JPS64782B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for cooling and holding a material to be processed, such as an ion beam dry etching apparatus or a charged particle beam exposure apparatus.

For example, in ion beam dry etching equipment, etc., it is necessary to hold the material to be processed without deformation, and at the same time, it is necessary to prevent heating of the material to be processed. It is extremely difficult to achieve both precise material retention and efficient cooling.

[Prior Art] Figures 1 and 2 are cross-sectional views showing an example of a conventionally used material holding device. First, as shown in Figure 1, a material holding device using a metal material with good thermal conductivity is used. A soft material (for example, silicone rubber) 2 having elasticity is placed on the holder 1 . The holder is provided with a groove 3 for exhaust, and the groove is connected to a through hole 4.
communicates with the lower side of the holder. A large number of small holes 5 are bored in the soft material, and the small holes communicate with the exhaust grooves of the holder. The material to be processed 6 is placed on the soft material 2, and the suction jig 7
When the holder is placed on the jig and the inside of the jig is evacuated using a suitable vacuum pump, the through hole 4 of the holder is removed.
The air in the groove 3 and the small hole 5 of the soft material 2 is removed, and the holder 1, the soft material 2, and the material to be processed 6 are brought into close contact and integrated. The upper surface of the holder 1, both sides of the soft material 2, and the surface of the material to be processed are sufficiently polished and shiny, and there are no irregularities on the surface, so each maintains a strong suction state and prevents exhaust from inside the jig. Even if air is allowed to flow into the interior, separation of the three will not occur. Therefore, as shown in Fig. 2, the integrated holder, soft material, and material to be processed are attached to a cooling table 8 in a processing chamber of an ion dry etching device or the like using metal fittings 9, and cooling water is introduced into the table. The processing material 6 will be processed while being cooled. At this time, even if the pressure around the holder and the material to be processed is reduced, the three components remain adsorbed to each other, and the material to be processed does not peel off.

However, in the conventional apparatus described above, the material holder 1 must be removed from the table 8 and placed on the jig 7 each time the material to be processed is replaced, making the operation extremely cumbersome and difficult to automate. Since the absorption is indirect through the holder, it is impossible to prevent a decrease in heat conduction due to contact, which has the disadvantage of poor cooling efficiency.

[Object of the Invention] The present invention aims to eliminate the above-mentioned conventional drawbacks, and provides a material holding device that can achieve both operability and heat conduction efficiency.

[Configuration of the Invention] The configuration of the present invention includes a holder having a cavity inside and a large number of small holes communicating with the cavity on the top surface;
A sheet-like elastic member placed on the holder and having a small hole communicating with the small hole, a material to be processed placed on the elastic member, and a seal placed in the cavity to close the small hole. A moving plate holding a member, a mechanism for moving the moving plate within the cavity in order to open and close the small hole by the sealing member, means for evacuating the interior of the cavity, and means for introducing cooling or constant temperature fluid into the cavity. The material holding device is characterized by:

[Example] The present invention will be described below based on an example shown in the drawings.

3 to 6 show one embodiment of the present invention, and numeral 10 indicates a processing chamber such as an ion dry etching device. Reference numeral 11 denotes a holder for the material to be processed, which is placed inside the processing chamber. The holder actually has a structure that allows it to be moved in X and Y directions, rotated, and tilted by a desired movement mechanism. The interior of this holder is a cavity 12, and a movable plate 13 is disposed within this cavity. Further, the upper surface of the holder 11 has a large number of small holes 14 that reach the cavity 12 (see Fig. 5), and a sheet-like soft material 1 having elasticity such as silicone rubber is placed on the holder.
5 is placed. This soft material also has a large number of small holes 16, which communicate with the small holes of the holder. A material to be treated 17 is placed on the soft material 15 . The movable plate holds a large number of spherical seal members 18 at positions corresponding to the small holes, and by moving the movable plate upward, the spherical seal members close the ends of each small hole. ing. The structure of the spherical seal is shown in FIG. The spherical seal 18 is fixed to a seal pin 19 that slidably passes through the movable plate 13, and the seal pin is pushed upward by a spring 20. FIG. 6 shows the spherical seal just sealed, ie closing the end of the stoma. Returning to FIGS. 3 and 4, a cylindrical body 21 for driving is fixed to the lower surface of the center of the movable plate, and this cylindrical body passes through the cylindrical part 22 of the holder 11 in an airtight manner. and protrudes downward. The inside of the cylindrical body 21 and the space between the cylindrical body and the cylindrical part 22 of the holder are used as a cooling or constant temperature fluid passage and a vacuum exhaust passage. Reference numeral 23 denotes a cooling fluid introduction pipe, which is taken out to the outside through the processing chamber 10 and connected to a fluid introduction source via a valve 24. Also, 2
Reference numeral 5 denotes a cooling fluid discharge pipe, which also passes through the processing chamber 10 and is taken out to the outside, and is connected to a valve 26.
to a waste tank or returned to the fluid introduction source. A vacuum pump 28 is connected to the introduction pipe via a valve 27, and the inside of the cavity 12 can be evacuated through the pipe 23. Said cylindrical body 2
The lower end of 1 is connected to a driving source such as an eccentric cam 29, and when the cam is rotated, the cylindrical body moves between the positions shown in FIGS. 3 and 4, and the moving plate 13 is moved up and down, The spherical seal 18 is opened and closed. That is, in FIG. 3, the movable plate 13 is at the lowest end,
The seal 18 is located below, and the lower end of the small hole 14 is open. In contrast, in FIG. 4, the movable plate is at the uppermost end, and each small hole is closed by a spherical seal 18.

30 is a vacuum pump for exhausting the processing chamber 10;
It communicates with the processing chamber via a pipe 31 and a valve 32. There is a leak valve 33 in the middle of the pipe.
is connected.

In such an apparatus, first, the movable plate 13 is placed at the lowest position, the leak valve 33 is opened and the valve 32 is closed to break the vacuum in the processing chamber 10, and the material to be processed 17 is placed on the soft material 15. Set up. Next, valves 24 and 26 for introducing cooling fluid.
is closed, the valve 27 is opened, and the inside of the cavity 12 of the holder 11 is evacuated by the vacuum pump 28 (the state shown in FIG. 3). Due to this exhaust gas, the processing chamber 1
The material to be processed is strongly pressed in the direction of the cavity due to the atmospheric pressure within 0, and as a result, the holder 11 and the soft material
and the material to be processed 17 are integrated by adsorption, and the material to be processed is held in a holder. In this state, when the eccentric cam is rotated to move the moving plate 13 to the uppermost end as shown in FIG. 4, the spherical seal 18 closes the lower end of each small hole and the small holes 14 and 16
Maintain the vacuum inside. Therefore, close the valve 27,
When 24 and 26 are opened and a desired cooling gas is introduced into the cavity 12 from the introduction source, the material 17 to be processed is cooled via the holder 11 and the soft material 15. Thereafter, by closing the leak valve 33 and opening the valve 32, the inside of the processing chamber 10 is evacuated by the vacuum pump 31, and the material to be processed is subjected to the desired processing. When replacing the processed material, the valves 24, 26, and 32 are closed, the leak valve 33 is opened to return the processing chamber to the atmosphere, and then the eccentric cam 29 is rotated to lower the movable plate 13. This causes the spherical seal 18 to unblock the stoma so that the pressure of the cooling gas remaining in the cavity applies pressure through each of the stomas 14, 16 to the back side of the material to be treated, which is a soft material. Peel off from 15.

The above operations can be performed only by operating the eccentric cam 29 and each valve, and there is no need to use jigs as in the conventional case, so handling is simple. At the same time, the holder 11 is directly cooled, which improves the cooling efficiency of the material to be processed. is extremely good.

7 to 9 show other embodiments of the present invention, and the same reference numerals as in the embodiment of FIGS. 3 to 6 indicate similar components. This embodiment is constructed so that it can be used even when the sizes of the materials to be treated are different, and only the structure of the spherical seal portion and the drive mechanism of the moving plate are different. In FIG. 7, 17a, 17b, 17c, 17d, and 17e indicate various materials to be processed, and small materials such as 1
In the case of 7a, the small holes other than the small hole in the center not only do not contribute to the adsorption of the material, but also make it impossible to seal between the cavity 12 and the processing chamber 10. must remain closed at all times. Therefore, the spherical seals 18a, 18b, 18c, 18d, and 18e located on concentric circles are arranged so that they approach the upper wall of the holder 11 at regular intervals as they go outward from the center. The drive mechanism includes a rotating roller 34 and a stepped plate 35, and by moving the stepped plate in the direction of the arrow, it is possible to perform arbitrary sealing. FIG. 8 shows the case where 17c is used as the material to be treated, and the stepped plate is moved between the fully closed position and the C position with step C selected. Of course, when the movable plate is moved to the fully closed position, the state will be similar to that shown in FIG. 4. FIG. 9 is an enlarged view of the seal portion where 18e and 18d have closed the small hole 14, but 18c has not yet been moved upwardly to close it. As can be seen from the figure, the seal pins 19e, 19d, 19c, . . . of each seal have different lengths.

With this configuration, any size of material to be processed can be processed, which is useful in practice.

[Effect] As explained in detail above, in the present invention, the material to be processed is placed directly on the holder without separating the holder for the material to be processed and the cooling table, so the cooling efficiency is extremely good. Since they are installed vertically on the moving plate, the cooling fluid can easily pass between them, and the contact surface with the holder is also secured, and appropriate turbulence is generated, so the cooling efficiency is even better. . Furthermore, since the means for fixing the material to be processed and the means for cooling it are both used, there is no need for complicated parts and they do not interfere with each other's functions.Furthermore, the material to be processed can be simply placed on the holder and then operated from the outside. Therefore, it is easy to handle and can be automated.

Note that the above is an example of the present invention, and various changes can be made in practice. For example, although the above description has been made using an ion dry etching device as an example, the present invention can be applied to any device that requires cooling. Further, it may be used not only for cooling but also for constant temperature of the material to be processed, including heating. Furthermore, the cooling or constant-temperature fluid may be not only a gas but also a liquid, as long as the atmosphere in which it is used is not in a vacuum. Furthermore,
The small holes are not limited to the shape, number, and distribution as shown in the drawings, and can be changed arbitrarily, and the sealing member does not need to be slidably attached to the movable plate, but may be fixed.

[Brief explanation of drawings]

FIGS. 1 and 2 are cross-sectional views for explaining a conventional device, FIGS. 3 to 6 are views showing one embodiment of the present invention, and FIGS. 7 to 9 are views showing other embodiments of the present invention. It is a figure showing an example. 11: Holder for material to be processed, 12: Cavity part,
13: moving plate, 14, 16: small hole, 15: sheet-like soft material, 17: material to be treated, 18: spherical seal, 19: seal pin, 20: spring, 21: cylindrical body, 22: cylindrical part, 23, 25: pipe, 24,
26, 27, 32: valve, 28, 31: vacuum pump, 29: eccentric cam.

Claims (1)

[Scope of Claims] 1. A holder having a hollow portion inside and a large number of small holes communicating with the hollow portion on the upper surface, and a sheet-like shape placed on the holder and having small holes communicating with the small holes. an elastic member, a material to be processed placed on the elastic member, a movable plate holding a sealing member arranged in the cavity and closing the small hole, and a moving plate for opening and closing the small hole with the sealing member. A material holding device comprising a mechanism for moving a moving plate within a cavity, a means for evacuating the interior of the cavity, and a means for introducing cooling or constant temperature fluid into the cavity. 2. The material holding device according to claim 1, wherein the distance between the sealing member and the upper wall of the cavity is varied concentrically, and the moving range of the movable plate can be switched to a plurality of stages. 3. The material holding device according to claim 1 or 2, wherein a part of the introduction path for the cooling or constant temperature fluid introduced into the cavity is used to exhaust the inside of the cavity.