JPS6360379B2 - - Google Patents

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a method of transporting an image mask for the upper and lower surfaces used when simultaneously exposing and printing both sides of a printed wiring board, etc. The present invention relates to a method for simultaneously transporting two upper and lower image masks, which allows image masks to be transported simultaneously.

[Conventional technology]

When simultaneously exposing and printing both sides of a printed wiring board or the like using a double-sided exposure device or the like, it is necessary to transport the image masks that will become the original image to the exposure section, position them on the upper and lower printing frames, and mount them. In the past, the image masks were conveyed to the exposure section one by one, each corresponding to each side of the printed wiring board, by means of conveyance means or manually.

[Problem that the invention seeks to solve]

The conventional conveyance method described above has the following problems. In other words, it takes a considerable amount of time to transport and attach a film mask, and in particular, transporting the upper and lower image masks one by one takes twice as much time to transport, which reduces productivity. Ta.

Particularly when exposing a small amount of workpieces, image masks are frequently replaced, which has a significant impact on reducing manufacturing costs.

The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide an image mask conveying method that can simultaneously convey two upper and lower image masks to improve productivity.

[Means for solving problems]

As a specific means for solving the above-mentioned problems, there is a method for simultaneously transporting upper and lower image masks for upper and lower double-sided exposure, in which a plurality of call holes are drilled in the upper image mask, and the suction The conveying means is equipped with suction pads corresponding to the hole positions, the upper and lower image masks are superimposed, and the lower image mask is suctioned by the suction pads through the suction holes of the upper image mask to form two upper and lower image masks. This is a method for simultaneously transporting two upper and lower image masks, characterized in that they are transported simultaneously.

[Operation] According to the method for simultaneously conveying two upper and lower image masks configured as described above, the two image masks on both the upper and lower surfaces are conveyed through suction holes drilled in the upper image mask by the suction pads provided in the conveying means, so that the images on the lower side are conveyed. By suctioning two masks at the same time, they can be held in a suctioned state and transported from the outside to the exposure section or from the exposure section to the outside, improving productivity.

〔Example〕

An embodiment of the present invention will be described below based on the drawings. The material of the image mask is not particularly limited, but since film masks are commonly used, this embodiment will be explained using film masks. FIG. 1 is a plan view showing the top film mask for double-sided exposure section of the present invention, and FIG.
FIG. 3 is an explanatory diagram when simultaneously transporting two film masks to a double-sided exposure device. In FIG. 1, an upper film mask 1 is provided with positioning pin holes 2, 2 and a plurality of vacuum suction holes 3, 3, . Further, the lower film 4, which will be described later, is also provided with positioning pin holes 5, 5 at the same positions as the pin holes 2, 2 formed in the upper film mask 1 (see Fig. 2). As shown in FIG.
The two sheets are placed one on top of the other at the same time in alignment with the reference pins 7, 7 provided in the.

Next, the upper and lower film masks 1 and 4 positioned by the stage 6 are transported to the double-sided exposure apparatus 10 by a transport handler 8 serving as a transport means. A plurality of suction pads 9, 9, . 9... to the suction holes 3, 3 of the upper film mask 1
. . , the lower film mask 4 is also vacuum-adsorbed at the same time as shown by the two-dot chain line in FIG. 2. Then, the transport handler 8 transports the upper and lower film masks 1 and 4 to the exposure section of the double-sided exposure apparatus 10 as shown by the arrows in the figure, with the film masks 1 and 4 simultaneously attracted.

The double-sided exposure device 10 has upper and lower exposure sections 11A and 11.
The exposure parts 11A and 11B are light sources 12
A, 12B, curved reflecting mirrors 13A, 13B that reflect the light from the light sources 12A, 12B, and a member to be exposed, such as a printed wiring board, which is sandwiched from above and below and printed on, such as an acrylic plate or a glass plate. It is composed of transparent baking frames 14A and 14B. On the upper surface of the baking frame 14B located on the lower side, positioning reference pins 15, 15 whose spacing, dimensions and number match those of the reference pins 7, 7 provided on the stage 6 are erected. . In addition, suction grooves 16A, 16B, which serve as suction means for the upper and lower film masks 1, 4, are respectively carved on the opposing surfaces of the upper and lower printing frames 14A, 14B, and these grooves 16A, 16B are provided with vacuum holes (not shown). connected to the pump. In addition, the suction groove 1 of the baking frame 14A
Needless to say, the holes 6A are formed avoiding the suction holes 3, 3, formed in the upper film mask 1.

Therefore, the exposure section 11 is moved by the transport handler 8.
The upper and lower film masks 1 and 4 are simultaneously conveyed between A and 11B, and then, as shown in FIG. The printing frame 14 of the lower exposure section 11B
The two sheets are simultaneously placed on the baking frame 14B in alignment with the reference pins 15, 15 provided on the baking frame 14B.

Note that this positioning work necessarily involves aligning the reference pins 7, 7 of the stage 6 with the reference pins 15, 15 of the baking frame 14B, so that the pin holes 2, 15 of the film masks 1, 4 are aligned. 2, 5, 5 are aligned with the reference pins 15, 15 of the baking frame 14B, and the process is easily performed. Film masks 1 and 4 on baking frame 14B
After the handler 8 is released from the handler 8, that is, from the state shown in FIG.
When a vacuum pump (not shown) is operated while the two are brought close to each other, suction force is applied to the suction grooves 16A, 16B formed in the upper and lower baking frames 14A, 14B, and the film masks 1, 4 on the upper and lower surfaces are moved as shown in FIG. 3B. As shown, they are sucked and held by upper and lower baking frames 14A and 14B, respectively. Then, with the upper and lower film masks 1 and 4 held by suction, the exposed member 17 such as a printed wiring board is positioned between the upper and lower printing frames 14A and 14B, and the upper and lower printing frames 14A and 14B are moved together as shown in FIG. When brought close together as shown in C, the vacuum forming rubbers 18, 18 provided on the upper baking frame 14A come into contact with the lower baking frame 14B, and in this state, when the pressure is reduced by a vacuum pump (not shown), the upper and lower baking frames 14A, 14B As shown in the figure, the film mask 1 on the upper and lower surfaces is bent from the center.
4 comes into close contact with both sides of the exposed member 17, allowing accurate exposure and printing.

Further, in addition to the above method using reduced pressure, a moving exposure device may be used, and accurate exposure and printing can be performed by irradiating parallel light with this device.

In order to further improve the printing accuracy, positioning pin holes 19, 19 that match the reference pins 15, 15 of the printing frame 14B are bored in the exposed member 17 as shown in FIG. 3C. It is preferable to leave it there.

As described above, the two upper and lower film masks positioned externally are simultaneously transported to the exposure section by the transport handler, allowing accurate exposure and printing to be performed on both sides of the exposed member, and the printing is completed. Since the film masks can be replaced later or carried outside by suctioning two film masks at the same time, it can greatly contribute to improving work efficiency and saving labor.

It should be noted that the present invention is not limited to the above-mentioned embodiments, and it goes without saying that various embodiments can be made without departing from the spirit of the invention. For example, in this embodiment, vacuum suction using a suction pad provided on a transport handler is used to suction the film mask, but suction using a suction cup or electrostatic suction may also be used.

[Effects of the Invention] As is clear from the above explanation, according to the method for simultaneously conveying two upper and lower image masks of the present invention, the two upper and lower image masks are attracted by the conveying means and can be conveyed simultaneously. Therefore, compared to the conventional example, it is possible to omit the work of attaching and replacing the image mask, and work efficiency is greatly improved, so that productivity is increased and costs are reduced.

In addition, since the image masks on the upper and lower surfaces are superimposed externally before being transported, it is possible to easily position the image masks on the upper and lower surfaces, and automatic conversion (installation and ejection) of the image masks in the exposure section is possible. It becomes possible.

[Brief explanation of the drawing]

Fig. 1 is a plan view of the upper film mask, Fig. 2 is an explanatory diagram showing an automatic exposure device and the manner in which the upper and lower film masks are transported thereto by a transport means, and Figs. 3 A to C are the film masks in the exposure section. FIG. 3 is an explanatory diagram showing a method for adsorbing and adhering to a member to be exposed. 1... Top image mask, 2, 5... Pin hole, 3
... Suction hole, 4 ... Bottom image mask, 6 ... Stage, 7, 15 ... Reference pin, 8 ... Transport handler, 9 ... Suction pad, 10 ... Double-sided exposure device, 16A, 16B ... Suction groove.

Claims (1)

[Scope of Claims] 1. A method for simultaneously transporting upper and lower image masks for upper and lower double-sided exposure, comprising: drilling a plurality of suction holes in the upper image mask; and sucking holes corresponding to the suction hole positions. A pad is provided in the conveying means, the upper and lower image masks are superimposed, the lower image mask is sucked by the suction pad through the suction hole of the upper image mask, and the upper and lower image masks are simultaneously conveyed. Features a method for simultaneously transporting two upper and lower image masks.