JPS6364073B2 - - Google Patents
Info
- Publication number
- JPS6364073B2 JPS6364073B2 JP10936484A JP10936484A JPS6364073B2 JP S6364073 B2 JPS6364073 B2 JP S6364073B2 JP 10936484 A JP10936484 A JP 10936484A JP 10936484 A JP10936484 A JP 10936484A JP S6364073 B2 JPS6364073 B2 JP S6364073B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- laser beam
- gas
- reflecting
- reflecting mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000010355 oscillation Effects 0.000 claims description 30
- 230000005284 excitation Effects 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims 2
- 229910002092 carbon dioxide Inorganic materials 0.000 claims 1
- 239000001569 carbon dioxide Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 27
- 230000003287 optical effect Effects 0.000 description 21
- 239000000758 substrate Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000013021 overheating Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 235000013372 meat Nutrition 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/0401—Arrangements for thermal management of optical elements being part of laser resonator, e.g. windows, mirrors, lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
- H01S3/0346—Protection of windows or mirrors against deleterious effects
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明はレーザー発振装置のレーザー光発振
手段、特にそのレーザー光反射手段の過熱防止に
関するものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to the prevention of overheating of a laser beam oscillation means of a laser oscillation device, particularly its laser beam reflection means.
第４図は従来のレーザー光反射手段の一部を示
す断面図であり、このレーザー光反射手段は、第
２図に斜視図で示す、レーザー発振装置のレーザ
ー光発振手段の右側を構成するものである。レー
ザー発振装置は、第２図に示すように、レーザー
光２を発振させるレーザー光発振手段４と、レー
ザーガス循環手段である送風機６と、レーザーガ
ス冷却手段である熱交換器８とを有し、レーザー
ガスはレーザー光発振手段４から熱交換器８に入
り、熱交換器からブロワ６を通つて矢印Ａの方向
に循環する。レーザー光発振手段４と送風機６と
熱交換器８は一点鎖線で示す筐体１０内に収容さ
れている。レーザーガス中にはCO2が含まれ、そ
の他にはCO、He、N2などが含まれている。
FIG. 4 is a sectional view showing a part of a conventional laser beam reflecting means, which constitutes the right side of the laser beam oscillation means of the laser oscillation device shown in a perspective view in FIG. 2. It is. As shown in FIG. 2, the laser oscillation device includes a laser beam oscillation means 4 for oscillating a laser beam 2, a blower 6 as a laser gas circulation means, and a heat exchanger 8 as a laser gas cooling means. , the laser gas enters the heat exchanger 8 from the laser beam oscillation means 4 and circulates from the heat exchanger through the blower 6 in the direction of arrow A. The laser beam oscillation means 4, the blower 6, and the heat exchanger 8 are housed in a casing 10 indicated by a dashed line. Laser gas contains CO 2 and other gases such as CO, He, and N 2 .
レーザー光発振手段４は、第３図の概略説明図
に示すように、レーザーガス励起手段である放
電々極１２と、レーザー光反射手段１４，１６と
からなり、レーザー光反射手段１４，１６は放
電々極１２の左右両端に配置され、放電々極１２
間には放電によつてレーザーガスを励起させる励
起領域１８が形成されている。レーザー光反射手
段１４，１６は、励起領域１８内で、Ｚ字を描く
３本の光軸２０，２２，２４を通つてレーザー光
２を反覆反射させるための、反射鏡２６，２８，
３０，３２を左右に２枚づつ有している。レーザ
ー光発振側（第３図の右側）のレーザー光反射手
段１６は、第２と第４の反射鏡２８，３２を有し
ており第４図に断面図で示すように構成されてい
る。すなわち、レーザー光２の３本の光軸２０，
２２，２４のうちで、第１の光軸２０と第２の光
軸２２の交叉する位置には、第２の反射鏡２８が
配置され、第３の光軸２４上には、第４の反射鏡
３２が配置されている。他方（第３図の左側）の
レーザー光反射手段１４は第１と第３の反射鏡２
６，３０を有しており、第１の反射鏡２６は、第
１の光軸２０上に、第２の反射鏡２８と対向して
配置され、第３の反射鏡３０は、第２の光軸２２
と第３の光軸２４の交叉する位置に、第４の反射
鏡３２と対向して配置されている。第１の反射鏡
２６は第３の反射鏡３０よりも放電々極１２から
離れて配置され、第４の反射鏡３２は第２の反射
鏡２８よりも放電々極１２から離れて配置されて
いる。 As shown in the schematic diagram of FIG. 3, the laser beam oscillation means 4 consists of a discharge electrode 12, which is a laser gas excitation means, and laser beam reflection means 14, 16. The discharge electrodes 12 are arranged at both left and right ends of the discharge electrodes 12.
An excitation region 18 for exciting the laser gas by discharge is formed between them. The laser beam reflecting means 14 and 16 include reflecting mirrors 26, 28, and 28 for repeatedly reflecting the laser beam 2 through three optical axes 20, 22, 24 forming a Z-shape within the excitation region 18.
30 and 32, two on each side. The laser beam reflecting means 16 on the laser beam oscillation side (right side in FIG. 3) has second and fourth reflecting mirrors 28 and 32, and is constructed as shown in a cross-sectional view in FIG. 4. That is, the three optical axes 20 of the laser beam 2,
22 and 24, a second reflecting mirror 28 is arranged at a position where the first optical axis 20 and the second optical axis 22 intersect, and a fourth reflecting mirror 28 is arranged on the third optical axis 24. A reflecting mirror 32 is arranged. The other (left side in FIG. 3) laser beam reflecting means 14 includes the first and third reflecting mirrors 2.
6, 30, the first reflecting mirror 26 is arranged on the first optical axis 20 and facing the second reflecting mirror 28, and the third reflecting mirror 30 is arranged on the second optical axis 20. Optical axis 22
It is disposed at a position where the and third optical axes 24 intersect, facing the fourth reflecting mirror 32 . The first reflecting mirror 26 is arranged further away from the discharge pole 12 than the third reflecting mirror 30 is, and the fourth reflecting mirror 32 is arranged further away from the discharge pole 12 than the second reflecting mirror 28 is. There is.
第２の反射鏡２８は第２のミラーホルダー３４
を介して第２の基板３６の内側に取付けられ、第
４の反射鏡３２は透過性ミラーからなり、第４の
ミラーホルダー３８を介して第２の基板３６の外
側に調節ねじ４０で第３の光軸２４上を移動でき
るように取付けられ、第２の基板３６が第３の光
軸２４と交叉する位置にはレーザー光２を通すた
めの穴４２が設けられている。基板３６は装置本
体の筐体１０に複数の支持棒４４を介して間隔調
節可能に取付けられている。第１の反射鏡２６と
第３の反射鏡３０も、上記同様に、第１の基板
（図示せず）に取付けられ、第１の基板も上記同
様に筐体１０に取付けられている。 The second reflecting mirror 28 is attached to the second mirror holder 34
The fourth reflecting mirror 32 is made of a transparent mirror, and the fourth reflecting mirror 32 is attached to the outside of the second substrate 36 via a fourth mirror holder 38 with an adjusting screw 40. A hole 42 for passing the laser beam 2 is provided at a position where the second substrate 36 intersects the third optical axis 24 . The substrate 36 is attached to the casing 10 of the apparatus main body via a plurality of support rods 44 so that the intervals can be adjusted. The first reflecting mirror 26 and the third reflecting mirror 30 are also attached to a first substrate (not shown) in the same manner as described above, and the first substrate is also attached to the casing 10 in the same manner as described above.
筐体１０がレーザー光２と交叉する位置には開
口部が設けられており、この開口部にはレーザー
光２を囲むダクト４６がダクト取付台４８を介し
て取付けられており、ダクト４６の先端部４６ａ
は第２の反射鏡２８の近傍に及んでいる。ダクト
取付台４８にはレーザーガスを矢印ａの方向に通
すための開口部５０が形成されており、開口部５
０にはレーザーガス中の塵を除去するためのフイ
ルタ５２が取付けられている。基板３６と筐体１
０はダクト４６を囲むベローズ５４によつて連結
され、ダクト４６とベローズ５４との間にはレー
ザーガスを矢印ａの方向に通すためのガス通路が
形成されている。第２のミラーホルダー３４には
レーザー光２の外周縁を遮つてレーザー光２のモ
ードを調節するアパーチヤ５６が取付けられてい
る。 An opening is provided at the position where the housing 10 intersects the laser beam 2, and a duct 46 surrounding the laser beam 2 is attached to this opening via a duct mount 48. Part 46a
extends to the vicinity of the second reflecting mirror 28. The duct mounting base 48 is formed with an opening 50 for passing the laser gas in the direction of arrow a.
0 is attached with a filter 52 for removing dust from the laser gas. Board 36 and housing 1
0 is connected by a bellows 54 surrounding the duct 46, and a gas passage is formed between the duct 46 and the bellows 54 for passing laser gas in the direction of arrow a. An aperture 56 is attached to the second mirror holder 34 for blocking the outer periphery of the laser beam 2 and adjusting the mode of the laser beam 2.
従来のレーザ発振装置は上記のように構成さ
れ、第１の反射鏡２６で反射されたレーザー光２
は第１の光軸２０を通つて第２の反射鏡２８に到
達する。第２の反射鏡２８はわずかに下向きに傾
いているので、レーザー光２は第１の光軸２０よ
りわずかに下向きに傾いた第２の光軸２２を通つ
て第３の反射鏡３０に到達する。第３の反射鏡３
０はわずかに上向きに傾いているので、レーザー
光２は第１の光軸２０と平行な第３の光軸２４を
通つて第４の反射鏡３２に到達する。第４の反射
鏡３２は透過性ミラーとなつているので、レーザ
ー光２の一部はそのまま外部に出力され、残りは
上記と逆のルートを通つて第１の反射鏡２６まで
戻り、上記のプロセスが繰り返され、レーザー光
２は励起領域１８内を反覆通過する間に、CO2ガ
スによつて増幅されて第４の反射鏡３２から外部
に出力されることになる。 The conventional laser oscillation device is configured as described above, and the laser beam 2 reflected by the first reflecting mirror 26 is
reaches the second reflecting mirror 28 through the first optical axis 20. Since the second reflecting mirror 28 is tilted slightly downward, the laser beam 2 reaches the third reflecting mirror 30 through the second optical axis 22 which is tilted slightly downward from the first optical axis 20. do. Third reflector 3
0 is tilted slightly upward, so that the laser light 2 reaches the fourth reflecting mirror 32 through the third optical axis 24 parallel to the first optical axis 20. Since the fourth reflecting mirror 32 is a transmissive mirror, a part of the laser beam 2 is directly output to the outside, and the rest returns to the first reflecting mirror 26 through the reverse route to the above. The process is repeated, and while the laser beam 2 repeatedly passes through the excitation region 18, it is amplified by the CO 2 gas and output from the fourth reflecting mirror 32 to the outside.
CO2は温度が上昇すると解離して、濃度が低下
する。レーザーガス中のCO2濃度が低下すると、
レーザー光発振手段４の効率が低下するので、レ
ーザーガスはブロワ６によつて循環させながら熱
交換器８によつてたえず冷却されている。また、
反射鏡が傾くと光軸がずれ、レーザー光２のモー
ドが変化し、レーザー光発振手段４の効率が低下
するので、第４図に示すように、ブロワ６によつ
て発生するレーザーガスの差圧によつて、レーザ
ーガスは矢印ａから矢印ｂの方向に循環し、第２
の反射鏡２８が冷却されている。第３の反射鏡３
０も同様に冷却されている。 CO 2 dissociates and its concentration decreases as the temperature increases. When the CO 2 concentration in the laser gas decreases,
Since the efficiency of the laser beam oscillation means 4 decreases, the laser gas is constantly cooled by the heat exchanger 8 while being circulated by the blower 6. Also,
When the reflecting mirror is tilted, the optical axis shifts, the mode of the laser beam 2 changes, and the efficiency of the laser beam oscillation means 4 decreases.As shown in FIG. Due to the pressure, the laser gas circulates in the direction of arrow a to arrow b, and the second
The reflecting mirror 28 is cooled. Third reflector 3
0 is similarly cooled.
しかるに、上記のように、第１の反射鏡２６は
第３の反射鏡３０よりも、第４の反射鏡３２は第
２の反射鏡２８よりも放電々極１２から、すなわ
ちダクト４６から離れて配置されているので、レ
ーザーガスは第１と第４の反射鏡２６，３２まで
循環せず、レーザー光２の吸収によつて発生した
熱がこもり、これによつて第１と第４の反射鏡２
６，３２のミラーホルダー３８が変形し、第１と
第４の反射鏡２６，３２の傾きがずれ、光軸がず
れ、また反射鏡のアライメントがくずれ、レーザ
ー光２のモードが変化し、レーザー光発振手段４
の出力が低下するという欠点があつた。 However, as described above, the first reflector 26 is further away from the discharge pole 12, that is, from the duct 46, than the third reflector 30, and the fourth reflector 32 is further away from the discharge pole 12 than the second reflector 28. Because of the arrangement, the laser gas does not circulate to the first and fourth reflecting mirrors 26 and 32, and the heat generated by absorption of the laser beam 2 is trapped, thereby causing the first and fourth reflecting mirrors 26, 32 to mirror 2
The mirror holders 38 of 6 and 32 are deformed, the inclinations of the first and fourth reflecting mirrors 26 and 32 are shifted, the optical axis is shifted, the alignment of the reflecting mirrors is broken, the mode of the laser beam 2 is changed, and the laser beam 2 is distorted. Optical oscillation means 4
The disadvantage was that the output was reduced.
この発明は、かかる欠点を改善する目的でなさ
れたもので、レーザー光反射手段に、レーザーガ
スの一部を外側の反射鏡から肉側の反射鏡を通つ
て循環させる、ガス通路を設けることにより、外
側の反射鏡をも冷却し、レーザー光の吸収による
外側の反射鏡の過熱を押え、外側の反射鏡の光軸
が傾いたり、アライメントがくずれたりするのを
防止するようにしたレーザ発振装置を提案するも
のである。
This invention was made with the aim of improving such drawbacks, by providing a gas passage in the laser light reflecting means to circulate a part of the laser gas from the outer reflecting mirror through the meat side reflecting mirror. , a laser oscillation device that also cools the outer reflector to prevent it from overheating due to absorption of laser light, and prevents the optical axis of the outer reflector from tilting or becoming out of alignment. This is what we propose.
第１図はこの発明の一実施例であるレーザー光
反射手段のレーザー光発振側を示す断面図であ
り、このレーザー光反射手段は第２図に斜視図で
示すレーザー発振装置の一部を構成するものであ
る。２〜５６は上記従来装置と全く同一のもので
ある。５８はレーザーガスをフイルタ５２を介し
て第４の反射鏡３２に導くガス通路であり、レー
ザー光２のモードを調節するためのアパーチヤ５
６はダクト４６の端部に取付けられている。他方
のレーザー光反射手段１４も上記と同様に構成さ
れている。
FIG. 1 is a sectional view showing the laser beam oscillation side of a laser beam reflecting means according to an embodiment of the present invention, and this laser beam reflecting means constitutes a part of the laser oscillation device shown in a perspective view in FIG. It is something to do. 2 to 56 are exactly the same as the conventional device described above. 58 is a gas passage that guides the laser gas to the fourth reflecting mirror 32 via the filter 52, and an aperture 5 for adjusting the mode of the laser beam 2.
6 is attached to the end of the duct 46. The other laser light reflecting means 14 is also constructed in the same manner as described above.
上記のように構成されたレーザー発振装置にお
いては、反射鏡を冷却するレーザーガスがガス通
路５８を通つて第１の反射鏡２６から第３の反射
鏡３０の近傍を流れ、またガス通路５８を通つて
第４の反射鏡３２から第２の反射鏡２８の近傍を
流れ、アパーチヤ５６の開口部からダクト４６内
に入ることにある。したがつて、レーザー光の吸
収によつて外側の反射鏡であると第１と第４の反
射鏡２６，３２が発熱しても、この第１と第４の
反射鏡２６，３２はミラーホルダー３８とともに
レーザーガスの流れによつてたえず冷却されてい
るから、その傾きがずれてレーザー光の光軸がず
れたりすることがないことになる。 In the laser oscillation device configured as described above, the laser gas for cooling the reflecting mirror flows from the first reflecting mirror 26 to the vicinity of the third reflecting mirror 30 through the gas passage 58, and also flows through the gas passage 58. The liquid flows from the fourth reflecting mirror 32 to the vicinity of the second reflecting mirror 28 and enters the duct 46 through the opening of the aperture 56 . Therefore, even if the first and fourth reflecting mirrors 26, 32, which are the outer reflecting mirrors, generate heat due to absorption of laser light, the first and fourth reflecting mirrors 26, 32 are not connected to the mirror holder. Since the laser beam 38 and the laser beam are constantly cooled by the flow of laser gas, the optical axis of the laser beam will not be shifted due to the inclination of the laser beam.
この発明は以上説明したとおり、レーザーガス
の一部を外側の反射鏡から内側の反射鏡を通つて
循環させるガス通路をレーザー光反射手段に設け
るという簡単な構造により、レーザー光の吸収に
よる反射鏡の過熱、ミラーホルダーの変形、ひい
ては反射鏡の光軸の傾きのずれを防止し、レーザ
ー発振器の出力を安定化させるという効果があ
る。
As explained above, this invention has a simple structure in which the laser light reflecting means is provided with a gas passage that circulates a part of the laser gas from the outer reflecting mirror to the inner reflecting mirror. This has the effect of preventing overheating of the mirror holder, deformation of the mirror holder, and deviation of the optical axis of the reflecting mirror, thereby stabilizing the output of the laser oscillator.
第１図はこの発明の一実施例を示す要部断面
図、第２図はレーザー発振装置の斜視図、第３図
はレーザー光発振手段の概略説明図、第４図は従
来のレーザー光発振手段の片側を示す断面図であ
る。
図において、４はレーザー光発振手段、６は送
風機、８は熱交換器、１２は放電々極、１４，１
６はレーザー光反射手段、１８は励起領域、２
６，２８，３０，３２は反射鏡、５８はガス通路
である。なお、各図中同一符号は同一または相当
部分を示すものとする。
Fig. 1 is a sectional view of a main part showing an embodiment of the present invention, Fig. 2 is a perspective view of a laser oscillation device, Fig. 3 is a schematic explanatory diagram of a laser beam oscillation means, and Fig. 4 is a conventional laser beam oscillation device. FIG. 3 is a cross-sectional view of one side of the means; In the figure, 4 is a laser beam oscillation means, 6 is a blower, 8 is a heat exchanger, 12 is a discharge electrode, 14, 1
6 is a laser beam reflecting means, 18 is an excitation region, 2
6, 28, 30, and 32 are reflecting mirrors, and 58 is a gas passage. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
るレーザー発振装置であり、該装置はレーザー光
を発振させるレーザー光発振手段と、該発振手段
を介してレーザーガスを循環させるレーザーガス
循環手段と、該レーザーガスを冷却するレーザー
ガス冷却手段とを有し、該発振手段はレーザーガ
ス励起手段と一対のレーザー光反射手段とからな
り、該励起手段は放電によつてレーザーガスを励
起させる励起領域を有し、該一対の反射手段は該
励起領域を挾んでレーザー光を互いに反覆反射さ
せる複数の反射鏡を各々有し、更に該一対の反射
手段には上記レーザーガスの一部を外側の反射鏡
から内側の反射鏡を通つて循環させるガス通路が
各々設けられていることを特徴とするレーザー発
振装置。 ２ レーザーガスが炭酸ガスを含むレーザーガス
であることを特徴とする特許請求の範囲第１項記
載のレーザー発振装置。 ３ レーザー光反射手段が反射鏡と励起領域との
間にアパーチヤを有するレーザー光反射手段であ
ることを特徴とする特許請求の範囲第１項又は第
２項記載のレーザー発振装置。[Claims] 1. A laser oscillation device that oscillates a laser beam using a laser gas, and the device includes a laser beam oscillation means that oscillates the laser beam, and a laser gas that circulates the laser gas through the oscillation means. The oscillation means includes a circulation means and a laser gas cooling means for cooling the laser gas, the oscillation means includes a laser gas excitation means and a pair of laser beam reflection means, and the excitation means excites the laser gas by electric discharge. The pair of reflecting means each have a plurality of reflecting mirrors that sandwich the excitation area and repeatedly reflect the laser beams from each other, and the pair of reflecting means includes a part of the laser gas. A laser oscillation device characterized in that each gas passage is provided for circulating gas from an outer reflecting mirror through an inner reflecting mirror. 2. The laser oscillation device according to claim 1, wherein the laser gas is a laser gas containing carbon dioxide gas. 3. The laser oscillation device according to claim 1 or 2, wherein the laser beam reflecting means is a laser beam reflecting means having an aperture between the reflecting mirror and the excitation region.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10936484A JPS60254683A (en) | 1984-05-31 | 1984-05-31 | Laser oscillation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10936484A JPS60254683A (en) | 1984-05-31 | 1984-05-31 | Laser oscillation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60254683A JPS60254683A (en) | 1985-12-16 |
| JPS6364073B2 true JPS6364073B2 (en) | 1988-12-09 |
Family
ID=14508355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10936484A Granted JPS60254683A (en) | 1984-05-31 | 1984-05-31 | Laser oscillation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60254683A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19549708B4 (en) * | 1994-05-16 | 2007-05-03 | Mitsubishi Denki K.K. | Laser oscillator with stabilised beam direction - has heat exchanger within laser housing for removing heat from laser medium resulting from discharge between opposing discharge electrodes |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2800593B2 (en) * | 1992-10-28 | 1998-09-21 | 三菱電機株式会社 | Laser oscillator |
| WO2016181511A1 (en) * | 2015-05-12 | 2016-11-17 | 三菱電機株式会社 | Gas laser oscillator |
-
1984
- 1984-05-31 JP JP10936484A patent/JPS60254683A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19549708B4 (en) * | 1994-05-16 | 2007-05-03 | Mitsubishi Denki K.K. | Laser oscillator with stabilised beam direction - has heat exchanger within laser housing for removing heat from laser medium resulting from discharge between opposing discharge electrodes |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60254683A (en) | 1985-12-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |