JPH0211359B2 - - Google Patents
Info
- Publication number
- JPH0211359B2 JPH0211359B2 JP59127932A JP12793284A JPH0211359B2 JP H0211359 B2 JPH0211359 B2 JP H0211359B2 JP 59127932 A JP59127932 A JP 59127932A JP 12793284 A JP12793284 A JP 12793284A JP H0211359 B2 JPH0211359 B2 JP H0211359B2
- Authority
- JP
- Japan
- Prior art keywords
- rotating mirror
- flange
- rotating
- mirror
- elastic body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
- B23K26/0673—Dividing the beam into multiple beams, e.g. multi-focusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Laser Beam Processing (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明はレーザ加工機に用いる回転ミラー組立
体に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a rotating mirror assembly used in a laser processing machine.
従来例の構成とその問題点
第１図にレーザ加工機の概観図を示すが、回転
ミラー１は１台のレーザ発振器２により複数の加
工ステーシヨン３で加工を可能にするため、レー
ザ光４を分割するものである。すなわちレーザ発
振器２からのレーザ光４は回転ミラー１により反
射又は透過され、その反射レーザ光６は集光レン
ズ７で加工ステーシヨン３上に集光され加工に供
せられる。Conventional configuration and its problems Figure 1 shows an overview of a laser processing machine.The rotating mirror 1 uses a single laser oscillator 2 to enable processing at multiple processing stations 3, so the laser beam 4 is It is meant to be divided. That is, the laser beam 4 from the laser oscillator 2 is reflected or transmitted by the rotating mirror 1, and the reflected laser beam 6 is focused onto the processing station 3 by the condensing lens 7 and used for processing.
この時回転ミラー１が回転軸５に対して正確に
取り付けられている必要がある。 At this time, the rotating mirror 1 must be accurately attached to the rotating shaft 5.
ところが回転ミラー１が回転軸５に対して傾い
て固定されていると、回転ミラー１より反射され
た反射レーザ光６が変動し、集光レンズ７で集光
されたビームスポツト８が変動して加工精度が悪
化する。反射レーザ光６の変動が加工精度に与え
る影響をを無視できるようにするためには、反射
レーザ光６が集光レンズ７に入射する入射角変動
を30秒以内におさめる必要がある。ここで、回転
軸５の回転精度による回転振れも考慮すると、回
転ミラー１は、回転軸５に対して取り付け角誤差
が５秒以内におさまつてなくてはならない。そこ
で、回転軸５に対して回転ミラー１を取り付角誤
差を５秒以内に収めるための従来例を次に述べ
る。 However, if the rotating mirror 1 is tilted and fixed with respect to the rotation axis 5, the reflected laser beam 6 reflected from the rotating mirror 1 will fluctuate, and the beam spot 8 focused by the condensing lens 7 will fluctuate. Machining accuracy deteriorates. In order to be able to ignore the influence of fluctuations in the reflected laser beam 6 on processing accuracy, it is necessary to suppress the fluctuation in the angle of incidence of the reflected laser beam 6 into the condenser lens 7 within 30 seconds. Here, considering the rotational vibration caused by the rotation accuracy of the rotating shaft 5, the mounting angle error of the rotating mirror 1 with respect to the rotating shaft 5 must be kept within 5 seconds. Therefore, a conventional example for keeping the mounting angle error of the rotating mirror 1 with respect to the rotating shaft 5 within 5 seconds will be described below.
第１の従来例を第２図に示す。同図ａは側面
図、同図ｂは同図ａのＡ―A′における断面図で
ある。 A first conventional example is shown in FIG. Figure a is a side view, and figure b is a sectional view taken along line A-A' in figure a.
これは、第１のフランジ９の基準面１０を回転
軸１１に対しての直角度および平面度をあらかじ
め高精度（直角度1μm以下、平面度1μm以下）に
加工しておきこの面に回転ミラー１８のミラー面
１２を第２のフランジ１９により押しつける方法
である。 This is because the reference surface 10 of the first flange 9 has been machined in advance to have a high degree of perpendicularity and flatness with respect to the rotating shaft 11 (perpendicularity of 1 μm or less, flatness of 1 μm or less), and a rotating mirror is placed on this surface. In this method, the second flange 19 presses the 18 mirror surfaces 12.
これは第１のフランジ９の基準面１０の超精密
加工が必要であり、回転軸１１に対する基準面１
０の直角度及び平面度の超精密測定技術も必要と
なる。 This requires ultra-precision machining of the reference surface 10 of the first flange 9, and the reference surface 10 relative to the rotating shaft 11 is
Ultra-precise measurement techniques for zero squareness and flatness are also required.
次に第２の従来例を第３図に示す。同図ａは左
側面図、同図ｂは同図ａのＢ―B′における断面
図、同図ｃは右側面図である。 Next, a second conventional example is shown in FIG. Figure a is a left side view, figure b is a sectional view taken along line BB' in figure a, and figure c is a right side view.
これは、第１のフランジ１３、第２のフランジ
１４に取り付けられた締めつけネジ１５の締めつ
け力を調整することにより回転ミラー１９のミラ
ー面１６の倒れ角をオートコリメータで測定しな
がら回転軸１７に対してのミラー面１６の取りつ
け角を調整するものである。 By adjusting the tightening force of the tightening screws 15 attached to the first flange 13 and the second flange 14, the angle of inclination of the mirror surface 16 of the rotating mirror 19 is measured with an autocollimator, and the angle of inclination is adjusted to the rotating shaft 17. This is to adjust the mounting angle of the mirror surface 16 relative to the mirror surface 16.
しかしながらこの構造だけでは、回転ミラー１
９の両側にある締めつけネジ１５を同時に調整し
なければならず高度の塾練度を要し、調整するの
に非常に時間がかかるという問題点を有してい
た。 However, with this structure alone, the rotating mirror 1
The problem is that the tightening screws 15 on both sides of the screw 9 must be adjusted at the same time, which requires a high degree of training and takes a very long time.
発明の目的
本発明は、以上のような問題点を解決するため
に、回転ミラー面の回転軸に対する取り付け角を
容易に調整できるようにした取り付け角補正機構
をもつ回転ミラー組立体を提供することを目的と
する。Purpose of the Invention In order to solve the above-mentioned problems, the present invention provides a rotating mirror assembly having an attachment angle correction mechanism that allows easy adjustment of the attachment angle of the rotating mirror surface with respect to the rotation axis. With the goal.
発明の構成
本発明は上記目的を達成するもので、回転ミラ
ーの両側にフランジを設け、このフランジの少な
くとも一方と回転ミラーとの間に弾性体を設け、
フランジに設けられた締めつけ手段により回転ミ
ラーのミラー面の取りつけ角を補正するようにし
た回転ミラー組立体を提供するものである。Structure of the Invention The present invention achieves the above object, and includes providing flanges on both sides of a rotating mirror, and providing an elastic body between at least one of the flanges and the rotating mirror.
A rotating mirror assembly is provided in which the mounting angle of a mirror surface of a rotating mirror is corrected by a tightening means provided on a flange.
実施例の説明
以下に本発明の実施例を図面を用いて説明す
る。DESCRIPTION OF EMBODIMENTS Examples of the present invention will be described below with reference to the drawings.
第４図ａは本発明の一実施例における回転ミラ
ー組立体を示す側面図、同図ｂはそのＣ―C′にお
ける断面図である。 FIG. 4a is a side view showing a rotating mirror assembly according to an embodiment of the present invention, and FIG. 4b is a sectional view taken along line C-C'.
同図において１０１は回転軸、１０２は反射部
を回転軸１０１の周辺に複数個設けた回転ミラ
ー、１０３は第１のフランジ、１０４は第２のフ
ランジ、１０６は第１のフランジ１０３に取り付
けられた締めつけネジ、１０７は第２のフランジ
１０４に取り付けられた締めつけネジ、１０８は
第１のフランジ１０３と回転ミラー１０２の間に
挿入された弾性体１０８である。回転ミラー１０
２のミラー面１０９の取り付け角補正機構は、第
１のフランジ１０３、第２のフランジ１０４、締
め付けネジ１０６，１０７、弾性体１０８から構
成されるものである。 In the figure, 101 is a rotating shaft, 102 is a rotating mirror with a plurality of reflecting parts provided around the rotating shaft 101, 103 is a first flange, 104 is a second flange, and 106 is a mirror attached to the first flange 103. 107 is a tightening screw attached to the second flange 104, and 108 is an elastic body 108 inserted between the first flange 103 and the rotating mirror 102. rotating mirror 10
The mounting angle correction mechanism for the second mirror surface 109 is composed of a first flange 103, a second flange 104, tightening screws 106, 107, and an elastic body 108.
弾性体１０８としてはウレタンゴムなどのゴム
が好適である。 As the elastic body 108, rubber such as urethane rubber is suitable.
この機構を用いた回転ミラー面１０９の回転軸
１０１に対する取りつけ角調整方法を以下に述べ
る。 A method of adjusting the mounting angle of the rotating mirror surface 109 with respect to the rotating shaft 101 using this mechanism will be described below.
締めつけネジ１０６及び１０７をゆるめた状態
では弾性体１０８の弾性により回転ミラー１０２
は第２のフランジ１０４に押しつけられた状態に
なつている。当然このままでは回転ミラー面１０
９は回転軸１０１に対して直角度はでていない。
そこでまず締めつけネジ１０７のみで回転ミラー
面１０９の回転軸１０１に対する取りつけ角を５
秒以内に収める。このとき取りつけ角はオートコ
リメータなどで測定しながら調整する。この調整
中回転ミラー１０２は弾性体１０８の弾性により
保持されている。この調整が終つたら、締め付け
ネジ１０６で取りつけ角がくるわないように締め
つける。以上で作業は完了する。 When the tightening screws 106 and 107 are loosened, the rotating mirror 102 is rotated due to the elasticity of the elastic body 108.
is pressed against the second flange 104. Naturally, as it is, the rotating mirror surface 10
9 is not perpendicular to the rotating shaft 101.
Therefore, first, use only the tightening screws 107 to set the mounting angle of the rotating mirror surface 109 to the rotating shaft 101 by 5.
Get it within seconds. At this time, adjust the mounting angle while measuring with an autocollimator. During this adjustment, the rotating mirror 102 is held by the elasticity of the elastic body 108. After completing this adjustment, tighten the tightening screw 106 so that the mounting angle does not turn. This completes the work.
このように本実施例では回転ミラー１０２と第
１のフランジ１０３との間に弾性体１０８を挿入
することにより、締め付けネジによる調整が片側
ずつ単独に行えるので作業性が大いに改善され
る。 As described above, in this embodiment, by inserting the elastic body 108 between the rotary mirror 102 and the first flange 103, adjustment using the tightening screw can be performed independently on each side, thereby greatly improving work efficiency.
なお弾性体１０８の位置は回転ミラー１０２と
第２のフランジ１０４との間に設けても良く、ま
た回転ミラー１０２の両側に設けても前記実施例
と同様の効果を奏する。 Note that the elastic body 108 may be provided between the rotating mirror 102 and the second flange 104, or may be provided on both sides of the rotating mirror 102 to achieve the same effect as in the above embodiment.
発明の効果
以上要するに本発明は回転ミラーの両側に設け
られたフランジの少なくとも一方と回転ミラーと
の間に弾性体を設け、フランジに設けられた締め
つけ手段により回転ミラーのミラー面の取り付け
角を補正するようにしたもので、従来のように回
転ミラーを介して相対する締めつけネジを同時
に、締めつけたりゆるめたりして取りつけ角を調
整することはなく、片面からの締めつけネジの調
整を２回行うだけですみ非常に作業性が良くな
り、塾練していない者でも比較的簡単に短時間で
調整を行うことができる。Effects of the Invention In summary, the present invention provides an elastic body between at least one of the flanges provided on both sides of the rotating mirror and the rotating mirror, and corrects the mounting angle of the mirror surface of the rotating mirror by tightening means provided on the flange. Instead of adjusting the mounting angle by simultaneously tightening and loosening opposing tightening screws via a rotating mirror as in the conventional method, you only need to adjust the tightening screws from one side twice. This greatly improves work efficiency, and even those who are not trained in cram school training can make adjustments relatively easily and in a short time.
第１図は回転ミラーを用いたレーザ加工機の概
要を示す概観図、第２図ａは回転ミラー組立体の
第１の従来例を示す側面図、同図ｂはａのＡ―
A′における断面図、第３図ａは回転ミラー組立
体の第２の従来例を示す左側面図、同図ｂはａの
Ｂ―B′における断面図、同図ｃは右側面図、第
４図ａは本発明の一実施例における回転ミラー組
立体の側面図、同図ｂはaC―C′における断面図
である。
１０１……回転軸、１０２……回転ミラー、１
０３……第１のフランジ、１０４……第２のフラ
ンジ、１０６……締めつけネジ、１０７……締め
つけネジ、１０８……弾性体、１０９……回転ミ
ラー面。
FIG. 1 is an overview diagram showing the outline of a laser processing machine using a rotating mirror, FIG. 2 a is a side view showing a first conventional example of a rotating mirror assembly, and FIG.
3A is a left side view showing a second conventional example of a rotating mirror assembly, FIG. Figure 4a is a side view of a rotating mirror assembly according to an embodiment of the present invention, and Figure 4b is a sectional view taken along line aC-C'. 101... Rotating axis, 102... Rotating mirror, 1
03...First flange, 104...Second flange, 106...Tightening screw, 107...Tightening screw, 108...Elastic body, 109...Rotating mirror surface.
Claims (1)
ミラーの両側に設けられたフランジと、前記フラ
ンジに設けられ、フランジを貫通して回転ミラー
を締着する締めめつけ手段と、前記フランジの少
なくとも一方と回転ミラーとの間に挿設された弾
性体とを具備することを特徴とする回転ミラー組
立体。 ２ 弾性体がウレタンゴムからなることを特徴と
する特許請求の範囲第１項記載の回転ミラー組立
体。[Scope of Claims] 1. A rotating mirror inserted into a rotating shaft, flanges provided on both sides of the rotating mirror, and a fastener provided on the flange and penetrating the flange to tighten the rotating mirror. and an elastic body inserted between at least one of the flanges and the rotating mirror. 2. The rotating mirror assembly according to claim 1, wherein the elastic body is made of urethane rubber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59127932A JPS617085A (en) | 1984-06-21 | 1984-06-21 | Rotary mirror assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59127932A JPS617085A (en) | 1984-06-21 | 1984-06-21 | Rotary mirror assembly |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS617085A JPS617085A (en) | 1986-01-13 |
| JPH0211359B2 true JPH0211359B2 (en) | 1990-03-13 |
Family
ID=14972200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59127932A Granted JPS617085A (en) | 1984-06-21 | 1984-06-21 | Rotary mirror assembly |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS617085A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0640176B2 (en) * | 1989-01-30 | 1994-05-25 | 精電舎電子工業株式会社 | Optical branching device |
| US20060114948A1 (en) * | 2004-11-29 | 2006-06-01 | Lo Ho W | Workpiece processing system using a common imaged optical assembly to shape the spatial distributions of light energy of multiple laser beams |
| CN106735876B (en) * | 2016-12-16 | 2019-03-01 | 武汉光谷航天三江激光产业技术研究院有限公司 | A kind of laser point energy device |
-
1984
- 1984-06-21 JP JP59127932A patent/JPS617085A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS617085A (en) | 1986-01-13 |
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