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JPS6356188B2 - - Google Patents
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JPS6356188B2 - - Google Patents

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Publication number
JPS6356188B2
JPS6356188B2 JP60093096A JP9309685A JPS6356188B2 JP S6356188 B2 JPS6356188 B2 JP S6356188B2 JP 60093096 A JP60093096 A JP 60093096A JP 9309685 A JP9309685 A JP 9309685A JP S6356188 B2 JPS6356188 B2 JP S6356188B2
Authority
JP
Japan
Prior art keywords
powder
molded product
sintering
boron
purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60093096A
Other languages
Japanese (ja)
Other versions
JPS61251579A (en
Inventor
Yoshihiro Kubota
Toshimi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP60093096A priority Critical patent/JPS61251579A/en
Publication of JPS61251579A publication Critical patent/JPS61251579A/en
Publication of JPS6356188B2 publication Critical patent/JPS6356188B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】[Detailed description of the invention]

産業上の利用分野 本発明は、改良された焼結法によるチツ化ホウ
素(以下BNという)成型体の製造方法に関する
ものである。 従来の技術 BN成型体を得るには、A)BN粉末製造時の
反応中間物を焼結する方法、B)BN粉末に無水
ホウ酸を混合し焼結する方法、C)塩化ボロンな
どの揮発性ボロン化合物とアンモニアなどのチツ
化原料を高温発熱体の上で共熱分解して得る方法
が従来から用いられている。 発明が解決しようとする問題点 A)の方法には、米国特許第2808314号公報な
どに示されているように、反応中間物を原料とす
るため、成型体純度が悪い、成型体中のバイ
ンダーとしての無水ホウ酸量がコントロールしに
くい、成型体の粒径コントロールができないな
どの欠点がある。B)の方法は、A)の方法の欠
点を改良する方法であるが、A)と同量のバイン
ダーを使用したとき、A)の成型体に比較してそ
の強度が弱いという欠点がある。これを解決する
ためCaO、SiO2などを添加する方法がとられて
いるが、これらは、たとえば伝熱性をそこなわせ
たり、また電気特性を変化させるなど、BNの特
性を低下させる欠点がある。C)にかかげた方法
は、無バインダーでもつとも高純度の成型体が得
られ、BNの基本物性を引き出すことができる
が、製造には長時間を要し、大量生産に不向きで
成型体が高価になる点に問題がある。 問題点を解決するための手段 本発明は、上記の各方法の欠点を改良した高純
度、高強度の成型体を提供することを目的とする
もので、その要旨とするところは、チツ化ホウ素
の粉末表面を酸化処理したのち、焼結することを
特徴とするチツ化ホウ素成型体の製造方法であ
る。 以下これについて詳しく説明する。 この方法に使用する原料は、従来法のものがす
べて使用できるが、粉末の段階で高純度化および
高結晶化されているものが好ましい。もちろん、
熱膨張特性、伝導性などの成型体物性を意識的に
変える目的で加えられるバインダー類はこの限り
ではない。またBN粉末の粒径は成型体強度の面
からは微粉であることが好ましいが、実際的には
現在知られている方法で得られる程度のものであ
ればよく、またボールミル、アトライターなどの
粉砕機によつてさらに微粉化されたものでも差支
えない。原料粉末表面の酸化処理は空気または酸
素雰囲気中で、高温水蒸気などで行われるが、酸
化量を厳密にコントロールするには空気中が好ま
しい。また酸化温度は、650〜1200℃の範囲であ
るが、酸化量を厳密にコントロールするにはでき
るだけ低温が好ましく、効率を考えると750〜950
℃が適当である。 これにより、BN粉体はその表面が酸化され、
B2O3と一部がB、N、OからなるBN前駆体とに
なり、これが焼結時にBNとB2O3に再分解するこ
とにより焼結を全うするものと考えられる。この
酸化の程度は、焼結体強度の面から1〜20重量%
の範囲とすべきである。1重量%以下では強度が
不足し、20重量%を越すと熱特性が劣化する。 つぎに実施例と比較例をあげて本発明を具体的
に説明するが、本発明はこれに限定されないこと
はもちろんである。 実施例 1 平均粒径5μm、比表面積6m2/g、BN純度
99.95%のBN粉末を、空気下マツフル炉で820℃、
20時間酸化してB2O3として6.9%含有する原料と
し、チツ素雰囲気中で1800℃、110Kg/cm2下にホ
ツトプレスし成型体を製造した。 実施例 2 平均粒径2μm、比表面積30m2/g、BN純度
99.95%のBN粉末を、マツフル炉で950℃、60分
間空気酸化し、B2O3として5.7%含有する原料を
得た。これを4000Kg/cm2の圧力で冷水間加圧し、
ついで1900℃、常圧チツ素雰囲気下焼結し成型体
を製造した。 実施例 3 平均粒径2.8μm、比表面積15m2/g、BN純度
99.95%のBN粉末に、酸化カルシウム0.8重量%
を加えボールミルで10時間混合した後、アルミナ
炉芯管を有するシリコニツト炉で1100℃、5分間
酸化し、B2O3として7.3%含有する粉末を得た。
これを1850℃、127Kg/cm2でチツ素雰囲気下ホツ
トプレスし成型体を製造した。 比較例 1 実施例1で用いたBN粉末に無水ホウ酸8重量
%を加え、ボールミルで10時間混合し、この粉末
を1800℃、110Kg/cm2でホツトプレスした。得ら
れた成型体の物性は曲げ強度がきわめて悪いもの
であつた。 比較例 1′ ホウ酸887gおよびリン酸カルシウム500gとを
水580gで混合し、これを150℃で乾燥し、7メツ
シユを通過するようライカイ機で粉砕し、アルミ
ナ炉芯管を有するシリコニツト炉中NH3雰囲気
下950℃で16時間反応させ、反応物をハンマーミ
ルによつて1mmφの穴径をもつスクリーンを通過
するまで粉砕し、ついで65℃、20%の塩酸水3000
g中で撹拌下120分放置後、瀘別し熱水洗浄を繰
返し、瀘過水のPHが7になつてからさらに20の
熱水で洗い、180℃で24時間乾燥した後、1800℃、
110Kg/cm2でチツ素雰囲気下にホツトプレスした。
こうして得た成形体は、B2O3分が22%と多く、
熱抵抗性がきわめて大きいものであつた。 比較例 2 実施例2で用いたBN粉末に、無水ホウ酸8重
量%を混ぜボールミルで10時間混合した後、この
粉末を4000Kg/cm2の圧力で冷水間加圧し、ついで
1900℃常圧チツ素雰囲気下で焼結した。焼結物は
クラツクが縦横にはいり、成型体とならなかつ
た。 比較例 3 実施例3における酸化カルシウムを加え混合し
た粉末に、無水ホウ酸を8重量%加えボールミル
で10時間混合し、1850℃、127Kg/cm2チツ素雰囲
気下でホツトプレスした。得られた成型体は強度
の弱いものであつた。 以上の実施例、比較例で得られた成型体の物性
を第1表に示す。
INDUSTRIAL APPLICATION FIELD The present invention relates to a method for producing a boron nitride (hereinafter referred to as BN) molded body by an improved sintering method. Conventional technology To obtain a BN molded body, A) a method of sintering a reaction intermediate during the production of BN powder, B) a method of mixing boric anhydride with BN powder and sintering it, and C) a method of volatilizing boron chloride etc. Conventionally, a method has been used in which a boron compound and a raw material for forming titanium, such as ammonia, are co-thermally decomposed on a high-temperature heating element. Problems to be Solved by the Invention As shown in U.S. Pat. No. 2,808,314, method A) uses a reaction intermediate as a raw material, so the purity of the molded product is poor and the binder in the molded product is used as a raw material. There are drawbacks such as difficulty in controlling the amount of boric anhydride as a compound and inability to control the particle size of the molded product. Method B) is a method that improves the drawbacks of method A), but has the drawback that when the same amount of binder as in A) is used, the strength of the molded product is weaker than in A). To solve this problem, methods have been taken to add CaO, SiO 2 , etc., but these have the disadvantage of deteriorating the properties of BN, such as impairing heat conductivity and changing electrical properties. . The method described in C) can obtain a molded product with high purity even without a binder and bring out the basic physical properties of BN, but it takes a long time to manufacture, is not suitable for mass production, and the molded product is expensive. There is a problem with becoming. Means for Solving the Problems The present invention aims to provide a high-purity, high-strength molded product that improves the drawbacks of the above-mentioned methods. This is a method for producing a boron nitride molded body, which is characterized in that the surface of the powder is oxidized and then sintered. This will be explained in detail below. All raw materials used in conventional methods can be used in this method, but those that have been highly purified and highly crystallized in the powder stage are preferred. of course,
This does not apply to binders added for the purpose of intentionally changing the physical properties of the molded product, such as thermal expansion characteristics and conductivity. In addition, it is preferable that the particle size of the BN powder is fine from the viewpoint of the strength of the molded product, but in practice it may be as long as it can be obtained by currently known methods, and It may be further pulverized using a pulverizer. The surface of the raw material powder is oxidized using high-temperature steam in air or an oxygen atmosphere, but air is preferred in order to strictly control the amount of oxidation. The oxidation temperature is in the range of 650 to 1200℃, but in order to strictly control the amount of oxidation, it is preferable to keep it as low as possible.
°C is appropriate. As a result, the surface of the BN powder is oxidized,
It is thought that B 2 O 3 and a BN precursor partially composed of B, N, and O are formed, and this is re-decomposed into BN and B 2 O 3 during sintering, thereby completing the sintering. The degree of this oxidation is 1 to 20% by weight in terms of the strength of the sintered body.
should be within the range of If it is less than 1% by weight, the strength will be insufficient, and if it exceeds 20% by weight, the thermal properties will deteriorate. Next, the present invention will be specifically explained with reference to Examples and Comparative Examples, but it goes without saying that the present invention is not limited thereto. Example 1 Average particle size 5 μm, specific surface area 6 m 2 /g, BN purity
99.95% BN powder was heated at 820℃ in a Matsufuru furnace under air.
The material was oxidized for 20 hours to obtain a raw material containing 6.9% B 2 O 3 and hot pressed at 1800° C. and 110 kg/cm 2 in a nitrogen atmosphere to produce a molded body. Example 2 Average particle size 2 μm, specific surface area 30 m 2 /g, BN purity
99.95% BN powder was air oxidized in a Matsufuru furnace at 950°C for 60 minutes to obtain a raw material containing 5.7% B 2 O 3 . This was pressurized with cold water at a pressure of 4000Kg/ cm2 ,
Then, it was sintered at 1900°C under normal pressure nitrogen atmosphere to produce a molded body. Example 3 Average particle size 2.8 μm, specific surface area 15 m 2 /g, BN purity
99.95% BN powder, 0.8% calcium oxide by weight
After mixing in a ball mill for 10 hours, the mixture was oxidized at 1100° C. for 5 minutes in a siliconite furnace equipped with an alumina furnace tube to obtain a powder containing 7.3% B 2 O 3 .
This was hot pressed at 1850° C. and 127 kg/cm 2 in a nitrogen atmosphere to produce a molded product. Comparative Example 1 8% by weight of boric anhydride was added to the BN powder used in Example 1, mixed in a ball mill for 10 hours, and this powder was hot pressed at 1800° C. and 110 kg/cm 2 . The physical properties of the molded product obtained were extremely poor in bending strength. Comparative Example 1' 887 g of boric acid and 500 g of calcium phosphate were mixed with 580 g of water, dried at 150°C, pulverized in a Raikai machine to pass through 7 meshes, and placed in a siliconite furnace with an alumina core tube in an NH 3 atmosphere. The reaction was allowed to proceed at 950°C for 16 hours, and the reaction product was pulverized using a hammer mill until it passed through a screen with a hole diameter of 1 mm.
After leaving it for 120 minutes under stirring in 180°C for 120 minutes, it was filtered and washed with hot water repeatedly, and when the pH of the filtrated water reached 7, it was further washed with hot water at 20°C, dried at 180°C for 24 hours, and then heated to 1800°C.
It was hot pressed at 110Kg/cm 2 in a nitrogen atmosphere.
The molded product obtained in this way has a high B 2 O 3 content of 22%,
It had extremely high heat resistance. Comparative Example 2 The BN powder used in Example 2 was mixed with 8% by weight of boric anhydride and mixed in a ball mill for 10 hours. This powder was then pressurized with cold water at a pressure of 4000 kg/cm 2 and then
Sintered at 1900℃ under normal pressure nitrogen atmosphere. The sintered product had cracks in all directions and could not be formed into a molded product. Comparative Example 3 8% by weight of boric anhydride was added to the powder obtained in Example 3 in which calcium oxide was added and mixed, and the mixture was mixed in a ball mill for 10 hours, and hot pressed at 1850° C. in a 127 kg/cm 2 nitrogen atmosphere. The resulting molded product had low strength. Table 1 shows the physical properties of the molded bodies obtained in the above Examples and Comparative Examples.

【表】 発明の効果 本発明の方法によれば、従来焼結しにくいため
利用困難であつた高純度のBN粉末を使用するこ
とができ、またバインダー量のコントロールが容
易であり、得られた成型体は高純度、高強度のも
ので産業上有用なものである。
[Table] Effects of the Invention According to the method of the present invention, it is possible to use high-purity BN powder, which was conventionally difficult to use because it is difficult to sinter, and the amount of binder can be easily controlled. The molded product has high purity and high strength and is industrially useful.

Claims (1)

【特許請求の範囲】 1 チツ化ホウ素の粉末表面を酸化処理した後、
焼結することを特徴とするチツ化ホウ素成型体の
製造方法。 2 前記酸化処理が酸化性雰囲気の650〜1200℃、
好ましくは750〜950℃で行われ、ついで焼結をホ
ツトプレス法で行うことを特徴とする特許請求の
範囲第1項記載の方法。 3 チツ化ホウ素の1〜20重量%が表面酸化され
ることを特徴とする特許請求の範囲第1項記載の
方法。
[Claims] 1. After oxidizing the surface of boron titanide powder,
A method for producing a boron titanide molded body, characterized by sintering. 2. The oxidation treatment is carried out at 650 to 1200°C in an oxidizing atmosphere,
2. A method according to claim 1, characterized in that the sintering is preferably carried out at a temperature of 750 DEG -950 DEG C. and then the sintering is carried out by hot pressing. 3. A method according to claim 1, characterized in that 1 to 20% by weight of the boron titanide is surface oxidized.
JP60093096A 1985-04-30 1985-04-30 Manufacturing method of boron nitride molded body Granted JPS61251579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60093096A JPS61251579A (en) 1985-04-30 1985-04-30 Manufacturing method of boron nitride molded body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60093096A JPS61251579A (en) 1985-04-30 1985-04-30 Manufacturing method of boron nitride molded body

Publications (2)

Publication Number Publication Date
JPS61251579A JPS61251579A (en) 1986-11-08
JPS6356188B2 true JPS6356188B2 (en) 1988-11-07

Family

ID=14072988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60093096A Granted JPS61251579A (en) 1985-04-30 1985-04-30 Manufacturing method of boron nitride molded body

Country Status (1)

Country Link
JP (1) JPS61251579A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4542747B2 (en) * 2003-02-19 2010-09-15 国立大学法人東京工業大学 Manufacturing method of high strength hexagonal boron nitride sintered body

Also Published As

Publication number Publication date
JPS61251579A (en) 1986-11-08

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