JPS6357677B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a joint. More specifically, the present invention relates to a fluid piping joint that allows fluid to easily replace the inside of the piping and the connecting portion, and prevents outside air from entering the piping even when the connecting portion is open.

[Conventional technology]

Conventionally, fluids that contain toxic substances or corrosive substances, fluids that contain corrosive substances, fluids that contain highly reactive substances, fluids that require high purity, or fluid components that react with air etc. over time In the case of a change in the number of pipes, there is a need for an easy replacement method within the arrangement so that these fluids or air do not remain in the pipes. Furthermore, when the pipe is dismantled, it may be necessary to prevent the inside of the pipe from being exposed to the outside air.

For example, silane gas (SiH ₄ ), which is widely used in the semiconductor industry, will be explained below. Silane is sent from commercially available cylinders to the desired equipment via connecting piping, but silane is an extremely active substance that spontaneously combusts quickly when exposed to oxygen.
Changes to silicon dioxide and water. Therefore, if air or the like is mixed in the piping, the piping will be clogged by the generated silicon dioxide, so it is necessary to replace the air with an inert gas in advance to eliminate the air in the piping.

In addition, when a connection is removed to replace a cylinder or change piping, air enters the piping, and this air reacts with the silane remaining in the piping.
It may cause blockage of piping. For this reason, it is necessary that the inside of the pipe be sealed with a replacement gas so that air does not enter the pipe even when the pipe is removed.

However, there is no easy method or simple device to exclude fluids such as the above-mentioned toxic fluids or air from the piping and to prevent outside air from entering the piping when the connection is opened.

With reference to FIG. 1, a conventional method in a device using conventional equipment in a cylinder joint will be explained.

In FIG. 1, a cylinder 1 filled with a working gas, such as silane gas, is connected via a cylinder valve 2 to equipment 3, such as a reactor and a working vessel, by a main pipe 4. The main pipe 4 is therefore provided with an inlet valve 5 in close proximity to the device 3. Further, a side pipe 6, a side pipe 7, and a side pipe 8 are branched from the main pipe 4 in this order from the cylinder side. The main pipe 4 communicates with the replacement gas supply pipe via a valve 9 provided on the side pipe 6, and communicates with the outside air via a valve 10 provided on the side pipe 7. It is connected to the vacuum system via a valve 11 that is connected to the vacuum system.

Air and other atmospheric gases in the pipes of the equipment shown in Figure 1 (hereinafter both are referred to as atmospheric gases)
Explain how to replace.

That is, cylinder valve 2, inlet valve 5, valve 11
Close the valve 10, open the valve 10, open the valve 9, introduce the replacement gas from the replacement gas supply pipe via the side pipe 6, discharge it to the atmosphere from the side pipe 7 through the valve 10, and replace it in the piping. Replace with gas. At this time, between the branching point of the side pipe 6 and the main pipe 4 and the cylinder valve 2, the side pipe 7
The area between the branch point between the side pipe and the main pipe 4 and the inlet valve 5 and the area between the branch point between the side pipe and the main pipe 4 and the valve 11 are not replaced. Therefore, in order to replace these unreplaced portions, it is necessary to close valves 9 and 10, respectively, and open valve 11 to exhaust the replacement gas and residual atmospheric gas in the piping under reduced pressure.

Only by repeating the replacement with the replacement gas and the evacuation under reduced pressure can the atmospheric gas in the piping when the cylinder is connected be removed. Furthermore, when the cylinder is removed, it is necessary to replace it with a replacement gas to discharge the remaining gas in the piping.

[Problem that the invention seeks to solve]

However, such an operation is not only complicated, but also requires a vacuum system, and has the drawbacks of insufficient displacement.

The inventors of the present invention solved the above-mentioned drawbacks of conventional devices and methods, and as a result of extensive research into a replacement device and method that are simple to operate, do not require a vacuum system, and can perform virtually complete replacement, they have developed a new method. A joint with a similar structure was explained.

[Means for solving problems]

That is, the present invention provides a joint that can replace the fluid stagnant in the connection part with the valve and in the piping, and prevent outside air from entering the pipe when the connection part with the valve is open. a first connection part having an attachment/detachment mechanism;
a second connection part having a connection mechanism with a supply pipe for the replacement fluid; a third connection part having a connection mechanism with a main pipe having a side pipe for discharging fluid during replacement;
A first flow path having openings at the connection portion and the second connection portion, a second flow path having openings at the first connection portion and the third connection portion, and one of the first flow path and the second flow path. The ratio of the diameter to the smaller diameter channel is 0.02 to 0.5
1 which communicates the first flow path and the second flow path with each other.
This joint is equipped with a main bypass flow path.

The joint of the present invention is applied to fluid piping that requires fluid replacement and prevention of outside air from entering when the connection is open, for example, piping for supplying various fluids to devices such as reactors, and is usually used in these piping. It is used by being interposed between the valve on the fluid supply source side and the main pipe on the device side.

The first connection part of the joint is connected to a valve on the fluid supply source side, the third connection part is connected to a main shaft having a side pipe for discharging fluid during replacement, and the second connection part is connected to a supply pipe for fluid for replacement. Connected. Note that valves are provided on the device side of the main pipe, the side pipe, and the replacement fluid supply pipe, respectively.

When fluid is supplied to the device, the valve on the fluid supply source side and the inlet valve on the device side are opened, so that the fluid is supplied to the first
It enters the joint from the connection, exits from the third connection, passes through the main pipe, and is supplied to the equipment.

In addition, when replacing fluid, close the valve on the fluid supply source side and the inlet valve on the equipment side, and open the valve on the replacement fluid supply pipe and the valve on the side pipe. The stagnant fluid is discharged from the side pipe together with the replacement fluid to replace the internal fluid.

Furthermore, when the valve on the fluid supply source side and the first connection part of the joint are disconnected, the inlet valve on the device side and the valve on the side pipe are respectively closed, and the valve on the supply pipe for the replacement fluid is opened. is continuously discharged from the first connection, thereby preventing infiltration of outside air.

The joint of the present invention and its operation will be specifically explained with reference to the drawings.

FIG. 2 is a longitudinal sectional view of the joint of the present invention. This joint connects the main pipe section 12 and the main pipe section 12.
It is a T-shaped joint consisting of a side pipe part 13 that is perpendicular to the main pipe part 12 at approximately the center of the main pipe part 12, and the first connection part is the left end of the main pipe part 12, the second connection part is the upper end of the side pipe part 13, and the third The connecting portion is located at the right end of the main pipe portion 12. A flow path 14 is bored in the side tube portion 13 .
Further, a flow path 15 and a flow path 16 are bored between the left end of the main pipe portion 12 and the center portion where the side pipe portions 13 intersect at right angles. Thus, the flow path 15 is connected to the flow path 14 of the side tube portion 13, and the flow path 15 and the flow path 14 are integrated into a first flow path. On the other hand, the flow path 16 is connected to a flow path 17 that is bored in the main pipe portion 12 and opens at the right end of the main pipe portion 12, and the flow path 16 and the flow path 17 are integrated into a second flow path. Furthermore, the first flow path (the flow path 14 and the flow path 15 are integrated) and the second flow path (the flow path 16 and the flow path 17 are integrated) are separated by the bypass flow path 18. have been contacted.

The diameter and length of each channel vary depending on the type of replacement gas and are selected as appropriate. The same applies to the bypass flow path. Bypass flow path 18 is configured according to the type of replacement gas, flow path 15 and flow path 1.
6, the ratio of the diameter of the bypass flow path 18 to the diameter of the smaller diameter flow path of the flow path 15 and the flow path 16 is
It is considered to be 0.02 to 0.5.

As mentioned above, in this joint, the connection part where both the flow path 15 and the flow path 16 of the main pipe part 12 are open is the first connection part, and this connection part is connected to a gas supply source such as a cylinder with a valve. The upper end of the side pipe part 13 is used as a second connection part to connect to a replacement gas supply pipe, and the right end of the main pipe part 12 where the flow path 17 is open is used as a third connection part to be used as a main pipe to an apparatus, etc. They are used by connecting each. (Flow path 1 of main pipe section 12
The right end where 7 is open may be used as the second connection part, and the upper end of the side tube part 13 may be used as the third connection part. ) These connections are made using conventional connection means such as cap nuts, union joints and flanges.

Figures 2 and 3 show how this joint is used.
This will be explained with a diagram. FIG. 3 is a piping diagram showing how the joint shown in FIG. 2 is used. That is,
The joint 19 shown in FIG.
The cylinder valve 2 connects the cylinder 1 to the first connecting portion in which both the flow path 15 and the flow path 16 are open.
By connecting through the casing inner space of the cylinder valve 2, the openings of the flow path 15 and the flow path 16 are communicated with each other by the casing inner space of the cylinder valve 2. Side tube part 13
By connecting the upper end to the side pipe 6 as a second connection part, it is connected to the replacement gas supply source via the valve 9,
In addition, a third pipe in which the flow path 17 of the main pipe portion 12 is open is also provided.
By connecting the connecting portion and the main pipe 4, communication is established with the device 3 via the inlet valve 5.

[Effect]

The usage and operation of the joint will be explained with reference to FIGS. 2 and 3.

To replace the gas in the piping when connecting a cylinder, close the cylinder valve 2 and inlet valve 5, open the valve 10,
The valve 9 is opened, and the replacement gas is introduced into the joint 19 via the side pipe 6, and is further discharged via a part of the main pipe 4 and the side pipe 7. At this time, the replacement gas passes through the flow path 14 of the joint 19, and a portion of the replacement gas passes through the flow path 15, that is, through the first flow path, from the opening of the first connection portion of the main pipe portion 12 to the cylinder valve 2. It reaches the inner space of the casing, changes direction in this space, passes through a second flow path in which the flow path 16 and the flow path 17 are integrated, reaches the main pipe 4, and is discharged from the side pipe 7. On the other hand, the remainder of the replacement gas passes through the bypass flow path 18 with a small diameter, moves from the flow path 17, that is, the first flow path to the second flow path, reaches the main pipe 4, and is discharged from the side pipe 7. At this time, since the bypass flow path 18 has a small diameter, resistance is generated and the flow is restricted.
5. A sufficient amount of replacement gas flows into the casing inner space of the cylinder valve 2 and the flow path 16 to scavenge the remaining gas. In this way, the atmospheric gas that was present in the piping and at the cylinder connection portion when the cylinder was connected is substantially completely replaced.

On the other hand, if you want to prevent atmospheric gas from entering the pipe through the opening of the disconnected first connection when the cylinder is removed from the joint,
When the inlet valve 5 and valve 10 are closed and the valve 9 is opened and the replacement gas is introduced into the joint 19 via the replacement gas side pipe 6, the replacement gas passes through the flow path 14, and then a part of the replacement gas enters the flow path. 15, that is to say via the first flow path, from the first connection. At the same time, the remainder of the replacement gas passes through the bypass flow path 18 and the flow path 16, which have small diameters, that is, from the first flow path to the second flow path.
The liquid flows into the flow path and flows out from the first connection. In this way, even when the cylinder piping is dismantled, the first connection part is covered with the replacement gas, so the inside of the piping is completely sealed by the replacement gas, and atmospheric gas is prevented from entering the piping. Ru.

Normally, an inert gas such as nitrogen gas is used as the replacement gas, and after replacing the cylinder with a new one, when restarting the supply of gas to the device 3, a small amount of replacement gas in the piping is replaced with the gas used. Although it is unlikely to be inconvenient if the replacement gas is supplied to the device 3 along with the replacement gas, if the conditions require the removal of the replacement gas, the following operation is performed.

After replacing the cylinder with a new one, when restarting the supply of gas, close valve 9, open valve 10, and open inlet valve 5.
By opening the cylinder valve 2 while remaining closed, the replacement gas, together with the used gas from the cylinder 1, passes through channels 16 and 17, and the rest passes through the channel 15, the small-diameter bypass channel, They reach the main pipe 4 through the flow path 17 and are discharged from the tip pipe 7. By subsequently closing the valve 10 and opening the inlet valve 5, the supply of gas to the device 3 is resumed.

(In addition, when the displacement gas is required to be discharged in this way, it is preferable that the side pipe 7 is provided close to the inlet valve 5 of the device 3).

The joint of the present invention is not limited to the embodiment illustrated in FIG. 2, and may be modified in various ways.

For example, although the joint in FIG. 2 has a T-shape, it may have a straight shape as shown in the longitudinal cross-sectional view of FIG. 4. At the joint in FIG. 4, the flow path 15 is connected to the flow path 20 extending in a straight direction, and the flow path 15 and the flow path 20 integrally form a first flow path.

〔Effect of the invention〕

By using the joint of the present invention, there is no need for a vacuum system when replacing the piping when the gas supply source is connected, the operation is simple, and it is possible to substantially completely replace the gas supply source. When the connection is removed, atmospheric gas can be easily prevented from entering the pipe.

[Brief explanation of the drawing]

Figure 1 is a piping diagram for the conventional method, Figures 2 and 4.
Each figure is a longitudinal sectional view of the joint of the present invention, and FIG. 3 is a piping diagram using the joint of the present invention. In the drawings, 1...Cylinder, 2...Cylinder valve, 3...Device, 4...Main pipe, 5...Inlet valve,
6, 7 and 8... side pipe, 9, 10 and 11...
...Valve, 12... Main pipe part, 13... Side pipe part, 14,
15, 16 and 17...channel, 18...bypass channel, 19...joint, 20...channel.

Claims (1)

[Scope of Claims] 1. A joint capable of displacing fluid stagnant in the connecting portion with the valve and in the piping, and preventing outside air from entering the piping when the connecting portion with the valve is open, the valve comprising: a first connection portion having an attachment/detachment mechanism between the
a second connection part having a connection mechanism with a supply pipe for the replacement fluid; a third connection part having a connection mechanism with a main pipe having a side pipe for discharging fluid during replacement;
A first flow path having openings at the connection portion and the second connection portion, a second flow path having openings at the first connection portion and the third connection portion, and one of the first flow path and the second flow path. The ratio of the diameter to the smaller diameter channel is 0.02 to 0.5
1 which communicates the first flow path and the second flow path with each other.
A joint comprising a main bypass flow path.