JPS644434B2 - - Google Patents
Info
- Publication number
- JPS644434B2 JPS644434B2 JP56053846A JP5384681A JPS644434B2 JP S644434 B2 JPS644434 B2 JP S644434B2 JP 56053846 A JP56053846 A JP 56053846A JP 5384681 A JP5384681 A JP 5384681A JP S644434 B2 JPS644434 B2 JP S644434B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- pole member
- magnetic
- tooth
- teeth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Linear Motors (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Control Of Linear Motors (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明はリニアパルスモータに関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a linear pulse motor.
数値制御工作機械の工具、工作物等の微細送
り、位置決め、或いはプリンターのシヤトルの駆
動等には、リニアパルスモータが広く使用されて
いるが、このようなリニアパルスモータには、小
形で、且つ応答速度の速いことが要求されてい
る。 Linear pulse motors are widely used for fine feeding and positioning of tools and workpieces in numerically controlled machine tools, and for driving shuttles in printers. Fast response speed is required.
従来これらのリニアパルスモータには、磁極を
電磁コイルによつて励磁し、磁気回路の磁気抵抗
が最小になる位置に、移送部を移動させる可変リ
アクタンス型のリニアパルスモータと、励磁する
ことにより、永久磁石の磁束を変化させ、磁気力
の安定する方向に移送部を移動させるハイブリツ
ト永久磁石型のリニアパルスモータとがある。
Conventionally, these linear pulse motors include variable reactance linear pulse motors whose magnetic poles are excited by an electromagnetic coil and the transfer section is moved to a position where the magnetic resistance of the magnetic circuit is minimized. There is a hybrid permanent magnet type linear pulse motor that changes the magnetic flux of a permanent magnet and moves a transfer section in a direction where the magnetic force is stabilized.
しかし、可変リアクタンス型、ハイブリツト永
久磁石型のいずれのリニアパルスモータも、歯の
周囲に励磁コイルを備えているので、それだけ構
成が複雑で、小形化の障害になつているという問
題点があつた。 However, both variable reactance type and hybrid permanent magnet type linear pulse motors have excitation coils around the teeth, which complicates their configurations and poses a problem in that they are an obstacle to miniaturization. .
また、双方とも励磁コイルに電磁力を発生させ
る方法であるために、コイルにパルス信号を印加
してから、移送部が移動を開始する迄の応答時間
に遅れがあり、高速化の要求を必ずしも満足させ
るものでなかつた。 Additionally, since both methods generate electromagnetic force in an excitation coil, there is a delay in the response time from when a pulse signal is applied to the coil until the transfer unit starts moving, which does not necessarily meet the demand for faster speeds. It wasn't satisfying.
本発明はこのような点に鑑みて創作されたもの
で、小形で、且つ応答速度が速い、リニアパルス
モータを提供することを目的としている。 The present invention was created in view of these points, and an object of the present invention is to provide a linear pulse motor that is small in size and has a fast response speed.
上記の目的を達成するために本発明は、第１図
に例示したように、細長い板状の磁性材料よりな
る固定部１の表面に、歯１０と歯幅に等しい幅の
溝を、所望のピツチＰで直線状に設ける。さら
に、この固定部１に歯列に沿つて両側に、２条の
ガイド溝５１を設ける。
In order to achieve the above object, the present invention, as illustrated in FIG. Provided in a straight line with pitch P. Further, two guide grooves 51 are provided on both sides of the fixed portion 1 along the tooth row.
先端部が同磁極になるように、永久磁石、また
は永久磁石により磁化されて構成され、それぞれ
の頭部に装着した圧電体積層型アクチユエータ３
により、先端面が歯１０に対して遠近運動するよ
うに装着された、幅が固定部１の歯幅に等しい一
対の角柱形の第１の磁極部材２１、及び第２の磁
極部材２２と、先端部が第１、第２の磁極部材２
１，２２とは反対の磁極となるように永久磁石、
または永久磁石により磁化されて構成され、それ
ぞれの頭部に装着した圧電体積層アクチユエータ
３により、先端面が歯１０に対して遠近運動する
ように装着された、幅が固定部１の歯幅に等しい
一対の角柱形の第３の磁極部材２３及び第４の磁
極部材２４とを、筐体に所望に装着して移送部２
を構成する。 A piezoelectric laminated actuator 3 is configured with a permanent magnet or is magnetized by a permanent magnet so that the tips thereof have the same magnetic pole, and is attached to each head.
A pair of prismatic first magnetic pole members 21 and second magnetic pole members 22 whose width is equal to the tooth width of the fixed part 1 are mounted so that their tip surfaces move toward and away from the teeth 10, The tips are the first and second magnetic pole members 2
A permanent magnet so that the magnetic pole is opposite to 1 and 22,
Alternatively, the piezoelectric laminated actuator 3, which is magnetized by a permanent magnet and attached to each head, is attached so that the tip surface moves near and far with respect to the teeth 10, and whose width corresponds to the tooth width of the fixed part 1. A pair of equal prismatic third magnetic pole members 23 and fourth magnetic pole members 24 are mounted on the housing as desired, and the transfer unit 2
Configure.
移送部２は、第１の磁極部材２１と第２の磁極
部材２２の間隔が、歯のピツチＰに等しく、第２
の磁極部材２２と第３の磁極部材２３との間隔が
歯のピツチの３／４に等しく、第３の磁極部材２
３と第４の磁極部材２４との間隔が歯のピツチに
等しいように、一列に筐体に装着するものとす
る。 In the transfer unit 2, the interval between the first magnetic pole member 21 and the second magnetic pole member 22 is equal to the tooth pitch P, and the second
The distance between the magnetic pole member 22 and the third magnetic pole member 23 is equal to 3/4 of the tooth pitch, and the third magnetic pole member 2
3 and the fourth magnetic pole member 24 are attached to the housing in a row so that the distance between them is equal to the pitch of the teeth.
磁極部材の先端面と歯との空隙が、第４の磁極
部材２４、第２の磁極部材２２、第３の磁極部材
２３、第１の磁極部材２１の順序で、伸縮するよ
うにそれぞれの圧電体積層型アクチユエータ３を
駆動して、移送部２に前進歩進運動を付与し、磁
極部材の先端面との空隙が、第１の磁極部材２
１、第３の磁極部材２３、第２の磁極部材２２、
第４の磁極部材２４の順序で、伸縮するようにそ
れぞれの圧電体積層型アクチユエータ３を駆動し
て、移送部２に後進歩進運動を付与するという構
成とする。 Each piezoelectric member is arranged so that the gap between the tip surface of the magnetic pole member and the tooth expands and contracts in the order of the fourth magnetic pole member 24, the second magnetic pole member 22, the third magnetic pole member 23, and the first magnetic pole member 21. The laminated actuator 3 is driven to impart forward movement to the transfer section 2, and the gap between the tip end face of the magnetic pole member and the first magnetic pole member 2 is
1, third magnetic pole member 23, second magnetic pole member 22,
The configuration is such that the respective piezoelectric laminated actuators 3 are driven to expand and contract in the order of the fourth magnetic pole member 24, thereby imparting backward movement to the transfer section 2.
上記本発明によれば、例えば第４の磁極部材２
４の圧電体積層型アクチユエータ３の通電をオフ
にすると、圧電体積層型アクチユエータ３が伸長
して、第４の磁極部材２４の先端面と固定部１の
歯１０との空隙が縮小する。
According to the present invention, for example, the fourth magnetic pole member 2
When the energization of the fourth piezoelectric laminated actuator 3 is turned off, the piezoelectric laminated actuator 3 expands, and the gap between the tip surface of the fourth magnetic pole member 24 and the tooth 10 of the fixed part 1 is reduced.
よつて、第４の磁極部材２４と歯との磁気抵抗
が、他の磁極部材と他の歯間の磁気抵抗よりも非
常に小さくなり、第４図の磁極部材２４が対応す
る歯に真正面に対向する方向に吸引されることに
より、移送部２が移動する。そして、第４の磁極
部材２４がその歯と真正面に対向した位置で停止
する。 Therefore, the magnetic resistance between the fourth magnetic pole member 24 and the tooth becomes much smaller than the magnetic resistance between the other magnetic pole members and the other teeth, and the magnetic pole member 24 in FIG. 4 is directly in front of the corresponding tooth. The transfer unit 2 moves by being sucked in the opposite direction. Then, the fourth magnetic pole member 24 stops at a position directly facing the teeth.
この際、第１の磁極部材２１と第２の磁極部材
２２は、それぞれ他の歯と1/4ピツチずれており、
第３の磁極部材２３はさらに他の歯と1/2ピツチ
ずれている。（即ち第３の磁極部材２３は溝に対
向した位置にある。）
したがつて、次に第４の磁極部材２４の圧電体
積層アクチユエータ３に通電し、第２の磁極部材
２２の圧電体積層型アクチユエータ３の通電をオ
フにすると、第２の磁極部材２２の圧電体積層型
アクチユエータ３が伸長する。そして、前述と同
様の吸引力が、第２の磁極部材２２に作用して、
第２の磁極部材２２が歯と真正面に対向した位置
に移動する。即ち、移送部２は歯のピツチの1/4
だけ移動する。 At this time, the first magnetic pole member 21 and the second magnetic pole member 22 are each shifted by 1/4 pitch from the other teeth,
The third magnetic pole member 23 is further offset by 1/2 pitch from the other teeth. (In other words, the third magnetic pole member 23 is in a position facing the groove.) Therefore, the piezoelectric laminated actuator 3 of the fourth magnetic pole member 24 is energized, and the piezoelectric laminated layer of the second magnetic pole member 22 is activated. When the energization of the mold actuator 3 is turned off, the piezoelectric laminated actuator 3 of the second magnetic pole member 22 expands. Then, the same attractive force as described above acts on the second magnetic pole member 22,
The second magnetic pole member 22 moves to a position directly facing the teeth. That is, the transfer part 2 is 1/4 of the tooth pitch.
move only.
このように、第４の磁極部材２４、第２の磁極
部材２２、第３の磁極部材２３、第１の磁極部材
２１の順序でそれぞれの圧電体積層型アクチユエ
ータ３を駆動すると、移送部２は、１歩進が歯の
ピツチの1/4で前進歩進運動を行う。 In this way, when the piezoelectric laminated actuator 3 is driven in the order of the fourth magnetic pole member 24, the second magnetic pole member 22, the third magnetic pole member 23, and the first magnetic pole member 21, the transfer unit 2 , one step is a forward movement of 1/4 of the pitch of the teeth.
また、第１の磁極部材２１、第３の磁極部材２
３、第２の磁極部材２２、第４の磁極部材２４の
順序で、それぞれの圧電体積層型アクチユエータ
３を駆動すると、移送部２は、１歩進が歯のピツ
チの1/4で後進歩進運動を行う。 In addition, the first magnetic pole member 21 and the third magnetic pole member 2
3. When the piezoelectric laminated actuator 3 is driven in the order of the second magnetic pole member 22 and the fourth magnetic pole member 24, the transfer unit 2 moves backward with one step being 1/4 of the tooth pitch. Perform progressive movements.
上記の圧電体積層アクチユエータは、直流電圧
を印加している間は圧縮されているが、通電をオ
フとすると伸長する。この際コイルがないので電
磁誘導現象は発生しない。よつて、パルス信号を
印加すると瞬間的に移送部が移動開示する。即
ち、リニアパルスモータの応答速度が速い。 The piezoelectric laminated actuator described above is compressed while a DC voltage is applied, but expands when the current is turned off. At this time, since there is no coil, no electromagnetic induction phenomenon occurs. Therefore, when a pulse signal is applied, the transfer section starts to move instantaneously. That is, the response speed of the linear pulse motor is fast.
また、歯の周囲にコイルを巻回する必要がない
ので、それだけ小形となる。 Also, since there is no need to wind a coil around the teeth, the size can be reduced accordingly.
以下図を参照しながら、本発明を具体的に説明
する。なお、全面を通じて同一符号は同一対象物
を示す。
The present invention will be specifically described below with reference to the drawings. Note that the same reference numerals indicate the same objects throughout.
第１図は本発明の一実施例の側断面図、第２図
は本発明の作用を説明する図、第３図は本発明の
他の実施例の側断面図、第４図は、本発明のさら
に他の実施例の側断面図である。 FIG. 1 is a side sectional view of one embodiment of the present invention, FIG. 2 is a diagram explaining the operation of the present invention, FIG. 3 is a side sectional view of another embodiment of the present invention, and FIG. 4 is a diagram illustrating the present invention. FIG. 7 is a side sectional view of yet another embodiment of the invention.
第１図において、１は、細長い板状の磁性材料
よりなり、幅がそれぞれ（ｐ／２）の歯１０と溝
とを、直線状に配列した固定部である。 In FIG. 1, reference numeral 1 denotes a fixed part made of a magnetic material in the form of an elongated plate, in which teeth 10 and grooves each having a width of (p/2) are linearly arranged.
２１，２２，２３，２４は幅が、それぞれ歯１
０のピツチＰの1/2に等しい角柱形の電磁軟鉄よ
りなる第１の磁極部材、第２の磁極部材、第３の
磁極部材、第４の磁極部材であつて、移送部２の
非鉄材料、例えばプラスチツクよりなる筐体４
に、固定部１の歯１０に対向して、所定の空隙を
隔てるように挿着してある。なお、それぞれの磁
極部材は、固定部１方向に摺動し得るようになつ
ている。 21, 22, 23, and 24 have the width of tooth 1, respectively.
The first magnetic pole member, the second magnetic pole member, the third magnetic pole member, and the fourth magnetic pole member are made of prismatic electromagnetic soft iron having a pitch equal to 1/2 of the pitch P of 0, and the non-ferrous material of the transfer section 2. , for example, a housing 4 made of plastic.
It is inserted so as to face the teeth 10 of the fixing part 1 with a predetermined gap in between. Note that each magnetic pole member is configured to be able to slide in one direction of the fixed portion.
第１の磁極部材２１と第２の磁極部材２２の間
隔が、固定部１の歯のピツチＰに等しく、第２の
磁極部材２２と第３の磁極部材２３との間隔が歯
のピツチの3/4に等しく、第３の磁極部材２３と
第４の磁極部材２４との間隔が歯のピツチに等し
いように、磁極部材を一列に配列して装着してあ
る。 The distance between the first magnetic pole member 21 and the second magnetic pole member 22 is equal to the tooth pitch P of the fixed part 1, and the distance between the second magnetic pole member 22 and the third magnetic pole member 23 is equal to the tooth pitch P. /4, and the magnetic pole members are arranged and mounted in a row so that the spacing between the third magnetic pole member 23 and the fourth magnetic pole member 24 is equal to the tooth pitch.
一方、それぞれの磁極部材２１，２２，２３，
２４の頭部、即ち歯１０とは反対的の先端に圧電
体積層型アクチユエータ３を装着し、圧電体積層
型アクチユエータ３の上端面を、筐体４に固着し
てある。 On the other hand, each magnetic pole member 21, 22, 23,
A piezoelectric laminated actuator 3 is attached to the head of 24, that is, the tip opposite to the teeth 10, and the upper end surface of the piezoelectric laminated actuator 3 is fixed to the housing 4.
それぞれの圧電体積層型アクチユエータ３から
リード３′を引き出し、それぞれの圧電体積層型
アクチユエータ３に直流電圧を所定の順序で印加
しオン、オフさせる。 A lead 3' is pulled out from each piezoelectric multilayer actuator 3, and a DC voltage is applied to each piezoelectric multilayer actuator 3 in a predetermined order to turn it on and off.
圧電体積層型アクチユエータ３に直流電圧を印
加している場合は、圧電体積層型アクチユエータ
３が圧縮されており、それぞれの磁極部材２１，
２２，２３，２４の先端面は、歯１０と離れた位
置にある。そして、その空隙をＴに設定してあ
る。 When a DC voltage is applied to the piezoelectric multilayer actuator 3, the piezoelectric multilayer actuator 3 is compressed, and the respective magnetic pole members 21,
The tip surfaces of 22, 23, and 24 are located away from the teeth 10. The gap is set to T.
圧電体積層型アクチユエータ３の印加電圧を、
オフすると、圧電体積層型アクチユエータ３がｈ
だけ伸長し、磁極部材が摺動して歯１０に近づ
き、歯面との空隙が（Ｔ−ｈ）となる。 The voltage applied to the piezoelectric multilayer actuator 3 is
When turned off, the piezoelectric laminated actuator 3
The magnetic pole member slides and approaches the tooth 10, and the gap with the tooth surface becomes (T-h).
それぞれの磁極部材２１，２２，２３，２４の
上方に、水平に永久磁石５を装着し、さらに永久
磁石５のＳ極の下端面に、第１の磁極部材２１及
び第２の磁極部材２２に磁気的に結合する電磁軟
鉄よりなる磁路部材７１を装着してある。また、
Ｎ極の下端面に、第３の磁極部材２３及び第４の
磁極部材２４に磁気的に結合する電磁軟鉄よりな
る磁路部材７２を装着してある。 A permanent magnet 5 is installed horizontally above each of the magnetic pole members 21, 22, 23, 24, and the first magnetic pole member 21 and the second magnetic pole member 22 are attached to the lower end surface of the S pole of the permanent magnet 5. A magnetic path member 71 made of electromagnetic soft iron that is magnetically coupled is attached. Also,
A magnetic path member 72 made of electromagnetic soft iron and magnetically coupled to the third magnetic pole member 23 and the fourth magnetic pole member 24 is attached to the lower end surface of the N pole.
このように永久磁石５を装着したことにより、
第１の磁極部材２１、第２の磁極部材２２の先端
部はＳ極となり、第３の磁極部材２３、第４の磁
極部材２４の先端部は、Ｎ極となつている。 By attaching the permanent magnet 5 in this way,
The tips of the first magnetic pole member 21 and the second magnetic pole member 22 are S poles, and the tips of the third magnetic pole member 23 and fourth magnetic pole member 24 are N poles.
以下、第２図を参照しながら本発明の作用につ
いて詳述する。 Hereinafter, the operation of the present invention will be explained in detail with reference to FIG.
第２図ａは、第４の磁極部材２４の圧電体積層
型アクチユエータ３の回路をオフとし、その先端
面が歯１０−１に近づくように摺動し、第４の磁
極部材２４が歯１０−１に吸引されたところを示
し、第４の磁極部材２４と歯１０−１とは真正面
に対向し、そのずれは零である。 In FIG. 2a, the circuit of the piezoelectric laminated actuator 3 of the fourth magnetic pole member 24 is turned off, and the tip surface thereof slides close to the tooth 10-1, and the fourth magnetic pole member 24 is moved toward the tooth 10-1. -1 is shown, and the fourth magnetic pole member 24 and the tooth 10-1 are directly opposed to each other, and the deviation between them is zero.
この際第３の磁極部材２３と歯１０−２のずれ
は、歯のピツチＰの1/2である。即ち第３の磁極
部材23は、歯１０−３との間の溝に対向してい
る。 At this time, the deviation between the third magnetic pole member 23 and the teeth 10-2 is 1/2 of the tooth pitch P. That is, the third magnetic pole member 23 faces the groove between the teeth 10-3.
また、第２の磁極部材２２は歯１０−４より、
歯のピツチＰの1/4だけ歯１０−３側にずれ、第
１の磁極部材２１は歯１０−５より、歯のピツチ
Ｐの1/4だけ歯１０−６側にずれている。 Further, the second magnetic pole member 22 has teeth 10-4,
The first magnetic pole member 21 is shifted from the tooth 10-5 by 1/4 of the tooth pitch P toward the tooth 10-6.
したがつて磁路は、
永久磁石５のＮ極−第４の磁極部材２４−歯
１０−４−第２の磁極部材２２−永久磁石５の
Ｓ極
永久磁石５のＮ極−第４の磁極部材２４−歯
１０−５−第１の磁極部材２１−永久磁石５の
Ｓ極
の２通りが構成され、且つ、第１の磁極部材２１
と第２の磁極部材２２をとおる磁束数が等しい。 Therefore, the magnetic path is: N pole of permanent magnet 5 - fourth magnetic pole member 24 - teeth 10 - 4 - second magnetic pole member 22 - S pole of permanent magnet 5 N pole of permanent magnet 5 - fourth magnetic pole Member 24 - tooth 10 - 5 - first magnetic pole member 21 - two types of S pole of permanent magnet 5 are configured, and first magnetic pole member 21
and the number of magnetic fluxes passing through the second magnetic pole member 22 is equal.
即ち、第４の磁極部材２４が歯１０−１に真正
面に対向した位置が、移送部２が磁気的に最も安
定した位置であつて、その位置を保持している。 That is, the position where the fourth magnetic pole member 24 directly faces the tooth 10-1 is the position where the transfer unit 2 is magnetically most stable, and is maintained at that position.
次に第４の磁極部材２４の圧電体積層型アクチ
ユエータ３に通電し、第２の磁極部材２２の圧電
体積層型アクチユエータ３の回路をオフすると、
第２図ｂのように、第４図の磁極部材２４が引き
上げられ、第２の磁極部材２２が突出する。 Next, when the piezoelectric multilayer actuator 3 of the fourth magnetic pole member 24 is energized and the circuit of the piezoelectric multilayer actuator 3 of the second magnetic pole member 22 is turned off,
As shown in FIG. 2b, the magnetic pole member 24 of FIG. 4 is pulled up, and the second magnetic pole member 22 protrudes.
したがつて、第２の磁極部材２２は歯１０−４
に吸引されて、矢印A1のように１／４ピツチだ
け前進（図の右方向）し、第２の磁極部材２２と
歯１０−５のずれがなくなる。 Therefore, the second magnetic pole member 22 has teeth 10-4.
is attracted, moves forward by 1/4 pitch (to the right in the figure) as shown by arrow A1 , and the misalignment between the second magnetic pole member 22 and the tooth 10-5 is eliminated.
この際、第１の磁極部材２１と歯１０−５のず
れは歯のピツチＰの1/2である。即ち第１の磁極
部材２１は、歯１０−５と歯１０−６との間の溝
に対向している。 At this time, the deviation between the first magnetic pole member 21 and the teeth 10-5 is 1/2 of the tooth pitch P. That is, the first magnetic pole member 21 faces the groove between the teeth 10-5 and 10-6.
また、第４の磁極部材２４は、歯１０−１より
歯のピツチＰの1/4だけ前進方向にずれており、
第３の磁極部材２３は、歯１０−３より歯のピツ
チＰの1/4だけ後進方向にずれている。 Further, the fourth magnetic pole member 24 is shifted in the forward direction from the tooth 10-1 by 1/4 of the tooth pitch P,
The third magnetic pole member 23 is offset from the tooth 10-3 by 1/4 of the tooth pitch P in the backward movement direction.
したがつて、磁路が、
（第４の磁極部材２４−歯１０−１）と（第３
の磁極部材２３−歯１０−３）とに平等に分岐
し、移送部２はこの位置で安定して一旦停止す
る。 Therefore, the magnetic path is between (fourth magnetic pole member 24-teeth 10-1) and (third
The transfer section 2 is stably stopped at this position.
次に第３の磁極部材２３の圧電体積層型アクチ
ユエータ３の回路をオフすると、第１図ｃに示す
ように、移送部２は矢印A2のように、さらに1/4
ピツチだけ前進（図の右方向）し、第３の磁極部
材２３と歯１０−３のずれがなくなる。 Next, when the circuit of the piezoelectric laminated actuator 3 of the third magnetic pole member 23 is turned off, as shown in FIG .
The third magnetic pole member 23 and the tooth 10-3 are no longer misaligned.
また、引き続いて、第１の磁極部材２１の圧電
体積層型アクチユエータ３の回路をオフすると、
第１図ｄに示すように、移送部２は矢印A3のよ
うに、さらに1/4ピツチだけ前進（図の右方向）
し、第１の磁極部材２１と歯１０−６のずれがな
くなる。 Furthermore, when the circuit of the piezoelectric laminated actuator 3 of the first magnetic pole member 21 is subsequently turned off,
As shown in Figure 1d, the transfer unit 2 moves forward by a further 1/4 pitch (toward the right in the figure) as indicated by arrow A3 .
However, there is no misalignment between the first magnetic pole member 21 and the tooth 10-6.
即ち、第４の磁極部材２４、第２の磁極部材２
２第３の磁極部材２３、第１の磁極部材２１の順
序で、それぞれの圧電体積層型アクチユエータの
回路をオフとすると、移送部２は、１歩進が歯の
ピツチＰの1/4で前進歩進運動を行う。 That is, the fourth magnetic pole member 24, the second magnetic pole member 2
2 When the circuits of the piezoelectric laminated actuators are turned off in the order of the third magnetic pole member 23 and the first magnetic pole member 21, the transfer unit 2 moves one step at 1/4 of the tooth pitch P. Perform forward movement.
一方、第１の磁極部材２１、第３の磁極部材２
３、第２の磁極部材２２、第４の磁極部材２４の
順序で、それぞれの圧電体積層型アクチユエータ
３の回路をオフとすると、移送部２は、１歩進が
歯のピツチの1/4で後進歩進運動を行う。 On the other hand, the first magnetic pole member 21 and the third magnetic pole member 2
3. When the circuit of each piezoelectric laminated actuator 3 is turned off in the order of the second magnetic pole member 22 and the fourth magnetic pole member 24, the transfer unit 2 moves one step at 1/4 of the tooth pitch. Perform a backward movement.
第３図に示したリニアパルスモータは、移送部
２に装着した第１の磁極部材２１、第２の磁極部
材２２、第３の磁極部材２３、第４の磁極部材２
４が、それぞれ単独の永久磁石であつて、第１の
磁極部材２１と第２の磁極部材２２は、Ｓ極が固
定部１側になるように装着し、第３の磁極部材２
３と第４の磁極部材２４は、Ｎ極が固定部１側に
なるように装着してある。 The linear pulse motor shown in FIG.
4 are independent permanent magnets, the first magnetic pole member 21 and the second magnetic pole member 22 are attached so that the S pole is on the fixed part 1 side, and the third magnetic pole member 2
The third and fourth magnetic pole members 24 are mounted so that their north poles are on the fixed part 1 side.
そして、それぞれの磁極部材２１，２２，２
３，２４の頭部側に設けた、電磁軟鉄よりなる磁
路部材６０の両端部に、磁極部材間に嵌挿する突
部６１，６２をそれぞれ設けてある。 And each magnetic pole member 21, 22, 2
Protrusions 61 and 62 that fit between the magnetic pole members are provided at both ends of a magnetic path member 60 made of electromagnetic soft iron provided on the head sides of the magnetic pole members 3 and 24, respectively.
突部６１は、第１の磁極部材２１と第２の磁極
部材２２とに磁気的に結合させ、突部６２は、第
３の磁極部材２３と、第４の磁極部材２４とに磁
気的に結合させてある。 The protrusion 61 is magnetically coupled to the first magnetic pole member 21 and the second magnetic pole member 22, and the protrusion 62 is magnetically coupled to the third magnetic pole member 23 and the fourth magnetic pole member 24. It has been combined.
このように構成することにより、それぞれの磁
極部材と固定部１の歯との間の吸引力が強くな
り、歩進する吸引力をより強くすることができ
る。 With this configuration, the attractive force between each magnetic pole member and the tooth of the fixed part 1 becomes stronger, and the advancing attractive force can be made stronger.
第４図に示す２０は、第１図に示した移送部２
を、歯のピツチＰの1/8だけ前後方向にずらして、
２台を並列に装着した移送部である。 20 shown in FIG. 4 is the transfer section 2 shown in FIG.
, by shifting it in the front-back direction by 1/8 of the tooth pitch P,
This is a transfer unit with two units installed in parallel.
即ち、前段の移送部の第１の磁極部材２１よ
り、1/8ピツチずらして後段の移送部の第１の磁
極部材２１−１を設けてある。 That is, the first magnetic pole member 21-1 of the subsequent transfer section is provided 1/8 pitch shifted from the first magnetic pole member 21 of the previous transfer section.
同様に、前段の移送部の第２の磁極部材２２よ
り1/8ピツチずらして、後段の移送部の第２の磁
極部材２２−１を設け、第３の磁極部材２３より
１／８ピツチずらして、後段の移送部の第３の磁極
部材２３−１を設け、さらに、第４の磁極部材２
４より1/8ビツチずらして、後段の移送部の第４
の磁極部材２４−１を設けてある。 Similarly, the second magnetic pole member 22-1 of the subsequent transfer section is provided 1/8 pitch apart from the second magnetic pole member 22 of the previous transfer section, and the second magnetic pole member 22-1 is provided 1/8 pitch apart from the third magnetic pole member 23. Then, a third magnetic pole member 23-1 of the rear transfer section is provided, and a fourth magnetic pole member 23-1 is provided.
Shift 1/8 bit from 4, and
A magnetic pole member 24-1 is provided.
このよう移送部２０を前進駆動するには、第４
の磁極部材２４、第４の磁極部材２４−１、第２
の磁極部材２２、第２の磁極部材２２−１、第３
の磁極部材２３、第３の磁極部材２３−１、第１
の磁極部材２１、第１の磁極部材２１−１の順序
で駆動する。 In order to drive the transfer section 20 forward in this way, the fourth
magnetic pole member 24, fourth magnetic pole member 24-1, second
magnetic pole member 22, second magnetic pole member 22-1, third magnetic pole member 22-1, and third magnetic pole member 22-1.
magnetic pole member 23, third magnetic pole member 23-1, first
The first magnetic pole member 21 and the first magnetic pole member 21-1 are driven in this order.
このように駆動すると、歯のピツチの1/8の歩
進量のリニアパルスモータとすることができる。 When driven in this manner, a linear pulse motor with a stepping amount of 1/8 of the tooth pitch can be achieved.
以上説明したように本発明は、磁極部材の頭部
圧電体積層型アクチユエータを設け、圧電体積層
型アクチユエータを駆動して固定部の歯と磁極部
材の先端部空隙を可変としたリニアパルスモータ
であつて、印加パルスに対する移送部の応答速度
が速く、且つコイルを設ける必要がないので、そ
れだけ小形である等、実用上で優れた効果があ
る。
As explained above, the present invention is a linear pulse motor that is provided with a piezoelectric laminated actuator at the head of the magnetic pole member and drives the piezoelectric laminated actuator to vary the gap between the tooth of the fixed part and the tip of the magnetic pole member. In addition, since the response speed of the transfer section to applied pulses is fast and there is no need to provide a coil, the device is compact and has excellent practical effects.
第１図は本発明の実施例の側断面図、第２図は
本発明の作用を説明する図、第３図は本発明の他
の実施例の側断面図、第４図は本発明のさらに他
の実施例の側面図でである。
図において、１は固定部、２，２０は移送部、
３は圧電体積層型アクチユエータ、４は筐体、５
は永久磁石、１０，１０−１，１０−２，１０−
３，１０−４，１０−５，１０−６は歯、２１，
２１−１は第１の磁極部材、２２，２２−１は第
２の磁極部材、２３，２３−１は第３の磁極部
材、２４，２４−１は第４の磁極部材をそれぞれ
示す。
FIG. 1 is a side sectional view of an embodiment of the present invention, FIG. 2 is a diagram explaining the operation of the present invention, FIG. 3 is a side sectional view of another embodiment of the present invention, and FIG. 4 is a side sectional view of an embodiment of the present invention. It is a side view of still another Example. In the figure, 1 is a fixed part, 2 and 20 are transfer parts,
3 is a piezoelectric layered actuator, 4 is a housing, 5
is a permanent magnet, 10,10-1,10-2,10-
3, 10-4, 10-5, 10-6 are teeth, 21,
21-1 is a first magnetic pole member, 22 and 22-1 are second magnetic pole members, 23 and 23-1 are third magnetic pole members, and 24 and 24-1 are fourth magnetic pole members, respectively.
Claims (1)
で直線上に配列した磁性材料よりなる固定部１
と、 先端部が同磁極で、それぞれの頭部に装着した
圧電体積層型アクチユエータ３により、先端面が
前記固定部１の歯に対して遠近運動し、且つ前記
歯のピツチに等しい間隔で筐体に装着された先端
部の幅が前記歯幅に等しい角柱形の一対の第１、
第２の磁極部材２１，２２、及び先端部が前記第
１、第２の磁極部材２１，２２とは反対の磁極
で、それぞれの頭部に装着した圧電体積層型アク
チユエータ３により、先端面が前記固定部１の歯
に対して遠近運動し、且つ前記歯のピツチに等し
い間隔で前記筐体に装着された、先端部の幅が前
記歯幅に等しい角柱形の一対の第３、第４の磁極
部材２３，２４とを、前記筐体に前記歯のピツチ
の3/4の間隔で装着して構成した少なくとも１基
の移送部２と、 前記第１の磁極部材２１と第２の磁極２２とを
磁気的に結合する磁路７１と、前記第３の磁極部
材２３と第４の磁極部材２４とを磁気的に結合す
る磁路７２及び、該磁路７１，７２同士を磁気的
に結合する磁性部材５を備え、 前記磁極部材の先端面と前記歯との空隙が、第
４の磁極部材２４、第２の磁極部材２２、第３の
磁極部材２３、第１の磁極部材２１の順序で、伸
縮する如くそれぞれの前記圧電体積層型アクチユ
エータ３を駆動して、前記移送部２に前進歩進運
動を付与し、前記磁極部材の先端面と前記歯との
空隙が、第１の磁極部材２１、第３の磁極部材２
３、第２の磁極部材２２、第４の磁極部材２４の
順序で、伸縮する如くそれぞれの前記圧電体積層
型アクチユエータ３を駆動して、前記移送部２に
後進歩進運動を付与することを特徴とするリニア
パルスモータの駆動方法。[Claims] 1. A groove with a width equal to the tooth and tooth width is formed at a desired pitch P.
Fixed part 1 made of magnetic material arranged in a straight line at
The piezoelectric laminated actuator 3, which has the same magnetic pole at the tip end and is attached to each head, allows the tip end surface to move toward and away from the teeth of the fixing part 1, and to move the housing at an interval equal to the pitch of the teeth. a pair of prismatic first ones having a tip end width equal to the tooth width, which are attached to the body;
The second magnetic pole members 21, 22 and the tip portions are magnetic poles opposite to the first and second magnetic pole members 21, 22, and the tip surfaces are controlled by the piezoelectric laminated actuator 3 attached to the respective heads. A pair of third and fourth prismatic prisms whose tips have a width equal to the tooth width are movable toward and away from the teeth of the fixing part 1 and are attached to the housing at intervals equal to the pitch of the teeth. at least one transfer unit 2 configured by mounting magnetic pole members 23 and 24 on the housing at an interval of 3/4 of the pitch of the teeth; and the first magnetic pole member 21 and the second magnetic pole. 22, a magnetic path 72 that magnetically couples the third magnetic pole member 23 and the fourth magnetic pole member 24, and a magnetic path 71 that magnetically couples the third magnetic pole member 23 and the fourth magnetic pole member 24. A magnetic member 5 to be coupled is provided, and the gap between the tip surface of the magnetic pole member and the tooth is the same as that of the fourth magnetic pole member 24, the second magnetic pole member 22, the third magnetic pole member 23, and the first magnetic pole member 21. The piezoelectric laminated actuators 3 are driven to expand and contract in order to impart forward movement to the transfer section 2, so that the gap between the tip surface of the magnetic pole member and the tooth becomes the first one. Magnetic pole member 21, third magnetic pole member 2
3. Driving the piezoelectric laminated actuator 3 in the order of the second magnetic pole member 22 and the fourth magnetic pole member 24 so as to expand and contract, thereby imparting backward movement to the transfer unit 2. Features a linear pulse motor drive method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56053846A JPS57170094A (en) | 1981-04-10 | 1981-04-10 | Driving method for linear pulse motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56053846A JPS57170094A (en) | 1981-04-10 | 1981-04-10 | Driving method for linear pulse motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57170094A JPS57170094A (en) | 1982-10-20 |
| JPS644434B2 true JPS644434B2 (en) | 1989-01-25 |
Family
ID=12954131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56053846A Granted JPS57170094A (en) | 1981-04-10 | 1981-04-10 | Driving method for linear pulse motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57170094A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61177155A (en) * | 1985-01-30 | 1986-08-08 | Sony Corp | Drive device |
| DE3790785T1 (en) * | 1986-12-03 | 1989-01-19 | ||
| JPH0528670U (en) * | 1991-09-26 | 1993-04-16 | 株式会社徳力本店 | Bookmark |
| TWI254356B (en) | 2002-11-29 | 2006-05-01 | Asml Netherlands Bv | Magnetic actuator under piezoelectric control |
| EP1424767B1 (en) * | 2002-11-29 | 2013-05-22 | ASML Netherlands B.V. | Magnetic actuator under piezoelectric control |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5382286A (en) * | 1976-12-28 | 1978-07-20 | Nec Corp | Motor |
-
1981
- 1981-04-10 JP JP56053846A patent/JPS57170094A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57170094A (en) | 1982-10-20 |
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