JPH0142886B2 - - Google Patents
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- JPH0142886B2 JPH0142886B2 JP59081454A JP8145484A JPH0142886B2 JP H0142886 B2 JPH0142886 B2 JP H0142886B2 JP 59081454 A JP59081454 A JP 59081454A JP 8145484 A JP8145484 A JP 8145484A JP H0142886 B2 JPH0142886 B2 JP H0142886B2
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- carbide powder
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Description
【発明の詳細な説明】
本発明は炭化けい素(以下SiCと記載する)の
製造方法に関する。更に詳しくは微細で3C(β)
単一相の易焼結性β型SiC粉末の製造方法に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing silicon carbide (hereinafter referred to as SiC). For more details, see 3C (β) in fine detail.
This invention relates to a method for producing single-phase easily sinterable β-type SiC powder.
SiC焼結体は硬度と強度が大きく、耐熱性に優
れ、化学的に安定であるから、耐摩機械部品、構
造用材、耐熱性材料等に広く利用されている。
SiC粉末にはα、βの2つの結晶形があり、β型
SiC粉末の製造方法としては、従来、(1)SiO2とC
の反応、(2)SiとCの反応、(3)Si化合物と炭化水素
からの気相合成法が知られているが、工業的には
前記(1)の方法によつて製造されている。これは高
温における次のいずれかの反応による。 SiC sintered bodies have high hardness and strength, excellent heat resistance, and are chemically stable, so they are widely used in wear-resistant mechanical parts, structural materials, heat-resistant materials, etc.
SiC powder has two crystal forms, α and β.
Conventionally, methods for producing SiC powder include (1) SiO 2 and C
reaction, (2) reaction of Si and C, and (3) gas phase synthesis from Si compounds and hydrocarbons, but industrially it is produced by the method described in (1) above. . This is due to one of the following reactions at high temperatures.
SiO2+3C→SiC+2CO(g) (1) SiO2+C→SiO(g)+CO(g) SiO(g)+2C→SiC+CO(g) (2) ただし、(g)はガス状物を表わす。 SiO 2 +3C→SiC+2CO(g) (1) SiO 2 +C→SiO(g)+CO(g) SiO(g)+2C→SiC+CO(g) (2) However, (g) represents a gaseous substance.
前記(2)の反応は、不均一な固体−気体反応であ
るため均質で粒径の均一な粉末が得難く、また
2Hのα−SiCが少量混存してくる。このα−SiC
は焼結に際し粒成長を促し、緻密化に有害であ
る。従つて、前記(1)の反応が利用されるが、(1)の
反応を促すためには、SiO2とCの混合を均一に
することが必要であり、従来その混合法について
種々提案されている。 Since the reaction (2) above is a non-uniform solid-gas reaction, it is difficult to obtain a homogeneous powder with uniform particle size, and
A small amount of 2H α-SiC coexists. This α-SiC
promotes grain growth during sintering and is harmful to densification. Therefore, the reaction (1) above is used, but in order to promote the reaction (1), it is necessary to uniformly mix SiO 2 and C, and various mixing methods have been proposed in the past. ing.
例えば、従来原料に用いられてきた固体のシリ
カ粉末の代りにけい酸液を用い、炭素質粉末もし
くは炭素前駆体物質と共に処理する方法、すなわ
ち、液相で混合することによつて均一な混合物を
得、この混合物を非酸化性雰囲気中で加熱して
SiCを製造する方法(特開昭57−88019号公報)
が知られている。 For example, a method of using a silicic acid solution instead of the solid silica powder conventionally used as a raw material and processing it together with a carbonaceous powder or a carbon precursor material, that is, by mixing in the liquid phase, a homogeneous mixture can be obtained. The mixture is heated in a non-oxidizing atmosphere to
Method for manufacturing SiC (Japanese Unexamined Patent Publication No. 1988-88019)
It has been known.
しかし、この方法によると、物理的な均一状態
のものが得られるが、シリカゾルが生成し、分子
的には不均一となり、SiCの製造の際、β型SiC
粉末に2Hのα−SiC相が数%以上混在し、単相の
β型SiCが得られない問題点があつた。 However, although this method yields a physically homogeneous product, silica sol is generated and molecularly non-uniform, and when SiC is manufactured, β-type SiC
There was a problem in that the powder contained several percent or more of the 2H α-SiC phase, making it impossible to obtain single-phase β-type SiC.
本発明はこの問題点を解決すべくなされたもの
で、その目的は分子的に均一に混合された原料を
得て、単相のβ型SiCを製造する方法を提供せん
とするものである。 The present invention was made to solve this problem, and its purpose is to provide a method for producing single-phase β-type SiC by obtaining raw materials that are molecularly uniformly mixed.
本発明者らは前記目的を達成すべく研究の結
果、常温で液状のけい素化合物と、官能基を有し
加熱により炭素を生成する常温で液状の有機化合
物と、少なくとも該有機化合物と均一に溶化する
重合または架橋触媒とを用い、それらを均一に混
合することによつて重合または架橋反応を起こさ
せてSi、O及びCを含む固体を得、それをSiCを
得るための前駆体物質すなわち、原料として用い
ると、単相のβ型SiCが得られることを見出し、
この知見に基づいて本発明を完成した。 As a result of research to achieve the above object, the present inventors have found that a silicon compound that is liquid at room temperature, an organic compound that is liquid at room temperature that has a functional group and generates carbon when heated, and at least the organic compound is uniformly mixed with the organic compound. A polymerization or crosslinking reaction is caused by uniformly mixing them using a polymerization or crosslinking catalyst that dissolves, to obtain a solid containing Si, O and C, which is then used as a precursor material for obtaining SiC, i.e. discovered that single-phase β-type SiC can be obtained when used as a raw material,
The present invention was completed based on this knowledge.
なお、常温で液状のけい素化合物や有機化合物
の粘度が高くて均一な混合が容易でないような場
合は、適当な溶媒を用いて粘度を下げるようにし
てもよい。 In addition, if the viscosity of the silicon compound or organic compound that is liquid at room temperature is high and uniform mixing is not easy, the viscosity may be lowered using an appropriate solvent.
すなわち、本発明の要旨は、けい素と炭素とを
含む原料を非酸化性雰囲気で加熱して単相のβ型
炭化けい素粉末を得る方法において、前記原料と
して、常温で液状のけい素化合物と、官能基を有
し加熱により炭素を生成する常温で液状の有機化
合物と、少なくとも前記有機化合物と均一に溶化
する重合または架橋触媒とを含む液が、重合また
は架橋反応の化学反応により分子的に均一に混合
して得られたけい素、酸素及び炭素を含む前駆体
物質を用いることを特徴とする単相のβ型炭化け
い素粉末の製造方法にある。 That is, the gist of the present invention is to provide a method for obtaining a single-phase β-type silicon carbide powder by heating a raw material containing silicon and carbon in a non-oxidizing atmosphere, wherein the raw material is a silicon compound that is liquid at room temperature. A liquid containing an organic compound that is liquid at room temperature and that has a functional group and generates carbon when heated, and a polymerization or crosslinking catalyst that uniformly dissolves at least the organic compound is dissolved in a molecular form by a chemical reaction of polymerization or crosslinking reaction. The present invention provides a method for producing single-phase β-type silicon carbide powder, characterized by using a precursor material containing silicon, oxygen, and carbon obtained by uniformly mixing the powder with silicon carbide.
本発明において使用する液状けい素化合物とし
ては、例えば、(1)けい酸アルカリ水溶液を酸分解
あるいは脱アルカリして得られたもの例えば水ガ
ラスの脱アルカリで得られたけい酸ポリマー、(2)
OH基を持つ有機化合物とけい酸のエステル、例
えばけい酸ポリマーをトリメチルシリル化して得
られる下記のような一群のポリマー、
(3)加水分解性けい酸化合物と有機化合物または有
機金属化合物とのエステル、例えばエチルシリケ
ート
などが挙げられる。 Examples of the liquid silicon compound used in the present invention include (1) a silicic acid polymer obtained by acid decomposition or dealkalization of an aqueous alkali silicate solution, for example, a silicic acid polymer obtained by dealkalization of water glass;
Esters of organic compounds with OH groups and silicic acid, such as the following group of polymers obtained by trimethylsilylation of silicic acid polymers, (3) Esters of hydrolyzable silicic acid compounds and organic compounds or organometallic compounds, such as ethyl silicate Examples include.
炭素源としての液状有機化合物としては、特に
残炭率が高く、触媒または加熱により重合または
架橋する有機化合物例えばフエノール樹脂、フラ
ン樹脂、ポリイミド、ポリウレタン、ポリアクリ
ロニトリル、ポリビニルアルコール、ポリ酢酸ビ
ニル、等の樹脂のモノマーやプレポリマーが好ま
しく、その他セルロース、しよ糖、ピツチ、ター
ル等も使用し得られる。 Examples of liquid organic compounds used as carbon sources include organic compounds that have a particularly high residual carbon content and can be polymerized or crosslinked by catalysts or heating, such as phenolic resins, furan resins, polyimides, polyurethanes, polyacrylonitrile, polyvinyl alcohol, and polyvinyl acetate. Resin monomers and prepolymers are preferred, and cellulose, sucrose, pitch, tar, and the like may also be used.
前記液状けい素化合物と官能基を有し加熱によ
り炭素を生成する液状有機化合物、及び重合また
は架橋触媒を溶化させ、加熱により重合、または
架橋反応させて固体を得る。 The liquid organic compound having a functional group and a polymerization or crosslinking catalyst is dissolved in the liquid silicon compound, and a polymerization or crosslinking reaction is caused by heating to obtain a solid.
重合、または架橋反応は、(1)官能基を有する有
機化合物と液状けい素化合物の官能基間、(2)官能
基を有する液状有機化合物の官能基間において行
われる。 The polymerization or crosslinking reaction is carried out between (1) the functional group of the organic compound having a functional group and the liquid silicon compound, and (2) the functional group of the liquid organic compound having the functional group.
例えば、フエノール樹脂の重合反応
(1)
(2) けい酸ポリマー中のシラノール基と有機化合
物のメチロール基との反応
の反応等により固体が形成される。 For example, polymerization reaction of phenolic resin (1) (2) Reaction between silanol groups in silicic acid polymers and methylol groups of organic compounds A solid is formed by the reaction, etc.
触媒としては重合または架橋反応に用いられる
触媒から選べばよく、例えば、塩酸、硫酸、ほう
酸等の鉱酸、ナトリウムエチラート等のアルカ
リ、有機過酸化物、有機スルホン酸類などが挙げ
られる。 The catalyst may be selected from catalysts used in polymerization or crosslinking reactions, and includes, for example, mineral acids such as hydrochloric acid, sulfuric acid, and boric acid, alkalis such as sodium ethylate, organic peroxides, and organic sulfonic acids.
液状けい素化合物と官能基を有する液状有機化
合物の混合比は、800〜1400℃での有機化合物の
残炭素量で換算して、CとSiの原子比が1<C/
Si<10、好ましくはC/Si3となるようにする
のがよい。合成した前駆体物質にCを残留させる
場合はC/Si>3とする。 The mixing ratio of the liquid silicon compound and the liquid organic compound having a functional group is such that the atomic ratio of C and Si is 1<C/
It is preferable that Si<10, preferably C/Si3. When C remains in the synthesized precursor material, C/Si>3.
前記比に混合したものに重合また架橋触媒を混
合し、硬化させた該混合物を不活性ガス雰囲気中
で600〜1000℃で処理すると、Si、O、及びCを
含有した均質な非結晶が得られる。 When a polymerization or crosslinking catalyst is mixed with the mixture in the above ratio and the cured mixture is treated at 600 to 1000°C in an inert gas atmosphere, a homogeneous amorphous material containing Si, O, and C is obtained. It will be done.
この非晶物を非酸化性雰囲気、例えば真空、窒
素、ヘリウム、またはアルゴン中で、1400〜2000
℃に加熱処理するとSiCが得られる。前記加熱処
理温度は1600℃前後が好ましく、1400℃より低い
と反応がおそく、また200℃を超える温度を必要
としないので、そのような温度では経済的に不利
となる。 This amorphous material is heated in a non-oxidizing atmosphere such as vacuum, nitrogen, helium, or argon at a temperature of 1400 to 2000
SiC is obtained by heat treatment at ℃. The heat treatment temperature is preferably around 1,600°C; if it is lower than 1,400°C, the reaction is slow, and since a temperature exceeding 200°C is not required, such a temperature is economically disadvantageous.
得られたSiC粉末は微細で均一粒径分布を持
ち、X線の分析の結果、2H等のα相は含まない
β−SiC粉末であつた。 The obtained SiC powder was fine and had a uniform particle size distribution, and as a result of X-ray analysis, it was found to be β-SiC powder containing no α phase such as 2H.
また、原料でC/Siのモル比を3とすると、残
留炭素のない純粋なβ型SiC粉末が得られ、脱炭
精製処理を必要としない。 Furthermore, when the molar ratio of C/Si is set to 3 in the raw material, pure β-type SiC powder with no residual carbon can be obtained, and no decarburization purification treatment is required.
実施例 1
液状けい素化合物としてSiO2を41重量%含む
エチルシリケートと官能基を持つ液状有機化合物
として残炭率が40%のレゾール型フエノール樹脂
を用いた。Example 1 Ethyl silicate containing 41% by weight of SiO 2 was used as a liquid silicon compound, and a resol type phenolic resin with a residual carbon content of 40% was used as a liquid organic compound having a functional group.
エチルシリケート62重量%と前記フエノール樹
脂38重量%の混合液を酸触媒下で硬化させ、透明
な樹脂状固体を得た。これを室素雰囲気下で昇温
速度10℃/minで1000℃まで加熱した。得られた
固体は均質でち密な固体で、CとSiの含有量は残
炭率からC/Si=3と考えられる。この固体の粉
末X線回折線図は第1図の通りであつた。粉末X
線回折分析では炭素系物質の非晶質特有の幅をも
つ回線のみ現れ、他の回折線が検出されなかつ
た。これより、固体はSi、OとCを含んだ非晶質
固体であることがわかる。さらにこれをアルゴン
雰囲気下昇温速度30℃/minで1600℃に加熱し、
4時間保持し、β−SiC粉末を得た。その粉末の
性質は次に示す通りであつた。 A mixed solution of 62% by weight of ethyl silicate and 38% by weight of the phenolic resin was cured under an acid catalyst to obtain a transparent resinous solid. This was heated to 1000°C at a temperature increase rate of 10°C/min in a room atmosphere. The obtained solid was a homogeneous and dense solid, and the content of C and Si was considered to be C/Si=3 based on the residual carbon ratio. The powder X-ray diffraction diagram of this solid was as shown in FIG. powder
In line diffraction analysis, only a line with a width characteristic of amorphous carbon-based materials appeared, and no other diffraction lines were detected. This shows that the solid is an amorphous solid containing Si, O, and C. Furthermore, this was heated to 1600℃ at a temperature increase rate of 30℃/min in an argon atmosphere.
After holding for 4 hours, β-SiC powder was obtained. The properties of the powder were as follows.
真比重 3.19〜3.21g/cm3
結晶形 立方晶(3C)単相
平均粒径 0.15μm
不純物 Al0.03重量%
Fe0.03 〃
C0.5 〃
色 黄色
また、その粉末の粉末X線回折線図は第2図、
粉末形状は第3図の通りであつた。第2図から
2H等のα相SiCを含まないβ型SiCであること、
また、第3図から粒径の均一な微粉であることが
分かる。True specific gravity 3.19-3.21g/cm 3 crystal form Cubic (3C) single phase average particle size 0.15μm Impurities Al0.03% by weight Fe0.03 〃 C0.5 〃 Color Yellow Also, the powder X-ray diffraction chart of the powder is Figure 2,
The shape of the powder was as shown in FIG. From Figure 2
Be a β-type SiC that does not contain α-phase SiC such as 2H,
Further, from FIG. 3, it can be seen that the powder is a fine powder with a uniform particle size.
比較例 1(特開昭57−88019号実施例4)
水ガラス3号希釈水溶液(濃度;SiO2分8重
量%)を陽イオン交換樹脂アンバーライト200C
(H+型)を充填したカラムで脱ナトリウムをおこ
なつたけい酸液(濃度;SiO2分5重量%)gに
デキストラン水溶液20g(含デキストラン4g)
を添加、混合し、噴霧乾燥した。得られた白色粉
末をヘリウム雰囲気中で1440℃、4時間加熱して
SiC粉末を得た。Comparative Example 1 (Example 4 of JP-A-57-88019) A water glass No. 3 diluted aqueous solution (concentration: SiO 2 :8% by weight) was mixed with cation exchange resin Amberlite 200C.
(H + form) was used to remove sodium in a column filled with silicic acid solution (concentration: SiO 2 min, 5% by weight) and 20 g of dextran aqueous solution (containing 4 g of dextran).
was added, mixed and spray dried. The obtained white powder was heated at 1440℃ for 4 hours in a helium atmosphere.
SiC powder was obtained.
得られたSiC粉末は、粒径0.1〜0.2μ、結晶相
3C90%、2H10%のSiCであつた。 The obtained SiC powder has a particle size of 0.1~0.2μ and a crystalline phase.
It was 90% 3C and 10% SiC.
実施例と比較例とから明らかなように、本発明
の方法によると、高純度の単一相β型SiC粉末が
得られるのに対し、比較例の方法においては結晶
相に2Hのα相SiCが混在したものとなる。この
2Hのα相SiCは高温で転移し易く、焼結に際し粒
成長を助長し、ち密化を阻害する。 As is clear from the examples and comparative examples, according to the method of the present invention, a high-purity single-phase β-type SiC powder is obtained, whereas in the method of the comparative example, 2H α-phase SiC is added to the crystal phase. It will be a mixture of. this
2H α-phase SiC is easily transformed at high temperatures, promotes grain growth during sintering, and inhibits densification.
本発明の方法で2Hのα相SiCが混在しないの
は、重合あるいは架橋反応により分子的に均一混
合が達せられるためと考えられる。 The reason why 2H α-phase SiC is not mixed in the method of the present invention is considered to be because molecularly homogeneous mixing is achieved through polymerization or crosslinking reaction.
実施例 2
水ガラス(けい酸4号)を塩酸とテトラヒドロ
フランで公知の方法により脱アルカリと抽出を行
つて液状けい酸化合物を得た。これとレゾール型
フエノール樹脂および酸触媒とをアルコール存在
下で溶化し、加熱して固化させた。液状けい酸化
合物とフエノール樹脂の混合比は47/53重量比で
ある。得られた樹脂状固体を実施例1と同様に
1000℃に加熱し、さらに1600℃で熱処理した。
1000℃処理後に得られた固体はSi、CとOから成
る均質な非晶質でC/Si3であつた。1600℃処
理後に得られたβ−SiC粉末は微粉であり、粉末
X線回折および粉末の形状は実施例1と同様であ
る。粉末の性質は次の通りであつた。Example 2 Water glass (silicic acid No. 4) was dealkalized and extracted using hydrochloric acid and tetrahydrofuran by a known method to obtain a liquid silicic acid compound. This, a resol type phenolic resin, and an acid catalyst were dissolved in the presence of alcohol, and heated to solidify. The mixing ratio of liquid silicic acid compound and phenolic resin was 47/53 by weight. The obtained resinous solid was treated in the same manner as in Example 1.
It was heated to 1000°C and further heat treated at 1600°C.
The solid obtained after treatment at 1000°C was homogeneous amorphous consisting of Si, C and O, and was C/Si3. The β-SiC powder obtained after the 1600°C treatment is a fine powder, and the powder X-ray diffraction and powder shape are the same as in Example 1. The properties of the powder were as follows.
真比重 3.19〜3.21g/cm3
結晶形 立方晶(3C)単相
粒 径 0.15〜0.20μm
不純物 Al0.04重量%
Fe0.02 〃
Na0.12 〃
C0.6 〃
色 黄色
実施例 3
水ガラス(けい酸4号)を塩酸とテトラヒドロ
フランで抽出し、公知の方法によつてトリメチル
シリル化して液状けい酸化合物を得た。これとレ
ゾール型フエノール樹脂および酸触媒とを溶化
し、硬化させ均質な固体とした。液状けい酸化合
物とフエノール樹脂の混合重量比は54/46であ
る。以下実施例1、2と同様の熱処理を行つた。
得られた粉末はβ−SiC単相の微粉であつた。本
実施例では炭素源のフエノール樹脂を過剰に加え
たので、生成したβ−SiC粉末中に遊離炭素を約
3%含有した。SiC粉末の焼結には炭素を添加す
る必要があるから粉末に遊離炭素が含有されるこ
とは焼結に有効である。粉末の性質は以下の通り
であつた。True specific gravity 3.19-3.21g/cm 3Crystal form Cubic (3C) single-phase grain Diameter 0.15-0.20μm Impurities Al0.04% by weight Fe0.02 〃 Na0.12 〃 C0.6 〃 Color Yellow Example 3 Water glass ( Silicic acid No. 4) was extracted with hydrochloric acid and tetrahydrofuran, and trimethylsilylated by a known method to obtain a liquid silicic acid compound. This, a resol type phenolic resin, and an acid catalyst were dissolved and cured to form a homogeneous solid. The mixing weight ratio of liquid silicic acid compound and phenolic resin is 54/46. Thereafter, the same heat treatment as in Examples 1 and 2 was performed.
The obtained powder was a single-phase β-SiC fine powder. In this example, since the phenolic resin serving as the carbon source was added in excess, the resulting β-SiC powder contained about 3% free carbon. Since it is necessary to add carbon to sinter SiC powder, the inclusion of free carbon in the powder is effective for sintering. The properties of the powder were as follows.
真比重 3.19〜3.20g/cm3
結晶形 立方晶(3C)単相
粒 径 0.15〜0.20μm
不純物 Al 0.03重量%
Fe 0.02 〃
Na 0.10重量%
遊離炭素 3.0 重量%
以上のように、本発明の方法によると、2Hの
α相SiCの混在しないβ型SiCの均一微粉末が容
易に得られる。従つて、この結晶体は焼結に際し
粒成長がなく、ち密なものとなる効果を有する。True specific gravity 3.19 to 3.20 g/cm 3 Crystal form Cubic (3C) single phase grain Size 0.15 to 0.20 μm Impurities Al 0.03% by weight Fe 0.02 〃 Na 0.10% by weight Free carbon 3.0% by weight As described above, the method of the present invention According to the method, a uniform fine powder of β-type SiC without 2H α-phase SiC can be easily obtained. Therefore, this crystal body has the effect of becoming dense without grain growth during sintering.
第1図は本発明の方法において用いる1000℃処
理したSiC前駆体物質の粉末X線回折図形(非晶
質)、第2図は本発明の方法で製造されたβ型
SiC粉末の粉末X線回折図形(β型SiC単一相)、
第3図は本発明の方法で製造されたβ型SiC粉末
の粒子構造のSEM写真である。
Figure 1 shows the powder X-ray diffraction pattern (amorphous) of the SiC precursor material treated at 1000°C used in the method of the present invention, and Figure 2 shows the β type produced by the method of the present invention.
Powder X-ray diffraction pattern of SiC powder (β-type SiC single phase),
FIG. 3 is a SEM photograph of the particle structure of β-type SiC powder produced by the method of the present invention.
Claims (1)
で加熱して単相のβ型炭化けい素粉末を得る方法
において、前記原料として、常温で液状のけい素
化合物と、官能基を有し加熱により炭素を生成す
る常温で液状の有機化合物と、少なくとも前記有
機化合物と均一に溶化する重合または架橋触媒と
を含む液が、重合または架橋反応の化学反応によ
り分子的に均一に混合して得られたけい素、酸素
及び炭素を含む前駆体物質を用いることを特徴と
する単相のβ型炭化けい素粉末の製造方法。 2 前記けい素化合物がけい酸アルカリ水溶液の
酸分解または脱アルカリにより得られたものであ
る特許請求の範囲第1項記載の単相のβ型炭化け
い素粉末の製造方法。 3 前記けい素化合物が水酸基を有する有機化合
物とけい酸のエステルである特許請求の範囲第1
項記載の単相のβ型炭化けい素粉末の製造方法。 4 前記けい素化合物が加水分解性けい素化合物
と有機化合物または有機金属化合物とを反応させ
たエステルである特許請求の範囲第1項記載の単
相のβ型炭化けい素粉末の製造方法。 5 前記重合または架橋反応が、官能基を有し加
熱により炭素を生成する常温で液状の有機化合物
の前記触媒による重合反応または架橋反応である
特許請求の範囲第1項記載の単相のβ型炭化けい
素粉末の製造方法。 6 前記重合または架橋反応が前記けい素化合物
と官能基を有し加熱により炭素を生成する常温で
液状の有機化合物の前記触媒による重合反応また
は架橋反応である特許請求の範囲第1項記載の単
相のβ型炭化けい素粉末の製造方法。[Claims] 1. A method for obtaining a single-phase β-type silicon carbide powder by heating a raw material containing silicon and carbon in a non-oxidizing atmosphere, wherein the raw material is a silicon compound that is liquid at room temperature; , a liquid containing an organic compound that is liquid at room temperature and that has a functional group and generates carbon when heated, and a polymerization or crosslinking catalyst that uniformly dissolves at least the organic compound is molecularly dissolved by a chemical reaction of polymerization or crosslinking reaction. A method for producing single-phase β-type silicon carbide powder, characterized by using a precursor material containing silicon, oxygen, and carbon obtained by uniformly mixing the same. 2. The method for producing a single-phase β-type silicon carbide powder according to claim 1, wherein the silicon compound is obtained by acid decomposition or dealkalization of an aqueous alkali silicate solution. 3. Claim 1, wherein the silicon compound is an ester of an organic compound having a hydroxyl group and silicic acid.
A method for producing a single-phase β-type silicon carbide powder as described in 1. 4. The method for producing a single-phase β-type silicon carbide powder according to claim 1, wherein the silicon compound is an ester obtained by reacting a hydrolyzable silicon compound with an organic compound or an organometallic compound. 5. The single-phase β type according to claim 1, wherein the polymerization or crosslinking reaction is a polymerization reaction or crosslinking reaction using the catalyst of an organic compound that has a functional group and is liquid at room temperature and generates carbon when heated. Method for producing silicon carbide powder. 6. The unit according to claim 1, wherein the polymerization or crosslinking reaction is a polymerization reaction or crosslinking reaction using the catalyst of an organic compound that has a functional group with the silicon compound and is liquid at room temperature and generates carbon when heated. A method for producing phase β-type silicon carbide powder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59081454A JPS60226406A (en) | 1984-04-23 | 1984-04-23 | Preparation of beta-silicon carbide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59081454A JPS60226406A (en) | 1984-04-23 | 1984-04-23 | Preparation of beta-silicon carbide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60226406A JPS60226406A (en) | 1985-11-11 |
| JPH0142886B2 true JPH0142886B2 (en) | 1989-09-18 |
Family
ID=13746846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59081454A Granted JPS60226406A (en) | 1984-04-23 | 1984-04-23 | Preparation of beta-silicon carbide |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60226406A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6251353B1 (en) | 1996-08-26 | 2001-06-26 | Bridgestone Corporation | Production method of silicon carbide particles |
| US6730283B2 (en) | 2001-03-14 | 2004-05-04 | Shin-Etsu Chemical Co., Ltd. | Preparation of fine β-silicon carbide powder |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS616111A (en) * | 1984-06-20 | 1986-01-11 | Bridgestone Corp | Manufacture of cabonaceous material |
| JP2565024B2 (en) * | 1991-07-18 | 1996-12-18 | 住友金属工業株式会社 | Method for producing silicon carbide powder for semiconductor jig |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6047362B2 (en) * | 1976-06-08 | 1985-10-21 | 東洋紡績株式会社 | Method for manufacturing silicon carbide-containing molded products |
| JPS5788019A (en) * | 1980-11-13 | 1982-06-01 | Asahi Chem Ind Co Ltd | Manufacture of silicon carbide |
| JPS58185424A (en) * | 1982-04-21 | 1983-10-29 | Asahi Chem Ind Co Ltd | Preparation of silicon carbide |
-
1984
- 1984-04-23 JP JP59081454A patent/JPS60226406A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6251353B1 (en) | 1996-08-26 | 2001-06-26 | Bridgestone Corporation | Production method of silicon carbide particles |
| US6730283B2 (en) | 2001-03-14 | 2004-05-04 | Shin-Etsu Chemical Co., Ltd. | Preparation of fine β-silicon carbide powder |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60226406A (en) | 1985-11-11 |
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