JPH0126530B2 - - Google Patents
Info
- Publication number
- JPH0126530B2 JPH0126530B2 JP56165034A JP16503481A JPH0126530B2 JP H0126530 B2 JPH0126530 B2 JP H0126530B2 JP 56165034 A JP56165034 A JP 56165034A JP 16503481 A JP16503481 A JP 16503481A JP H0126530 B2 JPH0126530 B2 JP H0126530B2
- Authority
- JP
- Japan
- Prior art keywords
- transfer
- feed
- attached
- pulse motor
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
- H10P72/3212—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips or lead frames
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
- H10P72/0604—Process monitoring, e.g. flow or thickness monitoring
Landscapes
- Control Of Conveyors (AREA)
- Die Bonding (AREA)
Description
【発明の詳細な説明】
本発明は、リードフレーム及びキヤリアの移送
装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a lead frame and carrier transfer device.
従来、リードフレーム及びキヤリアの移送装置
は、被移送体であるリードフレームやキヤリアの
移送量が、１枚の被移送体の中で数種類ある場
合、つまり、１枚の被移送体を異なる移送量で移
送する場合、機械的にストツパーを可変させた
り、或は、予め定められた所定の移送位置のとこ
ろに検出センサーを設けてこの検出センサの信号
によつてストツパーを調節することにより、移送
量の調節を行つている。このため移送開始や移送
停止を急激に行うと前述の移送機構が追従できな
くなり、移送精度が悪くなると共に、被移送体を
変形させたり或は移送ミスを起し、移送量の異な
る多種類の連続的な移送ができない問題があつ
た。 Conventionally, lead frame and carrier transfer devices have been used in cases where there are several types of lead frames and carriers to be transferred in one transferred object, that is, one transferred object can be transferred by different amounts. When transferring, the amount of transfer can be controlled by mechanically varying the stopper, or by providing a detection sensor at a predetermined transfer position and adjusting the stopper based on the signal from this detection sensor. Adjustments are being made. For this reason, if the transfer is suddenly started or stopped, the above-mentioned transfer mechanism will not be able to follow the transfer, which will deteriorate the transfer accuracy, deform the object to be transferred, or cause a transfer error, resulting in the transfer of many types of objects with different amounts of transfer. There was a problem where continuous transfer was not possible.
本発明は、かかる点に鑑みてなされたもので、
多種類の移送量で被移送体を連続的に且つ高い移
送精度で移送することができるリードフレーム及
びキヤリアの移送装置を提供するものである。 The present invention has been made in view of these points,
The present invention provides a lead frame and carrier transfer device that can continuously transfer objects to be transferred at various transfer amounts with high transfer accuracy.
以下、本発明の実施例について図面を参照して
説明する。 Embodiments of the present invention will be described below with reference to the drawings.
図は、本発明の一実施例の斜視図である。図中
１は、パルスモータである。パルスモータ１は、
所定間隔で壁板２ａ，２ｂを立設したブラケツト
２の一方の壁板２ａの外表面に取付けられてい
る。パルスモータ１の回転軸１ａは、この壁板２
ａを貫挿して対向する壁板２ｂにその先端部を取
付けて支持されている。回転軸１ａの周面には、
パルスモータ１の付根部を除いて螺旋状の送りね
じ１ｂが形成されている。回転軸１ａには、この
送りねじ１ｂを介して移送基体３が移動自在に取
付けられている。移送基体３は、その側面に取付
けられた１対のガイドローラ３ａ，３ｂでブラケ
ツト２の壁板２ａ，２ｂ間に架設されたガイド棒
４を挾持しながら、回転軸１ａの回転によつて回
転軸１ａ上を前後進するようになつている。移送
基体３の下面には、１対の検出板５ａ，５ｂが取
付けられている。検出板５ａ，５ｂは、移送基体
３が原点位置に設定されたときにブラケツト２の
側部に設けられた位置検出センサ６ａ，６ｂの検
出溝６a1，６b2内に挿入されて移送基体３の位置
を検出するようになつている。この検出板５ａ，
５ｂと位置検出センサ６ａ，６ｂとで位置検出器
７が構成されており、位置検出器７の出力信号
は、パルスモータ１の回転数、回転方向及び後述
する送り爪ホルダー１２の回転動作を制御する制
御回路（図示せず）に供給されるようになつてい
る。また、回転軸１ａの付根部の送りねじ１ｂの
形成されていない部分には、円板の周縁部の一部
分に切欠き８ａを形成した計数板８ｂが取付けら
れている。計数板８ｂの上方には、計数板８ｂの
周縁部が挿入される計数溝８ｃを有する計数器８
ｄが設けられている。計数板８ｂと計数器８ｄに
て回転数計数器８が構成されており、切欠き８ａ
が計数溝８ｃを通過した回数から回転軸１ａの回
転数を計数するようになつている。回転数計数器
８の出力信号は、制御回路に供給されるようにな
つている。移送基体３上には支持柱９が立設され
ている。支持柱９の先端部には、リードフレーム
やキヤリア等の被移送体１０の移送方向に沿つて
送りシヤフト１１が貫挿されている。送りシヤフ
ト１１には、支持柱９を挾むようにして１対の送
り爪ホルダー１２が送り方向と直交する平面に沿
つて回動自在に取付けられている。送り爪ホルダ
ー１２の先端部には、被移送体１０に送り量に等
しい間隔Ａ…Ｄで穿設された送り穴１０ａに嵌入
する送り爪１２ａが取付けられている。送り爪１
２ａは、送りシヤフト１１の先端部に取付けられ
たレバー１３によつて送り穴１０ａ内に出入する
ようになつており、レバー１３に取付けられたば
ね１４によつて送り穴１０ａ方向に押し付けられ
ている。また、送りシヤフト１１は、送りシヤフ
ト１１に挿着されたスライドベアリング１５によ
つて図示しない筐体に保持されている。支持柱９
は、その下部を移送基体３上に設けられたナツト
１６に当接して、かつ支持柱９と筐体間に取付け
られたばね１７によつて、原点位置からパルスモ
ータ１と離間する方向に移動した移送基体３を、
ばね１７の戻り力によつて原点位置に戻すように
なつている。 The figure is a perspective view of one embodiment of the invention. 1 in the figure is a pulse motor. The pulse motor 1 is
It is attached to the outer surface of one wall plate 2a of a bracket 2, which has wall plates 2a and 2b erected at predetermined intervals. The rotation shaft 1a of the pulse motor 1 is connected to this wall plate 2.
The distal end portion is attached to and supported by the opposing wall plate 2b through which it is inserted. On the circumferential surface of the rotating shaft 1a,
A spiral feed screw 1b is formed except for the base of the pulse motor 1. A transfer base 3 is movably attached to the rotating shaft 1a via the feed screw 1b. The transfer base 3 is rotated by the rotation of the rotating shaft 1a while a guide rod 4 installed between the wall plates 2a and 2b of the bracket 2 is held between a pair of guide rollers 3a and 3b attached to its side surface. It is designed to move forward and backward on the shaft 1a. A pair of detection plates 5a and 5b are attached to the lower surface of the transfer base 3. The detection plates 5a and 5b are inserted into the detection grooves 6a 1 and 6b 2 of the position detection sensors 6a and 6b provided on the sides of the bracket 2 when the transfer base 3 is set at the origin position. It is designed to detect the position of This detection plate 5a,
5b and position detection sensors 6a and 6b, a position detector 7 is configured, and the output signal of the position detector 7 controls the rotation speed and rotation direction of the pulse motor 1, and the rotation operation of the feed claw holder 12, which will be described later. The control circuit (not shown) is adapted to supply the signal to a control circuit (not shown). Further, a counter plate 8b having a notch 8a formed in a portion of the peripheral edge of a disc is attached to a portion of the base of the rotating shaft 1a where the feed screw 1b is not formed. Counter 8 has a counting groove 8c above the counting plate 8b into which the peripheral edge of the counting plate 8b is inserted.
d is provided. The number plate 8b and the counter 8d constitute the rotation speed counter 8, and the notch 8a
The number of rotations of the rotating shaft 1a is counted from the number of times that the rotating shaft 1a passes through the counting groove 8c. The output signal of the rotation speed counter 8 is supplied to a control circuit. A support column 9 is erected on the transfer base 3. A feed shaft 11 is inserted through the tip of the support column 9 along the direction of transfer of an object 10 such as a lead frame or a carrier. A pair of feed pawl holders 12 are attached to the feed shaft 11 so as to be rotatable along a plane perpendicular to the feed direction so as to sandwich the support column 9 therebetween. A feed pawl 12a is attached to the tip of the feed pawl holder 12 to fit into a feed hole 10a formed in the object 10 at intervals A to D equal to the feed amount. Feed claw 1
2a is moved in and out of the feed hole 10a by a lever 13 attached to the tip of the feed shaft 11, and is pressed in the direction of the feed hole 10a by a spring 14 attached to the lever 13. . Further, the feed shaft 11 is held in a housing (not shown) by a slide bearing 15 inserted into the feed shaft 11. Support pillar 9
is moved in a direction away from the pulse motor 1 from its origin position by abutting its lower part against a nut 16 provided on the transfer base 3 and by a spring 17 attached between the support column 9 and the housing. The transfer base 3,
The return force of the spring 17 returns it to the original position.
このように構成されたリードフレーム及びキヤ
リアの移送装置１８は、次のようにして被移送体
１０の移送を行う。 The lead frame and carrier transfer device 18 configured as described above transfers the object 10 to be transferred in the following manner.
例えば、４枚の被移送体１０を異なる移送量Ａ
…Ｄで移送する場合、予め制御回路に移送量Ａ…
Ｄの移送条件を記憶させておく。次いで、レバー
１３を回転させて送り爪ホルダー１２を被移送体
１０側に降下し、ばね１４の力によつて送り爪１
２ａを送り穴１０ａに嵌入させる。次いで、制御
回路の指示によつてパルスモータ１の回転軸１ａ
を所定方向Ｒに回転させる。回転軸１ａの回転に
よつて移送基体３は、原点位置からパルスモータ
１と離間する方向F1に移動する。パルスモータ
１は、制御回路の指示に従つて例えば移送量Ａだ
け移送基体３を移送したところで回転を停止す
る。つまり、被移送体１０は、移送量Ａだけ移送
される。次に、送り爪ホルダー１２を被移送体１
０から離間する方向に回転せしめて送り爪１２ｄ
を被移送体１０から離間させる。次いで、制御回
路によつてパルスモータ１を逆回転R′せしめる。
この逆回転によつて被移送体３は、回転軸１ａ上
を後進して原点位置まで戻ると、検出板５ａ，５
ｂが検出溝６a1，６a2に挿入され位置検出器７は
移送基体３が原点位置に戻つたことを制御回路に
知らせパルスモータ１を減速させる。 For example, four objects 10 to be transported may be transported by different amounts A.
...When transferring by D, the control circuit is preliminarily programmed to transfer the amount A...
The transfer conditions of D are memorized. Next, the lever 13 is rotated to lower the feed claw holder 12 toward the transferred object 10, and the force of the spring 14 causes the feed claw holder 12 to be lowered toward the transferred object 10.
2a is inserted into the feed hole 10a. Next, the rotation shaft 1a of the pulse motor 1 is rotated according to instructions from the control circuit.
is rotated in a predetermined direction R. Due to the rotation of the rotating shaft 1a, the transfer base 3 moves in the direction F1 away from the pulse motor 1 from the origin position. The pulse motor 1 stops rotating after transferring the transfer base 3 by a transfer amount A, for example, in accordance with instructions from the control circuit. In other words, the object to be transported 10 is transported by the transport amount A. Next, the feed claw holder 12 is attached to the transferred object 1.
The feed claw 12d is rotated in a direction away from 0.
is separated from the transferred object 10. Next, the control circuit causes the pulse motor 1 to rotate in reverse R'.
Due to this reverse rotation, the transferred object 3 moves backward on the rotating shaft 1a and returns to the origin position, and then the detection plates 5a, 5
b is inserted into the detection grooves 6a 1 and 6a 2 , and the position detector 7 notifies the control circuit that the transfer base 3 has returned to the original position and decelerates the pulse motor 1.
次いで、計数板８ｂが計数溝８ｃに挿入したと
ころで回転数計数器８は所定の出力信号を制御回
路に供給し、パルスモータ１の回転を完全に停止
させる。 Next, when the counting plate 8b is inserted into the counting groove 8c, the rotational speed counter 8 supplies a predetermined output signal to the control circuit to completely stop the rotation of the pulse motor 1.
以下、同様の操作を繰り返すことにより、被移
送体１０を異なる移送量Ａ…Ｄで連続的にかつ高
い移送精度で所定位置まで容易に移送することが
できる。 Thereafter, by repeating the same operation, the object to be transported 10 can be easily transported to a predetermined position with different transport amounts A to D continuously and with high transport accuracy.
尚、被移送体１０の移送速度は、パルスモータ
１のモータトルク、移送精度及びパルスモータ１
の脱調に注意して容易に所定値に設定することが
できる。また、パルスモータ１０の立上り及び立
下り、パルス発振数を制御回路にて調整しておく
ことにより、被移送体１０の移送時の振動を小さ
くできると共に、移送速度の変化時に起きやすい
誤移送を容易に回避することができるのは勿論の
ことである。 Note that the transfer speed of the transferred object 10 depends on the motor torque of the pulse motor 1, the transfer accuracy, and the pulse motor 1.
This can be easily set to a predetermined value while being careful not to lose synchronization. In addition, by adjusting the rise and fall of the pulse motor 10 and the number of pulse oscillations using the control circuit, it is possible to reduce vibrations during the transfer of the transferred object 10, and to prevent erroneous transfer that is likely to occur when the transfer speed changes. Of course, this can be easily avoided.
以上説明した如く、本発明に係るリードフレー
ム及びキヤリアの移送装置によれば、被移送体を
多種類の移送量で連続的に且つ高い移送精度で移
送することができる等顕著な効果を有するもので
ある。 As explained above, the lead frame and carrier transfer device according to the present invention has remarkable effects such as being able to transfer objects continuously and with high transfer accuracy at various transfer amounts. It is.
図は、本発明の一実施例の斜視図である。
１…パルスモータ、１ａ…回転軸、２ａ，２ｂ
…壁板、２…ブラケツト、３…移送基体、３ａ，
３ｂ…ガイドローラ、４…ガイド棒、５ａ，５ｂ
…検出板、６ａ，６ｂ…位置検出センサ、７…位
置検出器、８ａ…切欠き、８ｂ…計数板、８Ｃ…
計数溝、８…回転数計数器、９…支持柱、１０…
被移送体、１１…送りシヤフト、１２…送り爪ホ
ルダー、１３…レバー、１４…ばね、１５…スラ
イドベアリング、１６…ナツト、１７…ばね。
The figure is a perspective view of one embodiment of the invention. 1...Pulse motor, 1a...Rotating shaft, 2a, 2b
...Wall plate, 2...Bracket, 3...Transfer base, 3a,
3b...Guide roller, 4...Guide rod, 5a, 5b
...Detection plate, 6a, 6b...Position detection sensor, 7...Position detector, 8a...Notch, 8b...Counter plate, 8C...
Counting groove, 8... Rotation counter, 9... Support column, 10...
Transferred object, 11...Feeding shaft, 12...Feeding claw holder, 13...Lever, 14...Spring, 15...Slide bearing, 16...Nut, 17...Spring.
Claims (1)
後進自在に取付けられた移送基体と、該移送基体
の位置を検出する位置検出器と、前記回転軸の回
転数を計数する回転数計数器と、前記移送基体に
立設された支持柱と、該支持柱に被移送体の移送
方向に沿つて取付けられた送りシヤフトと、該送
シヤフトに移送方向と直交する平面に沿つて回動
自在に取付けられた送り爪ホルダーと、該送り爪
ホルダーに取付けられ前記被移送体の送り穴に嵌
入される送り爪と、前記位置検出器の出力信号と
前記回転数計数器の出力信号を受信して前記パル
スモータの回転数、回転方向及び前記送り爪ホル
ダーの回転動作を制御する制御回路とを具備する
ことを特徴とするリードフレーム及びキヤリアの
移送装置。1. A transfer base attached to the rotating shaft of a pulse motor via a feed screw so as to be movable back and forth, a position detector for detecting the position of the transfer base, and a rotation speed counter for counting the number of rotations of the rotating shaft. , a support column erected on the transfer base, a feed shaft attached to the support column along the transfer direction of the transferred object, and a feed shaft rotatable along a plane perpendicular to the transfer direction. receiving the attached feed claw holder, the feed claw attached to the feed claw holder and fitted into the feed hole of the transferred object, the output signal of the position detector, and the output signal of the rotation speed counter; A lead frame and carrier transfer device characterized by comprising a control circuit that controls the rotation speed and rotation direction of the pulse motor and the rotation operation of the feed claw holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56165034A JPS5866341A (en) | 1981-10-16 | 1981-10-16 | Transferring device of lead frame and carrier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56165034A JPS5866341A (en) | 1981-10-16 | 1981-10-16 | Transferring device of lead frame and carrier |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5866341A JPS5866341A (en) | 1983-04-20 |
| JPH0126530B2 true JPH0126530B2 (en) | 1989-05-24 |
Family
ID=15804572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56165034A Granted JPS5866341A (en) | 1981-10-16 | 1981-10-16 | Transferring device of lead frame and carrier |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5866341A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60145141U (en) * | 1984-03-09 | 1985-09-26 | 株式会社東芝 | IC frame transport and alignment device |
| JPS6197836U (en) * | 1984-11-30 | 1986-06-23 |
-
1981
- 1981-10-16 JP JP56165034A patent/JPS5866341A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5866341A (en) | 1983-04-20 |
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