JPS6366445B2 - - Google Patents
Info
- Publication number
- JPS6366445B2 JPS6366445B2 JP56162488A JP16248881A JPS6366445B2 JP S6366445 B2 JPS6366445 B2 JP S6366445B2 JP 56162488 A JP56162488 A JP 56162488A JP 16248881 A JP16248881 A JP 16248881A JP S6366445 B2 JPS6366445 B2 JP S6366445B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- circumferential frame
- sealing
- oscillator
- piezoelectric oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】 本発明は圧電振動子に関する。[Detailed description of the invention] The present invention relates to a piezoelectric vibrator.
本発明は封止ケースの両端に封止体を有し、導
通と気密封止が成される構造の圧電振動子に関す
る。 The present invention relates to a piezoelectric vibrator having a structure in which a sealing case has a sealing body at both ends to achieve conduction and airtight sealing.
本発明の目的は品質の良い圧電振動子を提供す
ることである。 An object of the present invention is to provide a piezoelectric vibrator with good quality.
本発明の他の目的は低コストの圧電振動子を提
供することである。 Another object of the invention is to provide a low cost piezoelectric vibrator.
第１図に本発明の一実施例として、ガラス封止
音叉型圧電振動子を断面図で示す。１は圧電発振
体であり、音叉型圧電発振片２（以下発振片２）
と該発振片２を取囲む周状枠３を有し、該周状枠
３と前記発振片２とは発振片２の基部４で接続
し、フオトリソグラフイツク技術もしくは機械加
工等により作り出されたものである。発振片２の
表面には励振電極５，６が設けられ、それぞれ周
状枠３の端面まで伸長し、接続用電極としての両
端電極７，８に接続されている。９はガラスによ
り構成された両端に開口部を有する封止ケースで
あり、該封止ケース９の内面に圧電発振体１を周
状枠３が内接もしくは間隙をもつた近接した状態
で挿入され、導電性の封止体１０，１１により圧
電発振体１を両端からはさみ込み、封止体１０，
１１の周囲の封止ケース９のガラスを加熱溶融し
て圧電発振体１が気密封止されている。 FIG. 1 shows a cross-sectional view of a glass-sealed tuning fork type piezoelectric vibrator as an embodiment of the present invention. 1 is a piezoelectric oscillator, and a tuning fork type piezoelectric oscillating piece 2 (hereinafter referred to as oscillating piece 2)
and a circumferential frame 3 surrounding the oscillating piece 2, the circumferential frame 3 and the oscillating piece 2 are connected at the base 4 of the oscillating piece 2, and the oscillating piece 2 is made by photolithographic technology or machining. It is something. Excitation electrodes 5 and 6 are provided on the surface of the oscillation piece 2, each extending to the end face of the circumferential frame 3, and connected to both end electrodes 7 and 8 as connection electrodes. Reference numeral 9 denotes a sealed case made of glass and having openings at both ends, and the piezoelectric oscillator 1 is inserted into the inner surface of the sealed case 9 with the circumferential frame 3 inscribed or close to it with a gap. , the piezoelectric oscillator 1 is sandwiched between the conductive sealing bodies 10 and 11 from both ends, and the sealing body 10,
The piezoelectric oscillator 1 is hermetically sealed by heating and melting the glass of the sealing case 9 around the piezoelectric oscillator 11 .
以上に述べた本発明は、
１ 実施例に示すとおり、上、下非対称型の音叉
型発振片を枠付き発振片とすることで上下方向
に導通をとり出すことが容易となり、アクシヤ
ルリードタイプの振動子が得られる。この結
果、本発明の圧電振動子は、実装の際に一般抵
抗用の自動挿入機械を使用することが可能とな
り、一般抵抗と同時に実装でき、実装に要する
時間が短縮できる。 The present invention described above has the following advantages: 1. As shown in the embodiments, by making the upper and lower asymmetric tuning fork type oscillation pieces into frame oscillation pieces, it becomes easy to take out conduction in the vertical direction, and the axial lead type oscillator is obtained. As a result, the piezoelectric vibrator of the present invention can be mounted using an automatic insertion machine for general resistors, and can be mounted at the same time as general resistors, reducing the time required for mounting.
２ 自己整列性を有する枠付きの圧電発振体と封
止ケースとの組合せにより気密封止が成される
ため、封止工程における精密な位置出しを要せ
ず、精密治具の削減、位置出し所要時間の節
減、また自動組立が可能となることから低コス
トの圧電振動子が得られる、という以上の利点
を有している。2. Since an airtight seal is achieved by the combination of the piezoelectric oscillator with a self-aligning frame and the sealing case, precise positioning is not required in the sealing process, reducing the need for precision jigs and positioning. This method has the following advantages: it saves time and can be assembled automatically, resulting in a low-cost piezoelectric vibrator.
なお、本発明は先の実施例に示した構成に限ら
ず以下の応用例にも適用できる。 Note that the present invention is applicable not only to the configuration shown in the previous embodiment but also to the following application examples.
１ 本発明はAT型圧電振動子、および縦振動型
圧電振動子、およびその他の振動モードを有す
る圧電振動子およびセラミツクフイルター等の
圧電振動子のそれぞれに本発明は応用すること
ができるもので、第２図にガラス封止AT型圧
電振動子の一応用例を説明する。１２はAT型
圧電発振体でありAT型圧電発振片１３が周状
枠１４に連結部１５，１６により接続されてい
る。AT型圧電発振片１３の表・裏両面にはそ
れぞれ励振電極１７，１８（１８は裏面）が設
けられ、周状枠１４の両端電極１９，２０にそ
れぞれ接続されている。２１はガラスにより構
成された封止ケースであり、AT型圧電発振体
１２を内面に周状枠１４が内接もしくは間隙を
もつて挿入され、導電性の封止体２２，２３に
よりAT型圧電発振体１２を両端からはさみ込
み、封止体２２，２３の周囲の封止ケース２１
のガラスを加熱溶融してAT型圧電発振体１２
を気密封止したものである。1. The present invention can be applied to AT type piezoelectric vibrators, longitudinal vibration type piezoelectric vibrators, piezoelectric vibrators having other vibration modes, and piezoelectric vibrators such as ceramic filters. An example of an application of a glass-sealed AT type piezoelectric vibrator is illustrated in FIG. 12 is an AT type piezoelectric oscillating body, and an AT type piezoelectric oscillating piece 13 is connected to a circumferential frame 14 by connecting portions 15 and 16. Excitation electrodes 17 and 18 (18 is the back surface) are provided on both the front and back surfaces of the AT type piezoelectric oscillation piece 13, respectively, and are connected to electrodes 19 and 20 at both ends of the circumferential frame 14, respectively. Reference numeral 21 denotes a sealed case made of glass, in which a circumferential frame 14 is inserted into the inner surface of the AT type piezoelectric oscillator 12 or with a gap therebetween. The oscillator 12 is sandwiched from both ends, and the sealing case 21 surrounds the sealing bodies 22 and 23.
AT type piezoelectric oscillator 12 is made by heating and melting the glass.
It is hermetically sealed.
同様にして前記他の圧電振動子を構成するこ
とが可能である。 It is possible to configure the other piezoelectric vibrators in a similar manner.
２ 封止ケースの断面は、円形のみでなく楕円等
でもかまわない。2. The cross section of the sealed case may be not only circular but also oval.
３ 本発明のガラス封止圧電振動子の形状は第３
図のイ，ロ等に示すようなリード線の有無、封
止体の形状の異なるタイプについても実施可能
である。3 The shape of the glass-sealed piezoelectric vibrator of the present invention is as follows.
It is also possible to implement different types of sealing bodies with or without lead wires and with different shapes as shown in A and B of the figure.
４ 圧電発振体の周状枠と封止体の導通の信頼性
を高めるため、封止体もしくは周状枠の端面の
一方もしくは両方にAu―Sn、Au―Si等のロー
材もしくは導電性の接着剤により接続すること
も有意である。4. In order to improve the reliability of the conduction between the circumferential frame of the piezoelectric oscillator and the sealing body, one or both of the end faces of the sealing body or the circumferential frame are coated with a brazing material such as Au-Sn or Au-Si or conductive material. It is also useful to connect by adhesive.
以上に示すとおり、本発明によれば高品質の圧
電振動子を低コストに製造することが可能であ
る。 As described above, according to the present invention, it is possible to manufacture a high quality piezoelectric vibrator at low cost.
第１図は本発明の、ガラス封止圧電振動子を用
いた一実施例、第２図は本発明の、AT型圧電振
動子を用いた応用例、第３図は本発明の、ガラス
封止圧電振動子を用いた外形形状の他の応用例。
１…圧電発振体、２…音叉型圧電発振片、３…
周状枠、４…音叉型圧電発振片の基部、５，６…
励振電極、７，８…両端電極、９…封止ケース、
１０，１１…封止体、１２…AT型圧電発振体、
１３…AT型圧電発振片、１４…周状枠、１５，
１６…連結部、１７，１８…励振電極、１９，２
０…両端電極、２１…封止ケース、２２，２３…
封止体。
FIG. 1 is an example of the present invention using a glass-sealed piezoelectric vibrator, FIG. 2 is an application example of the present invention using an AT-type piezoelectric vibrator, and FIG. 3 is a glass-sealed piezoelectric vibrator of the present invention. Other application examples of external shapes using stop piezoelectric vibrators. 1...Piezoelectric oscillator, 2...Tuning fork type piezoelectric oscillator piece, 3...
Circumferential frame, 4... Base of tuning fork type piezoelectric oscillation piece, 5, 6...
Excitation electrode, 7, 8...both end electrodes, 9...sealing case,
10, 11... Sealing body, 12... AT type piezoelectric oscillator,
13... AT type piezoelectric oscillation piece, 14... Circumferential frame, 15,
16... Connection part, 17, 18... Excitation electrode, 19, 2
0...Both end electrodes, 21...Sealing case, 22, 23...
Sealed body.
Claims (1)
状枠３とを１体に形成した圧電発振体１と、両端
が開口部により形成されるとともに内周面が前記
周状枠外周に内接もしくは近接して前記圧電発振
体を位置決めする筒状の封入ケース９と、前記封
入ケースの各々の開口部を封止するとともに少な
くとも１部が導電性の部分からなる封止体１０，
１１とからなり、 前記圧電発振体は前記封入ケースの開口部と対
向する前記周状枠の各々の端面に接続用電極７，
８を形成し、前記封入ケースの開口部に前記封止
体を封着するとき前記周状枠の接続用電極と前記
封止体の導電性の部分とを当接させ前記圧電発振
体の外部への電気的導通と機械的保持とをなすよ
う構成したことを特徴とする圧電振動子。[Scope of Claims] 1 A piezoelectric oscillator 1 in which a piezoelectric oscillating piece 2 and a circumferential frame 3 surrounding the piezoelectric oscillating piece are integrally formed, and both ends are formed by openings and an inner circumferential surface is formed by the circumferential frame 3. a cylindrical enclosure case 9 that positions the piezoelectric oscillator inscribed in or close to the outer periphery of the frame; and a seal that seals each opening of the enclosure case and at least a portion of which is made of a conductive part. body 10,
11, and the piezoelectric oscillator has connection electrodes 7, on each end surface of the circumferential frame facing the opening of the enclosure case.
8, and when sealing the sealing body to the opening of the enclosure case, the connection electrode of the circumferential frame and the conductive portion of the sealing body are brought into contact with each other, and the outside of the piezoelectric oscillator is A piezoelectric vibrator characterized in that it is configured to provide electrical continuity and mechanical holding to the piezoelectric vibrator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16248881A JPS5863211A (en) | 1981-10-12 | 1981-10-12 | Piezoelectric oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16248881A JPS5863211A (en) | 1981-10-12 | 1981-10-12 | Piezoelectric oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5863211A JPS5863211A (en) | 1983-04-15 |
| JPS6366445B2 true JPS6366445B2 (en) | 1988-12-20 |
Family
ID=15755562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16248881A Granted JPS5863211A (en) | 1981-10-12 | 1981-10-12 | Piezoelectric oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5863211A (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50790A (en) * | 1973-05-02 | 1975-01-07 | ||
| JPS5291678A (en) * | 1976-01-29 | 1977-08-02 | Seiko Instr & Electronics Ltd | Profile slide vibrator |
| JPS5938736Y2 (en) * | 1976-03-09 | 1984-10-29 | キンセキ株式会社 | Holding container for piezoelectric vibrator |
| JPS5398793A (en) * | 1977-02-09 | 1978-08-29 | Seiko Epson Corp | Piezo electric vibrator |
| JPS5493994A (en) * | 1978-01-06 | 1979-07-25 | Seiko Epson Corp | Container for crystal oscillator |
-
1981
- 1981-10-12 JP JP16248881A patent/JPS5863211A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5863211A (en) | 1983-04-15 |
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