JPS6354211B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to semiconductor manufacturing equipment, and particularly to improvements in the cap and exhaust duct of a diffusion tube used for semiconductor diffusion.

[Technical background of the invention and problems in the background art]

The first example is a conventional cap and exhaust duct.
2 and 3. The example in Figure 1 is
An exhaust duct portion 1b is provided on the peripheral wall portion 1a of the cap 1, and an exhaust tube 3 is provided in the exhaust duct portion 1b.
is connected. The cap 1 is made of quartz and is sealed by rubbing together with the diffusion tube 2, which is also made of quartz, and has no choice but to be opened and closed manually, making it difficult to automate opening and closing.

In the example shown in FIG. 2, the cap 6 consists of a disk 6 made of quartz, and is sealed with a cylindrical intermediate member 9 by an O-ring 8. The intermediate member 9 is connected to the diffusion tube 2, and is partially provided with an exhaust duct portion 9a, to which the exhaust tube 3 is connected. On the other hand, the cap 6 is supported by the support part 5, is rotatable together with the support part 5 about the rotating shaft 4, and is movable back and forth together with the rotating shaft 4, thereby automatically opening and closing the cap. is now possible. However, this configuration has disadvantages in that it requires a large number of parts, is expensive, and is inconvenient to install, adjust, and remove (necessary for cleaning, for example).

In the example shown in FIG. 3, an exhaust duct portion 10a is integrally formed with a diffusion tube 10 made of quartz. The structure of the cap 6, its automatic opening/closing mechanism, etc. are the same. In the configuration shown in FIG. 3, since the protruding exhaust duct portion 10a is integrally formed with the quartz tube 10, there are disadvantages such as high manufacturing cost and easy damage during cleaning etc. .

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor manufacturing apparatus that is capable of automatically opening and closing a cap, has a small number of parts, and is less likely to be damaged.

[Summary of the invention]

In the semiconductor manufacturing apparatus of the present invention, the support arm for automatically opening and closing the cap is formed hollow and also serves as an exhaust duct.

[Embodiments of the invention]

FIG. 4 shows an embodiment of the present invention.
As shown, an O-ring 8 is attached to one end of the diffusion tube 7, and a cap 13 is pressed against the O-ring 8 for sealing. The cap 13 is made of a disc made of quartz, and has an opening 13a in the center. An arm 12 is provided on the outer surface of the cap 13. The arm 12 is tubular as shown and has an air passage 12a passing through it. One end of this air passage 12a is connected to an opening 13a. The arm 12 is also made of quartz, and in this embodiment, the arm 12 and the cap 13 are integrally formed. An exhaust tube 13 is connected to one end of the arm 12. That is, in this way, the air passage 12a within the arm 12 functions as an exhaust duct.

An intermediate portion of the arm 12 is supported by an arm holder 11 made of stainless steel, and this arm holder is fixed to the rotating shaft 4. And arm 1
2 and the cap 13 can be rotated around the rotating shaft 4 (arrow A), and can also be moved back and forth together with the rotating shaft 4 (arrow B).

To close the cap 13, first rotate it together with the arm 12 to align it with the diffusion tube 7, then advance it toward the tube 7 and press it against the O-ring to seal it. To open the cap 13, move it backwards away from the O-ring 8 and then rotate it. Such opening/closing movements are performed automatically.

Note that the material of the cap and arm is not limited to quartz, but other materials such as silicon carbide (SiC) may be used.

〔Effect of the invention〕

As described above, according to the present invention, the arm for automatically opening and closing the cap also serves as an exhaust duct, so the number of parts is small. In addition, there is no need to provide a protruding exhaust duct on the diffusion tube, so
Problems such as damage during cleaning etc. are also eliminated.
In addition, since the cap itself has an exhaust port, the exhaust flow is smoother than when the exhaust port is on the peripheral wall, which not only improves the exhaust effect but also prevents substances from adhering to the area around the exhaust port (for example, phosphorus in a phosphorus diffusion furnace). adhesion) will also be reduced.

[Brief explanation of the drawing]

Figures 1a and b are perspective views and sectional views showing the cap and surroundings of one conventional example, Figures 2 a and b are front views and sectional views showing another conventional example, and Figure 3 shows still another conventional example. Figures 4a and 4b are front and cross-sectional views of the cap and arm of an apparatus according to one embodiment of the invention. 3... Exhaust tube, 4... Rotating shaft, 7... Diffusion tube, 8... O ring, 12... Arm, 12a...
Airway, 13...cap, 13a...opening.

Claims (1)

[Scope of Claims] 1. An arm that supports a cap that closes one end of a semiconductor diffusion tube and rotates with the cap to open and close the cap is connected to an opening that penetrates the inside and passes through the cap. 1. A semiconductor manufacturing device characterized by being provided with an air passage. 2. In the device according to claim 1,
A device characterized in that the cap and the arm are integrally formed.