JPH0146794B2 - - Google Patents
Info
- Publication number
- JPH0146794B2 JPH0146794B2 JP15331181A JP15331181A JPH0146794B2 JP H0146794 B2 JPH0146794 B2 JP H0146794B2 JP 15331181 A JP15331181 A JP 15331181A JP 15331181 A JP15331181 A JP 15331181A JP H0146794 B2 JPH0146794 B2 JP H0146794B2
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- sample
- mirror
- core tube
- vibrating body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 19
- 238000005339 levitation Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000000498 cooling water Substances 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 229910000883 Ti6Al4V Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005520 electrodynamics Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Description
【発明の詳細な説明】
本発明は試料を音波で浮遊させて加熱、溶融、
凝固を行い得るようにした音波浮遊装置付ミラー
炉に関する。[Detailed description of the invention] The present invention suspends a sample using sound waves, heats it, melts it, and
This invention relates to a mirror furnace with a sonic levitation device capable of performing solidification.
宇宙材料実験のごとく、無重力場での高純度材
料の無容器加熱、溶解、凝固プロセスにおいて
は、試料を浮遊させる必要があるが、このための
装置としては、電磁浮遊装置、音波浮遊装置、静
電浮遊装置が原理的に可能とされている。 In the container-less heating, melting, and solidification processes of high-purity materials in a zero-gravity field, such as space material experiments, it is necessary to suspend the sample. Electrolevitation devices are theoretically possible.
しかし、電磁浮遊装置は、対象が金属、半導体
等導電性の物質に限られること、音波浮遊装置は
誘電体等にも適用できるが、雰囲気ガスが必要な
こと、静電浮遊装置は試料への荷電方法、制御方
法が複雑なこと、等夫々一長一短がある。 However, electromagnetic levitation devices are limited to conductive materials such as metals and semiconductors, sonic levitation devices can be applied to dielectric materials, but require an atmospheric gas, and electrostatic levitation devices do not touch the sample. Each method has its advantages and disadvantages, such as the complicated charging method and control method.
一方、上述の音波浮遊装置は、雰囲気ガスとし
て不活性ガス(He、Ar等)が許されれば、金属
以外にガラス等の誘電体にも適用可能であるか
ら、その実用化が望まれている。ところが、実用
化への問題点は加熱炉と組合せたときのポジシヨ
ニング力の安定化制御であり、円管内炉空間に、
浮遊に適した音圧分布を形成させ、それを加熱、
冷却プロセスでの温度条件の変化に応じて一定に
維持することが必要である。 On the other hand, the above-mentioned sonic levitation device can be applied to dielectric materials such as glass in addition to metals, if inert gas (He, Ar, etc.) is allowed as the atmospheric gas, so its practical application is desired. . However, the problem with practical application is the stabilization control of the positioning force when combined with a heating furnace.
Create a sound pressure distribution suitable for floating, heat it,
It is necessary to keep it constant as the temperature conditions change during the cooling process.
上述のポジシヨニング力の安定化制御のための
手段としては、立方体空間(六面体)の三軸方向
にボイスコイル型スピーカを取付け、比較的低周
波(1〜2KHz)の音を放射し、中心部だけに音
圧分布の歪を生じさせるような音圧モードを形成
させるアイデアがあり、一部予備実験が進められ
ているが、斯かる手段には次のような問題があ
る。 As a means for stabilizing and controlling the positioning force mentioned above, voice coil type speakers are installed in the three axes of the cubic space (hexahedron), emitting relatively low frequency (1 to 2 KHz) sound, and only the central part is radiated. There is an idea to form a sound pressure mode that causes distortion of the sound pressure distribution, and some preliminary experiments are underway, but such a method has the following problems.
(i) 1〜2KHzの大音響出力を放射するので、実
験者の聴力保護対策が必要である。(i) Since it emits a loud sound output of 1 to 2 KHz, it is necessary to take measures to protect the experimenter's hearing.
(ii) 宇宙材料実験装置用として使用するために
は、マグネツト部の軽量化が必要である。(ii) In order to use it for space materials experiment equipment, it is necessary to reduce the weight of the magnet part.
(iii) 加熱炉との組み合せが難しい。(iii) Difficult to combine with heating furnace.
(iv) 3個の音源間の振幅位相等差を微妙にコント
ロールする必要がある。(iv) It is necessary to delicately control the difference in amplitude and phase between the three sound sources.
本発明は、内面に鏡面を形成した楕円状のミラ
ー炉本体内に、中空状の炉心管を挿通、固定せし
めると共に炉心管内を炉心管の外から加熱するた
めの加熱ヒータを取付け、前記炉心管の一端に軸
線方向へ移動自在に振動体ホルダーを嵌合せし
め、該振動体ホルダー内に、振動面がミラー炉本
体内に面し試料を浮遊させる定在波を発する振動
体を収納せしめ、前記炉心管の他端内部に、炉心
管軸線方向へ摺動自在に反射体を嵌合せしめ、該
反射体に、ミラー炉中心側に面し前記振動体より
発せられた定在波を反射する反射面を形成すると
共にミラー炉本体内の音圧を検出する音圧検出セ
ンサーを取付け、且つ該反射体の中心部に炉心管
軸線方向へ移動自在なロツドを配設して該ロツド
のミラー炉中心側突出部に試料ホルダーを取付
け、前記反射体側に、試料を前記試料ホルダーに
供給し得るようにしたサンプル管を接続し、前記
振動体側に前記炉心管内にガスを供給するガス供
給装置を設けたことを特徴とするものである。 The present invention involves inserting and fixing a hollow furnace core tube into an elliptical mirror furnace body with a mirror surface formed on the inner surface, and installing a heater for heating the inside of the furnace core tube from outside the furnace core tube. A vibrating body holder is fitted to one end of the vibrating body so as to be movable in the axial direction, and a vibrating body whose vibrating surface faces inside the mirror furnace main body and emits a standing wave that suspends the sample is housed in the vibrating body holder. A reflector is fitted inside the other end of the reactor core tube so as to be slidable in the axial direction of the reactor core tube, and a reflector that faces the mirror furnace center side and reflects the standing wave emitted from the vibrator is fitted to the reflector. A sound pressure detection sensor that forms a surface and detects the sound pressure inside the mirror furnace body is attached, and a rod movable in the core tube axis direction is disposed at the center of the reflector, and the mirror furnace center of the rod is installed. A sample holder is attached to the side protrusion, a sample tube capable of supplying a sample to the sample holder is connected to the reflector side, and a gas supply device for supplying gas into the reactor core tube is provided to the vibrator side. It is characterized by this.
以下、本発明の実施例を図面を参照しつつ説明
する。 Embodiments of the present invention will be described below with reference to the drawings.
断面が楕円形状をし且つ凹面内部に金鍍金を施
して鏡面を形成したミラー炉本体1の長軸方向両
側に、軸線が長軸側頂点を通り且つ長軸と平行に
延びるハロゲンランプ等の加熱ヒータ2を取付け
ると共に軸線が短軸と合致した中空状の石英製炉
心管3をミラー炉本体1に挿通・固定せしめる。
炉心管3は内径40mmφ程度、長さ160〜200mm程度
である。 A heating lamp such as a halogen lamp whose axis passes through the vertex on the long axis side and extends parallel to the long axis is installed on both sides in the long axis direction of the mirror furnace body 1, which has an elliptical cross section and a mirror surface formed by gold plating on the inside of the concave surface. The heater 2 is attached, and a hollow quartz furnace core tube 3 whose axis coincides with the short axis is inserted and fixed into the mirror furnace body 1.
The furnace core tube 3 has an inner diameter of about 40 mmφ and a length of about 160 to 200 mm.
炉心管3の一端を、ミラー炉本体1内よりある
程度外方へ突出せしめ、炉心管3の突出内部に中
空状の筒体4を摺動可能に嵌合せしめ、該筒体4
のミラー炉本体1側端部に、反射体5及び該反射
体5の反射面6から先端がミラー炉本体1内に突
出した音圧検出センサー7を取付け、筒体4の後
端外周にボールねじ8を介してプーリー9を取付
け、該プーリー9と駆動モータ10の出力軸に取
付けたプーリー11との間に無端状のベルト12
を掛け渡す。 One end of the furnace core tube 3 is made to protrude outward to some extent from inside the mirror furnace body 1, and a hollow cylinder 4 is slidably fitted into the protruding inside of the furnace core tube 3.
A reflector 5 and a sound pressure detection sensor 7 whose tip protrudes into the mirror furnace body 1 from the reflective surface 6 of the reflector 5 are attached to the side end of the mirror furnace body 1, and a ball is attached to the outer periphery of the rear end of the cylinder 4. A pulley 9 is attached via a screw 8, and an endless belt 12 is connected between the pulley 9 and a pulley 11 attached to the output shaft of a drive motor 10.
across.
前記筒体4中空部にロツド13を挿通せしめて
該ロツド13のミラー炉本体1側先端に朝顔状の
試料ホルダー14を取付け、ミラー炉本体1を取
付けた枠体15のブラケツト16に駆動モータ1
7により駆動されるローラ18とフリーローラ1
9とを枢着し、該ローラ18とフリーローラ19
間に前記ロツド13を挾み、摩擦力によりロツド
13を軸線方向に進退動させ得るようになつてい
る。 A rod 13 is inserted into the hollow part of the cylinder 4, a morning glory-shaped sample holder 14 is attached to the tip of the rod 13 on the side of the mirror furnace body 1, and a drive motor 1 is attached to the bracket 16 of the frame 15 to which the mirror furnace body 1 is attached.
roller 18 driven by roller 7 and free roller 1
9 are pivotally connected, and the roller 18 and the free roller 19 are
The rod 13 is sandwiched between them, and the rod 13 can be moved forward and backward in the axial direction by frictional force.
ミラー炉本体1の試料ホルダー14を設けた側
に、試料を投入するサンプル管20を取付け、該
サンプル管20を炉心管3の孔21に連通せしめ
る。 A sample tube 20 for introducing a sample is attached to the side of the mirror furnace body 1 on which the sample holder 14 is provided, and the sample tube 20 is communicated with the hole 21 of the furnace core tube 3.
炉心管3がミラー炉本体1側方へ突出してない
側に、中空状の枠体22を取付け、該枠体22内
に、先端が炉心管3内を摺動し得るようにした段
付円筒状の振動体ホルダー23を嵌合せしめ、該
振動体ホルダー23中空部に振動体24を取付
け、該振動体24を発振器25に接続する。 A hollow frame body 22 is attached to the side where the furnace core tube 3 does not protrude to the side of the mirror furnace body 1, and a stepped cylinder whose tip can slide inside the furnace core tube 3 is provided within the frame body 22. A vibrating body holder 23 having a shape is fitted thereinto, a vibrating body 24 is attached to the hollow part of the vibrating body holder 23, and the vibrating body 24 is connected to an oscillator 25.
振動体ホルダー23の後端にねじ軸26を取付
け、該ねじ軸26に雌ねじを有するプーリー27
を螺着せしめ、該プーリー27と駆動モータ28
出力軸に固着したプーリー29との間に無端状の
ベルト30を掛け渡す。 A screw shaft 26 is attached to the rear end of the vibrating body holder 23, and a pulley 27 has a female thread on the screw shaft 26.
The pulley 27 and drive motor 28 are screwed together.
An endless belt 30 is stretched between the output shaft and a pulley 29 fixed to the output shaft.
前記振動体24としては、電歪型、磁歪型、動
電型のいずれも使用可能であるが、前記炉心管3
内で試料をポジシヨニングするためには、15〜
20KHzの超音波が適当であり、トランスジユーサ
用の圧電素子としてはPZT(ジルコン酸チタン酸
鉛)を用いたボルト締めランジユバン型変換素子
を用い、ミラー炉本体1内に面した振動面31の
直径を炉心管3内径の0.59〜0.61倍にする。 As the vibrating body 24, any of electrostrictive type, magnetostrictive type, and electrodynamic type can be used.
In order to position the sample within the
Ultrasonic waves of 20 KHz are suitable, and a bolt-fastened lunge type transducer using PZT (lead zirconate titanate) is used as the piezoelectric element for the transducer. Make the diameter 0.59 to 0.61 times the inner diameter of the furnace tube 3.
枠体22の外部に、ガス成分コントロール装置
32と接続されたガス供給ノズル33を接続し、
該ガス供給ノズル33を、枠体22と振動体ホル
ダー23間の中空部、振動体ホルダー23に穿設
した小孔34、振動体ホルダー23中空部と振動
体24との間の間隙を介して炉心管3内に連通せ
しめる。 A gas supply nozzle 33 connected to a gas component control device 32 is connected to the outside of the frame 22,
The gas supply nozzle 33 is inserted through the hollow part between the frame body 22 and the vibrating body holder 23, the small hole 34 bored in the vibrating body holder 23, and the gap between the hollow part of the vibrating body holder 23 and the vibrating body 24. It communicates with the inside of the furnace core tube 3.
なお図中35はミラー炉本体1外周部に螺旋状
に取付けられた冷却水管、36は筒体4の冷却水
管、37はサンプル管20から孔21を経て炉心
管3内に連通したガスノズル、38は試料、41
は振動体24の冷却水管である。 In the figure, 35 is a cooling water pipe spirally attached to the outer periphery of the mirror furnace body 1, 36 is a cooling water pipe of the cylinder 4, 37 is a gas nozzle communicating from the sample tube 20 through the hole 21 into the core tube 3, and 38 is the sample, 41
is a cooling water pipe of the vibrating body 24.
次に本発明の作動について説明する。 Next, the operation of the present invention will be explained.
上記音波浮遊装置付ミラー炉は、通常は宇宙空
間で使用され、この場合にはどの方向に向けても
使用可能であるが、地上で使用する場合には振動
体24を上にし、試料ホルダー14を下にして作
業する必要があるが、以下地下での作業について
説明する。 The mirror furnace with a sonic levitation device is usually used in outer space, and in this case it can be used in any direction; however, when used on the ground, the vibrating body 24 should be at the top, and the sample holder 14 should be turned upward. It is necessary to work underground, but below we will explain how to work underground.
ミラー炉本体1内での試料の浮遊安定領域は、
一般に炉心管3内に複数個所に存在するのであら
かじめ加熱条件の分つている領域に閉じ込めてお
くことが必要である。このため、運転時には駆動
モータ10によりプーリー11,9を回転させて
筒体4を下降させると共に駆動モータ17により
ローラ18を回転させて試料ホルダー14を下降
させ、試料ホルダー14をサンプル管20より下
の位置で停止せしめ、サンプル管20より試料3
8を試料ホルダー14に入れ、駆動モータ17に
より試料ホルダー14をミラー炉本体1内中央部
所要位置に移動させ、試料ホルダー14により試
料38を保持して安定領域にプレポジシヨニング
する。 The floating stable region of the sample in the mirror furnace body 1 is:
Since they generally exist in multiple locations within the furnace core tube 3, it is necessary to confine them in an area with known heating conditions in advance. Therefore, during operation, the drive motor 10 rotates the pulleys 11 and 9 to lower the cylinder 4, and the drive motor 17 rotates the roller 18 to lower the sample holder 14, lowering the sample holder 14 below the sample tube 20. Stop the sample at the position and insert the sample 3 from the sample tube 20.
8 is placed in the sample holder 14, and the drive motor 17 moves the sample holder 14 to a desired central position in the mirror furnace body 1. The sample holder 14 holds the sample 38 and prepositions it in a stable area.
又、駆動モータ10により筒体4をミラー炉本
体1側に移動させて反射面6を所要位置に位置さ
せ、駆動モータ28により振動体ホルダー23を
移動させて振動体24の振動面31を所要位置に
位置させ、振動面31と反射面6を所要の間隔に
保持する。 Further, the driving motor 10 moves the cylinder 4 toward the mirror furnace main body 1 to position the reflecting surface 6 at a desired position, and the driving motor 28 moves the vibrating body holder 23 to move the vibrating surface 31 of the vibrating body 24 to the desired position. position, and maintain the vibrating surface 31 and the reflecting surface 6 at a required interval.
次に発振器25を作動させて機械的に振動を振
動体24に与える。機械的振動はボルト締めラン
ジユバン変換素子で超音波に変換され、チタン合
金(Ti6Al4V)製のトランスミツタで増幅され、
振動面31から炉心管3内に超音波が放射され
る。 Next, the oscillator 25 is activated to mechanically apply vibration to the vibrating body 24. Mechanical vibrations are converted into ultrasonic waves by a bolt-fastened lunge conversion element, which is amplified by a transmitter made of titanium alloy (Ti6Al4V).
Ultrasonic waves are radiated from the vibration surface 31 into the reactor core tube 3 .
振動面31の直径は炉心管3内径の略0.6倍で
あり且つ振動面31と反射面6の距離が適当な寸
法に調整されているため、炉心管3内に軸線方
向、径方向共にポジシヨニング力の働く音圧分布
すなわちベツセルの〔0.1〕モードが形成され、
試料38は試料ホルダー14から浮遊してポジシ
ヨニングされる。又、ポジシヨニングが終了した
ら、加熱ヒータ2により試料38は溶融される。 The diameter of the vibrating surface 31 is approximately 0.6 times the inner diameter of the reactor core tube 3, and the distance between the vibrating surface 31 and the reflecting surface 6 is adjusted to an appropriate dimension, so that positioning force is generated within the reactor core tube 3 in both the axial and radial directions. The sound pressure distribution, that is, Betssel's [0.1] mode is formed,
The sample 38 is positioned floating from the sample holder 14. Further, after the positioning is completed, the sample 38 is melted by the heater 2.
上記音圧分布は超音波の周波数、ガス中の音
速、炉心管3の内径、長さに依存することは理論
的にもある程度推定されるが、実機の場合には、
ガス中の音速はガスの温度ガス成分によつて変る
ので、一定の音圧分布を形成させておくことは困
難である。従つて、浮遊安定領域が移動しても試
料38の加熱条件が変化しないように、加熱ヒー
タ2のミラー炉の焦点を線状にし、ポジシヨニン
グ力を安定させてやる。 Although it can be theoretically estimated to some extent that the above sound pressure distribution depends on the frequency of the ultrasonic wave, the speed of sound in the gas, and the inner diameter and length of the reactor core tube 3, in the case of an actual machine,
Since the speed of sound in gas varies depending on the temperature and gas components of the gas, it is difficult to form a constant sound pressure distribution. Therefore, the focus of the mirror furnace of the heater 2 is made linear to stabilize the positioning force so that the heating conditions of the sample 38 do not change even if the floating stable region moves.
常温の試料38を加熱、溶融、冷却、凝固させ
る全プロセスにおいて浮遊させ、ポジシヨニング
することが理想であるが、その間の温度変化は
1000℃以上になり、ガス中の音速の変化も2倍以
上に変化し、音圧分布は大幅に変化するので、そ
の間に反射面6の位置とガス成分、ガス温度、反
射面上音圧、反射面位置、振動周波数をデータと
して実時間で取込み、これらを図示してない演算
装置で処理して上記の因子の最適値を出力し、安
定浮遊加熱を行う。 Ideally, the sample 38 at room temperature should be suspended and positioned during the entire process of heating, melting, cooling, and solidifying, but the temperature change during that time is
When the temperature reaches 1000℃ or more, the change in sound velocity in the gas more than doubles, and the sound pressure distribution changes significantly. The position of the reflecting surface and the vibration frequency are taken in as data in real time, and these are processed by an arithmetic device (not shown) to output the optimum values of the above factors, and stable floating heating is performed.
本発明の音波浮遊装置付ミラー炉は前述のごと
き構成であるから、下記のごとき種々の優れた効
果を奏し得る。 Since the mirror furnace with sonic levitation device of the present invention has the above-described configuration, it can achieve various excellent effects as described below.
() 円筒状音場の軸線上に加熱ゾーンを設けて
おり、定在波が軸対称であることから、加熱時
のポジシヨニング力の安定性が優れている。() Since the heating zone is provided on the axis of the cylindrical sound field and the standing waves are axially symmetrical, the stability of the positioning force during heating is excellent.
() 円筒状の炉心管を使用することにより線状
焦点ヒータとの整合性が良い。() The use of a cylindrical core tube provides good compatibility with the linear focal heater.
() ガスコントロール系の供給ガス流が反射体
と振動体トランスミツタ周辺を流れることによ
り、音場を乱すことがない。() The gas flow supplied to the gas control system flows around the reflector and vibrating transmitter, so it does not disturb the sound field.
() 試料投入口を反射体側に設け、ガス供給口
側と同じ側にすることにより、試料のプレポジ
シヨニングをガス流により行うことができるの
で試料ホルダーを反射体側にだけ設ければ良
い。() By providing the sample inlet on the reflector side and on the same side as the gas supply port, sample prepositioning can be performed using the gas flow, so it is only necessary to provide the sample holder on the reflector side.
() ガス成分比と反射体の炉心管軸線方向位置
を同時に制御することにより、加熱温度条件に
よる炉心管内音波の波長の変化への追従性を満
足し、しかも反射体の調整ストロークを短かく
でき、全体的にコンパクトになる。() By simultaneously controlling the gas component ratio and the position of the reflector in the axial direction of the core tube, it is possible to satisfy the ability to follow changes in the wavelength of the sound waves in the core tube due to heating temperature conditions, and to shorten the adjustment stroke of the reflector. , the overall size becomes more compact.
第1図は本発明の実施例の説明図である。
図中1はミラー炉本体、2は加熱ヒータ、3は
炉心管、4は筒体、5は反射体、6は反射面、1
4は試料ホルダー、20はサンプル管、23は振
動体ホルダー、24は振動体、25は発振器、2
6はねじ軸、31は振動面、32はガス成分コン
トロール装置を示す。
FIG. 1 is an explanatory diagram of an embodiment of the present invention. In the figure, 1 is the mirror furnace body, 2 is the heater, 3 is the furnace tube, 4 is the cylinder, 5 is the reflector, 6 is the reflective surface, 1
4 is a sample holder, 20 is a sample tube, 23 is a vibrating body holder, 24 is a vibrating body, 25 is an oscillator, 2
6 is a screw shaft, 31 is a vibration surface, and 32 is a gas component control device.
Claims (1)
内に、中空状の炉心管を挿通、固定せしめると共
に炉心管内を炉心管の外から加熱するための加熱
ヒータを取付け、前記炉心管の一端に軸線方向へ
移動自在に振動体ホルダーを嵌合せしめ、該振動
体ホルダー内に、振動面がミラー炉本体内に面し
試料を浮遊させる定在波を発する振動体を収納せ
しめ、前記炉心管の他端内部に、炉心管軸線方向
へ摺動自在に反射体を嵌合せしめ、該反射体に、
ミラー炉中心側に面し前記振動体より発せられた
定在波を反射する反射面を形成すると共にミラー
炉本体内の音圧を検出する音圧検出センサーを取
付け、且つ該反射体の中心部に炉心管軸線方向へ
移動自在なロツドを配設して該ロツドのミラー炉
中心側突出部に試料ホルダーを取付け、前記反射
体側に、試料を前記試料ホルダーに供給し得るよ
うにしたサンプル管を接続し、前記振動体側に前
記炉心管内にガスを供給するガス供給装置を設け
たことを特徴とする音波浮遊装置付ミラー炉。1 A hollow furnace core tube is inserted and fixed into an elliptical mirror furnace body with a mirror surface formed on the inner surface, and a heater for heating the inside of the furnace core tube from the outside is installed, and a heater is installed at one end of the furnace core tube. A vibrating body holder is fitted so as to be movable in the axial direction, and a vibrating body whose vibrating surface faces inside the mirror furnace body and generates a standing wave that suspends the sample is housed in the vibrating body holder. A reflector is fitted inside the other end so as to be slidable in the axial direction of the core tube, and the reflector is fitted with a
A reflecting surface facing the center of the mirror furnace and reflecting the standing waves emitted from the vibrating body is provided, and a sound pressure detection sensor for detecting the sound pressure inside the mirror furnace main body is attached, and the central part of the reflector is A rod movable in the axial direction of the furnace tube is disposed on the rod, a sample holder is attached to the protruding portion of the rod on the mirror furnace center side, and a sample tube is provided on the reflector side so that the sample can be supplied to the sample holder. A mirror furnace with a sonic floating device, characterized in that a gas supply device is connected to the vibrating body and supplies gas into the furnace tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15331181A JPS5855676A (en) | 1981-09-28 | 1981-09-28 | Mirror furnace with ultrasonic floaing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15331181A JPS5855676A (en) | 1981-09-28 | 1981-09-28 | Mirror furnace with ultrasonic floaing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5855676A JPS5855676A (en) | 1983-04-02 |
| JPH0146794B2 true JPH0146794B2 (en) | 1989-10-11 |
Family
ID=15559708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15331181A Granted JPS5855676A (en) | 1981-09-28 | 1981-09-28 | Mirror furnace with ultrasonic floaing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5855676A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60191898U (en) * | 1984-05-31 | 1985-12-19 | 株式会社サーモ理工 | Radiant heating device |
| JPS6262747A (en) * | 1985-09-14 | 1987-03-19 | 松下電工株式会社 | Laminated board |
-
1981
- 1981-09-28 JP JP15331181A patent/JPS5855676A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5855676A (en) | 1983-04-02 |
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