71
b, the third evaporator 71c is equipped with a second gas-liquid separator 71d and a third gas-liquid separator 71e, respectively.

第1コンデンサー72aには脱イオン水入口管
78、脱イオン水出口管80が接続されており、
脱イオン水入口管78は主配管20からの低温の
脱イオン水が流通し予熱されるようになつてい
る。脱イオン水出口管80は第2蒸発缶71bの
底部に連通している。第1コンデンサー72aに
はブリーザー機構82が設けられており、ブリー
ザー機構82は逆止弁83a、除菌フイルター8
3b等を有している。
A deionized water inlet pipe 78 and a deionized water outlet pipe 80 are connected to the first condenser 72a.
The deionized water inlet pipe 78 is configured to be preheated by flowing low-temperature deionized water from the main pipe 20. The deionized water outlet pipe 80 communicates with the bottom of the second evaporator 71b. A breather mechanism 82 is provided in the first condenser 72a, and the breather mechanism 82 includes a check valve 83a and a sterilization filter 8.
3b etc.

第1コンデンサー72aの下流には第2コンデ
ンサー72bが設けられており、第2コンデンサ
ー72bには冷却水入口管84、冷却水出口管8
6が接続している。この第2コンデンサー72b
の蒸溜水出口管88には3方弁90が介装されて
おり、3方弁90から高純度蒸溜水供給装置Fに
配管92で高純度蒸溜水を流通させるようになつ
ている。
A second condenser 72b is provided downstream of the first condenser 72a, and the second condenser 72b has a cooling water inlet pipe 84 and a cooling water outlet pipe 8.
6 is connected. This second capacitor 72b
A three-way valve 90 is interposed in the distilled water outlet pipe 88, and high-purity distilled water is made to flow from the three-way valve 90 to the high-purity distilled water supply device F through a pipe 92.

第2図を参照して高純度蒸溜水供給装置Fを説
明する。前記配管92(第1図)は蒸溜水タンク
100に接続されている。蒸溜水タンク100の
底部にはジヤケツト102が設けられており、ジ
ヤケツト102で蒸溜水タンク100内に貯留さ
れる高純度蒸溜水104を80℃〜85℃の細菌類が
増殖しない程度の高温に加熱する構造である。
The high purity distilled water supply device F will be explained with reference to FIG. The piping 92 (FIG. 1) is connected to a distilled water tank 100. A jacket 102 is provided at the bottom of the distilled water tank 100, and the jacket 102 heats the high purity distilled water 104 stored in the distilled water tank 100 to a high temperature of 80°C to 85°C, which is a high temperature that does not allow bacteria to grow. It has a structure that allows

ジヤケツト102には温度調整弁106を有す
る蒸気配管108が接続されており、蒸気配管1
08は主蒸気管50(第1図)に繋がつている。
110はドレン配管であり、ドレン配管110は
第1プレヒーター24aのドレン配管60(第1
図)に接続されている。
A steam pipe 108 having a temperature control valve 106 is connected to the jacket 102.
08 is connected to the main steam pipe 50 (FIG. 1).
110 is a drain pipe, and the drain pipe 110 is the drain pipe 60 (first
(Figure).

蒸溜水タンク100の上部には第1コンデンサ
ー72aと同様のブリーザー機構82が設けられ
ている。また蒸溜水タンク100の底部には主配
管112の一端が連通しており、主配管112か
ら高純度蒸溜水104を圧送するようになつてい
る。主配管112には上流側からポンプ114、
流量計116、第1冷却器118、第2冷却器1
20(第1、第2冷却機構)等が介装されてお
り、主配管112の下流側端部には蒸溜水出口1
22が形成されている。両冷却器118,120
は高温で貯留されている高純度蒸溜水を例えば40
℃〜45℃の適温に冷却するものである。
A breather mechanism 82 similar to the first condenser 72a is provided at the top of the distilled water tank 100. Further, one end of a main pipe 112 is connected to the bottom of the distilled water tank 100, and high-purity distilled water 104 is fed under pressure from the main pipe 112. The main pipe 112 includes a pump 114 from the upstream side,
Flow meter 116, first cooler 118, second cooler 1
20 (first and second cooling mechanisms) etc., and a distilled water outlet 1 is installed at the downstream end of the main pipe 112.
22 is formed. Both coolers 118, 120
For example, high purity distilled water stored at high temperature is
It cools to an appropriate temperature between ℃ and 45℃.

蒸溜水出口122から例えば注射液等の医薬品
製造設備に高純度蒸溜水104を供給するが、医
薬品製造設備での高純度蒸溜水104の消費は間
欠的であり、また高純度蒸溜水104は流れが停
滞すると細菌類が増殖しやすいので、高純度蒸溜
水104の一部を蒸溜水タンク100に還流させ
る還流配管124が設けられている。
High-purity distilled water 104 is supplied from the distilled water outlet 122 to equipment for manufacturing pharmaceutical products such as injections, but the consumption of high-purity distilled water 104 in the equipment for manufacturing pharmaceuticals is intermittent, and the high-purity distilled water 104 does not flow. If water stagnates, bacteria tend to grow, so a reflux pipe 124 is provided to reflux a portion of the high-purity distilled water 104 to the distilled water tank 100.

還流配管124は第‘冷却器118を通過し、
第1冷却器118と蒸溜水タンク100の間にオ
リフイス126(絞り機構)を有している。オリ
フイス126の絞り率は、還流配管124の流量
を細菌類の増殖を防止し得る程度の最小量、例え
ば主配管112の流量の10%程度、に絞るように
設定されている。前記第1冷却器118の上流の
還流配管124には圧力計128が介装されてい
る。
The reflux pipe 124 passes through the 'th cooler 118,
An orifice 126 (throttling mechanism) is provided between the first cooler 118 and the distilled water tank 100. The throttling ratio of the orifice 126 is set to restrict the flow rate of the reflux pipe 124 to a minimum amount that can prevent the growth of bacteria, for example, about 10% of the flow rate of the main pipe 112. A pressure gauge 128 is interposed in the reflux pipe 124 upstream of the first cooler 118 .

ポンプ114と流量計116の間の主配管11
2にはバイパス配管130の一端が接続されてお
り、バイパス配管130の他端はバイパス配管1
30の他端は蒸溜水タンク100に接続し、調整
弁132より下流側のバイパス配管130にはオ
リフイス126より下流側の循環配管124が接
続している。バイパス配管130の途中には調整
弁132が介装されており、調整弁132は圧力
計128の発信器129からの製造で開度調整さ
れるようになつている。より詳細には、バイパス
配管130で蒸溜水タンク100へ戻す余剰水の
量は、蒸溜水出口122での使用量が増えれば減
少し、使用量が減れば増加するように制御するの
が好ましい。そこで、蒸溜水出口122での使用
量が増えれば、循環配管124の圧力が低下する
ことを利用して、循環配管124の圧力を圧力計
128で測定し、圧力計128に連動する発信器
129からの製造で調整弁132を、蒸溜水出口
122での使用量が減つた時に調整弁132の開
度を増加するように制御している。なお134は
レベルスイツチであり、135は発信器である。
Main piping 11 between pump 114 and flow meter 116
One end of the bypass pipe 130 is connected to the bypass pipe 1, and the other end of the bypass pipe 130 is connected to the bypass pipe 1.
The other end of 30 is connected to the distilled water tank 100, and a circulation pipe 124 downstream of the orifice 126 is connected to the bypass pipe 130 downstream of the regulating valve 132. A regulating valve 132 is interposed in the middle of the bypass pipe 130, and the opening degree of the regulating valve 132 is adjusted by the transmitter 129 of the pressure gauge 128. More specifically, the amount of surplus water returned to the distilled water tank 100 via the bypass pipe 130 is preferably controlled so that it decreases as the amount used at the distilled water outlet 122 increases, and increases as the amount used decreases. Therefore, if the amount of distilled water used at the outlet 122 increases, the pressure in the circulation piping 124 decreases, so the pressure in the circulation piping 124 is measured with a pressure gauge 128, and a transmitter 129 linked to the pressure gauge 128 is used. In the manufacturing process, the regulating valve 132 is controlled so that the opening degree of the regulating valve 132 is increased when the amount of distilled water used at the distilled water outlet 122 decreases. Note that 134 is a level switch, and 135 is a transmitter.

次に作用を説明する。加熱器26内で脱イオン
水が沸騰すると突沸現象が起こり、この突沸現象
によつて加熱器26内圧力が上昇して加熱器26
から脱イオン水が蒸気の上昇力で蒸気と液滴及び
液が混合状態となつて主配管20を通つて蒸発缶
10の上部室16に圧送される。したがつて加熱
器26はポンプ作用をも働き格別のポンプは不要
である。
Next, the effect will be explained. When deionized water boils in the heater 26, a bumping phenomenon occurs, and this bumping phenomenon increases the pressure inside the heater 26, causing the heater 26 to boil.
The deionized water is mixed with steam, droplets, and liquid due to the rising force of the steam, and is forced into the upper chamber 16 of the evaporator 10 through the main pipe 20. Therefore, the heater 26 also functions as a pump, and no special pump is required.

上部室16に蒸気と液滴及び液の混合状態の脱
イオン水が圧送されると上部室16で急激に体積
が膨脹して所謂フラツシング現象を起こし、液は
液滴下され液滴は微細な粒子状に霧化されて蒸発
缶10の伝熱管14内面に付着し、薄く薄発しよ
すい液膜を形成する。加熱器26からの蒸気と伝
熱管14で発生した蒸気は下部室18から屈曲管
28を通つて気液分離器30に流入し、気液分離
器30でさらに液滴が取除かれて純粋蒸気となつ
て蒸気出口管32からオートクレーブ33に供給
される。
When deionized water in a mixed state of steam, liquid droplets, and liquid is pumped into the upper chamber 16, the volume expands rapidly in the upper chamber 16, causing a so-called flushing phenomenon, and the liquid is dripped down, and the droplets become fine particles. The liquid is atomized and adheres to the inner surface of the heat transfer tube 14 of the evaporator 10, forming a thin liquid film that is easily emitted. The steam from the heater 26 and the steam generated in the heat transfer tube 14 flow from the lower chamber 18 through the bent tube 28 into the gas-liquid separator 30, where droplets are further removed and pure steam is produced. The steam is then supplied from the steam outlet pipe 32 to the autoclave 33.

なお蒸発缶10への脱イオン水の供給量はレベ
ルスイツチ64で制御される自動弁22と自動弁
44を開閉することによつて加熱器26の脱イオ
ン水の圧送量を適正に制御する。
The amount of deionized water supplied to the evaporator 10 is appropriately controlled by opening and closing the automatic valves 22 and 44, which are controlled by the level switch 64, to appropriately control the amount of deionized water pumped into the heater 26.

熱源加熱蒸気の調整は圧力指示調整計34bで
制御される。蒸気出口管32からの蒸気の使用量
が変化しても、圧力指示調整計34bだ一定圧力
になるよう開度調整弁48の開度を調整すること
により必要量を供給する。
Adjustment of the heat source heating steam is controlled by a pressure indicating regulator 34b. Even if the amount of steam used from the steam outlet pipe 32 changes, the required amount is supplied by adjusting the opening degree of the opening adjustment valve 48 so that the pressure indicating regulator 34b maintains a constant pressure.

第1コンデンサー72aおよび第2コンデンサ
ー72bで余剰蒸気は凝縮され、高純度蒸溜水が
製造される。
Excess steam is condensed in the first condenser 72a and the second condenser 72b to produce high-purity distilled water.

蒸溜水タンク100内に高温で貯留されている
高純度蒸溜水104は、第1冷却器118、第2
冷却器120で例えば40℃程度の滴温に冷却され
た蒸溜水出口122から医薬品製造設備等の使用
施設に供給されるが、高純度蒸溜水104を消費
しない時には還流配管124から10%程度の高純
度蒸溜水104が蒸溜水タンク100に還流す
る。
High-purity distilled water 104 stored at high temperature in the distilled water tank 100 is supplied to a first cooler 118 and a second cooler 118.
The distilled water cooled to a droplet temperature of, for example, about 40°C by the cooler 120 is supplied to facilities such as pharmaceutical manufacturing equipment from the distilled water outlet 122, but when the high-purity distilled water 104 is not consumed, about 10% of the water is removed from the reflux pipe 124. High purity distilled water 104 flows back into distilled water tank 100.

したがつて高純度蒸溜水供給装置6の内部での
細菌増殖は防止され、かつ第2冷却器120で要
する冷却のためのエネルギが節約される。
Therefore, bacterial growth inside the high-purity distilled water supply device 6 is prevented, and the energy required for cooling in the second cooler 120 is saved.

しかも主配管112内の圧力は還流配管124
の循環流により維持されるので、主配管112か
ら必要が場合には即時に高純度蒸溜水104が圧
送される。
Moreover, the pressure inside the main pipe 112 is lower than that in the reflux pipe 124.
Since the high purity distilled water 104 is maintained by the circulating flow, high purity distilled water 104 is immediately pumped from the main pipe 112 when necessary.

また第1冷却器118の冷媒は還流配管124
を流れる高純度蒸溜水104であるので、第1冷
却器118で排熱を回収する。
Further, the refrigerant of the first cooler 118 is supplied to the reflux pipe 124.
Since the high-purity distilled water 104 flows through the water, the first cooler 118 recovers the exhaust heat.

更に主配管112内の余剰の高純度蒸溜水10
4はバイパス配管130から第1冷却器118、
第2冷却器120を通過せずに蒸溜水タンク10
0へバイパスされるので、一層エネルギの節約効
果が大きい。
Furthermore, surplus high-purity distilled water 10 in the main pipe 112
4 from the bypass pipe 130 to the first cooler 118;
Distilled water tank 10 without passing through second cooler 120
Since it is bypassed to 0, the energy saving effect is even greater.

(発明の効果) 以上説明したように本発明の高純度蒸溜水供給
装置は、高純度蒸溜水製造装置で製造された高純
度蒸溜水を細菌類の増殖を防止し得る高温で貯留
するタンクと、タンクに貯留された高純度水を使
用施設に圧送する主配管と、主配管の高純度水を
冷却する冷却機構とを有する高純度蒸溜水供給装
置において、主配管の蒸溜水出口から高純度蒸溜
水をタンクに循環させる還流配管を設け、この還
流配管の流量を高純度蒸溜水供給装置内部におけ
る細菌類の増殖を防止し得る程度の少ない流量に
絞る絞り機構を設け、主配管を一定の圧力に保ち
流通する余剰の高純度蒸溜水を、タンクと冷却機
構の間の主配管からタンクに循環させるバイパス
配管を設けたので、次の効果を奏する。
(Effects of the Invention) As explained above, the high-purity distilled water supply device of the present invention has a tank that stores high-purity distilled water produced by the high-purity distilled water production device at a high temperature that prevents the growth of bacteria. , in a high-purity distilled water supply system that has a main pipe that pumps high-purity water stored in a tank to a usage facility and a cooling mechanism that cools the high-purity water in the main pipe, high-purity distilled water is supplied from the distilled water outlet of the main pipe. A reflux pipe is installed to circulate distilled water to the tank, and a throttling mechanism is installed to reduce the flow rate of the reflux pipe to a low enough flow rate to prevent the growth of bacteria inside the high-purity distilled water supply device. A bypass pipe is provided to circulate excess high-purity distilled water maintained at pressure and circulated from the main pipe between the tank and the cooling mechanism to the tank, resulting in the following effects.

蒸溜水出口122から高純度蒸溜水104が消
費されない時でも還流配管124からオリフイス
126で最小必要量に絞られた高純度蒸溜水10
4が蒸溜水タンク100に還流するので、細菌類
の増殖を防止した状態で、第2冷却器120にお
いて冷却に要するエネルギを大幅に低減できる。
Even when the high-purity distilled water 104 is not consumed from the distilled water outlet 122, the high-purity distilled water 10 is squeezed to the minimum required amount by the orifice 126 from the reflux pipe 124.
4 flows back into the distilled water tank 100, the energy required for cooling in the second cooler 120 can be significantly reduced while the growth of bacteria is prevented.

また主配管112を流れる余剰の高純度蒸溜水
104を、バイパス配管130から蒸溜水タンク
100へ第1冷却器118、第2冷却器120を
通過させずにバイパスさせることができ、装置全
体の運転に要するエネルギを一層低減できる。
Further, the excess high-purity distilled water 104 flowing through the main pipe 112 can be bypassed from the bypass pipe 130 to the distilled water tank 100 without passing through the first cooler 118 and the second cooler 120, thereby improving the operation of the entire device. The energy required for this can be further reduced.

しかも主配管112内の圧力は還流配管124
の循環流により維持されるので、主配管112か
ら必要が場合には即時に高純度蒸溜水104を圧
送できる。特に本発明では、主配管112の途中
の2箇所に水冷の第1、第2冷却器120(第
1、第2冷却機構)を設け、主配管112の蒸溜
水出口から高純度蒸溜水104をタンク100に
循環させ、且つ前記タンク100に近い第1冷却
器118の冷媒として蒸溜水出口122から取出
した蒸溜水104を第1冷却器118に流す還流
配管124を設けたので、蒸溜水タンク100に
近く高温の蒸溜水104が流れる第1冷却器11
8の冷媒として還流配管124を流れる低温の蒸
溜水104を利用し、この蒸溜水104で第1冷
却器118の廃熱を蒸溜水タンク100に回収す
ることができ、省エネルギ効果が大きい。
Moreover, the pressure inside the main pipe 112 is lower than that in the reflux pipe 124.
Since the high purity distilled water 104 is maintained by the circulating flow, the high purity distilled water 104 can be immediately pumped from the main pipe 112 if necessary. In particular, in the present invention, water-cooled first and second coolers 120 (first and second cooling mechanisms) are provided at two locations in the middle of the main pipe 112, and high-purity distilled water 104 is supplied from the distilled water outlet of the main pipe 112. A reflux pipe 124 is provided to circulate distilled water 104 in the tank 100 and to flow the distilled water 104 taken out from the distilled water outlet 122 to the first cooler 118 as a refrigerant in the first cooler 118 near the tank 100. A first cooler 11 through which high-temperature distilled water 104 flows near the
By using the low-temperature distilled water 104 flowing through the reflux pipe 124 as the refrigerant in step 8, waste heat from the first cooler 118 can be recovered into the distilled water tank 100 using this distilled water 104, resulting in a large energy-saving effect.

更にバイパス配管130の途中に循環配管12
4の圧力に応じて蒸溜水出口122での蒸溜水消
費量が減少するに連れて流量を増さすようにバイ
パス配管130の流量を調整する調整弁132を
設け、バイパス配管130の調整弁132より下
流側部位に前記循環配管124の下流側端部を接
続したので、蒸溜水出口122での蒸溜水の使用
量の増減に応じて変化する還流配管124の圧力
を圧力計128で測定して、発信器129からの
信号で調整弁132を制御することができ、バイ
パス配管130の流量を適正に維持でき、主配管
112の圧力を常に略一定に保ち、必要な場合に
は迅速に蒸溜水出口122から蒸溜水104を供
給することができる。
Furthermore, a circulation pipe 12 is installed in the middle of the bypass pipe 130.
A regulating valve 132 is provided to adjust the flow rate of the bypass piping 130 so as to increase the flow rate as the amount of distilled water consumed at the distilled water outlet 122 decreases according to the pressure of the distilled water outlet 122. Since the downstream end of the circulation piping 124 is connected to the downstream part, the pressure in the reflux piping 124, which changes depending on the increase or decrease in the amount of distilled water used at the distilled water outlet 122, is measured with the pressure gauge 128. The regulating valve 132 can be controlled by the signal from the transmitter 129, the flow rate of the bypass pipe 130 can be maintained at an appropriate level, the pressure of the main pipe 112 can be kept approximately constant, and the distilled water outlet can be quickly closed if necessary. Distilled water 104 can be supplied from 122 .

還流配管124は調整弁132より下流側のバ
イパス配管130に接続し、オリフイス126を
第1冷却器118より下流側に設けたので、オリ
フイス126の影響が圧力計128に及ばず、圧
力計128の測定精度が高い。
The reflux pipe 124 is connected to the bypass pipe 130 downstream of the regulating valve 132, and the orifice 126 is provided downstream of the first cooler 118, so the influence of the orifice 126 does not affect the pressure gauge 128. High measurement accuracy.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は高純度蒸溜水の製造装置を示す構造略
図、第2図は本発明による高純度水供給装置を示
す構造略図である。M……純粋蒸溜水製造装置、
F……高純度蒸溜水供給装置、90……3方弁、
100……蒸溜水タンク、120……ジヤケツ
ト、112……主配管、114……ポンプ、11
8……第1冷却器、120……第2冷却器、12
2……蒸溜水出口、124……還流配管、126
……オリフイス、130……バイパス配管、13
2……調整弁。
FIG. 1 is a schematic structural diagram showing an apparatus for producing high-purity distilled water, and FIG. 2 is a schematic structural diagram showing a high-purity water supply apparatus according to the present invention. M...Pure distilled water production equipment,
F...High purity distilled water supply device, 90...3-way valve,
100... Distilled water tank, 120... Jacket, 112... Main piping, 114... Pump, 11
8...First cooler, 120...Second cooler, 12
2... Distilled water outlet, 124... Reflux piping, 126
... Orifice, 130 ... Bypass piping, 13
2...Adjustment valve.

Claims (1)

【特許請求の範囲】[Claims] 1 高純度蒸溜水製造装置で製造された高純度蒸
溜水を細菌類の増殖を防止し得る高温で貯留する
タンクと、タンクに貯留された高純度水を使用施
設に圧送する主配管と、主配管の高純度水を冷却
する冷却機構とを有する高純度蒸溜水供給装置に
おいて、主配管の途中の2箇所に水冷の第1、第
2冷却機構を設け、主配管の蒸溜水出口から高純
度蒸溜水をタンクに循環させ、且つ前記タンクに
近い第1冷却機構の冷媒として蒸溜水出口から取
出した蒸溜水を第1冷却機構に流す還流配管を設
け、この還流配管の流量を高純度蒸溜水供給装置
内部における細菌類の増殖を防止し得る程度の少
ない流量に絞る絞り機構を、前記第1冷却機構よ
り下流側の循環配管に設け、主配管を一定の圧力
に保つように主配管を流通する余剰の高純度蒸溜
水を、タンクと第1冷却機構の間の主配管からタ
ンクに循環させるバイパス配管を設け、前記還流
配管の第1冷却機構より上流側部位に圧力計を設
け、このバイパス配管の途中に循環配管の圧力に
応じて蒸溜水出口での蒸溜水消費量が減少するに
連れて流量を増やすようにバイパス配管の流量を
調整する調整弁を設け、バイパス配管の調整弁よ
り下流側部位に前記循環配管の下流側端部を接続
したことを特徴とする高純度蒸溜水供給装置。
1 A tank that stores the high-purity distilled water produced by the high-purity distilled water production equipment at a high temperature that prevents the growth of bacteria, a main pipe that pumps the high-purity water stored in the tank to the facility where it will be used, and In a high-purity distilled water supply device that has a cooling mechanism that cools high-purity water in piping, first and second water-cooled cooling mechanisms are installed at two locations in the middle of the main piping, and high-purity distilled water is supplied from the distilled water outlet of the main piping. Distilled water is circulated through the tank, and a reflux piping is provided to flow the distilled water taken out from the distilled water outlet to the first cooling mechanism as a refrigerant of the first cooling mechanism near the tank, and the flow rate of this reflux piping is adjusted to match the flow rate of high-purity distilled water. A throttling mechanism that restricts the flow rate to a low enough level to prevent the growth of bacteria inside the supply device is provided in the circulation piping downstream of the first cooling mechanism, and the main piping is circulated so as to maintain the main piping at a constant pressure. By-pass piping is provided to circulate excess high-purity distilled water from the main piping between the tank and the first cooling mechanism to the tank, and a pressure gauge is provided at the upstream side of the first cooling mechanism in the reflux piping, and this bypass A regulating valve is installed in the middle of the piping to adjust the flow rate of the bypass piping so that the flow rate increases as the amount of distilled water consumed at the distilled water outlet decreases according to the pressure of the circulation piping. A high-purity distilled water supply device, characterized in that a downstream end of the circulation pipe is connected to a side portion.
JP9726285A 1985-05-08 1985-05-08 Feeding device for distilled water having high purity Granted JPS61257281A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9726285A JPS61257281A (en) 1985-05-08 1985-05-08 Feeding device for distilled water having high purity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9726285A JPS61257281A (en) 1985-05-08 1985-05-08 Feeding device for distilled water having high purity

Publications (2)

Publication Number Publication Date
JPS61257281A JPS61257281A (en) 1986-11-14
JPS6352954B2 true JPS6352954B2 (en) 1988-10-20

Family

ID=14187625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9726285A Granted JPS61257281A (en) 1985-05-08 1985-05-08 Feeding device for distilled water having high purity

Country Status (1)

Country Link
JP (1) JPS61257281A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63231899A (en) * 1987-03-18 1988-09-27 Mitsuji Kubota X-ray photographing device
JP6409100B2 (en) * 2016-07-05 2018-10-17 クリーンメカニカル株式会社 Distilled water production apparatus and control method thereof

Also Published As

Publication number Publication date
JPS61257281A (en) 1986-11-14

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