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JPH0129354B2 - - Google Patents
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JPH0129354B2 - - Google Patents

Info

Publication number
JPH0129354B2
JPH0129354B2 JP57201524A JP20152482A JPH0129354B2 JP H0129354 B2 JPH0129354 B2 JP H0129354B2 JP 57201524 A JP57201524 A JP 57201524A JP 20152482 A JP20152482 A JP 20152482A JP H0129354 B2 JPH0129354 B2 JP H0129354B2
Authority
JP
Japan
Prior art keywords
ultrasonic
ultrasonic transducer
waveform
electric field
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57201524A
Other languages
Japanese (ja)
Other versions
JPS5991795A (en
Inventor
Shuzo Wadaka
Fumio Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57201524A priority Critical patent/JPS5991795A/en
Publication of JPS5991795A publication Critical patent/JPS5991795A/en
Publication of JPH0129354B2 publication Critical patent/JPH0129354B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Description

【発明の詳細な説明】 この発明は、非破壊検査や医療診断等に用いら
れる超音波探触子に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultrasonic probe used for nondestructive testing, medical diagnosis, and the like.

従来のこの種の超音波探触子は、例えば、第1
図に示すように、1ケの超音波振動子1を用い、
超音波振動子1の一方の音響放射面2上にバツキ
ング材3を設け、他方の音響放射面2上に一層あ
るいは多層の音響インピーダンス変成層4を設け
て構成されていた。なお5はリード線である。
Conventional ultrasonic probes of this type, for example,
As shown in the figure, using one ultrasonic transducer 1,
A backing material 3 was provided on one acoustic radiation surface 2 of the ultrasonic transducer 1, and a single or multilayer acoustic impedance modification layer 4 was provided on the other acoustic radiation surface 2. Note that 5 is a lead wire.

この種の超音波探触子は、超音波振動子1をイ
ンパルス励振し、短パルス幅の超音波パルスを送
受信して距離分解能よく被検材を検査する、いわ
ゆる、パルスエコー法による検査に用いられるば
かりでなく、レーダ等のマイクロ波の分野で広く
用いられている、いわゆる、パルス圧縮技術を適
用した検査にも用いられる。
This type of ultrasonic probe is used for inspection using the so-called pulse echo method, in which the ultrasonic transducer 1 is excited with impulses and transmits and receives ultrasonic pulses with a short pulse width to inspect the test material with good distance resolution. It is also used for inspections that apply so-called pulse compression technology, which is widely used in the field of microwaves such as radar.

第2図は、パルス圧縮技術を適用した検査にお
いて、被検材内へ送波される超音波の波形の一例
を示したものである。
FIG. 2 shows an example of the waveform of an ultrasonic wave transmitted into a material to be inspected in an inspection using pulse compression technology.

第2図に示すように、送波される超音波は、正
弦波を、2値の凝似不規則信号、例えば、
Barker系列等で例えば位相変調したものである。
As shown in FIG. 2, the transmitted ultrasonic wave is a sine wave, a binary condensed irregular signal,
For example, it is phase modulated using a Barker sequence or the like.

第2図では一例として正符号+と負符号−とか
らなる長さ4の擬似不規則符号系列(++−+)
の各符号に対応して、(0゜、0゜、180゜、0゜)の位相
変調をかけた波形を送波している場合を示す。つ
まり、正符号に0°、負符号に180゜を対応させてい
る。
In Fig. 2, as an example, a pseudo-irregular code sequence (++-+) of length 4 consisting of a positive sign + and a negative sign -
This shows the case where a waveform is transmitted with phase modulation of (0°, 0°, 180°, 0°) corresponding to each code. In other words, 0° corresponds to a positive sign, and 180° corresponds to a negative sign.

さて、従来のこの種の超音波探触子は、1ケの
超音波振動子1を用いて構成していたため、第2
図に示すような波形の超音波を得るには、超音波
振動子1を、第2図に示すような励振波形で励振
する必要があつた。このため超音波探触子以外
に、特別の励起用外部回路を必要とする欠点があ
つた。
Now, since the conventional ultrasonic probe of this type was constructed using one ultrasonic transducer 1,
In order to obtain ultrasonic waves having a waveform as shown in the figure, it was necessary to excite the ultrasonic transducer 1 with an excitation waveform as shown in FIG. For this reason, there was a drawback that a special excitation external circuit was required in addition to the ultrasonic probe.

また、同様に被検材内欠陥等からの反射エコー
を復調処理する際にも、特別の受信信号処理用外
部回路を必要とする欠点があつた。
Similarly, when demodulating reflected echoes from defects in the inspected material, a special external circuit for processing received signals is required.

この発明は、複数個の超音波振動子1を、各超
音波振動子1の音響放射面2どうしを対応させ積
重ねて配列し、各超音波振動子1に印加される電
界方向が不規則となるようにして、上述した欠点
を解決したものであり、以下第3図に示す一実施
例を用いて詳細に説明する。
In the present invention, a plurality of ultrasonic transducers 1 are stacked and arranged so that the acoustic radiation surfaces 2 of each ultrasonic transducer 1 correspond to each other, and the direction of the electric field applied to each ultrasonic transducer 1 is irregular. This solves the above-mentioned drawbacks, and will be explained in detail below using an embodiment shown in FIG.

第3図は、この発明に係る超音波探触子の一実
施例の構成図であり、8ケの超音波振動子1を、
各超音波波振動子1の音響放射面2どうしを対向
させ積重ねて配列している。
FIG. 3 is a block diagram of an embodiment of the ultrasonic probe according to the present invention, in which eight ultrasonic transducers 1 are
The acoustic radiation surfaces 2 of each ultrasonic wave transducer 1 are stacked and arranged so as to face each other.

3は従来と同様のパツキング材、4は従来と同
様の音響インピーダンス変成層である。
3 is a packing material similar to the conventional one, and 4 is an acoustic impedance change layer similar to the conventional one.

5はリード線であり、各超音波振動子1からの
リード線5の取出し面は、第2図に示した
Barker系列に沿つて変えており、第3図に示す
ように結線している。6は厚さが波長に比べて十
分薄い絶縁膜である。
5 is a lead wire, and the extraction surface of the lead wire 5 from each ultrasonic transducer 1 is shown in FIG.
It is changed according to the Barker series, and the wires are connected as shown in Figure 3. 6 is an insulating film whose thickness is sufficiently thin compared to the wavelength.

さて、この発明に係る超音波探触子をインパル
ス励振すれば、各超音波振動子1は、厚さが半波
長となる共振周波数の超音波を励振する。
Now, when the ultrasonic probe according to the present invention is subjected to impulse excitation, each ultrasonic transducer 1 excites an ultrasonic wave having a resonant frequency whose thickness is half a wavelength.

第3図に示すようにリード線5を結線し、各超
音波振動子1に印加される電界方向を各超音波振
動子1ごとに変えているため、従来一般に行なわ
れているインパルス励振をすることにより、被検
材内へ送波される超音波の波形は第2図に示した
ものと同一となる。つまり、第3図において、各
超音波振動子1には図中矢印で示す方向の電界が
加わる。各超音波振動子1は半波励起されるが、
そのとき励振される波の位相は電界方向が逆のと
ころでは180゜位相が異なる。したがつて、第3図
中左側に示すような波形が励振され、これが被検
材内へ送波されることとなる。
As shown in FIG. 3, the lead wires 5 are connected and the direction of the electric field applied to each ultrasonic transducer 1 is changed for each ultrasonic transducer 1, making it possible to perform impulse excitation, which is commonly done in the past. As a result, the waveform of the ultrasonic waves transmitted into the specimen material becomes the same as that shown in FIG. 2. That is, in FIG. 3, an electric field is applied to each ultrasonic transducer 1 in the direction indicated by the arrow in the figure. Each ultrasonic transducer 1 is excited by a half wave,
The phase of the waves excited at that time differs by 180° where the electric field direction is opposite. Therefore, a waveform as shown on the left side of FIG. 3 is excited, and this wave is transmitted into the specimen material.

この波形は第2図と同じである。すなわち、こ
の発明に係る超音波探触子では、従来のように、
特別の励振用外部回路を必要とせず、パルス圧縮
技術を適用した検査で必要な波形を実現できる。
また、この発明に係る超音波探触子では、同様に
被検材内欠陥等からの反射エコーも、特別の受信
信号処理用外部回路を必要とせず、復調処理でき
ることも明らかである。
This waveform is the same as in FIG. That is, in the ultrasonic probe according to the present invention, as in the conventional case,
No special external excitation circuit is required, and the required waveform can be achieved by testing using pulse compression technology.
Furthermore, it is clear that the ultrasonic probe according to the present invention can similarly demodulate echoes reflected from defects in the test material without requiring a special external circuit for processing received signals.

なお、以上は第3図の一実施例の場合について
説明したが、各超音波振動子1に印加する電界方
向は、他のBarker系列あるいはM系列などの凝
似不規則信号に沿つて変えてもよい。
The above description has been given for the case of one embodiment shown in FIG. 3, but the direction of the electric field applied to each ultrasonic transducer 1 may be changed along other condensed irregular signals such as Barker series or M series. Good too.

また、この発明は、被検材表面に対して斜めに
超音波を送受信する斜角形超音波探触子や、被検
材表面に沿つて超音波を送受信する表面波探触子
に適用してもよい。
Furthermore, the present invention can be applied to an oblique ultrasonic probe that transmits and receives ultrasonic waves obliquely to the surface of a test material, and a surface wave probe that transmits and receives ultrasound along the surface of a test material. Good too.

以上のように、この発明に係る超音波探触子で
は、複数個の超音波振動子1を、各超音波振動子
1の音響放射面2どうしを対向させ積重ねて配列
し、各超音波振動子1に印加する電界方向が不規
則となるようにして構成したことにより、従来の
ように特別な外部回路を必要とせず、パルス圧縮
技術を適用した検査を行える利点がある。
As described above, in the ultrasonic probe according to the present invention, a plurality of ultrasonic transducers 1 are stacked and arranged with the acoustic radiation surfaces 2 of each ultrasonic transducer 1 facing each other, and each ultrasonic vibration By configuring the device so that the direction of the electric field applied to the sensor 1 is irregular, there is an advantage that inspection using pulse compression technology can be performed without requiring a special external circuit unlike the conventional method.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の超音波探触子を示す構成図、第
2図は超音波の波形図、第3図はこの発明に係る
超音波探触子の一実施例を示す構成図でである。
図中、1は超音波振動子、2は音響放射面、3は
バツキング材、4は音響インピーダンス変成層、
5はリード線、6は絶縁膜である。なお、図中、
同一あるいは相当部分には同一符号を付して示し
てある。
FIG. 1 is a configuration diagram showing a conventional ultrasound probe, FIG. 2 is an ultrasound waveform diagram, and FIG. 3 is a configuration diagram showing an embodiment of an ultrasound probe according to the present invention. .
In the figure, 1 is an ultrasonic transducer, 2 is an acoustic radiation surface, 3 is a backing material, 4 is an acoustic impedance transformation layer,
5 is a lead wire, and 6 is an insulating film. In addition, in the figure,
Identical or equivalent parts are designated by the same reference numerals.

Claims (1)

【特許請求の範囲】[Claims] 1 複数個の超音波振動子を、上記各超音波振動
子の音響放射面どうしを対向させ積重ねて配列
し、上記各超音波振動子に印加される電界方向
を、正符号と負符号とからなる擬似不規則符号系
列の各符号に対応して変化させるようにしたこと
を特徴とする超音波探触子。
1 A plurality of ultrasonic transducers are stacked and arranged with the acoustic radiation surfaces of each ultrasonic transducer facing each other, and the direction of the electric field applied to each ultrasonic transducer is determined from a positive sign and a negative sign. An ultrasonic probe characterized in that the probe changes in response to each code of a pseudo-irregular code series.
JP57201524A 1982-11-17 1982-11-17 Ultrasonic wave probe Granted JPS5991795A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57201524A JPS5991795A (en) 1982-11-17 1982-11-17 Ultrasonic wave probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57201524A JPS5991795A (en) 1982-11-17 1982-11-17 Ultrasonic wave probe

Publications (2)

Publication Number Publication Date
JPS5991795A JPS5991795A (en) 1984-05-26
JPH0129354B2 true JPH0129354B2 (en) 1989-06-09

Family

ID=16442468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57201524A Granted JPS5991795A (en) 1982-11-17 1982-11-17 Ultrasonic wave probe

Country Status (1)

Country Link
JP (1) JPS5991795A (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5489721A (en) * 1977-12-27 1979-07-17 Nec Corp Compound type transmitter-receiver

Also Published As

Publication number Publication date
JPS5991795A (en) 1984-05-26

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