JPH0132445B2 - - Google Patents
Info
- Publication number
- JPH0132445B2 JPH0132445B2 JP59114816A JP11481684A JPH0132445B2 JP H0132445 B2 JPH0132445 B2 JP H0132445B2 JP 59114816 A JP59114816 A JP 59114816A JP 11481684 A JP11481684 A JP 11481684A JP H0132445 B2 JPH0132445 B2 JP H0132445B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic material
- soft magnetic
- pressure
- outer ring
- pressure transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/16—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in the magnetic properties of material resulting from the application of stress
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、圧力をインダクタンス値変化として
検出する圧力トランスデユーサに関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a pressure transducer that detects pressure as a change in inductance value.
従来例の構成とその問題点
近年、センサはマイクロプロセツサ入力用とし
て要望が多く、特に圧力センサに対するニーズは
極めて高い。しかしながら、安価で正確なものは
現在なく、例えば半導体圧力センサでは温度特性
が安定しておらず、静電容量方式は精度の点で問
題があり、歪ゲージ方式は高価である等の問題点
をかかえている。Conventional configuration and its problems In recent years, there have been many requests for sensors for input to microprocessors, and in particular, the need for pressure sensors is extremely high. However, there are currently no inexpensive and accurate sensors; for example, semiconductor pressure sensors have unstable temperature characteristics, capacitance sensors have problems with accuracy, and strain gauge sensors are expensive. I'm holding it.
発明の目的
本発明は上記従来の欠点を解消するもので、磁
歪現象が、新材料アモルフアス磁性合金により初
めて実用レベルで利用可能となる事を見とおし、
ならびにアモルフアス磁性合金が安価で多量に供
給できる事実をふまえ、アモルフアス磁性合金の
磁歪を用いた、安価で精度の高い圧力トランスデ
ユーサを提供することを目的とする。Purpose of the Invention The present invention is intended to eliminate the above-mentioned conventional drawbacks, and it is based on the perspective that the magnetostriction phenomenon can be utilized on a practical level for the first time with a new material, an amorphous magnetic alloy.
Furthermore, based on the fact that amorphous magnetic alloys can be supplied at low cost and in large quantities, it is an object of the present invention to provide an inexpensive and highly accurate pressure transducer using the magnetostriction of amorphous magnetic alloys.
発明の構成
上記目的を達成するため、本発明の圧力トラン
スデユーサは、円形底部と、この円形底部の一方
の面の外周縁部から突出した環状の外環壁と前記
円形底部の一方の面の中心部から突出しかつ先端
面が前記外環壁の先端面と同一面内に位置する円
柱状突出部とからなる軟磁性体と、前記外環壁と
円柱状突出部の先端面に当接して前記軟磁性体の
開口を覆う磁歪を有するアモルフアス磁性材料
と、前記軟磁性体の外環壁と円柱状突出部との間
〓に設置されたコイルと、前記軟磁体に前記コイ
ルの端子を取り出す透孔が設けられたものであ
る。Structure of the Invention In order to achieve the above object, the pressure transducer of the present invention includes a circular bottom, an annular outer ring wall protruding from an outer peripheral edge of one surface of the circular bottom, and a pressure transducer of the present invention. a soft magnetic body consisting of a cylindrical protrusion that protrudes from the center and whose distal end surface is located in the same plane as the distal end surface of the outer annular wall; an amorphous magnetic material having magnetostriction that covers the opening of the soft magnetic body; a coil installed between the outer annular wall of the soft magnetic body and the cylindrical protrusion; and a terminal of the coil on the soft magnetic body. It has a through hole for taking it out.
実施例の説明
以下、本発明の一実施例について、図面に基づ
いて説明する。DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.
第１図Ａは本発明の一実施例における圧力トラ
ンスデユーサの平面図、同図Ｂは同断面図で、１
は磁歪を有するアモルフアス磁性合金の円板、２
は中心部に先端面が外環壁２ａの先端面と同一面
内に位置する円柱状突出部２ｂを有するつぼ形軟
磁性体、３は前記円柱状突出部２ｂに巻かれたコ
イル、４はコイルの端子を取り出す小孔である。
アモルフアス磁性合金の円板１と軟磁性体２とは
磁気回路を構成し、コイル３によりそのインダク
タンスが測定できる様になつている。 FIG. 1A is a plan view of a pressure transducer according to an embodiment of the present invention, and FIG. 1B is a sectional view of the same.
is a disk of amorphous magnetic alloy having magnetostriction, 2
3 is a pot-shaped soft magnetic material having a cylindrical protrusion 2b in the center whose tip surface is located in the same plane as the tip surface of the outer ring wall 2a; 3 is a coil wound around the cylindrical protrusion 2b; 4 is a coil wound around the cylindrical protrusion 2b; This is a small hole for taking out the coil terminal.
The amorphous magnetic alloy disk 1 and the soft magnetic material 2 constitute a magnetic circuit, and the inductance thereof can be measured using a coil 3.
この圧力トランスデユーサにおいて、圧力Ｐが
第１図に示す様に加えられると、アモルフアス磁
性合金の円板１は、軟磁性体２の環状の溝部で下
方に押し下げられて変形し、その結果内部応力が
発生する。すると磁歪効果により、アモルフアス
磁性合金の円板１の透磁率が変化し、コイル３に
より検出されるインダクタンス値もそれに伴なつ
て変化する。この変化を検出する事により、被測
定圧力が測定できることになる。 In this pressure transducer, when pressure P is applied as shown in FIG. Stress occurs. Then, due to the magnetostrictive effect, the magnetic permeability of the amorphous magnetic alloy disk 1 changes, and the inductance value detected by the coil 3 changes accordingly. By detecting this change, the pressure to be measured can be measured.
この様に構成された圧力トランスデユーサにお
いては、次の様なアモルフアス磁性合金の特徴が
生かされ、従来にない多くの利点をもつものとな
る。すなわち、
機械的強度が大きく（200〜300Kg／mm2）、従
来金属のそれを凌ぎ（ステンレス鋼で60Kg／
mm2）、かつ塑性変形が生じない。これにより、
過大入力に極めて強い圧力トランスデユーサと
なる。 A pressure transducer configured in this manner takes advantage of the following characteristics of the amorphous magnetic alloy, and has many advantages not found in the past. In other words, it has high mechanical strength (200-300Kg/mm 2 ), surpassing that of conventional metals (60Kg/mm 2 for stainless steel).
mm 2 ), and no plastic deformation occurs. This results in
This is a pressure transducer that is extremely resistant to excessive input.
磁歪効果の大きいものが作成でき、特にFe
系のものは飽和磁歪入ｓが約30×10-6と大き
い。このような材料は発生する応力に対する透
磁率の変化が大きい。特にアモルフアス合金は
初透磁率が大きいためその変化は極めて大き
く、よつて感度のよいトランスデユーサとな
る。 It is possible to create materials with a large magnetostrictive effect, especially Fe.
The saturation magnetostriction input s of the system is as large as approximately 30×10 -6 . Such materials have a large change in magnetic permeability with respect to generated stress. In particular, since amorphous alloys have a large initial magnetic permeability, the change in the permeability is extremely large, and therefore a transducer with high sensitivity is obtained.
結晶粒界、転位、積層欠陥がなく、異相析
出、偏析もない化学的均一物質であり、非常に
高い耐蝕性を示す。この事により、腐蝕性ガス
や液体の圧力を直接測定可能となり、正確な測
定ができる。また構成も簡略化でき、価格及び
信頼性の上で大きなメリツトとなる。 It is a chemically homogeneous substance with no grain boundaries, dislocations, stacking faults, foreign phase precipitation, or segregation, and exhibits extremely high corrosion resistance. This makes it possible to directly measure the pressure of corrosive gases and liquids, allowing for accurate measurements. Furthermore, the configuration can be simplified, which has great advantages in terms of cost and reliability.
透磁率が高く優れた軟磁性材料である。その
ため磁気回路を構成しやすく、漏れ磁束等を考
慮する必要がなく、設計が極めて簡単になる。 It is an excellent soft magnetic material with high magnetic permeability. Therefore, the magnetic circuit is easy to configure, there is no need to consider leakage magnetic flux, etc., and the design is extremely simple.
第２図は第１図に示す圧力トランスデユーサを
含む非安定マルチバイブレータ回路を有する圧力
センサの回路ブロツク図で、５は測定用標準イン
ダクタンスであり、インダクタンス値をl1とす
る。６は第１図に示した圧力トランスデユーサ
で、そのインダクタンス値をl2とする。７，８は
発振用帰還容量で、その容量値はC1，C2である。
９，１０は発振用帰還抵抗で、その抵抗値はr1，
r2である。１１，１２はスイツチング用トランジ
スタ、１３，１４はエミツタ電流逆流阻止ダイオ
ードである。以上で非安定マルチバイブレータが
構成される。１５はトランジスタ１１の導通時に
コレクタ電圧が低レベルになる時間長T1を測定
する回路、１６はトランジスタ１２の導通時にコ
レクタ電圧が低レベルになる時間長T2を測定す
る回路である。１７は時間長T1，T2を測定する
回路１５，１６より送られた時間長T1，T2を用
いてl2の変化を検出し、それより圧力値を演算出
力する回路である。i1，i2はインダクタンス素子
５，６を流れる電流である。この非安定マルチバ
イブレータ部では、発振時に容量７，８はインダ
クタンス素子５，６よりもインピーダンスが小さ
く、抵抗９，１０は容量７，８の放電時定数がそ
の発振周期よりも長くなるように設定されてい
る。 FIG. 2 is a circuit block diagram of a pressure sensor having an unstable multivibrator circuit including the pressure transducer shown in FIG. 1, where 5 is a standard inductance for measurement and the inductance value is l1 . 6 is the pressure transducer shown in FIG. 1, and its inductance value is assumed to be l 2 . 7 and 8 are feedback capacitors for oscillation, and their capacitance values are C 1 and C 2 .
9 and 10 are feedback resistors for oscillation, and their resistance values are r 1 ,
r2 . 11 and 12 are switching transistors, and 13 and 14 are emitter current backflow blocking diodes. The above completes the unstable multivibrator. Reference numeral 15 denotes a circuit for measuring the time length T 1 during which the collector voltage is at a low level when the transistor 11 is conductive, and 16 is a circuit for measuring the time length T 2 during which the collector voltage is at a low level when the transistor 12 is conductive. 17 is a circuit that detects a change in l 2 using the time lengths T 1 and T 2 sent from the circuits 15 and 16 that measure the time lengths T 1 and T 2 , and calculates and outputs a pressure value from the change. i 1 and i 2 are currents flowing through the inductance elements 5 and 6. In this unstable multivibrator section, capacitors 7 and 8 have lower impedance than inductance elements 5 and 6 during oscillation, and resistors 9 and 10 are set so that the discharge time constant of capacitors 7 and 8 is longer than the oscillation period. has been done.
この時、この非安定マルチバイブレータの発振
周期を示すT1，T2は次式で表わされる。 At this time, T 1 and T 2 indicating the oscillation period of this unstable multivibrator are expressed by the following equation.
T1＝2l1／r1（１＋l2r1／l1r2）2 …… T2＝2l2／r2（１＋l1r2／l2r1）2 …… これよりT1，T2はl2の値により変化する。 T 1 = 2l 1 / r 1 (1 + l 2 r 1 / l 1 r 2 ) 2 ... T 2 = 2l 2 / r 2 (1 + l 1 r 2 / l 2 r 1 ) 2 ... From this, T 1 , T 2 changes depending on the value of l 2 .
そこで、圧力が圧力トランスデユーサ６に加わ
り、インダクタンス値l2が変化すると、T1又は
T2を測定すれば、これにより圧力が測定できる
事になる。 Therefore, when pressure is applied to the pressure transducer 6 and the inductance value l 2 changes, T 1 or
If we measure T 2 , we can measure the pressure.
これは検出回路の一例であり、その他の方法に
よつても圧力トランスデユーサの変化は検出可能
であり、それによる圧力センサの構成も可能であ
る。 This is an example of a detection circuit, and changes in the pressure transducer can be detected by other methods, and the pressure sensor can also be configured using such methods.
発明の効果
以上説明した様に本発明によれば、磁歪を有す
るアモルフアス磁性合金を用いた圧力トランスデ
ユーサは、アモルフアス磁性合金と軟磁性体とが
間隙、空隙のない閉磁気回路を構成し、アモルフ
アス合金部材が圧力を検出するセンサ材料となる
と同時に機構部品のダイアフラムとしても働くと
いう特徴を有するものであり、そして、検出用コ
イルを内蔵し、かつ高耐食性および高機械的強度
をもつアモルフアス合金を用いることによつて、
被測定圧力媒質が直接接しても耐久性と対環境性
の著しい向上が得られ、しかも、構成部品が少な
い、設計のしやすい、組立やすい、安価なトラン
スデユーサが得られ、さらに、高感度で高信頼性
を実現することができるものである。Effects of the Invention As explained above, according to the present invention, a pressure transducer using an amorphous magnetic alloy having magnetostriction has a closed magnetic circuit in which the amorphous magnetic alloy and the soft magnetic material have no gaps or voids. The amorphous alloy member has the characteristic of acting as a sensor material for detecting pressure and at the same time as a diaphragm for mechanical parts.The amorphous alloy member has a built-in detection coil and has high corrosion resistance and high mechanical strength. By using
Even if the pressure medium to be measured is in direct contact, the durability and environmental resistance are significantly improved, and the transducer has fewer components, is easy to design, is easy to assemble, and is inexpensive. Furthermore, it has high sensitivity. This enables high reliability to be achieved.
第１図Ａは本発明の一実施例における圧力トラ
ンスデユーサの平面図、同図Ｂは同断面図、第２
図は第１図に示す圧力トランスデユーサと検出回
路とを含む圧力センサの回路ブロツク図である。
１……円板、２……つぼ形軟磁性体、２ａ……
外環壁、２ｂ……円環状突出部、３……コイル、
４……透孔。
FIG. 1A is a plan view of a pressure transducer according to an embodiment of the present invention, FIG. 1B is a sectional view of the same, and FIG.
1 is a circuit block diagram of a pressure sensor including a pressure transducer and a detection circuit shown in FIG. 1. FIG. 1... Disk, 2... Pot-shaped soft magnetic material, 2a...
Outer ring wall, 2b... annular protrusion, 3... coil,
4...Through hole.
Claims (1)
縁部から突出した環状の外環壁と前記円形底部の
一方の面の中心部から突出しかつ先端面が前記外
環壁の先端面と同一面内に位置する円柱状突出部
とからなる軟磁性体と、前記外環壁と円柱状突出
部の先端面に当接して前記軟磁性体の開口を覆う
磁歪を有するアモルフアス磁性材料と、前記軟磁
性体の外環壁と円柱状突出部との間〓に設置され
たコイルと、前記軟磁体に前記コイルの端子を取
り出す透孔が設けられたことを特徴とする圧力ト
ランスデユーサ。1 A circular bottom, an annular outer ring wall protruding from the outer peripheral edge of one surface of the circular bottom, and an annular outer ring wall protruding from the center of one surface of the circular bottom and having a tip end surface that is the same as the tip surface of the outer ring wall. a soft magnetic material comprising a cylindrical protrusion located in-plane; an amorphous magnetic material having magnetostriction that contacts the outer ring wall and the tip surface of the cylindrical protrusion and covers the opening of the soft magnetic material; A pressure transducer comprising: a coil installed between an outer annular wall of a soft magnetic material and a cylindrical protrusion; and a through hole provided in the soft magnetic material to take out a terminal of the coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59114816A JPS6022639A (en) | 1984-06-04 | 1984-06-04 | Pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59114816A JPS6022639A (en) | 1984-06-04 | 1984-06-04 | Pressure transducer |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16610279A Division JPS5687816A (en) | 1979-12-19 | 1979-12-19 | Pressure or displacement sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6022639A JPS6022639A (en) | 1985-02-05 |
| JPH0132445B2 true JPH0132445B2 (en) | 1989-06-30 |
Family
ID=14647400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59114816A Granted JPS6022639A (en) | 1984-06-04 | 1984-06-04 | Pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6022639A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01269025A (en) * | 1988-04-20 | 1989-10-26 | Matsushita Electric Ind Co Ltd | Pressure sensor |
| JP4189584B2 (en) * | 2003-09-02 | 2008-12-03 | 日産自動車株式会社 | Shock absorber with power supply function between sprung and unsprung |
| EP3223429A1 (en) * | 2016-03-24 | 2017-09-27 | The Swatch Group Research and Development Ltd. | Force sensor, in particular for a touchpad |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS549758B2 (en) * | 1973-06-18 | 1979-04-26 | ||
| JPS5444168Y2 (en) * | 1974-06-21 | 1979-12-19 | ||
| JPS5528501B2 (en) * | 1974-07-26 | 1980-07-28 | ||
| JPS51111698A (en) * | 1975-03-27 | 1976-10-02 | Res Inst Iron Steel Tohoku Univ | Magnetostriction-mechanics converter |
| JPS5359060U (en) * | 1976-10-21 | 1978-05-19 |
-
1984
- 1984-06-04 JP JP59114816A patent/JPS6022639A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6022639A (en) | 1985-02-05 |
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