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JPS6353470B2 - - Google Patents
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JPS6353470B2 - - Google Patents

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Publication number
JPS6353470B2
JPS6353470B2 JP4235380A JP4235380A JPS6353470B2 JP S6353470 B2 JPS6353470 B2 JP S6353470B2 JP 4235380 A JP4235380 A JP 4235380A JP 4235380 A JP4235380 A JP 4235380A JP S6353470 B2 JPS6353470 B2 JP S6353470B2
Authority
JP
Japan
Prior art keywords
gas
storage tank
heat exchanger
heat
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4235380A
Other languages
Japanese (ja)
Other versions
JPS56138655A (en
Inventor
Noriaki Shiki
Ryuichi Fukusato
Tetsuya Ootani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KAGAKU GIJUTSUCHO CHOKAN KANBO
Original Assignee
KAGAKU GIJUTSUCHO CHOKAN KANBO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KAGAKU GIJUTSUCHO CHOKAN KANBO filed Critical KAGAKU GIJUTSUCHO CHOKAN KANBO
Priority to JP4235380A priority Critical patent/JPS56138655A/en
Publication of JPS56138655A publication Critical patent/JPS56138655A/en
Publication of JPS6353470B2 publication Critical patent/JPS6353470B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/06Articles and bulk

Landscapes

  • Separation By Low-Temperature Treatments (AREA)

Description

【発明の詳細な説明】 本発明は、Heを冷媒として極低温(液体He温
度)を発生し、その極低温を例えば極低温下にお
ける金属材料の機械的性質を調べるための疲労試
験機に使用する極低温冷却装置に関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION The present invention uses He as a refrigerant to generate cryogenic temperatures (liquid He temperature), and uses the cryogenic temperatures, for example, in a fatigue testing machine to examine the mechanical properties of metal materials at cryogenic temperatures. This relates to cryogenic cooling equipment.

従来、Heを冷媒とする極低温冷却装置は種々
提案されているが、実用上長時間(数千時間)連
続運転に耐えうるものとして満足すべきものはな
い。
Conventionally, various cryogenic cooling devices using He as a refrigerant have been proposed, but none of them is satisfactory in terms of being able to withstand continuous operation for a long time (several thousand hours) in practice.

Heを冷媒として極低温を発生させるためには、
少くとも液体窒素温度レベルでの熱シールドを有
する真空容器内に極低温発生装置を収納する必要
がある。そして、この熱シールドには、液体窒素
あるいは補助冷凍機が使用されていた。このた
め、装置が複雑になるとともに、長時間運転する
場合、ランニングコストが高くなるという欠点を
有していた。
In order to generate extremely low temperatures using He as a refrigerant,
It is necessary to house the cryogenic generator in a vacuum vessel with a heat shield at least at liquid nitrogen temperature levels. This heat shield used liquid nitrogen or an auxiliary refrigerator. This has the disadvantage that the device becomes complicated and the running cost increases when operated for a long time.

また、Heを冷媒として長時間循環使用する場
合、ほぼ完全にHe内への不純物(CO2、O2
N2、Ar、H2、H2O等)の混入を防止しなければ
ならない。なぜならば、殆どの不純物は極低温を
得る過程において熱交換部および配管部において
凝縮あるいは凍結してしまい、循環経路を閉塞し
て装置の機能を停止させるからである。
In addition, when He is used as a refrigerant in circulation for a long time, impurities (CO 2 , O 2 ,
(N 2 , Ar, H 2 , H 2 O, etc.) must be prevented from entering. This is because most impurities condense or freeze in the heat exchange section and piping section during the process of obtaining extremely low temperatures, blocking the circulation path and stopping the function of the device.

これに対して、精製装置を用いて、He内の不
純物を吸着除去しつつ循環させる方法が公知であ
る。しかしながら、このものでは吸着能の向上の
ため、吸着器冷却用に液体窒素を用い、さらに精
製装置の再生のためにHeを用いるため、これら
に要する費用が大となる欠点を有していた。
On the other hand, a method is known in which He is circulated while adsorbing and removing impurities using a purification device. However, in order to improve the adsorption capacity, this method uses liquid nitrogen for cooling the adsorber and further uses He to regenerate the purification equipment, which has the drawback of high costs.

本発明は、前記従来の欠点に鑑みてなされたも
ので、その目的はHeを閉サイクル内にて循環使
用することによりランニングコストを低減し、か
つ長時間連続運転可能な極低温冷却装置を提供す
ることにある。
The present invention has been made in view of the above-mentioned conventional drawbacks, and its purpose is to reduce running costs by circulating He in a closed cycle, and to provide a cryogenic cooling device that can be operated continuously for a long time. It's about doing.

次に、本発明を一実施例である図面にしたがつ
て説明する。
Next, the present invention will be explained with reference to the drawings which are one embodiment.

図において、1はガス貯蔵タンクで、一方に
Heボンベ3からHeガスを受入れる供給口2を有
し、他方において等温圧縮装置4に接続してい
る。等温圧縮装置4は、圧縮機間に冷却機を配置
したもので、Heガスを等温圧縮したのち、ガス
精製装置5に送り出している。
In the figure, 1 is the gas storage tank, on one side
It has a supply port 2 for receiving He gas from a He cylinder 3, and is connected to an isothermal compression device 4 on the other side. The isothermal compression device 4 has a cooler arranged between compressors, and after isothermally compressing He gas, sends it to the gas purification device 5.

ガス精製装置5内において、Heガスは冷熱回
収熱交換器6からガス冷却器8、さらにガス精製
器9を経たのち、再び冷熱回収熱交換器6を通過
し、次工程に流れる。ここで、冷熱回収熱交換器
6は、ガス冷却器8により冷却され、かつガス精
製器9により精製されたHeガスにより、等温圧
縮装置4からHeガスを冷却するものである。
In the gas purification device 5, the He gas passes through the cold heat recovery heat exchanger 6, the gas cooler 8, and the gas purifier 9, and then passes through the cold heat recovery heat exchanger 6 again and flows to the next step. Here, the cold heat recovery heat exchanger 6 cools the He gas from the isothermal compression device 4 using the He gas cooled by the gas cooler 8 and purified by the gas purifier 9.

ガス冷却器8は、補助冷凍機7により冷却さ
れ、補助冷凍機7はフロン、NH3等を冷媒とし、
約260〓程度までの冷却能力を有する。
The gas cooler 8 is cooled by an auxiliary refrigerator 7, and the auxiliary refrigerator 7 uses Freon, NH 3 , etc. as a refrigerant.
It has a cooling capacity of approximately 260㎜.

また、ガス製精器9は2つの吸着筒10a,1
0bを並列に配置して構成されている。そして、
吸着筒10a,10bは合成ゼオライトを吸着材
とし、He中の不純物のうちH2O、CO2分を吸着
してHeガスを精製するとともに、内部に自己再
生用ヒータ11a,11bを有している。各吸着
筒10a,10bの流入、流出側にはバルブ1
2,15,17,20が設けられ、さらにバルブ
14,16,19を介して各吸着筒10a,10
bは真空ポンプ50に接続されており、それぞれ
の作動時間に応じて、適宜精製、再生を切換えて
使用できるようになつている。
Moreover, the gas refiner 9 has two adsorption cylinders 10a, 1
0b arranged in parallel. and,
The adsorption cylinders 10a and 10b use synthetic zeolite as an adsorbent and purify He gas by adsorbing H 2 O and CO 2 of the impurities in He, and have self-regeneration heaters 11a and 11b inside. There is. Valve 1 is provided on the inflow and outflow sides of each adsorption cylinder 10a, 10b.
2, 15, 17, 20 are provided, and each adsorption cylinder 10a, 10 is further provided via valves 14, 16, 19.
b is connected to a vacuum pump 50, and can be used by switching between purification and regeneration as appropriate depending on the operating time of each.

なお、流路23は再生後、精製作業開始前の吸
着筒10a,10bを予冷するために設けてあ
り、冷熱回収熱交換器6を出た流れを2つの分岐
流24,25とし、その一方の分岐流24をバル
ブ21を介してガス冷却器8に導き、さらに前記
バルブ13,18を介して吸着筒10a,10b
に戻らせたものである。
Note that the flow path 23 is provided to pre-cool the adsorption cylinders 10a and 10b after regeneration and before the start of purification work, and the flow exiting the cold heat recovery heat exchanger 6 is divided into two branched flows 24 and 25, one of which is The branched flow 24 of
It was brought back to .

また、前記他方の分岐流25は、ガス精製装置
5を出たのち、さらに2つの分岐流26,27と
なり、He冷凍装置28に到つている。
Further, after the other branched flow 25 leaves the gas purification device 5, it becomes two further branched flows 26 and 27, and reaches the He freezing device 28.

He冷凍装置28は、多段に配置した熱交換器
29,30,31,32,33,34,35を有
し、これらに、前記一方の分岐流26の、進入流
れ26aと帰還流れ26bとを逆方向に順次連続
的に通過させている。ここで、進入流れ26a
は、分岐流26で、後記する疲労試験機44に到
る流れであり、帰還流れ26bは疲労試験機44
からの戻りである。
The He refrigeration system 28 has heat exchangers 29, 30, 31, 32, 33, 34, and 35 arranged in multiple stages. It passes continuously in the opposite direction. Here, the incoming flow 26a
is a branch flow 26 that reaches a fatigue testing machine 44, which will be described later, and a return flow 26b is a flow that reaches a fatigue testing machine 44, which will be described later.
This is the return from.

また、熱交換器30,32,34では、流入流
れ26aの入側の一部を分岐させ、内部精製器3
7、寒冷発生器である膨張エンジン38を経て帰
還流れ26bの入側に合流させている。なお、内
部精製器37は、内部に活性炭フイルタを有し、
He中のAr、N2、O2等の不純物(空気成分)を
除去するものである。
Further, in the heat exchangers 30, 32, and 34, a part of the inlet side of the inflow flow 26a is branched, and the internal purifier 3
7. It passes through the expansion engine 38, which is a cold generator, and merges with the inlet side of the return flow 26b. Note that the internal purifier 37 has an activated carbon filter inside,
This removes impurities (air components) such as Ar, N 2 and O 2 in He.

流入流れ26aの熱交換の最終段階にある熱交
換器35はジユールトムソン(以下JTと称す
る。)熱交換器で、つづく39はJT弁であり、
JT効果を利用したものである。流入流れ26a
の中間部には2ケ所において内部精製器37aが
設けられている。
The heat exchanger 35 in the final stage of heat exchange of the inflow stream 26a is a Joel Thomson (hereinafter referred to as JT) heat exchanger, and the following 39 is a JT valve,
This takes advantage of the JT effect. Inflow flow 26a
Internal purifiers 37a are provided at two locations in the middle of the tank.

さらに、前記他方の分岐流27は、熱交換器3
0,36により冷却され、熱シールド部40を経
て、再び熱交換器36を通り、He冷凍装置28
外へ送り出される。熱シールド部40は、前記冷
却用構成機器全体を内部に含むHe冷凍機本体4
1の周囲にコイル状に配置されており、He冷凍
機本体41を熱シールドするものである。なお、
熱交換器36,30間には内部精製器37aが設
けられている、He冷凍機本体41の外側は、さ
らに断熱用の真空容器であるコールドボツクス4
2により覆われている。
Furthermore, the other branched flow 27 is connected to the heat exchanger 3
0,36, passes through the heat shield section 40, passes through the heat exchanger 36 again, and is heated to the He refrigerator 28.
be sent outside. The heat shield section 40 is a He refrigerator main body 4 that includes the entire cooling component therein.
It is arranged in a coil shape around the He refrigerator body 41 to heat shield the He refrigerator body 41. In addition,
An internal purifier 37a is provided between the heat exchangers 36 and 30, and a cold box 4, which is a vacuum container for insulation, is located outside the He refrigerator main body 41.
Covered by 2.

したがつて、流入流れ26aは熱交換器29〜
35を通過する間に帰還流れ26bと熱交換を行
い、段階的に温度を下げ、かつ内部精製器37に
より純度を上げて行く。このようにして冷却され
たHeガスは、JT弁39にて大気圧近くまで等エ
ンタルピー膨張することにより一部液化され、気
化混合状態(ミスト)となる。ミストとなつた
Heは、He冷凍装置28を出てミスト移送管43
により負荷である疲労試験機44に導かれる。
Therefore, the inlet stream 26a passes through the heat exchanger 29~
35, it exchanges heat with the return flow 26b, lowering the temperature step by step, and increasing the purity through the internal purifier 37. The He gas cooled in this manner is isenthalpically expanded to near atmospheric pressure at the JT valve 39, and is partially liquefied, resulting in a vaporized mixed state (mist). Became a mist
He exits the He freezing device 28 and enters the mist transfer pipe 43.
is guided to the fatigue testing machine 44 which is a load.

疲労試験機44は、外部から供給される液体
He45を貯めておく密閉可能な極低温容器46
と、被試験体47に試験条件を付与する検査部4
8と、前記ミストが流れる再凝縮器49とから構
成される。液体He45から蒸発するHeガスは再
凝縮器49により冷却され、再度液化し、検査部
48を液体He温度(4.4〓)に保持している。
The fatigue tester 44 uses a liquid supplied from the outside.
Sealable cryogenic container 46 to store He45
and an inspection section 4 that applies test conditions to the test object 47.
8, and a recondenser 49 through which the mist flows. The He gas evaporated from the liquid He 45 is cooled by the recondenser 49 and liquefied again, thereby maintaining the inspection section 48 at the liquid He temperature (4.4〓).

再凝縮器49を通過してきたHeは、前記帰還
流れ26bとなり、再び前記熱交換器35〜29
を経てHe冷凍装置28外へ出たのち、分岐流2
7と合流してガス貯蔵タンク1に戻り閉サイクル
を形成している。
He that has passed through the recondenser 49 becomes the return flow 26b and returns to the heat exchangers 35 to 29.
After exiting the He refrigerator 28 through the branch flow 2
7 and returns to the gas storage tank 1, forming a closed cycle.

なお、51,52,53は真空ポンプで、コー
ルドボツクス42内、He冷凍装置内のHe流路、
極低温容器46を脱気する。
In addition, 51, 52, and 53 are vacuum pumps, and the He flow path in the cold box 42 and the He refrigerator,
Degas the cryogenic container 46.

次に、前記構成からなる極低温冷却装置の作動
について説明する。
Next, the operation of the cryogenic cooling device having the above configuration will be explained.

まず、真空ポンプ50,51,52,53によ
り極低温冷却装置内を脱気して不純物を除去した
のち、Heボンベ3から供給口2よりガス貯蔵タ
ンク1に高純度Heガスを供給する。ガス貯蔵タ
ンク1内の状態は、約1気圧ならびに約310〓と
する。
First, the inside of the cryogenic cooling device is degassed using the vacuum pumps 50, 51, 52, and 53 to remove impurities, and then high-purity He gas is supplied from the He cylinder 3 to the gas storage tank 1 through the supply port 2. The conditions inside the gas storage tank 1 are approximately 1 atmosphere and approximately 310㎓.

ガス貯蔵タンク1のHeガスは等温圧縮装置4
により約15〜20気圧に圧縮されて、ガス精製装置
5に到る。この内部では、Heガスは冷熱回収熱
交換器6からガス冷却器8を経て260〓に冷却さ
れ、ガス精製器9に送られる。
He gas in gas storage tank 1 is transferred to isothermal compression device 4
The gas is compressed to about 15 to 20 atmospheres and reaches the gas purifier 5. Inside this, the He gas is cooled down to 260 °C from the cold heat recovery heat exchanger 6 through the gas cooler 8 and sent to the gas purifier 9.

ガス精製器9の吸着筒10a,10bは前記の
ように、作動時間に応じ、適宜バルブ操作を行う
ことにより精製、再生を切換えて使用できる。例
えば吸着筒10aで精製させ、吸着筒10bで再
生させる場合は、バルブ12,15,16,1
8,19を開、バルブ13,14,17,20,
21を閉とし、ヒータ11bを加熱して真空ポン
プ50を働かせればよい。
As described above, the adsorption cylinders 10a and 10b of the gas purifier 9 can be used by switching between purification and regeneration by appropriately operating the valves depending on the operating time. For example, when purifying with the adsorption column 10a and regenerating with the adsorption column 10b, the valves 12, 15, 16, 1
8, 19 open, valves 13, 14, 17, 20,
21 is closed, the heater 11b is heated, and the vacuum pump 50 is operated.

また、吸着筒10bの再生が完了すると、バル
ブ16,19を開、バルブ21を開として吸着筒
10bを予冷する。その後、バルブ18,21を
閉、バルブ17,20を開とすれば精製を開始す
ることができる。
Further, when the regeneration of the adsorption cylinder 10b is completed, the valves 16 and 19 are opened and the valve 21 is opened to pre-cool the adsorption cylinder 10b. Thereafter, purification can be started by closing the valves 18 and 21 and opening the valves 17 and 20.

吸着筒10aで再生させ、吸着筒10bで精製
させる場合は、対称の位置関係にあるバルブにつ
き開閉切替え、前記操作を行えばよい。
When regenerating in the adsorption column 10a and refining in the adsorption column 10b, the above-mentioned operations may be performed by switching open/close valves that are in a symmetrical positional relationship.

以上のように、ガス精製器9で精製されたHe
ガスは冷熱回収熱交換器6にて熱交換して約300
〓となり、ガス精製装置5からHe冷凍装置28
に送られる。
As described above, He purified in the gas purifier 9
The gas is heat-exchanged in the cold heat recovery heat exchanger 6 and is heated to approximately 300
〓, from the gas purification device 5 to the He freezing device 28
sent to.

He冷凍装置28では、まず熱交換器29,3
0により流入流れ26aおよび分岐流27を約80
〓に冷却し、He冷凍機本体41を約80〓に冷却
した熱シールド部40により熱シールドする。
In the He refrigerator 28, first the heat exchangers 29 and 3
0, the inlet flow 26a and branch flow 27 are
The He refrigerator body 41 is heat shielded by the heat shield section 40 cooled to about 80°.

この内、流入流れ26aについては熱交換器3
1〜35により約5〓に冷却する。さらに、JT
弁39によりHeガスを4.4〓に冷却し、一部液化
させ、ミスト状態とする。
Of these, for the inflow flow 26a, the heat exchanger 3
Cool to about 5〓 by 1~35. Additionally, J.T.
The He gas is cooled to 4.4ⓓ by the valve 39, partially liquefied, and made into a mist state.

ミスト状態のHeは、He冷凍装置28から疲労
試験機44の再凝縮器に到り、極低温容器46内
の液体He45の気化を抑える。そして、He冷凍
装置28に戻る帰還流れ26bとなり、流入流れ
26aを冷却しつつ通過して、ガス貯蔵タンク1
に入り、再度、以上の閉サイクルを循環する。
He in a mist state reaches the recondenser of the fatigue testing machine 44 from the He freezing device 28 and suppresses the vaporization of the liquid He 45 in the cryogenic container 46. Then, it becomes a return flow 26b that returns to the He refrigerator 28, passes through the inflow flow 26a while cooling it, and passes through the gas storage tank 1.
, and the above closed cycle is repeated again.

なお、He冷凍装置28の作動開始時において
は、図中破線で示す液体窒素(約80〓)の予冷ラ
イン54を設けてHe冷凍機本体41を熱シール
ドすれば予冷時間の短縮等の冷却効果が改善され
る。
When the He refrigerator 28 starts operating, if the He refrigerator main body 41 is heat shielded by providing a pre-cooling line 54 of liquid nitrogen (approximately 80㎓) shown by the broken line in the figure, cooling effects such as shortening the pre-cooling time can be achieved. is improved.

また、極低温容器46内の液体He45を繰返
し使用する場合は、図中破線にて示すHeガス回
収系55を設ければよい。56はガス貯蔵器、5
7は高圧圧縮装置、58は精製器である。この場
合、ガス貯蔵器56より極低温容器46内に定圧
高純度Heガスを供給し、He冷凍装置28より供
給される寒冷を再凝縮器49を介して伝達するこ
とにより前記定圧高純度Heガスは逐次極低温容
器46内において液体He45となり疲労試験機
44に供される。
Furthermore, if the liquid He 45 in the cryogenic container 46 is to be used repeatedly, a He gas recovery system 55 indicated by a broken line in the figure may be provided. 56 is a gas storage device, 5
7 is a high pressure compression device, and 58 is a purifier. In this case, the constant pressure high purity He gas is supplied from the gas storage 56 into the cryogenic container 46, and the cold supplied from the He freezing device 28 is transmitted via the recondenser 49, thereby producing the constant pressure high purity He gas. is sequentially turned into liquid He45 in the cryogenic container 46 and subjected to the fatigue testing machine 44.

したがつて、疲労試験機44にある液体He4
5は、He冷凍装置28と再凝縮器49を用いて
効果的に再液化されるため液化Heの実質的消費
は殆どない。
Therefore, the liquid He4 in the fatigue tester 44
5 is effectively reliquefied using the He freezing device 28 and the recondenser 49, so there is almost no substantial consumption of liquefied He.

以上の説明より明らかなように、本発明によれ
ば、Heを閉サイクル内にて循環使用しているた
め、およびガス精製器の再生をヒータにより不純
物を放出させることにより行つているため、He
の消耗は殆どない。そして、He冷凍機本体の熱
シールドを閉サイクルの余剰能力を利用して行つ
ていること等によりランニングコストを大巾に低
減させることができる。
As is clear from the above explanation, according to the present invention, He is circulated in a closed cycle and the gas purifier is regenerated by releasing impurities using a heater.
There is almost no wear and tear. Additionally, by utilizing the surplus capacity of the closed cycle to heat shield the main body of the He refrigerator, running costs can be significantly reduced.

また、ガス精製装置は2つの吸着筒を適宜切換
えて精製、再生作業を並行して行わせることがで
きるため、長時間の連続運転に対しても安定した
性能を示す。
In addition, the gas purification device can perform purification and regeneration operations in parallel by appropriately switching between the two adsorption cylinders, so it exhibits stable performance even during long-term continuous operation.

さらに、常温操作部であるバルブ類を極低温部
には一切設けていないため、熱損失は少く、冷却
性能が良好である等種々の効果を有する。
Furthermore, since no valves, which are room-temperature operation parts, are provided in the cryogenic part, there are various effects such as low heat loss and good cooling performance.

【図面の簡単な説明】[Brief explanation of the drawing]

図は本発明に係る極低温冷却装置の系統図であ
る。 1…ガス貯蔵タンク、2…供給口、4…等温圧
縮装置、5…ガス精製装置、28…He冷凍装置、
40…熱シールド部、44…疲労試験機、49…
再凝縮器。
The figure is a system diagram of a cryogenic cooling device according to the present invention. 1... Gas storage tank, 2... Supply port, 4... Isothermal compression device, 5... Gas purification device, 28... He freezing device,
40... Heat shield part, 44... Fatigue tester, 49...
Recondenser.

Claims (1)

【特許請求の範囲】[Claims] 1 Heガス貯蔵タンクと、圧縮装置と、再生機
能を備えたガス精製装置と、周囲に熱シールド部
を備えるとともに、内部に多段の熱交換器および
ジユールトムソン弁等のミスト化手段を備えた冷
凍装置と、前記貯蔵タンクおよび圧縮装置からガ
ス精製装置を経て分岐し、分岐した一方が前記ミ
スト化手段を通過して、流入流れとし負荷へ至る
一方、負荷からの帰還流れとして前記熱交換器を
通過して前記流入流れとの間での熱交換により流
入流れを冷却して前記貯蔵タンクに帰還するとと
もに、前記分岐した他方が前記熱交換器の一部を
通過して前記熱シールド部となつた後、前記貯蔵
タンクに帰還するHe循環用閉サイクル回路とか
ら構成したことを特徴とする極低温冷却装置。
1 Equipped with a He gas storage tank, a compression device, a gas purification device with a regeneration function, a surrounding heat shield, and internally equipped with a multi-stage heat exchanger and misting means such as a Joel-Thompson valve. A refrigeration system and a gas purification system are branched from the storage tank and the compression system, and one of the branches passes through the misting means to reach the load as an inflow flow, while a return flow from the load flows through the heat exchanger. The inflow stream is cooled by heat exchange with the inflow stream and returned to the storage tank, and the other branched stream passes through a part of the heat exchanger and connects with the heat shield part. 1. A cryogenic cooling device comprising: a closed cycle circuit for circulating He that returns to the storage tank after being exhausted.
JP4235380A 1980-03-31 1980-03-31 Cryocooler Granted JPS56138655A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4235380A JPS56138655A (en) 1980-03-31 1980-03-31 Cryocooler

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4235380A JPS56138655A (en) 1980-03-31 1980-03-31 Cryocooler

Publications (2)

Publication Number Publication Date
JPS56138655A JPS56138655A (en) 1981-10-29
JPS6353470B2 true JPS6353470B2 (en) 1988-10-24

Family

ID=12633659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4235380A Granted JPS56138655A (en) 1980-03-31 1980-03-31 Cryocooler

Country Status (1)

Country Link
JP (1) JPS56138655A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60253769A (en) * 1984-05-30 1985-12-14 株式会社日立製作所 Helium refrigerator
JPS617785U (en) * 1984-06-20 1986-01-17 株式会社日立製作所 helium refrigerator
JPS61203267U (en) * 1985-06-08 1986-12-20
JPH0721358B2 (en) * 1987-01-30 1995-03-08 株式会社日立製作所 Cryogenic liquefier

Also Published As

Publication number Publication date
JPS56138655A (en) 1981-10-29

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