JPH0211667B2 - - Google Patents
Info
- Publication number
- JPH0211667B2 JPH0211667B2 JP3830384A JP3830384A JPH0211667B2 JP H0211667 B2 JPH0211667 B2 JP H0211667B2 JP 3830384 A JP3830384 A JP 3830384A JP 3830384 A JP3830384 A JP 3830384A JP H0211667 B2 JPH0211667 B2 JP H0211667B2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- heating means
- surrounding
- metal
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明はるつぼで金属を溶融する金属溶融装
置に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a metal melting apparatus for melting metal in a crucible.
従来、常温固体状の物質を加熱して蒸発させ、
被蒸着材上に蒸着して薄膜を形成する真空蒸着に
おいては、特公昭54−9592号公報に示されている
ように、常温固体状の物質を入れたるつぼの外側
に加熱手段を配置する構成であつた。即ち、第１
図において、１は噴出孔１ａが設けられたるつぼ
で、常温固体状の金属部材が収容される。２は電
源、３はるつぼ１を囲繞したフイラメントからな
る加熱手段で、るつぼ１を囲繞するように配置さ
れている。なお、加熱手段３としては、ジユール
加熱によるもの、あるいは加速させた電子をるつ
ぼ１に衝突させて、電子の運動エネルギーを熱に
変換させるもの等が採用されている。
Conventionally, substances that are solid at room temperature are heated and evaporated.
In vacuum evaporation in which a thin film is formed by vapor deposition on a material to be evaporated, as shown in Japanese Patent Publication No. 54-9592, a heating means is placed outside a crucible containing a substance that is solid at room temperature. It was hot. That is, the first
In the figure, reference numeral 1 denotes a crucible provided with an ejection hole 1a, in which a metal member that is solid at room temperature is accommodated. 2 is a power source; 3 is a heating means consisting of a filament that surrounds the crucible 1, and is arranged so as to surround the crucible 1; Note that as the heating means 3, one using Joule heating, or one that causes accelerated electrons to collide with the crucible 1 and converts the kinetic energy of the electrons into heat, etc. is adopted.
上記構成によると、加熱手段の外周部から放出
される熱量はるつぼの加熱には寄与しないので、
熱損失が大きいという欠点があつた。 According to the above configuration, the amount of heat emitted from the outer periphery of the heating means does not contribute to heating the crucible.
The drawback was that heat loss was large.
この発明はるつぼで加熱手段を囲繞し、るつぼ
の外周を断熱材で囲むことによつて、加熱手段か
ら発生する熱量を効率よく利用できる金属溶融装
置を提供する。
The present invention provides a metal melting apparatus that can efficiently utilize the amount of heat generated from the heating means by surrounding the heating means with a crucible and surrounding the outer periphery of the crucible with a heat insulating material.
以下、図について説明する。第２図において、
４はフイラメントからなる加熱手段、５は加熱手
段４を囲繞したるつぼで、金属蒸気の噴出孔５ａ
が設けられている。６は電源で、加熱手段４とる
つぼ５との間に接続されている。７は断熱材で、
るつぼ５を囲繞する構造となつている。
The figures will be explained below. In Figure 2,
4 is a heating means made of a filament, 5 is a crucible surrounding the heating means 4, and has a metal vapor ejection hole 5a.
is provided. A power source 6 is connected between the heating means 4 and the crucible 5. 7 is insulation material,
It has a structure surrounding the crucible 5.
次に動作を説明する。第２図において、加熱手
段４でるつぼ５を加熱すると、加熱手段４から発
生した熱量はそのほとんどがるつぼ５の加熱に寄
与する。そして、るつぼ５の加熱手段４に近い側
から外周部に向つて温度が低くなる。 Next, the operation will be explained. In FIG. 2, when the crucible 5 is heated by the heating means 4, most of the heat generated from the heating means 4 contributes to heating the crucible 5. The temperature decreases from the side of the crucible 5 closer to the heating means 4 toward the outer circumference.
さらに、るつぼ５を囲繞する断熱材７のため
に、るつぼ５に接する面から外周部に向つて温度
が低くなる。 Furthermore, because of the heat insulating material 7 surrounding the crucible 5, the temperature decreases from the surface in contact with the crucible 5 toward the outer periphery.
第２図はるつぼ５の内部が分かれているが、底
部あるいは側面が両内部に通じていても効果は同
じである。 In FIG. 2, the inside of the crucible 5 is separated, but the effect is the same even if the bottom or side is connected to both insides.
上記実施例ではドーナツ状のるつぼの中央部に
加熱手段を配置したものについて説明したが、平
面上の円周上に複数個のるつぼを配置し、円周の
中心部に加熱手段を配置したものについても同様
の効果が期待される。 In the above embodiment, the heating means is arranged in the center of the donut-shaped crucible, but a plurality of crucibles are arranged on the circumference on a plane, and the heating means is arranged in the center of the circumference. A similar effect is expected for
この発明によると、加熱手段をるつぼで囲繞
し、さらにるつぼを断熱材で囲繞することによつ
て、加熱手段から発生する熱量のほとんどをるつ
ぼの加熱に利用できるので、熱損失を低減でき
る。
According to this invention, by surrounding the heating means with the crucible and further surrounding the crucible with a heat insulating material, most of the heat generated from the heating means can be used to heat the crucible, thereby reducing heat loss.
第１図は従来の金属溶融装置の構成図、第２図
はこの発明の一実施例を示す構成図である。
図において、４は加熱手段、５はるつぼであ
る。
FIG. 1 is a block diagram of a conventional metal melting apparatus, and FIG. 2 is a block diagram showing an embodiment of the present invention. In the figure, 4 is a heating means and 5 is a crucible.
Claims (1)
し、上記るつぼの外周を断熱材で囲繞した金属溶
融装置。 ２ るつぼは複数個で構成されていることを特徴
とする特許請求の範囲第１項記載の金属溶融装
置。[Scope of Claims] 1. A metal melting device, in which a heating means for melting metal is surrounded by a crucible, and the outer periphery of the crucible is surrounded by a heat insulating material. 2. The metal melting apparatus according to claim 1, characterized in that the crucible is comprised of a plurality of crucibles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3830384A JPS60181266A (en) | 1984-02-28 | 1984-02-28 | Apparatus for melting metal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3830384A JPS60181266A (en) | 1984-02-28 | 1984-02-28 | Apparatus for melting metal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60181266A JPS60181266A (en) | 1985-09-14 |
| JPH0211667B2 true JPH0211667B2 (en) | 1990-03-15 |
Family
ID=12521530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3830384A Granted JPS60181266A (en) | 1984-02-28 | 1984-02-28 | Apparatus for melting metal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60181266A (en) |
-
1984
- 1984-02-28 JP JP3830384A patent/JPS60181266A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60181266A (en) | 1985-09-14 |
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