JPH0157621B2 - - Google Patents
Info
- Publication number
- JPH0157621B2 JPH0157621B2 JP3884484A JP3884484A JPH0157621B2 JP H0157621 B2 JPH0157621 B2 JP H0157621B2 JP 3884484 A JP3884484 A JP 3884484A JP 3884484 A JP3884484 A JP 3884484A JP H0157621 B2 JPH0157621 B2 JP H0157621B2
- Authority
- JP
- Japan
- Prior art keywords
- electric field
- dielectric sheet
- dielectric
- field curtain
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005684 electric field Effects 0.000 claims description 20
- 239000011368 organic material Substances 0.000 claims description 9
- 229910010272 inorganic material Inorganic materials 0.000 claims description 4
- 239000011147 inorganic material Substances 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/88—Cleaning-out collected particles
- B03C3/885—Cleaning-out collected particles by travelling or oscillating electric fields, e.g. electric field curtains
Landscapes
- Electrostatic Separation (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、誘電体シート内に平行で、かつ等間
隔に複数本の電極を設け、隣接する電極間に交流
電圧を印加して荷電粒子を電極と直角方向に移送
するようにした電界カーテン装置に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention provides a dielectric sheet with a plurality of electrodes arranged in parallel and at regular intervals, and applies an alternating current voltage between adjacent electrodes to transfer charged particles to the electrodes. This invention relates to an electric field curtain device that is configured to transport the electric field in a direction perpendicular to the electric field curtain.
従来技術
ポリエチレンテレフタレート、ポリイミド等の
有機材料より成る誘電体シートを用いてフレキシ
ビイテイリー、低コストを計つた電界カーテン装
置、
フアインセラミツク、、ガラス等の無機材料よ
り成る誘電体シートを用いて電気的耐久性を向上
させるようにした電界カーテン装置、
等が知られている。PRIOR TECHNOLOGY A flexible, low-cost electric field curtain device using a dielectric sheet made of an organic material such as polyethylene terephthalate or polyimide.A dielectric sheet made of an inorganic material such as fine ceramics or glass. Electric field curtain devices that improve electrical durability are known.
一方、誘電体シートの電極直上部近傍ではコロ
ナ放電が発生しているので、オゾン、酸素ラシカ
ル、各種イオンが豊富に発生して誘電体シートの
表面に衝突していると共に、電極の近傍は電界の
集中度合が特に大である。 On the other hand, corona discharge occurs near the dielectric sheet directly above the electrode, so ozone, oxygen radicals, and various ions are generated abundantly and collide with the surface of the dielectric sheet, and the electric field near the electrode The degree of concentration is particularly large.
このために、有機材料より成る誘電体シートを
用いた電界カーテン装置では、誘電体シートの電
極近傍部分が早期に劣化、変質してしまうので、
数百時間の稼動で絶縁破壊を起してしまうから、
有機材料より成る誘電体シートを用いた電界カー
テン装置は耐久性が悪いものとなつてしまう。 For this reason, in electric field curtain devices that use dielectric sheets made of organic materials, the portions of the dielectric sheets near the electrodes deteriorate and change in quality early.
Dielectric breakdown occurs after several hundred hours of operation.
Electric field curtain devices using dielectric sheets made of organic materials tend to have poor durability.
発明の目的
有機材料より成る誘電体シートを用いた電界カ
ーテン装置の耐久性を向上できるようにすること
を目的とする。OBJECTS OF THE INVENTION It is an object of the invention to improve the durability of an electric field curtain device using a dielectric sheet made of an organic material.
発明の構成
有機材料より成る誘電体シートの表面に無機材
料より成る誘電体被膜を形成したもの。Structure of the Invention A dielectric film made of an inorganic material is formed on the surface of a dielectric sheet made of an organic material.
実施例
第１図は単相電界カーテン装置の概略平面図、
第２図はその−線に沿う一部拡大断面図であ
り、厚さ100μｍ程度のポリイミドフイルムより
構成された誘電体シート３の下部には、ホツトエ
ツチング等の手段によつて第１、第２電極１，２
が並行にかつ等間隔で交互に多数形成されて電極
群を構成し、各第１電極１は連続し、かつ第１接
続端子１ａに接続してあり、各第２電極２は連続
しかつ第２接続端子２ａに接続してあると共に、
第１、第２接続端子１ａ，２ａ間に交流電源６が
接続されて30〜400Hzで３〜5KV（RMS）程度の
交流電圧が印加されている。Example FIG. 1 is a schematic plan view of a single-phase electric field curtain device,
FIG. 2 is a partially enlarged sectional view taken along the - line, and the lower part of the dielectric sheet 3 made of a polyimide film with a thickness of about 100 μm is etched with first and second layers by means such as hot etching. Electrodes 1, 2
are formed alternately in parallel and at regular intervals to constitute an electrode group, each first electrode 1 is continuous and connected to the first connection terminal 1a, and each second electrode 2 is continuous and connected to the first connection terminal 1a. 2 connection terminal 2a, and
An AC power source 6 is connected between the first and second connection terminals 1a and 2a, and an AC voltage of about 3 to 5 KV (RMS) at 30 to 400 Hz is applied.
なお、第１、第２電極１，２は銅、アルミ等の
材料より成り厚さ30μｍ、巾300μｍの矩形断面形
状を有していると共に、隣接する電極間のピツチ
はそれぞれ2.5mmとなつている。 The first and second electrodes 1 and 2 are made of materials such as copper and aluminum and have a rectangular cross-sectional shape with a thickness of 30 μm and a width of 300 μm, and the pitch between adjacent electrodes is 2.5 mm. There is.
また、各第１、第２電極１，２、つまり電極群
はシリコンゴムよりなる絶縁支持体層４により完
全に埋設されている。 Further, each of the first and second electrodes 1 and 2, that is, the electrode group, is completely buried in an insulating support layer 4 made of silicone rubber.
前記誘電体シート３の表面は厚さ数μｍ、つま
りフレキシビイリテイーを損なわない程度の酸化
シリコン（SiO2）被膜５が施されている。 The surface of the dielectric sheet 3 is coated with a silicon oxide (SiO 2 ) film 5 having a thickness of several μm, that is, to an extent that does not impair flexibility.
ここで、酸化シリコンの被膜を形成する工程は
一般に1000℃前後の高温を必要とするが、本発明
に係る電界カーテン装置の誘電体シート３に用い
られているポリイミドフイルムは約250℃の耐熱
性しか有していない。 Here, the process of forming a silicon oxide film generally requires a high temperature of around 1000°C, but the polyimide film used for the dielectric sheet 3 of the electric field curtain device according to the present invention has a heat resistance of about 250°C. I only have one.
そこで、本発明においてはシランと酸素の混合
ガスを用いた低温プラズマCVDで酸化シリコン
の被膜を誘電体シート３の表面に形成した。 Therefore, in the present invention, a silicon oxide film was formed on the surface of the dielectric sheet 3 by low-temperature plasma CVD using a mixed gas of silane and oxygen.
この様にすれば、誘電体シート３は百数十度迄
しか温度が上がらないので、ポリイミドフイルム
ばかりかポリエチレンテレフタレート（PET）
等を誘電体シート３の材料として用いることがで
きる。 In this way, the temperature of the dielectric sheet 3 will only rise to more than 100 degrees, so it can be used not only for polyimide films but also for polyethylene terephthalate (PET).
etc. can be used as the material of the dielectric sheet 3.
以上の様であるから、誘電体シート３の表面が
酸化シリコン被膜５で保護されるので、ポリイミ
ドフイルムよりなる誘電体シート３におけるコロ
ナ放電によつて発生するオゾン、酸素ラシカル、
各種イオンが衝突したり、電界の集中度合が特に
大である電極近傍部分の劣化、変質を低減して長
時間稼動しても絶縁破壊が起ることを防止でき、
ポリイミドフイルムよりなる誘電体シートを用い
た電界カーテン装置の耐久性を向上できる。 As described above, since the surface of the dielectric sheet 3 is protected by the silicon oxide film 5, ozone, oxygen radicals generated by corona discharge in the dielectric sheet 3 made of polyimide film, etc.
It reduces collisions of various ions and deterioration and alteration of the area near the electrode where the degree of electric field concentration is particularly large, and prevents dielectric breakdown even after long-term operation.
The durability of an electric field curtain device using a dielectric sheet made of polyimide film can be improved.
以上の実施例ではポリイミドフイルムより誘電
体シートを構成したが、他の有機材料により構成
しても良いと共に、酸化シリコン被膜を形成した
が無機材料より成る誘電体被膜を形成すれば良
い。 In the above embodiments, the dielectric sheet was made of polyimide film, but it may be made of other organic materials, and although a silicon oxide film was formed, a dielectric film made of an inorganic material may be formed.
また、以上の実施例では単相電界カーテン装置
として述べたが、多相電界カーテン装置でも良い
ことは勿論である。 Furthermore, although the above embodiments have been described as single-phase electric field curtain devices, it goes without saying that a multi-phase electric field curtain device may also be used.
なお、本発明に係る電界カーテン装置の用途と
しては粉体の輪送やオゾン発生装置又は粉体、フ
イルム等の帯電装置などである。 The electric field curtain device according to the present invention may be used as a powder conveyor, an ozone generator, or a charging device for powder, film, etc.
発明の効果
有機材料より成る誘電体シート３の電極近傍部
分の劣化、変質を低減して早期に絶縁破壊するこ
とを防止できるから、有機材料より成る誘電体シ
ートを用いた電界カーテン装置の耐久性を向上で
きる。Effects of the Invention The durability of the electric field curtain device using the dielectric sheet 3 made of an organic material is improved because deterioration and deterioration of the portion of the dielectric sheet 3 made of an organic material near the electrodes can be reduced and early dielectric breakdown can be prevented. can be improved.
図面は本発明の実施例を示し、第１図は単相電
界カーテン装置の概略平面図、第２図は第１図の
−線に沿う一部拡大断面図である。
１，２は電極、３は誘電体シート。
The drawings show an embodiment of the present invention, and FIG. 1 is a schematic plan view of a single-phase electric field curtain device, and FIG. 2 is a partially enlarged sectional view taken along the line - in FIG. 1. 1 and 2 are electrodes, and 3 is a dielectric sheet.
Claims (1)
かつ等間隔に複数本の電極１，２を設け、隣接す
る電極間に交流電圧を印加する電界カーテン装置
において、前記誘電体シート３の表面に無機材料
より成る誘電体被膜を形成したことを特徴とする
電界カーテン装置。1. In an electric field curtain device in which a plurality of electrodes 1 and 2 are provided in a dielectric sheet 3 made of an organic material at equal intervals in parallel and an alternating current voltage is applied between adjacent electrodes, the surface of the dielectric sheet 3 is An electric field curtain device characterized by forming a dielectric film made of an inorganic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3884484A JPS60183046A (en) | 1984-03-02 | 1984-03-02 | Electric field curtain apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3884484A JPS60183046A (en) | 1984-03-02 | 1984-03-02 | Electric field curtain apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60183046A JPS60183046A (en) | 1985-09-18 |
| JPH0157621B2 true JPH0157621B2 (en) | 1989-12-06 |
Family
ID=12536502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3884484A Granted JPS60183046A (en) | 1984-03-02 | 1984-03-02 | Electric field curtain apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60183046A (en) |
-
1984
- 1984-03-02 JP JP3884484A patent/JPS60183046A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60183046A (en) | 1985-09-18 |
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