JPH0140300B2 - - Google Patents
Info
- Publication number
- JPH0140300B2 JPH0140300B2 JP58123043A JP12304383A JPH0140300B2 JP H0140300 B2 JPH0140300 B2 JP H0140300B2 JP 58123043 A JP58123043 A JP 58123043A JP 12304383 A JP12304383 A JP 12304383A JP H0140300 B2 JPH0140300 B2 JP H0140300B2
- Authority
- JP
- Japan
- Prior art keywords
- laminar flow
- flow element
- capillary
- holes
- large number
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/48—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by a capillary element
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Description
【発明の詳細な説明】
本発明は、例えば層流型流量計などに用いられ
る層流素子の改良技術に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a technique for improving a laminar flow element used in, for example, a laminar flow meter.
従来の代表的な層流素子として、多数本のキヤ
ピラリー管を外管の内部に密に挿入させるものが
あるが、内径が0.1〜1.0mmで肉厚が0.1〜0.5mm程
度の極く細いキヤピラリー管を外管内に密に挿入
するには熟練を要しキヤピラリー管の折れ曲りや
挿入不足に起因して流量特性の均質なものを得る
には高度の技術を要する。その上、管の端部を揃
えるための加工が必要であると共に、流量特性は
長さによつて設定されるものであるからある程度
長く作製しなければならない。 A typical conventional laminar flow element is one in which many capillary tubes are tightly inserted inside an outer tube. Skill is required to tightly insert the tube into the outer tube, and sophisticated technology is required to obtain uniform flow characteristics due to bending or insufficient insertion of the capillary tube. Furthermore, processing is required to align the ends of the tube, and since the flow rate characteristics are determined by the length, the tube must be manufactured to a certain length.
本発明は、流量特性の設定が容易で、しかも、
素子間の流量特性を均質化できるものを、製作容
易にして提供せんとするものであり、即ち本発明
による層流素子は、薄板から成る層流素子構成部
材の夫々に、キヤピラリー流路形成用の多数の孔
を同一パターンで形成すると共に、前記多数の孔
の位相を合せるための位相合せ部を設け、該層流
素子構成部材の所定枚数を、それらのキヤピラリ
ー流路孔の位相を合せた状態で重ね合せてユニツ
ト化された点に特徴がある。 The present invention allows easy setting of flow characteristics, and
It is an object of the present invention to provide a laminar flow element that can homogenize the flow characteristics between elements and is easy to manufacture.That is, the laminar flow element according to the present invention has a laminar flow element component made of a thin plate with a capillary flow path forming part. A large number of holes are formed in the same pattern, and a phase matching portion is provided for matching the phases of the large number of holes, and a predetermined number of laminar flow element constituent members are arranged so that the phases of their capillary flow passage holes are matched. It is distinctive in that it is made into a unit by overlapping each other.
以下、本発明の実施例を図面に基いて説明す
る。 Embodiments of the present invention will be described below with reference to the drawings.
先ず、第１図に示すように、ステンレス鋼や
銅、アルミニウムなどの金属やシリコン結晶ウ
エハ等の薄板から成る円形の層流素子構成部材
１の多数を用意する。 First, as shown in FIG. 1, a large number of circular laminar flow element components 1 made of metals such as stainless steel, copper, or aluminum, or thin plates such as silicon crystal wafers are prepared.
該構成部材１の夫々には、キヤピラリー流路
形成用の多数の孔ａ…と、該多数の孔ａ…の位
相を合せるための位相合せ部ｂ…とが、既知の
手段、（例えばフオトエツチング、エレクトロ
ホーミング、放電加工、プレス加工など）によ
つて同一パターンで形成されている。 Each of the structural members 1 is provided with a large number of holes a for forming capillary flow paths and a phasing part b for matching the phases of the large number of holes a using known means (for example, photo etching). , electrohoming, electrical discharge machining, press working, etc.) in the same pattern.
尚、第１図において、前記孔ａを六角形に
し、位相合せ部ｂを円形にしているが、第４図
に示すように、孔ａを円形にし、位相合せ部ｂ
を凹部から形成するなどの変形可能であり、即
ち形状は不問であるが、第１図の構成による場
合は、構成部材１の大きさの割に孔ａ…の総計
の面積を大にでき、しかも、孔ａ自体は円形に
近い状態となる。 In FIG. 1, the hole a is hexagonal and the phase matching portion b is circular, but as shown in FIG. 4, the hole a is circular and the phase matching portion b is
It is possible to deform the hole a by forming it from a concave portion, that is, the shape is not critical, but in the case of the configuration shown in FIG. Furthermore, the hole a itself is almost circular.
次に、第２図に示すように、少なくとも２本
のねじ２，２を用意して、該ねじ２，２に前記
位相合せ部ｂ，ｂを挿入させながら、所望の流
量特性を示すに相当する枚数の層流素子構成部
材１…を重ね合わせ、該構成部材１…を密接さ
せるように前記ねじ２，２にナツト３，３を螺
合する。 Next, as shown in FIG. 2, at least two screws 2, 2 are prepared, and while the phasing parts b, b are inserted into the screws 2, 2, the desired flow rate characteristics can be obtained. A number of laminar flow element components 1 are stacked one on top of the other, and nuts 3, 3 are screwed into the screws 2, 2 so that the components 1 are brought into close contact with each other.
もつて、第３図に示すように、多数の孔ａ…
が互いに連通したキヤピラリー流路Ａ…を備え
る層流素子Ｓを、所定枚数の構成部材１…のユ
ニツト化によつて作製するのである。 As shown in Fig. 3, a large number of holes a...
A laminar flow element S having capillary channels A communicating with each other is manufactured by forming a predetermined number of component members 1 into a unit.
かかる構成によれば、層流素子構成部材１…
の枚数設定によつて流量特性を設定できるので
あり、しかも、各構成部材１の多数の孔ａ…の
位相が一致しているので、常に所定数のキヤピ
ラリー流路Ａ…を正確に確保でき、即ち、層流
素子Ｓ，Ｓ間の流量特性を均質化できるのであ
る。 According to this configuration, the laminar flow element component 1...
The flow rate characteristics can be set by setting the number of capillary channels A, and since the phases of the large number of holes a in each component 1 match, a predetermined number of capillary channels A can always be accurately secured. That is, the flow characteristics between the laminar flow elements S, S can be made uniform.
そして、上述の優れた機能を有する層流素子
Ｓを、構成部材１…の重ね合せによつてユニツ
ト化するだけで作製できるものであつて、従来
の外管に対するキヤピラリー管の密挿に比べて
製作性が良好であり、その上、量産化が可能で
あつて延いてはコストダウンを達成できるもの
である。 The laminar flow element S having the above-mentioned excellent functions can be manufactured simply by stacking the constituent members 1 into a unit. It has good manufacturability, can be mass-produced, and can further reduce costs.
尚、前記層流素子構成部材１…を金属製とし
てこれをユニツト化した状態において、該ユニ
ツトを真空下又は不活性ガス中で加熱並びに重
ね合せ方向で加圧し、構成部材１，１どうしを
拡散接合させるも良く、あるいは、構成部材１
がシリコン結晶ウエハ等であれば、これの接合
面に予め金膜などを設けておいて拡散接合させ
るも良い。 In addition, when the laminar flow element constituent members 1 are made of metal and are made into a unit, the unit is heated under vacuum or in an inert gas and pressurized in the overlapping direction to diffuse the constituent members 1, 1 together. It may be joined or the component 1
If the bonding surface is a silicon crystal wafer or the like, a gold film or the like may be provided in advance on the bonding surface and diffusion bonding may be performed.
以下、第５図乃至第７図に、例えば層流型流
量計の支持筒４に対する層流素子Ｓのセツト手
段を示す。第５図は、支持筒４の大径部４ａに
層流素子Ｓを内装すると共に、支持筒４の挿入
端部４ｂをカシメ加工して、該カシメ端部４ｂ
と段部端４ｃとによつて層流素子Ｓを固定させ
るようにしたものである。 5 to 7 show means for setting the laminar flow element S to the support tube 4 of a laminar flow meter, for example. FIG. 5 shows that a laminar flow element S is installed inside the large diameter portion 4a of the support tube 4, and the insertion end 4b of the support tube 4 is caulked.
The laminar flow element S is fixed by the step end 4c.
第６図は、層流素子Ｓを支持筒大径部４ａに
内挿して後に、筒状の押しねじ５を前記大径部
４ａに螺合させたもので、該押しねじ５と段部
端４ｃとによつて層流素子Ｓを挾着固定したも
のである。 FIG. 6 shows a case in which a cylindrical push screw 5 is screwed into the large diameter portion 4a after the laminar flow element S is inserted into the large diameter portion 4a of the support cylinder, and the push screw 5 and the step end end are screwed together. 4c, the laminar flow element S is clamped and fixed.
第７図は、層流素子Ｓを支持筒大径部４ａに
内挿して後に、筒状スリーブ６を前記大径部４
ａに圧入させたもので、このスリーブ６と段部
端４ｃとによつて層流素子Ｓを挾着固定してい
る。 FIG. 7 shows that after inserting the laminar flow element S into the large diameter portion 4a of the support tube, the cylindrical sleeve 6 is inserted into the large diameter portion 4a.
The laminar flow element S is clamped and fixed by this sleeve 6 and the step end 4c.
尚、層流素子Ｓの作製に際して、第８図に示
すように、厚さの異なる構成部材１を用意し、
所定寸法に達するまでは厚みの厚い構成部材１
…を重ね合せ、厚みの薄い構成部材１…によつ
て所定寸法になるように寸法調整して、層流素
子Ｓを作製するも良い。 In addition, when manufacturing the laminar flow element S, as shown in FIG. 8, component members 1 having different thicknesses are prepared,
Thick component 1 until it reaches a predetermined size
The laminar flow element S may be fabricated by stacking... and adjusting the dimensions to a predetermined size using thin component members 1....
以上説明したように本発明の層流素子によれ
ば、流量特性の設定が容易で、しかも素子間に
おける流量特性の均質化が図れ、その上、製作
性に優れると共に、量産化が容易であつてコス
トダウンを達成できるものであり、従来のキヤ
ピラリー管充填タイプのものと同じ形態の層流
素子を、製作容易かつ安価に、しかも特性の優
れたものにして提供できるに至つた。 As explained above, according to the laminar flow element of the present invention, the flow characteristics can be easily set, the flow characteristics can be made homogeneous between elements, and furthermore, it is easy to manufacture and can be mass-produced. Therefore, it is possible to achieve cost reduction, and it has become possible to provide a laminar flow element in the same form as the conventional capillary tube filling type, which is easy to manufacture, inexpensive, and has excellent characteristics.
図面は本発明の実施例を示し、第１図は層流素
子構成部材の平面図、第２図は層流素子ユニツト
化の説明図、第３図はユニツト化した層流素子の
側面図、第４図は層流素子構成部材の別実施例の
平面図、第５図乃至第７図は夫々層流素子のセツ
ト態様の断面図、第８図は別実施例の層流素子の
側面図である。
１……層流素子構成部材、Ａ……キヤピラリー
流路、ａ……キヤピラリー流路形成用孔、ｂ……
位相合せ部。
The drawings show embodiments of the present invention; FIG. 1 is a plan view of the components of the laminar flow element, FIG. 2 is an explanatory diagram of the unitization of the laminar flow element, and FIG. 3 is a side view of the unitized laminar flow element. FIG. 4 is a plan view of another embodiment of the laminar flow element component, FIGS. 5 to 7 are sectional views of the laminar flow element set, and FIG. 8 is a side view of the laminar flow element of another embodiment. It is. 1... Laminar flow element component, A... Capillary flow path, a... Capillary flow path forming hole, b...
Phase matching section.
Claims (1)
ヤピラリー流路形成用の多数の孔を同一パターン
で形成すると共に、前記多数の孔の位相を合せる
ための位相合せ部を設け、該層流素子構成部材の
所定枚数を、それらのキヤピラリー流路孔の位相
を合せた状態で重ね合せてユニツト化して成る層
流素子。1 A large number of holes for forming a capillary flow path are formed in the same pattern in each of the laminar flow element constituent members made of a thin plate, and a phase matching part is provided for matching the phases of the large number of holes, and the laminar flow element is A laminar flow element formed by stacking a predetermined number of component members with their capillary passage holes aligned in phase to form a unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12304383A JPS6014121A (en) | 1983-07-05 | 1983-07-05 | Laminar flow element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12304383A JPS6014121A (en) | 1983-07-05 | 1983-07-05 | Laminar flow element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6014121A JPS6014121A (en) | 1985-01-24 |
| JPH0140300B2 true JPH0140300B2 (en) | 1989-08-28 |
Family
ID=14850791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12304383A Granted JPS6014121A (en) | 1983-07-05 | 1983-07-05 | Laminar flow element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6014121A (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01272921A (en) * | 1988-04-25 | 1989-10-31 | Cosmo Keiki:Kk | Flow rate converting device |
| JPH01299416A (en) * | 1988-05-26 | 1989-12-04 | Cosmo Keiki:Kk | Converting apparatus of flow rate |
| JP4684387B2 (en) * | 2000-05-26 | 2011-05-18 | 株式会社堀場エステック | Flow rate detection mechanism and method for manufacturing resistor used in flow rate detection mechanism |
| US6843139B2 (en) * | 2003-03-12 | 2005-01-18 | Rosemount Inc. | Flow instrument with multisensors |
| JP2007531931A (en) * | 2004-02-27 | 2007-11-08 | 株式会社堀場エステック | Flor restrictor |
| TWI292473B (en) * | 2005-08-26 | 2008-01-11 | Smc Kk | Flow meter |
| JP5068194B2 (en) * | 2008-02-20 | 2012-11-07 | アズビル株式会社 | Flowmeter |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2929248A (en) * | 1957-11-13 | 1960-03-22 | Bailey Meter Co | Flow meter |
| JPS5336792B2 (en) * | 1973-03-16 | 1978-10-04 | ||
| JPS5336792A (en) * | 1976-09-17 | 1978-04-05 | Toyota Motor Corp | Machine tool |
| JPS53144371A (en) * | 1977-05-21 | 1978-12-15 | Tokyo Seimitsu Co Ltd | Flow meter |
-
1983
- 1983-07-05 JP JP12304383A patent/JPS6014121A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6014121A (en) | 1985-01-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE2849738C2 (en) | Semiconductor converter | |
| JP4484251B2 (en) | Substrate, substrate manufacturing method, pin jig, adjustment method | |
| JPH1079586A (en) | Heat receiving part structure of heat dissipation device | |
| US3390447A (en) | Method of making laminar mesh | |
| US4687879A (en) | Tiered thermoelectric unit and method of fabricating same | |
| JPS585951A (en) | Method and device for forming plural flat structure | |
| JPH0140300B2 (en) | ||
| US4138691A (en) | Framed lead assembly for a semiconductor device comprising insulator reinforcing strips supported by a frame and made integral with lead strips | |
| JPH065686B2 (en) | Pressure contact type semiconductor device | |
| JPH11230845A (en) | Semiconductor pressure detector | |
| JPH0727642A (en) | Pressure sensor | |
| JPH1117078A (en) | Radiator | |
| US5905044A (en) | Mass manufacturing method of semiconductor acceleration and vibration sensors | |
| CA2143641A1 (en) | Process for producing miniature components | |
| JPS6213689Y2 (en) | ||
| CN117096089A (en) | Wafer clamp and method for fixing wafer to be clamped | |
| JPS63135831A (en) | Preparation of membrane load cell | |
| JP3672170B2 (en) | Method for forming electrode with wire sensor in gas rate sensor and wire sensor structure | |
| JPS58193095A (en) | Manufacture of radiator | |
| CN119216929A (en) | Fixtures for preparing semiconductor devices | |
| JP2526355B2 (en) | Radiation fin manufacturing method | |
| JP3258146B2 (en) | Semiconductor device | |
| JPH03209838A (en) | Semiconductor device | |
| JPH03293752A (en) | Manufacture of heat sink for semiconductor device | |
| JPH04287949A (en) | Manufacturing of semiconductor device |