JPS6362097B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a manipulator for operating a plane moving device that moves a moving table in any direction within a plane when processing a semiconductor device.

In general, tools such as semiconductor wire bonders
In an apparatus that performs processing while moving in the X and Y directions, a plane moving device is used in which a moving table supporting tools and the like is moved in the X and Y directions.

Conventionally, as a device in which the motor for moving the moving table of such a plane moving device in the X direction and the Y direction is remotely controlled by a manipulator,
For example, one disclosed in Japanese Patent Application Laid-Open No. 153581/1983 is known. However, in this method, if the amount of operation movement of the manipulator and the amount of movement of the moving table are made the same, it is necessary to increase the space for the manipulator. Furthermore, if the ratio between the amount of movement of the manipulator and the amount of movement of the movable table is increased, even a slight movement of the manipulator increases the amount of movement of the movable table, making it difficult to operate the manipulator.
In other words, making the manipulator compact and reducing the ratio of the amount of movement of the manipulator to the amount of movement of the moving table in order to make it easier to operate satisfies contradictory conditions.
Even if the operational movement amount of the manipulator reaches the limit, the moving table will not move to the limit.

Therefore, in order to satisfy these conflicting conditions, conventional methods have been used in conjunction with a switch that turns off the electric signal that transmits the amount of movement of the manipulator. However, in this method, if the manipulator reaches its limit but the moving table has not reached the desired position, use a switch to turn off the electrical signal that transmits the amount of manipulator movement, then return the manipulator, and then The switch must be turned on to restore the electrical signal that transmits the amount of movement of the manipulator, the manipulator must be moved again, and the above operation must be repeated until the moving platform reaches the target position. Therefore, it takes a lot of time to operate and is very troublesome.

The present invention was made in view of the above-mentioned drawbacks of the prior art, and an object of the present invention is to provide a manipulator for a plane moving device in a semiconductor device that is compact and easy to operate.

Hereinafter, the present invention will be explained with reference to illustrated embodiments.

The figures show an embodiment of a manipulator for a plane moving device in a semiconductor device according to the present invention, in which FIG. 1 is a perspective view showing a schematic configuration, FIG. 2 is a front view, and FIG.
The figure is a left side view partially shown in cross section, Figure 4 is a plan view,
FIG. 5 is a sectional view taken along the line A--A in FIG. 2. A spherical ball 1 is supported at three points by rollers 4 held by a holder 3 fixed to a bottom plate 2. A top plate 6 is fixed to the bottom plate 2 via a pole 5,
A portion of the ball 1 protrudes from a window 6a formed in the upper plate 6. The ball 1 is also supported at three points by a roller 8 held by a holder 7 fixed to the lower surface of the upper plate 6, and is supported by this roller 8 and the roller 4 so as to be rotatable. It is taking shape. Two cylindrical contacts 9 and 10 are in pressure contact with the rotatably supported ball 1, and these contacts 9 and 10 are positioned at a 90° angle from the center of the ball 1. It is located in The contacts 9 and 10 are converters 11 and 12 that are comprised of encoders or the like that convert the amount of rotation into electrical signals.
are fixed to rotating shafts 11a and 12a, respectively. The transducers 11 and 12 each have an arm 13
The arm 13 is rotatably attached to a support shaft 15 attached to an angle 14 fixed to the bottom plate 2. Also, contacts 9 and 10
A spring 16 is attached to the arm 13 and the angle 14 so as to press against the ball 1.

Next, the operation of the manipulator having such a configuration will be explained. Ball 1 protruding from the upper plate 6
When the operator rotates the part with his fingertips or the palm of his hand toward the contact 9 side shown by arrow B in FIG. 1, the ball 1
One of the contactors 9 that is in pressure contact with the contactor 9 rotates, and one of the converters 11 generates an electric signal corresponding to the amount of rotation of the contactor 9. However, since the other contactor 10 is arranged at an angle of 90 degrees with the contactor 9, the ball 1 does not rotate even if the ball 1 is rotated in the direction of arrow B, and the electric signal is not transmitted from the other converter 12. Does not occur. Further, when the ball 1 is rotated in the direction of the arrow C perpendicular to the arrow B, the contact 10 rotates in the opposite direction to that described above, and the converter 12 generates an electric signal corresponding to the amount of rotation of the contact 10. does not rotate and converter 1
No electrical signal is generated from 1. Also, when the ball 1 is rotated in any direction, each contactor 9,
10 contacts the ball 1 and rotates, and the respective converters 11 and 12 generate electric signals corresponding to the amount of rotation of the respective contacts 9 and 10. The electrical signals generated in this manner are input to an X-direction drive motor and a Y-direction drive motor that drive the movable base of a planar moving device (not shown), respectively, to drive the movable base in the
direction and any direction in the Y direction.

In this way, since the direction of rotation of the ball 1 corresponds to the movement of the moving table, the manipulator can be manufactured compactly, and the operation is simple and easy, since it is only necessary to rotate the ball 1. It is.

In addition, in the above embodiment, the contacts 9, 10
Although it is formed into a cylindrical shape, it may be formed into a spherical shape.

As is clear from the above description, according to the present invention, it is possible to obtain a manipulator for a planar moving device that is compact and easy to operate, which is the intended purpose.

[Brief explanation of drawings]

The figures show an embodiment of a manipulator for a plane moving device in a semiconductor device according to the present invention, in which FIG. 1 is a perspective view showing a schematic configuration, FIG. 2 is a plan view, and FIG.
The figure is a left side view partially shown in cross section, Figure 4 is a plan view,
FIG. 5 is a sectional view taken along the line A--A in FIG. 2. 1...ball, 9,10...contact, 11,1
2...Converter.

Claims (1)

[Claims] 1. Operating each of the drive motors of a plane moving device that uses an X-direction drive motor and a Y-direction drive motor to move a moving table in any direction within a plane defined by the X-axis and Y-axis. A ball held rotatably in the manipulator,
Two contacts are placed in contact with this ball and are arranged at an angle of 90 degrees with respect to the ball, and two converters are attached to each of these contacts and convert the amount of rotation of the contact into an electrical signal. A manipulator for a planar movement device in a semiconductor device comprising: