JPH0120645B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a continuous vacuum processing apparatus for continuously plasma processing plastic molded products, such as vinyl chloride resin films, in a vacuum state.

[Conventional technology]

As described in Japanese Unexamined Patent Application Publication No. 53-85741, conventional equipment has preliminary vacuum chambers placed before and after the vacuum processing chamber, and the vacuum pressure is lowered in stages to continuously vacuum process the workpiece. It was structured to do so.

[Problem to be solved by the invention]

In the above-mentioned conventional technology, when the object to be processed has low rigidity, such as a plastic film, when it is heated in a vacuum processing chamber, the object to be processed expands thermally and becomes loose.
If the material is transported as it is to the vacuum preliminary chamber at the rear, there are problems such as wrapping around the seal roll, wrinkles, etc., and even cutting of the material to be processed.

In view of the above-mentioned points, the present invention provides continuous vacuum processing that does not cause the workpiece to wrap around a seal roll or wrinkle, even if the workpiece becomes slack, and allows the tension of the workpiece to be constantly controlled at a set value. The purpose is to provide equipment.

[Means to solve the problem]

The above purpose is to provide a vacuum processing chamber and a pre-vacuum chamber before and after the vacuum processing chamber. In a vacuum continuous processing device in which the discharged workpiece is processed in a vacuum processing chamber and then wound up by a winding device,
tension detection means for detecting the tension of the object to be processed between the vacuum processing chamber and the rear preliminary vacuum chamber; and a tension detection means for detecting the tension of the object to be treated, and a device for increasing or decreasing the number of rotations of a seal roll in the rear preliminary vacuum chamber based on a signal from the detection means. This is achieved by including a control means for controlling the tension of the material to be treated to a set value.

[Effect]

When the detection means detects the tension of the workpiece, the detection signal is input to the control means, and if the tension is greater than the set value, the control means reduces the number of revolutions of the seal roll in the rear preliminary vacuum chamber to tighten the tension of the workpiece. By loosening the tension, and conversely increasing the number of rotations when the tension is smaller than the set value, and applying tension, the tension of the object to be processed always becomes the set value. When the workpiece is heated in the vacuum processing chamber, it undergoes thermal expansion, which appears as slack between the vacuum processing chamber and the rear preliminary chamber, so if the tension between this is detected and the tension is controlled to the set value. Wrapping around the seal roll and generation of wrinkles can be effectively prevented.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

1 and 2, 1 is a vacuum processing chamber in which a flexible workpiece F, such as a plastic film, for example, a vinyl chloride resin film, is subjected to continuous plasma treatment in a vacuum state; 2 is a vacuum processing chamber 1;
A plurality of preliminary vacuum chambers 3 are arranged on the front side of the vacuum processing chamber 1, and a plurality of preliminary vacuum chambers 3 are arranged on the rear side of the vacuum processing chamber 1 ^. It is evacuated through an exhaust pipe 5 to maintain a vacuum pressure of about ² torr. The inside of the preliminary vacuum chambers 2 and 3 is maintained at a vacuum pressure slightly higher than the vacuum pressure inside the vacuum processing chamber 1 by a vacuum pump 6 connected thereto, and gradually reduced from atmospheric pressure through an exhaust pipe 7. and evacuated.

The workpiece F to be processed is sent from the unwinding device 8 through the preliminary vacuum chamber 2 on the front side to the vacuum processing chamber 1, where it is subjected to plasma treatment, and then further passed through the preliminary vacuum chamber 3 on the rear side to the winding device. It is wound up at 9. 10 is a drive motor, and this drive motor 10 is connected to a line shaft 11 and continuously variable transmissions 12, 13, 1.
The driving force is transmitted to the vacuum processing chamber 1, the front and rear preliminary vacuum chambers 2, 3, and the winding device 9 via the vacuum chamber 1, the preliminary vacuum chambers 2, 3, and the winding device 9. The rotational speed of the system is appropriately adjusted by continuously variable transmissions 12-15.

The front and rear preliminary vacuum chambers 2 and 3 each include a pair of upper and lower seal rolls, a lip seal, a side seal, and a case.

FIG. 3 shows details of the vacuum processing chamber 1. The vacuum processing chamber 1 includes a drum-shaped negative electrode 16, and rod-shaped positive electrodes 17 arranged at intervals on the outer circumference of the negative electrode 16. , and guide rollers 18 that guide the workpiece F.

FIG. 4 shows an example of a means for detecting the tension of the transported workpiece F, and the tension detector 19 is
A detection roller 20 that contacts the workpiece F, a bearing unit 21 that supports this detection roller 20, and a differential transformer 22 that is connected to this bearing unit 21.
and a spring 23, and this tension detector 19 consists of two guide rollers 24a, 24b.
is set between. This tension detector 19 (in this embodiment, a known one is used, so the details of the structure are omitted) is such that, for example, when the tension of the workpiece F increases, the detection roller 20 resists the spring 23 and moves across the illustrated gap. When the detection roller 20 is pulled downward and the tension decreases, the detection roller 20 is pulled upward by the spring 23. Also, differential transformer 2
2 generates an output voltage according to the amount of movement of the detection roller 20.

5 and 6 show an example of the mounting position of the tension detector 19, which is installed between the vacuum processing chamber 1 and the rear preliminary vacuum chamber 3. FIG.

FIG. 7 is a block diagram showing the control system in the apparatus of the present invention.

In FIG. 7, 25 is a comparator, and this comparator 25 receives a setting signal A corresponding to the optimum tension of the workpiece F, that is, a set tension, and a detection signal corresponding to the actual tension detected by the tension detector 19. Compare B,
A deviation signal C between both signals A and B is supplied to the continuously variable transmission 14. The tension setting signal A is set in advance depending on the material, thickness, etc. of the workpiece F.

In the above configuration, when the tension of the workpiece F between the vacuum processing chamber 1 and the rear preliminary vacuum chamber 3 increases, the detection roller 20 of the tension detector 19 is pulled down against the spring 23 and this detection The amount of movement of the roller 20 is converted into voltage by a differential transformer 22. The comparator 25 compares the detection signal B and the setting signal A, and supplies a deviation signal C to the continuously variable transmission 14. At this time, the continuously variable transmission 14
The rotational speed of each seal roll in the preliminary vacuum chamber 3 is controlled in accordance with the deviation signal C from the comparator 25 so that the tension of the workpiece F is optimized. That is,
The rotational speed of the continuously variable transmission 14 is controlled to decrease so that the tension of the workpiece F being conveyed is reduced and the tension is optimized. When the deviation signal C from the comparator 25 reaches zero, the continuously variable transmission 14
Stops rotation speed control.

Furthermore, even when the tension of the workpiece F decreases, the tension of the workpiece F can be brought to an optimum state by the same detection and control as described above, but in this case, the continuously variable transmission 14 controlled in the direction of increasing.

In this way, the tension of the workpiece F being transported is detected, and the rotation speed of the continuously variable transmission is controlled according to the increase/decrease of the tension based on this detection signal, so that the optimum tension can be obtained. Problems such as meandering, wrinkles, getting caught in the seal roll, and cutting of the workpiece F are solved.

The tension detector 19 was installed between the vacuum processing chamber 1 and the rear pre-vacuum chamber 3, but the reason for this is that the heat treatment of the workpiece F is affected by the difference between the vacuum processing chamber 1 and the rear pre-vacuum chamber 3. This is because if the tension is controlled to a set value before conveying to the seal roll, winding around the seal roll and wrinkles can be prevented.

FIG. 8 shows an embodiment in which another vacuum processing chamber 1' is provided in addition to the vacuum processing chamber 1. In this case, it is effective to provide a tension detector 19 between the two vacuum processing chambers 1 and 1'. It is.

Furthermore, in one embodiment of the device of the present invention, a case where the rotation speed of a continuously variable transmission is controlled is explained, but the same effect as described above can be obtained when a variable motor is used instead of the continuously variable transmission. It is something to play.

〔Effect of the invention〕

According to the present invention, the detection means for detecting the tension of the object to be processed is provided at a position where it can be controlled most effectively, and the tension of the object to be processed is always controlled to the set value. Easy to wrap around seal rolls and prevents wrinkles.

[Brief explanation of drawings]

FIG. 1 is a schematic vertical sectional view showing an embodiment of the present invention, FIG. 2 is a schematic plan view of FIG. 1, FIG. 3 is a detailed view of the vacuum processing chamber in the present invention, and FIG. A schematic side view of the tension detector, FIGS. 5 and 6 are diagrams for explaining an example of the mounting position of the tension detector, FIG. 5 is a front view, FIG. 6 is a plan view of FIG. 5, FIG. 7 is a block diagram showing the tension control means in the present invention, and FIG. 8 is a diagram showing another example of the mounting position of the tension detector. 1... Vacuum processing chamber, 2, 3... Preliminary vacuum chamber, 8
...Unwinding device, 9... Winding device, 12, 13, 1
4, 15...Continuously variable transmission, 19...Tension detector,
20...Detection roller, 22...Differential transformer, 2
5... Comparator.

Claims (1)

[Claims] 1 Equipped with a vacuum processing chamber and preliminary vacuum chambers before and after it,
The preliminary vacuum chamber is formed by arranging a plurality of pairs of upper and lower seal rolls in the conveying direction of the workpiece, and after the workpiece is unwound by the unwinding device and processed in the vacuum processing chamber, the workpiece is unwound. In the continuous vacuum processing apparatus, the apparatus includes a tension detection means for detecting the tension of the object to be processed between the vacuum processing chamber and a rear preliminary vacuum chamber, and a tension detection means for detecting the tension of the object to be processed, and a tension detection means for detecting the tension of the object to be processed in the preliminary vacuum chamber based on a signal from the detection means. 1. A vacuum continuous processing apparatus, comprising: control means for controlling the tension of a workpiece to a set value by increasing or decreasing the number of rotations of a seal roll.