JPH0146570B2 - - Google Patents
Info
- Publication number
- JPH0146570B2 JPH0146570B2 JP56200065A JP20006581A JPH0146570B2 JP H0146570 B2 JPH0146570 B2 JP H0146570B2 JP 56200065 A JP56200065 A JP 56200065A JP 20006581 A JP20006581 A JP 20006581A JP H0146570 B2 JPH0146570 B2 JP H0146570B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- alloy
- electrical resistance
- palladium
- melting point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000956 alloy Substances 0.000 claims description 51
- 229910045601 alloy Inorganic materials 0.000 claims description 50
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 35
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 31
- 238000004519 manufacturing process Methods 0.000 claims description 19
- 230000009466 transformation Effects 0.000 claims description 17
- 229910052742 iron Inorganic materials 0.000 claims description 16
- 238000002844 melting Methods 0.000 claims description 15
- 230000008018 melting Effects 0.000 claims description 15
- 229910052763 palladium Inorganic materials 0.000 claims description 15
- 238000001816 cooling Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 230000001590 oxidative effect Effects 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 description 17
- 239000000203 mixture Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000011282 treatment Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000005491 wire drawing Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000009749 continuous casting Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 238000010791 quenching Methods 0.000 description 3
- 230000000171 quenching effect Effects 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 229910000640 Fe alloy Inorganic materials 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 238000005242 forging Methods 0.000 description 2
- 238000000265 homogenisation Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- SORXVYYPMXPIFD-UHFFFAOYSA-N iron palladium Chemical compound [Fe].[Pd] SORXVYYPMXPIFD-UHFFFAOYSA-N 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 238000010587 phase diagram Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003878 thermal aging Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/04—Alloys based on a platinum group metal
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/14—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of noble metals or alloys based thereon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C3/00—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/06—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material including means to minimise changes in resistance with changes in temperature
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Electromagnetism (AREA)
- Thermistors And Varistors (AREA)
- Heat Treatment Of Nonferrous Metals Or Alloys (AREA)
- Soft Magnetic Materials (AREA)
Description
本発明は主成分としてパラジウム(Pd)およ
び鉄(Fe)からなり、少量の不純物を含み超高
温で安定な電気抵抗合金およびその製造方法に関
するもので、その目的とするところは490℃以上
1340℃以下の広い温度範囲において電気抵抗の変
化が小さく、しかも常温にて鍜造、圧延、伸線あ
るいは巻線成形加工が容易な素材を得るにある。
近年製鉄業、化学工業、原子力産業、宇宙関連
産業等の業界においては非常に苛酷な条件下にお
ける各種計測が盛んに行われるようになつてき
た。
例えば高歩留まり、高品位の鉄鋼を一貫生産で
きる連続鋳造プロセスにおいては、タンデツシユ
や鋳型内湯面を所望のレベルに保つため、常時湯
面レベルを制御する必要がある。湯面レベル計と
しては従来γ線やX線等の放射線を用いる方式が
採用されてきたが、装置が大型となり危険性があ
る等欠点が多いため、近年小型で取扱いの容易な
渦電流式変位計(以下単に変位計と呼ぶ)の使用
が考えられるようになつた。
ところで変位計の性能はセンサコイル材によつ
て決まるためその電気的特性、使用環境性および
安定性等は極めて重要である。例えば前記連続鋳
造における溶湯温度は1500℃以上にも達するた
め、その真上に位置するセンサコイル材は1000℃
前後の温度に耐えるだけでなく、最も重要なこと
はその特性が優れしかも長期間安定したものでな
ければならない。
従来高温型センサコイル材としては本発明者ら
により発明された公知のパラジウムと銀を主成分
とした合金(特開昭55−122839号)がある。この
合金は高温における耐食性や耐酸化性、加工性等
が良好であるばかりでなく、第1図に示した比較
合金の特性曲線からもわかるように−50〜600℃
の広い温度範囲にわたつて電気抵抗の温度係数が
+20ppm/℃以下と極めて小さい特長を有してい
るが、さらに高い温度600〜1000℃では+
133ppm/℃と非常に大きな値を示すため、前述
した連続鋳造の如き非常に高い温度での使用にお
いては高いドリフトが発生し、変位計の温度変化
による精度が急激に低下して正確な測定ができな
い。そのため600℃以上のより高い温度において
高精度および良好な安定性を有する新規性のある
超高温型センサコイル材の開発が各種産業界から
強く要望されるようになつた。
そこで本発明者らはこれに応えるためさらに詳
細な研究を進めた結果、パラジウム72.0〜86.5%
および残部鉄と少量の不純物からなる2元合金が
規則−不規則変態温度(570℃)以上融点(1340
℃)以下の広範囲な温度にわたつて電気抵抗の変
化が極めて小さい特性を有し、高温における電気
抵抗の安定性が優れ、かつ加工性が良好な超高温
型センサコイル用電気抵抗合金であることを見出
した。
すなわち本発明は重量比にてパラジウム72.0〜
86.5%および鉄28.0〜13.5%からなり少量の不純
物を含み、規則−不規則変態温度以上1340℃以下
の広い温度範囲において電気抵抗の温度係数が±
50ppm/℃以下有する超高温型センサコイル用電
気抵抗合金およびその製造方法に係わり、これを
さらに規則−不規則変態温度以上融点以下の温度
で充分な焼鈍を施すことによつて優れた安定性を
有する電気的特性を発揮せしめる合金の製造方法
を提供するものである。また本発明合金はこれを
用いた超高温型センサコイルばかりでなく、570
℃以上の超高温において本発明合金の特性を発揮
し得る各種センサをはじめ精密計測機器の電気抵
抗体素子としても好適であるから、それらのデバ
イス複合体としても応用が考えられる。
つぎに本発明合金の製造方法について詳細に説
明する。
本発明の合金を造るにはまずパラジウム72.0〜
86.5%および鉄28.0〜13.5%の適量を非酸化性雰
囲気中あるいは真空中において適当な溶解炉を用
いて溶解し、充分撹拌し組成的に均一な溶融合金
を得る。つぎに溶融合金は適当な形および大きさ
の鉄型に注入して健全な鋳塊を得た後、常温にお
いて鋳造その他種々の加工を施して適当な形状の
もの、例えば棒あるいは板を造る。さらにこれを
スエージング、伸線、圧延あるいは潰し等の方法
によつて冷間加工を施し目的の形状のもの、例え
ば細線あるいは薄板にする。最後に細線または薄
板のままで電気抵抗合金素子として使う場合には
これら冷間加工状態の成品を安定化するために非
酸化性雰囲気中あるいは真空中で規則−不規則変
態温度以上融点以下の温度において少なくとも測
定温度以上、例えば成品の使用温度の上限が1000
℃であれば1050℃以上に加熱し、5分以上50時間
以下保持後、5〜300℃/hで冷却し充分に焼鈍を
行う必要がある。これらの製造工程により優れた
成品が得られる。
なお上記の製造工程中最も重要なことは、本発
明合金は空気または酸素との親和力が強いため
に、第2図からも明らかなように空気との接触に
よつて電気抵抗の著しい劣化を生ずるのみなら
ず、製造工程における冷間加工性に悪影響をもた
らす原因となるので充分に注意することが肝要で
ある。すなわち溶解作業においては出来るだけ空
気または酸素の接触を避けなければならないのは
当然であるが、この他にも溶解後の製造工程にお
ける各種熱処理ならびにセンサデバイスとして応
用する場合においても上記の点について充分注意
を払わなければならない。
また本発明合金は上述したように酸化ばかりで
なく、熱処理の方法によつては金属間化合物の如
く硬く、脆い性質を有する規則状態(γ1相および
γ2相)の合金に変化して加工性を損うものもあ
る。したがつて加工性をさらに向上させるために
は、加工の途中において規則−不規則変態温度以
上融点以下の温度から適当な方法、例えば非酸化
性ガスを高速で吹付けるか、油中急冷するかある
いは石英管の中に真空封入したまま氷塩水中に投
入するなどの方法で急冷することによつて、不規
則状態(γ単相)の合金とし、常温において良好
な加工性を付与する必要もある。この方法による
と加工以前に急冷処理を施した細線あるいは薄板
は非常に軟かくコイル状あるいはスパイラル状に
巻線成形加工が容易となる。
以上のように良好な加工性を具備する製造方法
も本発明の一つの特徴である。
つぎに上記合金の絶縁方法としては以下3種類
の工程が考えられる。
(A) 本発明合金を鋳造、鍜造、圧延、線引き等の
加工を施して線材あるいは板材等の所望の形状
のものを、そのままの状態で耐熱性絶縁体、例
えば高純度セラミツクペースト中に埋め込む
か、耐熱性絶縁体にアルミナ接着剤で直接貼付
するか、筒状セラミツクに巻きつけるかあるい
は2枚の絶縁板で挾むなどの方法により固定す
る。
(B) センサコイルの占積率を高める方法として
は、本発明合金を鋳造、鍜造、圧延、線引き等
により造つた成形体の表面に耐熱性の良好なシ
リカ、アルミナ、マグネシア、フツ化物、ホウ
化物あるいはチツ化物等の無機質絶縁被膜を電
着、蒸着、プレーテングあるいはスパツタリン
グ等の適当な方法により塗布あるいはコーテン
グした後、任意の形状に巻線成形加工を施す。
(C) 本発明合金の成形体の表面に耐熱性絶縁体の
被膜を電着、蒸着、プレーテングあるいはスパ
ツタリング等の適当な方法により形成した後、
任意の形状にエツチツグ打抜きあるいはトリミ
ング加工を施す。
以上のような工程により完成した成品をそのま
まで使用してもよいが、必要ならば合金素材の安
定化のために、さらに再び前述の方法により焼鈍
処理を施せば電気抵抗合金自体と同じ特性を発揮
する優秀な超高温型センサコイルあるいは電気抵
抗体素子の製造が可能である。
つぎに本発明の実施例について述べる。
実施例 1
合金番号 合金FP−18(組成 Pd=86.5%、
Fe=13.5%)の製造
原料としては純度99.9%以上のパラジウムおよ
び純度99.9%以上の鉄を用いた。試料を造るには
全重量100gの原料を高純度アルミナ坩堝に入れ、
酸化を防ぐため表面に高純度アルゴンガスを吹き
つけながら高周波誘導電気炉によつて溶かし、よ
く撹拌して均質な溶融合金とした後、内径7mm、
高さ180mmの鉄型に鋳込んだ。鋳塊は表面の疵を
取つた後、スエージングによつて直径5mmまで冷
間加工した。つぎに真空中1150℃で均質化処理を
施した後、規則−不規則変態温度(570℃)以上
の1000℃から水焼入れした。つづいて途中数回の
水焼入れを繰り返しながらスエージングおよび冷
間伸線により直径0.5mmの細線とし、それより長
さ約10cmのものを切りとり電気抵抗測定用試料と
した。電気抵抗は真空中、常温〜1300℃の温度範
囲で測定した。第1図に示してあるように加工状
態(破線)の電気抵抗の変化は組織が不安定なた
め昇温途中の温度、例えばa点(350℃)あるい
はb点(450℃)から冷却するとa→a′あるいは
b→b′の如く元の経路を辿らずヒステリシスを生
ずる。しかし規則−不規則変態温度(Tp-d=570
℃)以上の温度からの焼鈍状態(実線)では、
Tp-d付近で小さなヒステリシスループを生ずる
他は昇温を繰り返しても同じ径路を辿る。そして
Tp-d以上の温度における電気抵抗の変化はTp-d
以下の温度における場合に比較して極めて小さい
ことがわかる。尚試料の熱処理条件に対応した特
性は第1表のとおりである。
The present invention relates to an electrical resistance alloy consisting of palladium (Pd) and iron (Fe) as main components, containing a small amount of impurities, and stable at ultra-high temperatures, and a method for producing the same.
The object of the present invention is to obtain a material that exhibits small changes in electrical resistance over a wide temperature range of 1340°C or less, and that can be easily processed by forging, rolling, wire drawing, or wire winding at room temperature. In recent years, various types of measurements under extremely harsh conditions have become popular in industries such as the steel industry, chemical industry, nuclear industry, and space-related industry. For example, in a continuous casting process that enables integrated production of high-yield, high-quality steel, it is necessary to constantly control the level of the molten metal in the tundish or mold in order to maintain it at a desired level. Conventionally, methods using radiation such as gamma rays and The use of a displacement meter (hereinafter simply referred to as a displacement meter) has become possible. Incidentally, since the performance of a displacement meter is determined by the sensor coil material, its electrical characteristics, usage environment, stability, etc. are extremely important. For example, the temperature of the molten metal in continuous casting reaches over 1500℃, so the temperature of the sensor coil material located directly above it is 1000℃.
It must not only withstand high and low temperatures, but most importantly, it must have excellent properties and be stable over a long period of time. As a conventional high-temperature sensor coil material, there is a well-known alloy (Japanese Patent Laid-Open No. 122839/1983) invented by the present inventors and consisting mainly of palladium and silver. This alloy not only has good corrosion resistance, oxidation resistance, and workability at high temperatures, but also has good resistance to temperatures between -50 and 600℃, as can be seen from the characteristic curve of the comparative alloy shown in Figure 1.
The temperature coefficient of electrical resistance is extremely small at +20ppm/℃ or less over a wide temperature range, but at even higher temperatures of 600 to 1000℃
Since the value is as large as 133 ppm/℃, high drift occurs when used at extremely high temperatures such as in the continuous casting process mentioned above, and the accuracy of the displacement meter due to temperature changes rapidly decreases, making accurate measurement impossible. Can not. Therefore, there has been a strong demand from various industries for the development of novel ultra-high temperature sensor coil materials that have high accuracy and good stability at higher temperatures of 600°C or higher. In response to this, the present inventors conducted further detailed research and found that palladium contained 72.0 to 86.5%.
The melting point (1340℃) is higher than the ordered-disorder transformation temperature (570℃) and the balance iron and a small amount of impurities.
It is an electrical resistance alloy for ultra-high temperature sensor coils that has extremely small changes in electrical resistance over a wide range of temperatures below ℃), has excellent electrical resistance stability at high temperatures, and has good workability. I found out. That is, the present invention has a weight ratio of palladium of 72.0 to
It is composed of 86.5% iron and 28.0 to 13.5% iron, and contains a small amount of impurities, and the temperature coefficient of electrical resistance is ± within a wide temperature range from the regular-irregular transformation temperature to 1340°C.
An electrical resistance alloy for ultra-high temperature sensor coils having a resistance of 50 ppm/℃ or less and a method for manufacturing the same, which is further annealed at a temperature above the regular-irregular transformation temperature and below the melting point to achieve excellent stability. The present invention provides a method for producing an alloy that exhibits the electrical properties of the present invention. In addition, the alloy of the present invention is not only used in ultra-high temperature sensor coils, but also in 570
Since the alloy of the present invention is suitable as an electrical resistor element for precision measuring instruments, including various sensors that can exhibit the characteristics of the present alloy at ultra-high temperatures of ℃ or higher, it is also possible to apply it as a composite of these devices. Next, the method for manufacturing the alloy of the present invention will be explained in detail. To make the alloy of the present invention, palladium 72.0 ~
Appropriate amounts of 86.5% iron and 28.0 to 13.5% iron are melted in a non-oxidizing atmosphere or in vacuum using a suitable melting furnace and thoroughly stirred to obtain a compositionally uniform molten alloy. Next, the molten alloy is poured into an iron mold of an appropriate shape and size to obtain a sound ingot, which is then subjected to casting and other various processing at room temperature to produce an object of an appropriate shape, such as a rod or plate. Further, this is subjected to cold working by methods such as swaging, wire drawing, rolling, or crushing to obtain a desired shape, such as a thin wire or a thin plate. Finally, when using the thin wire or thin plate as an electrical resistance alloy element, in order to stabilize the cold-worked product, it is placed in a non-oxidizing atmosphere or in vacuum at a temperature above the ordered-disorder transformation temperature and below the melting point. at least the measurement temperature or higher, for example, the upper limit of the product's operating temperature is 1000
℃, it is necessary to heat it to 1050℃ or higher, hold it for 5 minutes or more and 50 hours or less, and then cool it at 5 to 300℃/h to perform sufficient annealing. These manufacturing processes yield excellent products. The most important thing in the above manufacturing process is that since the alloy of the present invention has a strong affinity for air or oxygen, as is clear from Figure 2, contact with air causes a significant deterioration in electrical resistance. In addition, it is important to be careful because it may cause an adverse effect on cold workability in the manufacturing process. In other words, it is natural that contact with air or oxygen must be avoided as much as possible during the melting process, but in addition to this, the above points must also be taken into consideration when applying various heat treatments in the manufacturing process after melting and when applying it as a sensor device. Must pay attention. Furthermore, as mentioned above, the alloy of the present invention is not only oxidized, but also changes into an ordered state (γ 1 phase and γ 2 phase) alloy, which has hard and brittle properties like an intermetallic compound, depending on the heat treatment method. There are some things that can damage your sexuality. Therefore, in order to further improve processability, it is necessary to use an appropriate method during processing from a temperature above the regular-irregular transformation temperature to below the melting point, such as by spraying non-oxidizing gas at high speed, or by rapidly cooling in oil. Alternatively, it is necessary to create an alloy in a disordered state (γ single phase) by rapidly cooling it by placing it in ice salt water while vacuum-sealing it in a quartz tube, and to give it good workability at room temperature. be. According to this method, the thin wire or thin plate that has been rapidly cooled before processing becomes very soft and can be easily wound into a coil or spiral shape. A manufacturing method that provides good workability as described above is also one of the features of the present invention. Next, as a method for insulating the above-mentioned alloy, the following three types of processes can be considered. (A) The alloy of the present invention is processed by casting, forging, rolling, wire drawing, etc. into a desired shape such as a wire or plate, and then embedded as is in a heat-resistant insulator such as high-purity ceramic paste. Alternatively, it can be fixed by directly attaching it to a heat-resistant insulator with alumina adhesive, wrapping it around a cylindrical ceramic, or sandwiching it between two insulating plates. (B) A method for increasing the space factor of the sensor coil is to add heat-resistant silica, alumina, magnesia, fluoride, or After applying or coating an inorganic insulating film such as boride or titanide by an appropriate method such as electrodeposition, vapor deposition, plating or sputtering, the wire is formed into a desired shape. (C) After forming a heat-resistant insulating film on the surface of the molded body of the alloy of the present invention by an appropriate method such as electrodeposition, vapor deposition, plating, or sputtering,
Perform etching punching or trimming into any shape. The product completed through the above process can be used as is, but if necessary, it can be annealed again using the method described above to stabilize the alloy material, so that it has the same characteristics as the electrical resistance alloy itself. It is possible to manufacture ultra-high temperature sensor coils or electrical resistor elements that exhibit excellent performance. Next, embodiments of the present invention will be described. Example 1 Alloy number Alloy FP-18 (composition Pd=86.5%,
Production of Fe=13.5%) Palladium with a purity of 99.9% or higher and iron with a purity of 99.9% or higher were used as raw materials. To make a sample, put raw materials with a total weight of 100g into a high-purity alumina crucible,
To prevent oxidation, the surface was blown with high purity argon gas and melted in a high frequency induction electric furnace, stirred well to make a homogeneous molten alloy, and then the inner diameter was 7 mm.
It was cast into an iron mold with a height of 180mm. After removing surface defects, the ingot was cold-worked to a diameter of 5 mm by swaging. Next, after homogenization treatment was performed at 1150°C in vacuum, water quenching was performed at 1000°C, which is higher than the regular-irregular transformation temperature (570°C). Subsequently, water quenching was repeated several times during the process, followed by swaging and cold wire drawing to form a thin wire with a diameter of 0.5 mm, and a wire with a length of about 10 cm was cut out to be used as a sample for measuring electrical resistance. Electrical resistance was measured in a temperature range of room temperature to 1300°C in vacuum. As shown in Figure 1, the change in electrical resistance during processing (broken line) is due to the instability of the structure. →a' or b→b', the original path is not followed and hysteresis occurs. However, the regular-disorder transformation temperature (T pd = 570
In the annealed state (solid line) from temperatures above ℃),
Other than a small hysteresis loop occurring near T pd , it follows the same path even if the temperature is repeatedly increased. and
The change in electrical resistance at temperatures above T pd is T pd
It can be seen that this is extremely small compared to the case at the following temperatures. The characteristics corresponding to the heat treatment conditions of the samples are shown in Table 1.
【表】
表中第1項、第2項および第3項はそれぞれ
800〜900℃、900〜1000℃および800〜1000℃の温
度範囲における電気抵抗の平均の温度係数が示し
てある。第1項ないし第3項のそれぞれの値の差
が小さいほど2次係数が小さく電気抵抗は直線的
に変化する。そして1300℃まで昇温後冷却し、
1000℃に50日間および1100℃に20日間保つても電
気抵抗の変化は全くみられなかつた。
実施例 2
合金番号 合金FP−24(組成Pd=80.2%、Fe
=19.8%)の製造
原料は実施例1と同じ純度のパラジウムおよび
鉄を用いた。試料の製造方法は全重量10gを高純
度アルミナ坩堝(SSA−H、#2)に入れ、酸
化を防ぐため金属表面に高純度アルゴンガスを吹
きつけながらタンマン炉によつて溶かし、よく撹
拌して均質な溶融合金とした。つぎにこれを内径
2.6〜2.7mmの石英管に吸い上げ、均質化処理のた
め、試料の直径より若干太い内径を有する一端封
止の石英管に挿入して1000℃の温度で10分間保持
後水焼入れを行つた。つづいてスエージングおよ
び冷間伸線によつて直径0.5mmの細線とした。こ
れより長さ約10cmを切りとり試料とした。試料の
熱処理条件とそれに対応した特性は第2表および
第1図のとおりで実施例1と類似の傾向を示す。[Table] Items 1, 2, and 3 in the table are
The average temperature coefficient of electrical resistance in the temperature ranges 800-900°C, 900-1000°C and 800-1000°C is shown. The smaller the difference between the values of the first to third terms, the smaller the quadratic coefficient becomes and the electrical resistance changes linearly. Then, the temperature is raised to 1300℃ and then cooled.
No change in electrical resistance was observed even when kept at 1000°C for 50 days and 1100°C for 20 days. Example 2 Alloy number Alloy FP-24 (composition Pd=80.2%, Fe
= 19.8%) Palladium and iron of the same purity as in Example 1 were used as raw materials. The sample was manufactured by placing a total weight of 10 g into a high-purity alumina crucible (SSA-H, #2), melting it in a Tamman furnace while blowing high-purity argon gas onto the metal surface to prevent oxidation, and stirring well. A homogeneous molten alloy was obtained. Next, set this to the inner diameter
The sample was sucked up into a 2.6 to 2.7 mm quartz tube, and for homogenization treatment, the sample was inserted into a quartz tube sealed at one end with an inner diameter slightly larger than the diameter of the sample, held at a temperature of 1000°C for 10 minutes, and then water quenched. Subsequently, the wire was made into a fine wire with a diameter of 0.5 mm by swaging and cold wire drawing. A sample of approximately 10 cm in length was cut from this. The heat treatment conditions of the sample and the corresponding characteristics are shown in Table 2 and FIG. 1, and show similar trends to those in Example 1.
【表】
実施例 3
合金番号 合金FP−19(組成Pd=73%、Fe=
27%)の製造
原料および製造方法は実施例2と同じである。
試料の熱処理条件とそれに対応した特性は第3表
および第1図のとおりで実施例1および実施例2
と類似の傾向を示す。[Table] Example 3 Alloy number Alloy FP-19 (composition Pd=73%, Fe=
27%) Production The raw materials and production method are the same as in Example 2.
The heat treatment conditions of the samples and the corresponding characteristics are shown in Table 3 and Figure 1.
shows a similar trend.
【表】
第3図には実施例1ないし実施例3と同様の実
験をパラジウム−鉄2元系全域にわたつて行い、
温度範囲(800〜900℃)、温度範囲(900〜
1000℃)および温度範囲(800〜1000℃)にお
ける電気抵抗の平均の温度係数Cf=ΔR/R・ΔTと
900℃における比電気抵抗ρ900がPd量に対して示
してある。図からCfが±100ppm/℃以下の特性
はパラジウム59.0〜88.0%(A〜D)において、
またCfが±50ppm/℃以下の特性はパラジウム
72.0〜86.5%(B〜C)の組成において得られる
ことがわかる。温度範囲,およびにおける
Cf()、Cf()およびCf()の各値間の差が大きい
ほど2次係数が大きく、逆にそれらの差が小さい
ほど2次係数が小さいことを表わしている。例え
ばCf()、Cf()およびCf()が交叉している点A
では2次係数が0のため、800〜1000℃における
電気抵抗は直線的に変化する。
第4図は鉄−パラジウム系状態図で、線影の部
分はパラジウム72.0〜86.5%および鉄28〜13.5%
からなる本発明合金が±50ppm/℃以下の電気抵
抗の温度係数Cfを有することを示している。上記
の特性はいずれも規則−不規則変態温度と融点で
挾まれた広い温度範囲、570℃以上1335℃以下に
おいて得られることがわかる。なお第1図におい
て合金番号FP−24の場合、曲線上約400℃附近に
も電気抵抗の変化の小さい部分がみられるが、規
則−不規則変態温度において不連続に変化ししか
も本発明の目的である温度の広範囲にわたり電気
抵抗の変化が小さい特性を具備していないので、
第4図には示していない。
以上実施例1〜3に述べたように本発明合金は
いずれの場合にも温度に対する電気抵抗の変化が
小さい。特に実施例1の合金番号FP−18は比電
気抵抗ρ900が100μΩ−cmで大きいが、570〜1335℃
の広い温度範囲にわたつて電気抵抗の変化が極め
て小さく、再現性があるため成品の安定性が良好
であることを示している。このようにして単一の
素材で570℃以上1335℃以下の広い温度範囲にわ
たつて±50ppm/℃以下の小さい温度係数を有す
る例は既知の合金には全くなく超高温型センサコ
イル合金の要求特性を充分に満足していると云え
る。
つぎに本発明合金の組成においてパラジウムを
72.0〜86.5%に限定した理由は各実施例、第1
図、第3図および第4図からも明らかなように、
570℃以上1340℃以下の温度範囲における電気抵
抗の温度係数が±50ppm/℃以下の特性を示す
が、組成がこの範囲をはずれると上記の値より大
きくなるため温度の広範囲にわたり電気抵抗の変
化の小さい合金としては不適当となるからであ
る。
また本発明合金の製造方法において焼鈍前の急
冷処理を規則−不規則変態温度(570℃)以上融
点(1340℃)以下の温度範囲から行うことを限定
した理由は、各実施例、第1図、第3図および第
4図からも明らかなように、上記温度範囲から急
冷するとγ単相(不規則状態)を誘起せしめるた
め常温においてより一層良好な加工性を付与する
ことができるが、急冷温度が規則−不規則変態温
度以下では非常に脆くしかも硬くなるため常温に
おいて加工が困難となるばかりでなく、巻線成形
作業に支障を伴うので本発明合金の製造方法とし
ては不適当であるからである。さらに急冷処理と
焼鈍処理が前後相反する製造工程は、焼鈍処理に
よつて非常に脆くしかも硬くなり、その後の巻線
成形加工が困難となるため、本発明合金の製造方
法としては不適当である。
要するに、本発明合金は規則−不規則変態温度
(570℃)以上融点(1340℃)以下の広い温度範囲
における電気抵抗の変化が±100ppm/℃以下と
極めて小さく、1100℃の如く超高温においても長
期間極めて安定であり、規則−不規則変態温度
(570℃)以上融点(1340℃)以下、の温度から急
冷処理を施すことによつて加工性がより一層向上
するなど多くの特長を有しており、超高温センサ
コイルばかりでなく490℃以上1340℃以下の広い
温度領域で使用する基準抵抗器をはじめ精密計測
機器等の電気抵抗体素子としても好適である。ま
た本発明合金を用いたセンサコイルあるいは電気
抵抗体素子と他の機能素子とで構成してなる位置
センサ、三次元センサ、変位センサ、圧力セン
サ、重量センサ、加速度センサ、振動センサ、ト
ルクセンサおよびレペルセンサ等のセンサ複合体
やフロートスイツチ、リミツトスイツチおよび近
接スイツチ等の各種応用デバイスにおいても、本
発明合金が有する優れた特性をより一層発揮する
ことが可能である。[Table] Figure 3 shows that experiments similar to those in Examples 1 to 3 were conducted over the entire palladium-iron binary system.
Temperature range (800~900℃), Temperature range (900~
1000°C) and the average temperature coefficient of electrical resistance in the temperature range (800 to 1000°C) C f =ΔR/R·ΔT and the specific electrical resistance ρ 900 at 900°C are shown with respect to the amount of Pd. From the figure, the characteristics when C f is ±100 ppm/℃ or less are palladium 59.0 to 88.0% (A to D).
Also, the characteristics with C f of ±50ppm/℃ or less are palladium.
It can be seen that the composition is 72.0 to 86.5% (B to C). temperature range, and
The larger the difference between the values of C f (), C f (), and C f (), the larger the quadratic coefficient, and conversely, the smaller the difference between them, the smaller the quadratic coefficient. For example, the point A where C f (), C f () and C f () intersect
Since the quadratic coefficient is 0, the electrical resistance changes linearly between 800 and 1000°C. Figure 4 is the iron-palladium system phase diagram, and the shaded area is palladium 72.0-86.5% and iron 28-13.5%.
It has been shown that the alloy of the present invention consisting of has a temperature coefficient of electrical resistance C f of ±50 ppm/°C or less. It can be seen that all of the above properties can be obtained in a wide temperature range between the regular-disorder transformation temperature and the melting point, from 570°C to 1335°C. In Figure 1, in the case of alloy number FP-24, there is a small portion of the electrical resistance change near about 400°C on the curve, but it changes discontinuously at the ordered-irregular transformation temperature. Because it does not have the characteristic that the change in electrical resistance is small over a wide range of temperatures,
Not shown in Figure 4. As described above in Examples 1 to 3, the alloy of the present invention exhibits a small change in electrical resistance with respect to temperature in all cases. In particular, alloy number FP-18 of Example 1 has a large specific electrical resistance ρ900 of 100 μΩ-cm, but it
The change in electrical resistance is extremely small and reproducible over a wide temperature range, indicating that the product has good stability. In this way, there is no known example of a single material having a small temperature coefficient of less than ±50 ppm/°C over a wide temperature range of 570°C to 1335°C, which is a requirement for ultra-high temperature sensor coil alloys. It can be said that the characteristics are fully satisfied. Next, palladium is added to the composition of the alloy of the present invention.
The reason for limiting the range to 72.0 to 86.5% is explained in each example and the first
As is clear from Figures 3 and 4,
The temperature coefficient of electrical resistance in the temperature range of 570°C to 1340°C exhibits a characteristic of ±50 ppm/°C or less, but if the composition is outside this range, it becomes larger than the above value, so the change in electrical resistance over a wide range of temperatures is This is because it is inappropriate as a small alloy. Furthermore, in the method for producing the alloy of the present invention, the reason why the quenching treatment before annealing is limited to a temperature range from the regular-irregular transformation temperature (570°C) to the melting point (1340°C) is explained in each example and in Figure 1. , as is clear from Figures 3 and 4, rapid cooling from the above temperature range induces a single γ phase (irregular state), which can provide better workability at room temperature. If the temperature is below the ordered-irregular transformation temperature, the alloy becomes extremely brittle and hard, which not only makes processing difficult at room temperature, but also poses a problem in wire-wound forming operations, making it unsuitable as a method for producing the alloy of the present invention. It is. Furthermore, a manufacturing process in which rapid cooling treatment and annealing treatment are contradictory is not suitable as a manufacturing method for the alloy of the present invention because the annealing treatment makes the alloy extremely brittle and hard, making subsequent winding forming processing difficult. . In short, the alloy of the present invention has an extremely small change in electrical resistance of ±100 ppm/°C or less over a wide temperature range from the ordered-disorder transformation temperature (570°C) to the melting point (1340°C), and even at extremely high temperatures such as 1100°C. It is extremely stable for a long period of time, and has many features such as its workability being further improved by rapid cooling from a temperature above the regular-irregular transformation temperature (570℃) and below the melting point (1340℃). Therefore, it is suitable not only for ultra-high temperature sensor coils but also as electrical resistor elements for precision measuring instruments, including reference resistors used in a wide temperature range of 490°C or higher and 1340°C or lower. In addition, position sensors, three-dimensional sensors, displacement sensors, pressure sensors, weight sensors, acceleration sensors, vibration sensors, torque sensors, and The excellent properties of the alloy of the present invention can be further exhibited in various applied devices such as sensor complexes such as repel sensors, float switches, limit switches, and proximity switches.
第1図は加工状態および焼鈍状態における合金
番号FP−18、FP−24、FP−8およびパラジウ
ム−43%銀からなる比較合金について、温度に対
する電気抵抗の変化を示した特性曲線図、第2図
は合金番号FP−18(パラジウム−13.5%鉄合金)
について1000℃の一定温度で50日間以下、空気中
および真空中または非酸化性ガス中における熱エ
ージング日数に対する電気抵抗の変化を比較して
示した特性曲線図、第3図はパラジウム−鉄合金
について、温度範囲(800〜900℃)、温度範囲
(900〜1000℃)および温度範囲(800〜1000
℃)における電気抵抗の平均の温度係数Cf()、
Cf()およびCf()と900℃における比電気抵抗
ρ900のパラジウム量に対する変化を示した特性曲
線図、第4図はパラジウム59.0〜88.0%および鉄
41.0〜12.0%からなる本発明合金について、電気
抵抗の温度係数Cfが±100ppm/℃以下および±
50ppm/℃以下を有する温度範囲を示した特性図
である。
Figure 1 is a characteristic curve diagram showing the change in electrical resistance with respect to temperature for comparative alloys consisting of alloy numbers FP-18, FP-24, FP-8 and palladium-43% silver in processed and annealed states. The figure shows alloy number FP-18 (palladium-13.5% iron alloy)
A characteristic curve diagram comparing the change in electrical resistance with respect to the number of days of thermal aging at a constant temperature of 1000℃ for 50 days or less in air, vacuum, or non-oxidizing gas. Figure 3 is for palladium-iron alloy. , Temperature Range (800~900℃), Temperature Range (900~1000℃) and Temperature Range (800~1000℃)
temperature coefficient of the average electrical resistance C f (),
C f () and C f () and characteristic curve diagrams showing changes in specific electrical resistance ρ 900 at 900°C with respect to palladium content. Figure 4 shows palladium 59.0 to 88.0% and iron
For the alloy of the present invention consisting of 41.0 to 12.0%, the temperature coefficient of electrical resistance C f is ±100 ppm/℃ or less and ±
It is a characteristic diagram showing a temperature range having 50 ppm/°C or less.
Claims (1)
部鉄と、少量の不純物からなり、規則−不規則変
態温度以上融点以下の温度範囲において電気抵抗
の温度係数が±50ppm/℃以下を有することを特
徴とする温度の広範囲にわたり電気抵抗の変化の
小さい合金。 2 重量比にてパラジウム72.0〜86.5%および残
部鉄と、少量の不純物からなる合金を溶解し、鋳
造後、真空又は非酸化性雰囲気中で加熱し、規則
−不規則変態温度以上融点以下の温度に保持し、
この温度から常温まで急冷後、冷間加工により線
材あるいは板材等の所望の形状となし、さらにこ
の素材を非酸化性雰囲気中あるいは真空中におい
て規則−不規則変態温度以上融点以下の温度で5
分以上50時間以下保持後、5〜300℃/hの冷却速
度で冷却し、規則−不規則変態温度(約570℃)
以上融点以下の温度範囲において温度係数が±
50ppm/℃以下の合金を得ることを特徴とする温
度の広範囲にわたり電気抵抗の変化の小さい合金
の製造法。[Scope of Claims] 1 Consisting of 72.0 to 86.5% palladium and the balance iron and a small amount of impurities by weight, and has a temperature coefficient of electrical resistance of ±50 ppm/°C in the temperature range from the ordered-irregular transformation temperature to the melting point. An alloy having a small change in electrical resistance over a wide range of temperatures, characterized by having the following: 2 An alloy consisting of 72.0 to 86.5% palladium by weight, the balance iron, and a small amount of impurities is melted, cast, and heated in a vacuum or non-oxidizing atmosphere to a temperature above the ordered-disorder transformation temperature and below the melting point. hold in
After rapidly cooling from this temperature to room temperature, it is cold-worked into a desired shape such as a wire or plate, and this material is further heated at a temperature above the regular-disorder transformation temperature and below the melting point in a non-oxidizing atmosphere or in a vacuum.
After holding for at least 50 hours, cool at a cooling rate of 5 to 300°C/h until the regular-irregular transformation temperature (approximately 570°C)
In the temperature range above and below the melting point, the temperature coefficient is ±
A method for producing an alloy with a small change in electrical resistance over a wide range of temperatures, characterized by obtaining an alloy with a resistance of 50 ppm/°C or less.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56200065A JPS58113332A (en) | 1981-12-14 | 1981-12-14 | Alloy undergoing slight change in electric resistance over wide temperature range and its manufacture |
| US06/437,613 US4518439A (en) | 1981-12-14 | 1982-10-29 | Alloy with small change of electric resistance over wide temperature range and method of producing the same |
| GB08231440A GB2111528B (en) | 1981-12-14 | 1982-11-03 | Alloy with small change of electric resistance over wide temperature range and method of producing the same |
| NLAANVRAGE8204468,A NL188298C (en) | 1981-12-14 | 1982-11-18 | METHOD FOR MANUFACTURING AN ELECTRICAL RESISTANCE ELEMENT AND PALLADIUM IRON ALLOY. |
| DE3243504A DE3243504C2 (en) | 1981-12-14 | 1982-11-24 | Process for the production of an electrical resistance alloy and its use |
| US06/709,327 US4684416A (en) | 1981-12-14 | 1985-03-07 | Alloy with small change of electric resistance over wide temperature range and method of producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56200065A JPS58113332A (en) | 1981-12-14 | 1981-12-14 | Alloy undergoing slight change in electric resistance over wide temperature range and its manufacture |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26762087A Division JPS63125650A (en) | 1987-10-24 | 1987-10-24 | Production of sensor coil with small variation in electric resistance over wide temperature range |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58113332A JPS58113332A (en) | 1983-07-06 |
| JPH0146570B2 true JPH0146570B2 (en) | 1989-10-09 |
Family
ID=16418250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56200065A Granted JPS58113332A (en) | 1981-12-14 | 1981-12-14 | Alloy undergoing slight change in electric resistance over wide temperature range and its manufacture |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US4518439A (en) |
| JP (1) | JPS58113332A (en) |
| DE (1) | DE3243504C2 (en) |
| GB (1) | GB2111528B (en) |
| NL (1) | NL188298C (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58113332A (en) * | 1981-12-14 | 1983-07-06 | Res Inst Electric Magnetic Alloys | Alloy undergoing slight change in electric resistance over wide temperature range and its manufacture |
| SE8206158L (en) * | 1982-10-29 | 1984-04-30 | Hans G Wahlbeck | PROCEDURE AND DEVICE FOR THE PREPARATION OF ALLERGY FREE Precious Metal Forms |
| GB2203764B (en) * | 1987-04-25 | 1991-02-13 | Reifenhaeuser Masch | Production of spun fleece from continuous synthetic filaments |
| JPH0732323B2 (en) * | 1989-05-30 | 1995-04-10 | 住友金属鉱山株式会社 | Resonator with adjustable temperature coefficient of resonance frequency |
| US5005986A (en) * | 1989-06-19 | 1991-04-09 | Texaco Inc. | Slag resistant thermocouple sheath |
| US5221369A (en) * | 1991-07-08 | 1993-06-22 | Air Products And Chemicals, Inc. | In-situ generation of heat treating atmospheres using non-cryogenically produced nitrogen |
| GB9120161D0 (en) * | 1991-09-20 | 1991-11-06 | Johnson Matthey Plc | New pinning wire products |
| JPH0550999U (en) * | 1991-12-09 | 1993-07-02 | 株式会社明電舎 | Motor current limit circuit |
| DE19635298A1 (en) * | 1996-08-30 | 1998-03-05 | Schenck Process Gmbh | Measurement coil esp for use in oscillator loop e.g. for machine monitoring |
| RU2217524C1 (en) * | 2002-05-15 | 2003-11-27 | Институт физики металлов Уральского отделения РАН | Method of manufacture of material for weak- current contacts made from palladium-based ordered alloy |
| US20060078457A1 (en) * | 2004-10-12 | 2006-04-13 | Heraeus, Inc. | Low oxygen content alloy compositions |
| GB0520473D0 (en) * | 2005-10-07 | 2005-11-16 | Ilika Technologies Ltd | Metal alloy catalysts for fuel cell cathoodes |
| CN100370217C (en) * | 2005-11-01 | 2008-02-20 | 上海瑞视仪表电子有限公司 | Ultra-low temperature drift electric vortex vibrating/displacement sensor |
| CN100442005C (en) * | 2006-12-30 | 2008-12-10 | 上海驰捷电子有限公司 | Fixed-frequency AM electric vortex displacement sensor of linear automatic compensation |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA624029A (en) * | 1961-07-18 | Metallgesellschaft Aktiengesellschaft | Method of applying highly heat-resistant protective coatings to metallic surfaces | |
| US1832307A (en) * | 1925-07-11 | 1931-11-17 | Western Electric Co | Alloy for electrical contacts |
| DE710122C (en) * | 1934-05-26 | 1941-09-09 | Fried Krupp Akt Ges | Palladium-iron alloys as permanent magnets |
| US2780543A (en) * | 1955-05-17 | 1957-02-05 | Baker & Co Inc | High resistivity alloy |
| DE1186636B (en) * | 1956-10-02 | 1965-02-04 | Engelhard Ind Inc | Use of an alloy based on gold-palladium for electrical resistance bodies |
| DE1266511B (en) * | 1963-06-20 | 1968-04-18 | Degussa | Process for the production of permanent magnets |
| GB1110045A (en) * | 1964-03-04 | 1968-04-18 | Zh Denki Jiki Zairyo Kenkyusho | A method of manufacturing non-magnetic, elastic metallic materials |
| US4050956A (en) * | 1970-02-20 | 1977-09-27 | Commonwealth Scientific And Industrial Research Organization | Chemical bonding of metals to ceramic materials |
| JPS55122839A (en) * | 1979-03-14 | 1980-09-20 | Res Inst Electric Magnetic Alloys | Alloy showing little electric resistance change over wide temperature range and manufacture thereof |
| US4374679A (en) * | 1980-05-20 | 1983-02-22 | The Foundation: The Research Institute Of Electric And Magnetic Alloys | Electrical resistant article having a small temperature dependence of electric resistance over a wide temperature range and a method of producing the same |
| NL184915C (en) * | 1980-05-27 | 1989-12-01 | Elect & Magn Alloys Res Inst | METHOD FOR PREPARING ELECTRICAL RESISTANCE ALLOYS OF PALLADIUM AND SILVER, METHOD FOR MANUFACTURING ELECTRICAL RESISTANCE MATERIALS, AND A RECESSING COIL COMPOSING OF SUCH RESISTANCE MATERIAL. |
| DE3020624C2 (en) * | 1980-05-30 | 1986-04-17 | The Foundation: The Research Institute of Electric and Magnetic Alloys, Sendai | Process for the production of an electrical resistance alloy with a low temperature coefficient of electrical resistance over a wide temperature range and its use for a high-temperature sensing coil |
| JPS58113332A (en) * | 1981-12-14 | 1983-07-06 | Res Inst Electric Magnetic Alloys | Alloy undergoing slight change in electric resistance over wide temperature range and its manufacture |
-
1981
- 1981-12-14 JP JP56200065A patent/JPS58113332A/en active Granted
-
1982
- 1982-10-29 US US06/437,613 patent/US4518439A/en not_active Expired - Lifetime
- 1982-11-03 GB GB08231440A patent/GB2111528B/en not_active Expired
- 1982-11-18 NL NLAANVRAGE8204468,A patent/NL188298C/en not_active IP Right Cessation
- 1982-11-24 DE DE3243504A patent/DE3243504C2/en not_active Expired
-
1985
- 1985-03-07 US US06/709,327 patent/US4684416A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US4684416A (en) | 1987-08-04 |
| DE3243504C2 (en) | 1986-12-11 |
| NL188298C (en) | 1992-05-18 |
| GB2111528B (en) | 1985-09-25 |
| DE3243504A1 (en) | 1983-07-07 |
| US4518439A (en) | 1985-05-21 |
| JPS58113332A (en) | 1983-07-06 |
| NL188298B (en) | 1991-12-16 |
| GB2111528A (en) | 1983-07-06 |
| NL8204468A (en) | 1983-07-01 |
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