JPS6365901B2 - - Google Patents
Info
- Publication number
- JPS6365901B2 JPS6365901B2 JP15144182A JP15144182A JPS6365901B2 JP S6365901 B2 JPS6365901 B2 JP S6365901B2 JP 15144182 A JP15144182 A JP 15144182A JP 15144182 A JP15144182 A JP 15144182A JP S6365901 B2 JPS6365901 B2 JP S6365901B2
- Authority
- JP
- Japan
- Prior art keywords
- leak
- amount
- sniffer
- test
- measure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 27
- 239000007789 gas Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 12
- 239000001307 helium Substances 0.000 claims description 10
- 229910052734 helium Inorganic materials 0.000 claims description 10
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 10
- 238000010998 test method Methods 0.000 claims description 8
- 230000035945 sensitivity Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Description
【発明の詳細な説明】
この発明はスニフア法によるリークテスト方法
に関し、詳しくは被試験物のリーク個所のリーク
量をリアルタイムで測定可能とするスニフア法に
よるリークテスト方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a leak test method using a sniffer method, and more particularly to a leak test method using a sniffer method that allows measuring the amount of leak at a leak point of a test object in real time.
従来のスニフア法によるリークテスト方法で
は、ヘリウム等の試験ガスを封入した被試験物に
一定容量のフードを施し、このフード内の試験ガ
ス濃度の上昇を測定してリーク量を測定してい
た。この方法ではフード内への試験ガスのため込
みのために時間を要しリアルタイムでのリーク量
の測定ができなかつた。 In a conventional leak test method using a sniffer method, a hood of a certain volume is applied to a test object filled with a test gas such as helium, and the amount of leakage is measured by measuring the increase in the concentration of the test gas inside the hood. This method required time to store the test gas in the hood, making it impossible to measure the amount of leakage in real time.
この発明は上記従来法の欠点を解消するために
なされたものであり、スニフア法によるリークテ
スト方法においてリーク量のリアルタイムでの測
定を可能とすることを目的とする。すなわちスニ
フア法プローブの吸込量とスニフアプローブより
吸込んだ試験ガスをリークデテクタにより測定し
たリーク量とが１対１で対応できないので、スニ
フアプローブの吸込量を測定算出するとともに、
濃度のわかつた試験ガスと試験ガスを含まないガ
スをそれぞれスニフアプローブより吸込ませ、こ
のときの各リークインジケータの振れ量を測定し
最小可検リーク量を算出してリークデテクタの感
度校正を行ない、その上で被試験物のリーク個所
にスニフアプローブを近づけたときのリークイン
ジケータの振れの増加量を測定することによつて
リーク量を求めるようにしたリークテスト方法に
関するものである。 This invention was made to eliminate the drawbacks of the above-mentioned conventional methods, and an object thereof is to enable real-time measurement of leakage amount in a leak test method using a sniffer method. In other words, since there is no one-to-one correspondence between the suction amount of the sniffer method probe and the leak amount measured by the leak detector on the test gas sucked in by the sniffer probe, the suction amount of the sniffer probe is measured and calculated.
Inhale test gas with known concentration and gas without test gas through the sniffer probe, measure the amount of deflection of each leak indicator at this time, calculate the minimum detectable leak amount, and calibrate the sensitivity of the leak detector. The present invention relates to a leak test method in which the amount of leakage is determined by measuring the amount of increase in deflection of a leakage indicator when a sniffer probe is brought close to a leakage point of a test object.
以下図面に基づいてこの発明の実施例について
説明する。 Embodiments of the present invention will be described below based on the drawings.
第１図はこの発明を実施する従来装置の構成を
示す説明図である。実施例では試験ガスをヘリウ
ムとした。被試験物１内に封入されリーク個所か
ら漏れてくるヘリウムを検出するにあたつては、
まず試料導入バルブ４を閉じ、油回転真空ポンプ
６でスニフアプローブ２とサンプルガスキヤリア
チユーブ３内を真空排気する。そして図示しない
試料導入バルブ４に設けた絞りとリークデテクタ
５内の検出部間をリークデテクタ５内蔵の真空ポ
ンプで真空排気する。ついで試料導入バルブ４を
開くとヘリウムは試料導入バルブ４を経てリーク
デテクタ５の検出部に導入され検出される。 FIG. 1 is an explanatory diagram showing the configuration of a conventional device implementing the present invention. In the examples, helium was used as the test gas. In detecting helium sealed in the test object 1 and leaking from the leakage point,
First, the sample introduction valve 4 is closed, and the inside of the sniffer probe 2 and the sample gas carrier tube 3 are evacuated using the oil rotary vacuum pump 6. Then, a vacuum pump built into the leak detector 5 evacuates the space between the aperture provided in the sample introduction valve 4 (not shown) and the detection section in the leak detector 5. Then, when the sample introduction valve 4 is opened, helium is introduced into the detection section of the leak detector 5 through the sample introduction valve 4 and detected.
上記構成の装置において、まずスニフアプロー
ブ２の吸込量を測定算出する。第２図に示すよう
に注射器７を用意し、このスピンドルが軽く動く
ことを確認してスニフアプローブ２の吸込口と接
続し吸込量を測定する。例えば300c.c.吸込むため
に10秒かかれば、吸込量VsはVs＝30／10＝３
（atm c.c./sec）となる。つぎにヘリウムの含ま
れていない真空をスニフア法プローブ２より吸込
ませる。このときのリークデータ５のインジケー
タの振れ量Do（div）を測定する。そして同様に
別個に設けた標準ヘリウムを供給する装置より濃
度Ｃ（ppm）のわかつたヘリウムをスニフアプロ
ーブ２より吸込ませて、このときのリークインジ
ケータの振れ量Ds（div）を測定する。この濃度
Ｃ（ppm）と各振れ量Do、Dsより最小検出濃度
Qsminが、Qsmin＝Ｃ／Ds−Do（ppm／div）で
求まる。スニフアプローブ２の吸込量Vsがわか
つているので、最小可検リーク量Qminは、
Qmin＝Qsmin×Vs×10-6（atm c.c./sec／div）
として算出される。この最小可検リーク量Qmin
を求めることにより、リークデテクタ５の感度校
正が終了する。 In the apparatus configured as described above, first, the suction amount of the sniffer probe 2 is measured and calculated. As shown in FIG. 2, a syringe 7 is prepared, and after confirming that the spindle moves lightly, it is connected to the suction port of the sniffer probe 2 and the amount of suction is measured. For example, if it takes 10 seconds to inhale 300 c.c., the suction amount Vs is Vs = 30/10 = 3
(atm cc/sec). Next, a vacuum containing no helium is sucked in through the sniffer probe 2. At this time, the amount of deflection Do (div) of the indicator of leak data 5 is measured. Similarly, helium whose concentration C (ppm) is determined from a separately provided standard helium supply device is sucked into the sniffer probe 2, and the deflection amount Ds (div) of the leak indicator at this time is measured. From this concentration C (ppm) and each shake amount Do, Ds, the minimum detection concentration
Qsmin is determined by Qsmin=C/Ds-Do (ppm/div). Since the suction volume Vs of sniffer probe 2 is known, the minimum detectable leak volume Qmin is:
Qmin＝Qsmin×Vs× 10-6 (atm cc/sec/div)
It is calculated as This minimum detectable leakage amount Qmin
By determining , the sensitivity calibration of the leak detector 5 is completed.
リークテストを行なうときは、第３図に示すよ
うにスニフアプローブ２より被試験物１の検査面
近傍の大気を吸引させながら検査面をその近傍の
空間に沿つて移動していく。リーク個所にスニフ
アプローブ２を近づけたときのリークインジケー
タの振れの増加量がDx（div）とすると、このと
きのリーク量ＱはＱ＝Qmin×Dx（atm c.c./sec）
として求めることができる。この振れの増加量と
は大気中に含まれる約5ppmのヘリウムを考慮し
て求められるものである。 When performing a leak test, as shown in FIG. 3, the sniffer probe 2 sucks the atmosphere near the inspection surface of the test object 1 while moving the inspection surface along the space in the vicinity. If the amount of increase in deflection of the leak indicator when the sniffer probe 2 is brought close to the leak point is Dx (div), then the leak amount Q at this time is Q = Qmin × Dx (atm cc/sec)
It can be found as This amount of increase in deflection is determined by taking into account approximately 5 ppm of helium contained in the atmosphere.
この発明においては被試験物のリーク個所にお
いて、スニフアプローブより周囲の空気とともに
リーク個所からのヘリウムを100％吸込ませるこ
とが必要なので、吸込量は充分に余裕のもてるよ
うにスニフアプローブのキヤピラリの外径、油回
転真空ポンプの排気力を設定する。ただしあまり
吸込量を大きくすると、最小可検リーク量が大き
くなつて小さな漏れが検出できなくなるので注意
を要する。 In this invention, it is necessary for the sniffer probe to suck in 100% of the helium from the leak point along with the surrounding air at the leak point of the test object. Set the outer diameter of the capillary and the exhaust force of the oil rotary vacuum pump. However, care must be taken because if the suction amount is increased too much, the minimum detectable leak amount will become large and small leaks will not be detected.
この発明にかかるスニフア法によるリークテス
ト方法によれば、上記したようにスニフアプロー
ブを被試験物の検査面近傍の空間に沿つて移動す
ることにより、リークインジケータの振れの増加
量を測定することによつてリーク個所のリーク量
の定量測定をリアルタイムで可能とすることがで
きるものである。 According to the leak test method using the sniffer method according to the present invention, as described above, by moving the sniffer probe along the space near the inspection surface of the test object, the amount of increase in deflection of the leak indicator can be measured. This makes it possible to quantitatively measure the amount of leak at a leak location in real time.
第１図はこの発明にかかるスニフア法によるリ
ークテスト方法を実施する従来装置の構成を示す
説明図である。第２図はスニフアプローブの吸込
量を測定算出する方法を示す説明図である。第３
図は実施例におけるリークテスト状態を示す説明
図である。
１…被試験物、２…スニフアプローブ、３…サ
ンプルガスキヤリアチユーブ、４…試料導入バル
ブ、５…リークデテクタ、６…油回転真空ポン
プ。
FIG. 1 is an explanatory diagram showing the configuration of a conventional apparatus for carrying out a leak test method using a sniffer method according to the present invention. FIG. 2 is an explanatory diagram showing a method of measuring and calculating the suction amount of the sniffer probe. Third
The figure is an explanatory diagram showing a leak test state in the embodiment. 1... Test object, 2... Sniffer probe, 3... Sample gas carrier tube, 4... Sample introduction valve, 5... Leak detector, 6... Oil rotary vacuum pump.
Claims (1)
封入した被試験物のリーク個所のリーク量の測定
をリークデテクタを用いスニフア法によりリーク
テストを行なう方法において、スニフアプローブ
の吸込量Vs（atm c.c./sec）をあらかじめ測定算
出しておき、試験ガスの含まれていないガスをス
ニフアプローブより吸込ませ、このときのリーク
インジケータの振れ量Do（div）と、濃度のわか
つた試験ガスＣ（ppm）をスニフアプローブより
吸込ませ、このときのリークインジケータの振れ
量Ds（div）とを測定し、最小可検リーク量Qmin
を式Qmin＝Ｃ×Vs×10-6／Ds−Do（atm c.c./se
ｃ／div）で求めてリークデテクタの感度校正をす
るとともに、リーク個所にスニフアプローブを近
づけたときのリークインジケータの振れの増加量
Dx（div）を測定し、リーク量Ｑを式Ｑ＝Qmin×
Dx（atm c.c./sec）で求めるようにしたことを特
徴とするスニフア法によるリークテスト方法。1 In the method of performing a leak test by the sniffer method using a leak detector to measure the leakage amount at the leak point of a test object whose interior is evacuated and filled with a test gas such as helium, the suction amount Vs (atm cc/sec) in advance, inhale the gas that does not contain the test gas through the sniffer probe, and measure the amount of deflection Do (div) of the leak indicator at this time and the test gas C (of which the concentration is known). ppm) through the sniffer probe, measure the deflection amount Ds (div) of the leak indicator at this time, and measure the minimum detectable leakage amount Qmin.
The formula Qmin=C×Vs×10 -6 /Ds−Do(atm cc/se
c/div) to calibrate the sensitivity of the leak detector, and also calculate the increase in deflection of the leak indicator when the sniffer probe is brought close to the leak location.
Measure Dx (div) and calculate the leakage amount Q using the formula Q=Qmin×
A leak test method using a sniffer method characterized by determining Dx (atm cc/sec).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15144182A JPS5940136A (en) | 1982-08-30 | 1982-08-30 | Leak test method using sniffer method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15144182A JPS5940136A (en) | 1982-08-30 | 1982-08-30 | Leak test method using sniffer method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5940136A JPS5940136A (en) | 1984-03-05 |
| JPS6365901B2 true JPS6365901B2 (en) | 1988-12-19 |
Family
ID=15518669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15144182A Granted JPS5940136A (en) | 1982-08-30 | 1982-08-30 | Leak test method using sniffer method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5940136A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009236747A (en) * | 2008-03-27 | 2009-10-15 | Sumitomo Heavy Ind Ltd | Leak test method and leak test device |
-
1982
- 1982-08-30 JP JP15144182A patent/JPS5940136A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5940136A (en) | 1984-03-05 |
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